[Scan]
initial_time=2016-01-18T22:39:47
final_time=2016-01-18T22:40:09
ip_count=19
run=1024
dataset=10
scan=745
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27053E-2
qbias_imon=-3.79453E-6
ql1_vset=
ql1_vmon=-8.80016E1
ql1_imon=-7.92837E-10
ql2_vset=
ql2_vmon=-2.6226E-4
ql2_imon=1.41718E-9
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-2.49974E-9
ql4_vset=
ql4_vmon=3.8147E-4
ql4_imon=1.62038E-8
mult1=-1.73621E-8
mult2=-2.60883E-9
rf_tmon=-5.08922E-3
rf_agc=3.35018E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.05312E-3
ql5_imon=6.08933E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67388E0
bslens_imon=2.34151E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19583E1
lens5a_imon=1.99359E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12492E2
lens4a_imon=2.05058E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53829E1
cs_ef1b_imon=2.73369E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04639E2
lens23_imon=1.02273E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04799E1
cs_ea1_imon=2.58467E-5
lens1_vset=-2.7E0
lens1_vmon=-2.94747E0
lens1_imon=1.62655E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65008E1
os_ef1alow_imon=2.9641E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03826E1
cs_ea2_imon=1.47365E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84319E1
cs_ef1a_imon=2.90676E-5
olens2_vset=9.7E-1
olens2_vmon=9.6972E-1
olens2_imon=1.18952E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11575E1
os_restr1_imon=4.27879E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15247E1
os_ea1_imon=2.41195E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63734E1
os_ef1bup_imon=3.07357E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2462E0
cs_ionrep_imon=1.19227E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91909E2
cs_nozzle_imon=1.93668E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01943E1
cs_anode1_imon=2.89043E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20408E0
olens4_imon=3.92195E-8
tplens_vset=1.4E-1
tplens_vmon=1.67093E0
tplens_imon=-2.49335E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26446E1
iondef3_imon=1.47719E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26404E1
iondef2_imon=1.55187E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02951E2
lens6_imon=2.98151E-4
ql6_vset=1.0E-1
ql6_vmon=9.4986E-2
ql6_imon=8.9879E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26331E0
ionrepsh_imon=1.73168E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33776E1
lens5b_imon=2.16454E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74773E1
cs_ef2b_imon=3.11979E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.41904E0
os_ea2_imon=-8.1918E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06087E2
lens4b_imon=2.00771E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71333E1
cs_ef2a_imon=3.15837E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06556E0
os_ef2alow_imon=-2.46685E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.76958E-1
os_ef2bup_imon=-5.1984E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11112E1
os_restr2_imon=3.37314E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2304E2
cs_ionfoca_imon=6.28512E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01885E1
cs_anode2_imon=2.23152E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73069E1
iondef1_imon=1.09529E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67776E1
iondef4_imon=1.09372E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71777E1
olens3_imon=4.88709E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81426E-1
olens1_imon=7.14856E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13883E0
cs_ionaccel_imon=-1.8552E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02098E2
cs_ionfocb_imon=1.47386E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56312E1
einzel_imon=7.70869E-6
window_vset=0.0E0
window_vmon=2.48963E-1
window_imon=-8.16104E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82677E2
mask1_imon=2.39025E-4
mask2_vset=0.0E0
mask2_vmon=-1.86344E1
mask2_imon=-6.59718E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92616E3
multa_neg_imon=7.62585E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93687E3
defgrida_imon=6.43307E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50115E3
multb_neg_imon=7.0737E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.44985E0
defgridb_imon=6.14284E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33334E1
os_fil1_imon=9.41748E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0715E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61717E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30909E1
cs_fil1_imon=9.95783E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62824E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62888E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.93972E-2
