[Scan]
initial_time=2016-01-18T22:41:44
final_time=2016-01-18T22:42:05
ip_count=19
run=1024
dataset=10
scan=749
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.14689E-2
qbias_imon=-3.78257E-6
ql1_vset=
ql1_vmon=-8.80019E1
ql1_imon=-7.57313E-10
ql2_vset=
ql2_vmon=-4.76837E-5
ql2_imon=1.41517E-9
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-2.45696E-9
ql4_vset=
ql4_vmon=8.58307E-4
ql4_imon=1.61249E-8
mult1=-1.66396E-8
mult2=-2.76833E-9
rf_tmon=-5.41792E-3
rf_agc=3.34448E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.81606E-3
ql5_imon=5.32603E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68851E0
bslens_imon=2.52521E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19681E1
lens5a_imon=2.00531E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1248E2
lens4a_imon=2.0503E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5406E1
cs_ef1b_imon=2.73945E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04648E2
lens23_imon=1.02288E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0454E1
cs_ea1_imon=2.60138E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01708E0
lens1_imon=1.66478E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64375E1
os_ef1alow_imon=2.96948E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0384E1
cs_ea2_imon=1.48321E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84491E1
cs_ef1a_imon=2.90331E-5
olens2_vset=9.7E-1
olens2_vmon=9.70006E-1
olens2_imon=1.18851E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11376E1
os_restr1_imon=4.27923E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15183E1
os_ea1_imon=2.41917E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63642E1
os_ef1bup_imon=3.06484E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22549E0
cs_ionrep_imon=1.15734E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91899E2
cs_nozzle_imon=1.93202E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01938E1
cs_anode1_imon=2.89319E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20442E0
olens4_imon=3.91888E-8
tplens_vset=1.4E-1
tplens_vmon=1.66998E0
tplens_imon=-5.03819E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26048E1
iondef3_imon=1.49645E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26661E1
iondef2_imon=1.53888E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02944E2
lens6_imon=2.98167E-4
ql6_vset=1.0E-1
ql6_vmon=9.48191E-2
ql6_imon=8.99148E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.31634E0
ionrepsh_imon=1.73355E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33879E1
lens5b_imon=2.177E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7465E1
cs_ef2b_imon=3.12478E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.42016E0
os_ea2_imon=-7.76353E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06096E2
lens4b_imon=2.00533E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71245E1
cs_ef2a_imon=3.17071E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07986E0
os_ef2alow_imon=-2.48659E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.95262E-1
os_ef2bup_imon=-5.41359E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1126E1
os_restr2_imon=3.36494E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2304E2
cs_ionfoca_imon=6.27281E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02003E1
cs_anode2_imon=2.23073E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73216E1
iondef1_imon=1.10439E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68316E1
iondef4_imon=1.09535E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=4.8348E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82022E-1
olens1_imon=7.14563E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13144E0
cs_ionaccel_imon=-1.80933E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02084E2
cs_ionfocb_imon=1.47417E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5658E1
einzel_imon=7.75012E-6
window_vset=0.0E0
window_vmon=2.5874E-1
window_imon=-9.3746E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8268E2
mask1_imon=2.39158E-4
mask2_vset=0.0E0
mask2_vmon=-1.86201E1
mask2_imon=-7.85661E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92624E3
multa_neg_imon=7.7968E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93718E3
defgrida_imon=6.60154E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50124E3
multb_neg_imon=7.43472E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.10791E0
defgridb_imon=5.99418E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33323E1
os_fil1_imon=9.39897E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07102E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61849E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30909E1
cs_fil1_imon=9.92708E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63345E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62864E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.99923E-2
