[Scan]
initial_time=2016-01-18T22:32:05
final_time=2016-01-18T22:32:33
ip_count=19
run=1024
dataset=10
scan=730
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.21643E-2
qbias_imon=-3.7828E-6
ql1_vset=
ql1_vmon=-8.80009E1
ql1_imon=-9.8263E-10
ql2_vset=
ql2_vmon=-2.86102E-4
ql2_imon=1.40876E-9
ql3_vset=
ql3_vmon=-8.80009E1
ql3_imon=-3.17827E-9
ql4_vset=
ql4_vmon=5.24521E-4
ql4_imon=1.61748E-8
mult1=-1.99732E-8
mult2=-2.89712E-9
rf_tmon=-4.7004E-3
rf_agc=3.32134E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.57764E-3
ql5_imon=5.36287E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65412E0
bslens_imon=2.44763E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19478E1
lens5a_imon=1.99605E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.125E2
lens4a_imon=2.04938E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54043E1
cs_ef1b_imon=2.75781E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04635E2
lens23_imon=1.02308E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04712E1
cs_ea1_imon=2.59591E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01432E0
lens1_imon=1.34812E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65107E1
os_ef1alow_imon=2.9636E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0351E1
cs_ea2_imon=1.48667E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84352E1
cs_ef1a_imon=2.9081E-5
olens2_vset=9.7E-1
olens2_vmon=9.7003E-1
olens2_imon=1.20129E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11352E1
os_restr1_imon=4.26139E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14723E1
os_ea1_imon=2.41422E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63755E1
os_ef1bup_imon=3.07965E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2509E0
cs_ionrep_imon=1.17088E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91931E2
cs_nozzle_imon=1.93586E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01809E1
cs_anode1_imon=2.89837E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20425E0
olens4_imon=3.92684E-8
tplens_vset=1.4E-1
tplens_vmon=1.6877E0
tplens_imon=-3.8947E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25987E1
iondef3_imon=1.50073E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2695E1
iondef2_imon=1.58328E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02951E2
lens6_imon=2.97996E-4
ql6_vset=1.0E-1
ql6_vmon=9.48906E-2
ql6_imon=9.07922E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28935E0
ionrepsh_imon=1.72964E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33532E1
lens5b_imon=2.16765E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74567E1
cs_ef2b_imon=3.12434E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44436E0
os_ea2_imon=-7.8962E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06123E2
lens4b_imon=2.00464E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7112E1
cs_ef2a_imon=3.15605E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04315E0
os_ef2alow_imon=-2.45012E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.67991E-1
os_ef2bup_imon=-5.38735E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11153E1
os_restr2_imon=3.37265E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23062E2
cs_ionfoca_imon=6.29424E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01827E1
cs_anode2_imon=2.23776E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73684E1
iondef1_imon=1.09265E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68208E1
iondef4_imon=1.09783E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71777E1
olens3_imon=4.83829E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81331E-1
olens1_imon=7.23305E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15537E0
cs_ionaccel_imon=-1.81221E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02043E2
cs_ionfocb_imon=1.47251E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56225E1
einzel_imon=7.74911E-6
window_vset=0.0E0
window_vmon=2.58188E-1
window_imon=-8.64372E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82649E2
mask1_imon=2.39135E-4
mask2_vset=0.0E0
mask2_vmon=-1.8611E1
mask2_imon=-6.87777E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92703E3
multa_neg_imon=6.90335E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9371E3
defgrida_imon=6.53564E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50117E3
multb_neg_imon=7.13046E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.50081E0
defgridb_imon=5.89396E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3334E1
os_fil1_imon=9.40744E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07029E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62337E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30897E1
cs_fil1_imon=9.94275E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63063E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63342E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.88625E-2