os_fil2_imon=-2.76765E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.97607E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.21613E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33772E-1
cs_fil2_imon=-2.47805E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.04533E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21916E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=3.00453E-1
chamber_ion_pmon=1.19749E-7
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.24657E-1
res40_imon=-2.446E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=207
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.869E3	0.0E0	1.47E2	4.1E1	-7.19325E-2	-8.80015E1	-5.72205E-4	-8.80007E1	3.8147E-4	4.12464E-3	9.47237E-2	2.73225E1	-3.26843E1	-3.26254E1	2.68304E1	1.20069E-7	2.51225E-3	2.51225E-3	6.34588E-3	3.00824E-1
2.0E0	9.8107E4	9.0E1	3.16E2	1.6E2	-7.23964E-2	-8.80015E1	-2.38419E-4	-8.80007E1	5.48363E-4	4.3869E-3	9.50336E-2	2.73129E1	-3.26476E1	-3.25972E1	2.6822E1	1.20106E-7	2.51739E-3	2.51739E-3	6.32896E-3	3.00197E-1
3.0E0	1.8E1	0.0E0	4.85E2	2.79E2	-7.19325E-2	-8.80018E1	-3.09944E-4	-8.80008E1	5.00679E-4	4.60148E-3	9.49621E-2	2.73198E1	-3.2685E1	-3.26319E1	2.68556E1	1.19766E-7	2.51693E-3	2.51693E-3	6.34099E-3	3.00144E-1
4.0E0	2.1489E4	1.4E1	6.55E2	3.98E2	-7.20871E-2	-8.80014E1	-2.14577E-4	-8.80009E1	5.24521E-4	4.673E-3	9.50098E-2	2.73255E1	-3.26759E1	-3.26086E1	2.68376E1	1.20004E-7	2.52276E-3	2.52276E-3	6.31817E-3	3.00197E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.16233E-2	-8.80014E1	-5.24521E-4	-8.80007E1	4.52995E-4	4.62532E-3	9.49383E-2	2.73104E1	-3.26703E1	-3.26449E1	2.6818E1	1.19965E-7	2.52757E-3	2.52757E-3	6.30192E-3	3.00563E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.17007E-2	-8.80016E1	-3.09944E-4	-8.80008E1	6.19888E-4	4.55379E-3	9.50813E-2	2.73243E1	-3.26771E1	-3.2608E1	2.68256E1	1.19953E-7	2.52061E-3	2.52061E-3	6.31278E-3	3.01223E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.20871E-2	-8.80016E1	-2.14577E-4	-8.80005E1	4.29153E-4	4.60148E-3	9.47952E-2	2.73339E1	-3.26518E1	-3.2617E1	2.6819E1	1.2033E-7	2.52647E-3	2.52647E-3	6.3074E-3	3.00302E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.13143E-2	-8.80013E1	-3.57628E-4	-8.80006E1	5.96046E-4	4.81606E-3	9.50575E-2	2.73057E1	-3.26741E1	-3.25972E1	2.6852E1	1.19913E-7	2.52209E-3	2.52209E-3	6.31288E-3	2.99E-1
1.2E1	6.3E1	0.0E0	4.85E2	3.23E2	-7.20871E-2	-8.80015E1	-2.86102E-4	-8.80007E1	5.48363E-4	4.673E-3	9.48906E-2	2.73129E1	-3.2641E1	-3.26092E1	2.6846E1	1.19861E-7	2.5199E-3	2.5199E-3	6.32386E-3	2.98481E-1
1.3E1	1.2E1	0.0E0	5.25E2	3.53E2	-7.23964E-2	-8.8002E1	-4.52995E-4	-8.80005E1	6.4373E-4	4.45843E-3	9.47714E-2	2.72949E1	-3.26524E1	-3.26615E1	2.68244E1	1.20069E-7	2.5188E-3	2.5188E-3	6.32386E-3	2.98222E-1
1.4E1	3.292E3	0.0E0	5.66E2	3.82E2	-7.12368E-2	-8.80018E1	-4.29153E-4	-8.80004E1	8.34465E-4	4.60148E-3	9.47952E-2	2.73134E1	-3.26502E1	-3.26107E1	2.68118E1	1.19653E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.00041E-1
1.5E1	7.2E1	0.0E0	6.06E2	4.11E2	-7.13143E-2	-8.80018E1	-7.15256E-5	-8.80006E1	8.58307E-4	4.43459E-3	9.47237E-2	2.73448E1	-3.26549E1	-3.26086E1	2.68484E1	1.19851E-7	2.52384E-3	2.52384E-3	6.31817E-3	3.00453E-1
1.6E1	4.43E2	0.0E0	6.47E2	4.41E2	-7.19325E-2	-8.80014E1	-2.14577E-4	-8.80008E1	6.67572E-4	4.60148E-3	9.49144E-2	2.73292E1	-3.26383E1	-3.26243E1	2.68373E1	1.19913E-7	2.52099E-3	2.52099E-3	6.31837E-3	2.9978E-1
1.7E1	7.79E2	0.0E0	6.87E2	4.7E2	-7.22418E-2	-8.80015E1	-5.96046E-4	-8.80006E1	3.33786E-4	4.43459E-3	9.49144E-2	2.73267E1	-3.26667E1	-3.26368E1	2.68344E1	1.19628E-7	2.51752E-3	2.51752E-3	6.34322E-3	2.99179E-1
1.8E1	3.195E3	3.0E0	7.27E2	5.0E2	-7.19325E-2	-8.80015E1	-3.8147E-4	-8.80004E1	6.67572E-4	4.33922E-3	9.47237E-2	2.73562E1	-3.26957E1	-3.2626E1	2.68268E1	1.1995E-7	2.51874E-3	2.51874E-3	6.3074E-3	2.98435E-1
1.9E1	2.034E3	2.0E0	7.68E2	5.29E2	-7.29374E-2	-8.80021E1	-4.29153E-4	-8.80003E1	5.72205E-4	4.55379E-3	9.49144E-2	2.73462E1	-3.26162E1	-3.26405E1	2.68169E1	1.19913E-7	2.51225E-3	2.51225E-3	6.31288E-3	3.00302E-1
2.0E1	2.4989E4	1.5E1	8.08E2	5.58E2	-7.18554E-2	-8.80018E1	-7.86781E-4	-8.80009E1	3.33786E-4	4.64916E-3	9.49144E-2	2.73159E1	-3.26567E1	-3.26579E1	2.68677E1	1.19941E-7	2.52765E-3	2.52765E-3	6.30212E-3	3.01356E-1
2.1E1	4.4E1	0.0E0	8.49E2	5.88E2	-7.17779E-2	-8.80016E1	-4.05312E-4	-8.80003E1	5.48363E-4	4.41074E-3	9.47475E-2	2.72974E1	-3.26714E1	-3.26006E1	2.6825E1	1.20122E-7	2.51225E-3	2.51225E-3	6.32936E-3	3.00302E-1
2.2E1	1.708E3	0.0E0	8.89E2	6.17E2	-7.21643E-2	-8.80014E1	-4.29153E-4	-8.80006E1	2.38419E-4	4.12464E-3	9.48429E-2	2.73321E1	-3.26867E1	-3.26038E1	2.68538E1	1.19646E-7	2.52707E-3	2.52707E-3	6.3074E-3	3.02253E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.27053E-2	-8.80016E1	-2.6226E-4	-8.80005E1	3.8147E-4	4.05312E-3	9.4986E-2	2.73069E1	-3.26404E1	-3.26446E1	2.67776E1	1.19749E-7	2.52061E-3	2.52061E-3	6.32896E-3	3.00453E-1