os_fil2_imon=-2.57443E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.93413E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.20031E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34546E-1
cs_fil2_imon=-2.45766E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.08432E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21827E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=2.99941E-1
chamber_ion_pmon=1.20055E-7
chamber_cvt_pmon=2.51096E-3
foreline_cvt_pmon=2.51096E-3
chamber_tmon=1.40094E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.32238E-1
res40_imon=-2.56443E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.89E3	1.0E0	1.47E2	4.1E1	-7.23964E-2	-8.80018E1	-6.19888E-4	-8.80005E1	4.29153E-4	4.3869E-3	9.48906E-2	2.7301E1	-3.26284E1	-3.2577E1	2.68208E1	1.20076E-7	2.52266E-3	2.52266E-3	6.31332E-3	3.00479E-1
2.0E0	9.7417E4	1.02E2	3.16E2	1.6E2	-7.29374E-2	-8.80018E1	-5.00679E-4	-8.80008E1	4.05312E-4	4.26769E-3	9.4676E-2	2.7326E1	-3.26625E1	-3.26081E1	2.68453E1	1.19953E-7	2.51847E-3	2.51847E-3	6.29128E-3	2.98156E-1
3.0E0	2.3E1	0.0E0	4.85E2	2.79E2	-7.27053E-2	-8.80017E1	-5.72205E-4	-8.80007E1	7.86781E-4	4.48227E-3	9.47952E-2	2.7329E1	-3.26609E1	-3.25862E1	2.68454E1	1.202E-7	2.5188E-3	2.5188E-3	6.30192E-3	2.9874E-1
4.0E0	2.1459E4	1.4E1	6.55E2	3.98E2	-7.20871E-2	-8.80018E1	-7.62939E-4	-8.80007E1	5.00679E-4	4.12464E-3	9.46045E-2	2.73201E1	-3.262E1	-3.26416E1	2.68364E1					
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.16233E-2	-8.80019E1	-9.29832E-4	-8.80007E1	3.57628E-4	4.07696E-3	9.47952E-2	2.73069E1	-3.26425E1	-3.2639E1	2.68322E1	1.19902E-7	2.51525E-3	2.51525E-3	6.31817E-3	2.99686E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.201E-2	-8.80021E1	-9.05991E-4	-8.80008E1	5.24521E-4	4.36306E-3	9.48906E-2	2.73187E1	-3.26714E1	-3.2626E1	2.68557E1	1.20055E-7	2.51417E-3	2.51417E-3	6.32896E-3	2.96887E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.286E-2	-8.80017E1	-4.76837E-4	-8.80009E1	6.19888E-4	4.50611E-3	9.49144E-2	2.73165E1	-3.26591E1	-3.26194E1	2.68394E1	1.20069E-7	2.51662E-3	2.51662E-3	6.31837E-3	2.9874E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.21643E-2	-8.80016E1	-5.24521E-4	-8.80007E1	7.86781E-4	4.33922E-3	9.47237E-2	2.73363E1	-3.26549E1	-3.26086E1	2.68274E1	1.2033E-7	2.5188E-3	2.5188E-3	6.31837E-3	2.9926E-1
1.2E1	8.1E1	1.0E0	4.85E2	3.23E2	-7.16233E-2	-8.80018E1	-6.19888E-4	-8.80007E1	5.96046E-4	4.8399E-3	9.47714E-2	2.73364E1	-3.26697E1	-3.26378E1	2.68154E1	1.19902E-7	2.52061E-3	2.52061E-3	6.33436E-3	3.00453E-1
1.3E1	1.8E1	0.0E0	5.25E2	3.53E2	-7.21643E-2	-8.80018E1	-6.4373E-4	-8.80006E1	5.48363E-4	5.00679E-3	9.46999E-2	2.73484E1	-3.26801E1	-3.26044E1	2.68532E1	1.19965E-7	2.51443E-3	2.51443E-3	6.34588E-3	2.99E-1
1.4E1	3.193E3	2.0E0	5.66E2	3.82E2	-7.27828E-2	-8.80017E1	-2.14577E-4	-8.80007E1	4.76837E-4	4.62532E-3	9.48668E-2	2.73369E1	-3.26561E1	-3.26122E1	2.68294E1	1.19861E-7	2.51771E-3	2.51771E-3	6.29098E-3	2.98481E-1
1.5E1	1.04E2	0.0E0	6.06E2	4.11E2	-7.23964E-2	-8.80018E1	-4.76837E-5	-8.80005E1	4.52995E-4	4.45843E-3	9.43899E-2	2.73393E1	-3.26561E1	-3.26248E1	2.68559E1	1.19697E-7	2.51525E-3	2.51525E-3	6.31817E-3	2.97647E-1
1.6E1	3.93E2	1.0E0	6.47E2	4.41E2	-7.30146E-2	-8.80016E1	-9.53674E-5	-8.80005E1	5.96046E-4	4.62532E-3	9.4676E-2	2.72973E1	-3.26585E1	-3.2647E1	2.67794E1	1.2033E-7	2.5188E-3	2.5188E-3	6.31837E-3	2.98481E-1
1.7E1	8.62E2	1.0E0	6.87E2	4.7E2	-7.24736E-2	-8.80016E1	-1.90735E-4	-8.80006E1	6.4373E-4	4.69685E-3	9.50575E-2	2.7337E1	-3.26708E1	-3.26136E1	2.68175E1	1.19861E-7	2.51662E-3	2.51662E-3	6.33486E-3	2.98222E-1
1.8E1	3.39E3	2.0E0	7.27E2	5.0E2	-7.15461E-2	-8.80016E1	-4.52995E-4	-8.80005E1	7.39098E-4	4.74453E-3	9.50336E-2	2.73351E1	-3.26849E1	-3.26044E1	2.68785E1	1.19902E-7	2.52276E-3	2.52276E-3	6.32356E-3	2.99175E-1
1.9E1	1.931E3	2.0E0	7.68E2	5.29E2	-7.23189E-2	-8.80016E1	-3.33786E-4	-8.80006E1	7.62939E-4	4.48227E-3	9.50098E-2	2.73123E1	-3.26591E1	-3.26206E1	2.6816E1	1.20031E-7	2.52362E-3	2.52362E-3	6.31858E-3	3.0041E-1
2.0E1	2.4725E4	1.7E1	8.08E2	5.58E2	-7.15461E-2	-8.80015E1	-7.15256E-5	-8.80006E1	9.05991E-4	4.43459E-3	9.51529E-2	2.73394E1	-3.26731E1	-3.26315E1	2.68088E1	1.19757E-7	2.51225E-3	2.51225E-3	6.32936E-3	3.01085E-1
2.1E1	5.7E1	0.0E0	8.49E2	5.88E2	-7.17779E-2	-8.80016E1	-3.57628E-4	-8.80004E1	8.58307E-4	4.48227E-3	9.50575E-2	2.73115E1	-3.26648E1	-3.26364E1	2.68346E1	1.19861E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.00302E-1
2.2E1	1.765E3	1.0E0	8.89E2	6.17E2	-7.23964E-2	-8.80018E1	-2.6226E-4	-8.80003E1	8.82149E-4	4.3869E-3	9.50098E-2	2.72921E1	-3.26596E1	-3.26119E1	2.67949E1	1.20055E-7	2.51525E-3	2.51525E-3	6.3074E-3	2.98665E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.14689E-2	-8.80019E1	-4.76837E-5	-8.80003E1	8.58307E-4	4.81606E-3	9.48191E-2	2.73216E1	-3.26661E1	-3.26048E1	2.68316E1	1.20055E-7	2.51096E-3	2.51096E-3	6.32896E-3	2.99941E-1