os_fil2_imon=-2.65395E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.83298E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.90204E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36773E-1
cs_fil2_imon=-2.43171E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.10618E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21985E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=2.9926E-1
chamber_ion_pmon=1.20174E-7
chamber_cvt_pmon=2.52428E-3
foreline_cvt_pmon=2.52428E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.87523E-1
res40_imon=-2.63392E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=174
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.86E3	1.0E0	1.47E2	4.1E1	-7.15461E-2	-8.80003E1	-3.8147E-4	-8.80008E1	7.86781E-4	4.52995E-3	9.47237E-2	2.73254E1	-3.26735E1	-3.26417E1	2.68615E1	1.20106E-7	2.52169E-3	2.52169E-3	6.32356E-3	2.99941E-1
2.0E0	9.8904E4	9.7E1	3.16E2	1.6E2	-7.20871E-2	-8.80001E1	-5.00679E-4	-8.80012E1	7.86781E-4	4.45843E-3	9.52244E-2	2.73171E1	-3.26615E1	-3.26188E1	2.68263E1	1.19851E-7	2.52169E-3	2.52169E-3	6.3074E-3	3.00453E-1
3.0E0	1.3E1	0.0E0	4.85E2	2.79E2	-7.201E-2	-8.80004E1	-3.57628E-4	-8.80014E1	9.29832E-4	4.79221E-3	9.50098E-2	2.73039E1	-3.26591E1	-3.25755E1	2.68285E1	1.20226E-7	2.52099E-3	2.52099E-3	6.33486E-3	2.9978E-1
4.0E0	2.1811E4	1.2E1	6.55E2	3.98E2	-7.22418E-2	-8.80005E1	-2.6226E-4	-8.80012E1	7.86781E-4	4.95911E-3	9.4676E-2	2.73175E1	-3.26632E1	-3.2603E1	2.67992E1	1.20106E-7	2.51632E-3	2.51632E-3	6.30202E-3	3.00453E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.31692E-2	-8.80007E1	7.15256E-5	-8.80012E1	5.48363E-4	4.8399E-3	9.4676E-2	2.73257E1	-3.26419E1	-3.26195E1	2.68024E1	1.20174E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.00824E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.30146E-2	-8.80004E1	4.76837E-5	-8.80014E1	7.39098E-4	4.55379E-3	9.49383E-2	2.73346E1	-3.26797E1	-3.26284E1	2.68292E1	1.20055E-7	2.52492E-3	2.52492E-3	6.29665E-3	2.98156E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.201E-2	-8.80006E1	-2.38419E-5	-8.8001E1	7.86781E-4	4.74453E-3	9.51052E-2	2.73057E1	-3.26326E1	-3.2623E1	2.68797E1	1.19697E-7	2.52276E-3	2.52276E-3	6.3074E-3	2.9841E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.15461E-2	-8.80007E1	-7.15256E-5	-8.80011E1	6.91414E-4	4.48227E-3	9.51529E-2	2.73045E1	-3.26434E1	-3.26002E1	2.6822E1	1.19861E-7	2.51771E-3	2.51771E-3	6.32936E-3	2.9926E-1
1.2E1	1.04E2	1.0E0	4.85E2	3.23E2	-7.21643E-2	-8.80005E1	-2.14577E-4	-8.80009E1	5.48363E-4	4.72069E-3	9.50575E-2	2.72992E1	-3.26767E1	-3.26366E1	2.68383E1	1.20055E-7	2.51847E-3	2.51847E-3	6.30202E-3	2.9892E-1
1.3E1	1.0E1	0.0E0	5.25E2	3.53E2	-7.11597E-2	-8.80005E1	-2.14577E-4	-8.80009E1	5.72205E-4	4.88758E-3	9.48429E-2	2.73345E1	-3.27011E1	-3.26188E1	2.68641E1	1.20122E-7	2.51443E-3	2.51443E-3	6.32936E-3	3.01085E-1
1.4E1	3.292E3	3.0E0	5.66E2	3.82E2	-7.19325E-2	-8.80004E1	-2.86102E-4	-8.80009E1	5.48363E-4	4.62532E-3	9.52959E-2	2.73207E1	-3.26603E1	-3.26164E1	2.68298E1	1.19809E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.03712E-1
1.5E1	1.02E2	0.0E0	6.06E2	4.11E2	-7.15461E-2	-8.80007E1	-7.39098E-4	-8.80006E1	4.76837E-4	4.36306E-3	9.51052E-2	2.73225E1	-3.26452E1	-3.2623E1	2.67782E1	1.19809E-7	2.52538E-3	2.52538E-3	6.29645E-3	3.02396E-1
1.6E1	4.28E2	0.0E0	6.47E2	4.41E2	-7.19325E-2	-8.80006E1	-5.00679E-4	-8.80006E1	5.24521E-4	4.57764E-3	9.50098E-2	2.7349E1	-3.26921E1	-3.26026E1	2.68641E1	1.19757E-7	2.52209E-3	2.52209E-3	6.32936E-3	3.00041E-1
1.7E1	7.72E2	0.0E0	6.87E2	4.7E2	-7.20871E-2	-8.80006E1	-4.76837E-4	-8.80007E1	6.67572E-4	4.69685E-3	9.52959E-2	2.73315E1	-3.26549E1	-3.26122E1	2.68455E1	1.19965E-7	2.51007E-3	2.51007E-3	6.31288E-3	2.9978E-1
1.8E1	3.19E3	2.0E0	7.27E2	5.0E2	-7.13915E-2	-8.80005E1	-2.6226E-4	-8.80008E1	4.76837E-4	4.50611E-3	9.50575E-2	2.7347E1	-3.26726E1	-3.26325E1	2.68182E1	1.19965E-7	2.51662E-3	2.51662E-3	6.28552E-3	3.00824E-1
1.9E1	1.91E3	1.0E0	7.68E2	5.29E2	-7.19325E-2	-8.80008E1	-4.52995E-4	-8.80009E1	2.6226E-4	4.93526E-3	9.51052E-2	2.72849E1	-3.26266E1	-3.26315E1	2.68178E1	1.20158E-7	2.51417E-3	2.51417E-3	6.29128E-3	3.0071E-1
2.0E1	2.5378E4	1.7E1	8.08E2	5.58E2	-7.13915E-2	-8.80005E1	-2.38419E-4	-8.80009E1	3.33786E-4	4.45843E-3	9.51529E-2	2.73187E1	-3.26832E1	-3.26018E1	2.68575E1	1.20137E-7	2.52362E-3	2.52362E-3	6.31299E-3	3.01209E-1
2.1E1	5.0E1	0.0E0	8.49E2	5.88E2	-7.22418E-2	-8.80007E1	-4.05312E-4	-8.80009E1	6.4373E-4	4.24385E-3	9.52482E-2	2.73063E1	-3.26543E1	-3.26128E1	2.68154E1	1.19851E-7	2.52061E-3	2.52061E-3	6.3074E-3	3.01995E-1
2.2E1	1.723E3	0.0E0	8.89E2	6.17E2	-7.15461E-2	-8.80007E1	-5.00679E-4	-8.80011E1	4.76837E-4	4.88758E-3	9.49144E-2	2.73299E1	-3.26738E1	-3.2652E1	2.68424E1	1.20004E-7	2.51847E-3	2.51847E-3	6.29128E-3	3.01995E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.21643E-2	-8.80009E1	-2.86102E-4	-8.80009E1	5.24521E-4	4.57764E-3	9.48906E-2	2.73684E1	-3.2695E1	-3.25987E1	2.68208E1	1.20174E-7	2.52428E-3	2.52428E-3	6.31288E-3	2.9926E-1
