[Scan]
initial_time=2016-01-18T22:35:20
final_time=2016-01-18T22:35:42
ip_count=19
run=1024
dataset=10
scan=736
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.11597E-2
qbias_imon=-3.79158E-6
ql1_vset=
ql1_vmon=-8.80013E1
ql1_imon=-8.65221E-10
ql2_vset=
ql2_vmon=-4.76837E-5
ql2_imon=1.38576E-9
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-2.75868E-9
ql4_vset=
ql4_vmon=5.48363E-4
ql4_imon=1.61298E-8
mult1=-1.74825E-8
mult2=-2.73458E-9
rf_tmon=-4.89094E-3
rf_agc=3.35198E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.43459E-3
ql5_imon=5.69451E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66444E0
bslens_imon=2.35567E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19842E1
lens5a_imon=1.99182E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1247E2
lens4a_imon=2.04785E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53995E1
cs_ef1b_imon=2.75133E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04615E2
lens23_imon=1.021E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0451E1
cs_ea1_imon=2.58927E-5
lens1_vset=-2.7E0
lens1_vmon=-3.0336E0
lens1_imon=1.64425E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64662E1
os_ef1alow_imon=2.95891E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03472E1
cs_ea2_imon=1.47825E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84142E1
cs_ef1a_imon=2.90449E-5
olens2_vset=9.7E-1
olens2_vmon=9.69815E-1
olens2_imon=1.19846E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11484E1
os_restr1_imon=4.28013E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14716E1
os_ea1_imon=2.40806E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63635E1
os_ef1bup_imon=3.07676E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22496E0
cs_ionrep_imon=1.182E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91915E2
cs_nozzle_imon=1.93675E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02182E1
cs_anode1_imon=2.90125E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20413E0
olens4_imon=3.928E-8
tplens_vset=1.4E-1
tplens_vmon=1.67329E0
tplens_imon=-3.20124E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.262E1
iondef3_imon=1.51365E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26717E1
iondef2_imon=1.56674E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02935E2
lens6_imon=2.98254E-4
ql6_vset=1.0E-1
ql6_vmon=9.49144E-2
ql6_imon=9.25124E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30519E0
ionrepsh_imon=1.72353E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33787E1
lens5b_imon=2.16844E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74663E1
cs_ef2b_imon=3.12866E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.42022E0
os_ea2_imon=-6.84683E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06092E2
lens4b_imon=2.00382E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7127E1
cs_ef2a_imon=3.16146E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06117E0
os_ef2alow_imon=-2.5258E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.64988E-1
os_ef2bup_imon=-5.30446E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11244E1
os_restr2_imon=3.3849E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23032E2
cs_ionfoca_imon=6.28406E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01785E1
cs_anode2_imon=2.23488E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73021E1
iondef1_imon=1.10485E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68286E1
iondef4_imon=1.0899E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=4.84384E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81736E-1
olens1_imon=7.21689E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15237E0
cs_ionaccel_imon=-1.67526E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02078E2
cs_ionfocb_imon=1.47179E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56585E1
einzel_imon=7.77434E-6
window_vset=0.0E0
window_vmon=2.4257E-1
window_imon=-9.07619E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82658E2
mask1_imon=2.39138E-4
mask2_vset=0.0E0
mask2_vmon=-1.86308E1
mask2_imon=-6.19302E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92605E3
multa_neg_imon=7.50905E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93725E3
defgrida_imon=6.65251E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50111E3
multb_neg_imon=7.04185E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.29039E0
defgridb_imon=6.11452E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33338E1
os_fil1_imon=9.41303E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07239E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62177E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30919E1
cs_fil1_imon=9.94726E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63135E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6313E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.93972E-2
os_fil2_imon=-2.58188E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.845E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.07439E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36902E-1
cs_fil2_imon=-2.47976E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.25985E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21951E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31798E-3
inlet_lpb_pmon=2.99093E-1
chamber_ion_pmon=1.20243E-7
chamber_cvt_pmon=2.52131E-3
foreline_cvt_pmon=2.52131E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.88434E-1
res40_imon=-2.49697E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=242
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.83E3	2.0E0	1.47E2	4.1E1	-7.17007E-2	-8.8001E1	-2.6226E-4	-8.80007E1	4.05312E-4	4.72069E-3	9.49144E-2	2.73358E1	-3.26732E1	-3.26437E1	2.68412E1	1.19809E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.00041E-1
2.0E0	9.8857E4	9.7E1	3.16E2	1.6E2	-7.14689E-2	-8.80011E1	-2.38419E-4	-8.80004E1	6.67572E-4	4.62532E-3	9.52244E-2	2.73425E1	-3.26616E1	-3.26223E1	2.68356E1	1.19941E-7	2.51077E-3	2.51077E-3	6.32328E-3	3.006E-1
3.0E0	1.4E1	0.0E0	4.85E2	2.79E2	-7.16233E-2	-8.8001E1	-7.15256E-5	-8.80007E1	4.52995E-4	4.43459E-3	9.50336E-2	2.73028E1	-3.26602E1	-3.26382E1	2.68053E1	1.19937E-7	2.52066E-3	2.52066E-3	6.33021E-3	3.00522E-1
4.0E0	2.1362E4	1.1E1	6.55E2	3.98E2	-7.15461E-2	-8.80011E1	-2.6226E-4	-8.80008E1	6.91414E-4	4.3869E-3	9.48668E-2	2.73448E1	-3.26981E1	-3.25888E1	2.68424E1	1.19941E-7	2.52025E-3	2.52025E-3	6.32328E-3	2.99845E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.20871E-2	-8.80012E1	-2.6226E-4	-8.80007E1	6.67572E-4	4.62532E-3	9.48429E-2	2.7324E1	-3.26638E1	-3.26183E1	2.68148E1	1.20017E-7	2.51662E-3	2.51662E-3	6.32936E-3	2.9926E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.19325E-2	-8.80013E1	-2.38419E-5	-8.80008E1	5.24521E-4	4.41074E-3	9.48191E-2	2.73147E1	-3.26344E1	-3.26074E1	2.67956E1	1.20069E-7	2.51662E-3	2.51662E-3	6.27461E-3	3.00824E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.20871E-2	-8.80011E1	-1.43051E-4	-8.80007E1	6.4373E-4	4.60148E-3	9.51529E-2	2.73296E1	-3.26725E1	-3.26217E1	2.68448E1	1.20174E-7	2.51662E-3	2.51662E-3	6.34037E-3	2.9952E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.12368E-2	-8.80012E1	-3.09944E-4	-8.80007E1	7.86781E-4	4.8399E-3	9.49621E-2	2.73051E1	-3.26639E1	-3.26146E1	2.68737E1	1.19809E-7	2.51443E-3	2.51443E-3	6.31837E-3	2.97445E-1
1.2E1	7.4E1	0.0E0	4.85E2	3.23E2	-7.23964E-2	-8.80012E1	-9.53674E-5	-8.80007E1	6.4373E-4	4.57764E-3	9.48191E-2	2.73375E1	-3.26561E1	-3.25821E1	2.68502E1	1.20017E-7	2.5188E-3	2.5188E-3	6.31837E-3	2.9952E-1
1.3E1	1.0E1	0.0E0	5.25E2	3.53E2	-7.24736E-2	-8.80012E1	-4.29153E-4	-8.80006E1	3.33786E-4	4.673E-3	9.53674E-2	2.73033E1	-3.26402E1	-3.25977E1	2.68298E1	1.20122E-7	2.5188E-3	2.5188E-3	6.32936E-3	2.9926E-1
1.4E1	3.252E3	1.0E0	5.66E2	3.82E2	-7.15461E-2	-8.80013E1	-2.6226E-4	-8.80007E1	3.57628E-4	4.12464E-3	9.52721E-2	2.73165E1	-3.26645E1	-3.26002E1	2.68725E1	1.19965E-7	2.52318E-3	2.52318E-3	6.31288E-3	2.9952E-1
1.5E1	8.4E1	0.0E0	6.06E2	4.11E2	-7.15461E-2	-8.80011E1	-1.90735E-4	-8.80007E1	4.76837E-4	4.52995E-3	9.50098E-2	2.73541E1	-3.26634E1	-3.26003E1	2.6804E1	1.19965E-7	2.51116E-3	2.51116E-3	6.34588E-3	2.99E-1
1.6E1	4.42E2	0.0E0	6.47E2	4.41E2	-7.16233E-2	-8.80014E1	-3.57628E-4	-8.80006E1	4.52995E-4	4.81606E-3	9.48191E-2	2.73039E1	-3.2708E1	-3.25847E1	2.68448E1	1.20122E-7	2.51771E-3	2.51771E-3	6.33486E-3	2.99E-1
1.7E1	7.89E2	1.0E0	6.87E2	4.7E2	-7.07733E-2	-8.80013E1	-1.90735E-4	-8.80008E1	2.14577E-4	4.24385E-3	9.50813E-2	2.73237E1	-3.26386E1	-3.26356E1	2.6813E1	1.19913E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.01609E-1
1.8E1	3.202E3	1.0E0	7.27E2	5.0E2	-7.06958E-2	-8.80013E1	1.66893E-4	-8.80007E1	5.24521E-4	4.60148E-3	9.49383E-2	2.73569E1	-3.26738E1	-3.25964E1	2.68619E1	1.19902E-7	2.51847E-3	2.51847E-3	6.32356E-3	3.02253E-1
1.9E1	1.926E3	0.0E0	7.68E2	5.29E2	-7.20871E-2	-8.80012E1	-1.90735E-4	-8.80008E1	4.76837E-4	4.98295E-3	9.49383E-2	2.74018E1	-3.27437E1	-3.25331E1	2.68419E1	1.19991E-7	2.51919E-3	2.51919E-3	6.29684E-3	3.00852E-1
2.0E1	2.486E4	9.0E0	8.08E2	5.58E2	-7.23189E-2	-8.80012E1	-1.43051E-4	-8.8001E1	1.90735E-4	4.74453E-3	9.52244E-2	2.73015E1	-3.26789E1	-3.2632E1	2.68466E1	1.20154E-7	2.52749E-3	2.52749E-3	6.29603E-3	2.99981E-1
2.1E1	5.6E1	0.0E0	8.49E2	5.88E2	-7.16233E-2	-8.80012E1	-5.00679E-4	-8.80008E1	2.14577E-4	4.48227E-3	9.53913E-2	2.73275E1	-3.26608E1	-3.2626E1	2.68076E1	1.19965E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.01609E-1
2.2E1	1.741E3	0.0E0	8.89E2	6.17E2	-7.01548E-2	-8.80011E1	-2.38419E-4	-8.80008E1	1.90735E-4	4.52995E-3	9.48906E-2	2.73275E1	-3.26531E1	-3.25906E1	2.68876E1	1.20226E-7	2.51662E-3	2.51662E-3	6.34037E-3	2.9926E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.11597E-2	-8.80013E1	-4.76837E-5	-8.80005E1	5.48363E-4	4.43459E-3	9.49144E-2	2.73021E1	-3.26717E1	-3.262E1	2.68286E1	1.20243E-7	2.52131E-3	2.52131E-3	6.31798E-3	2.99093E-1
