[Scan]
initial_time=2016-01-18T22:42:13
final_time=2016-01-18T22:42:33
ip_count=19
run=1024
dataset=10
scan=750
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.21643E-2
qbias_imon=-3.7727E-6
ql1_vset=
ql1_vmon=-8.80016E1
ql1_imon=-8.11911E-10
ql2_vset=
ql2_vmon=-3.09944E-4
ql2_imon=1.43049E-9
ql3_vset=
ql3_vmon=-8.80006E1
ql3_imon=-2.49741E-9
ql4_vset=
ql4_vmon=6.4373E-4
ql4_imon=1.61617E-8
mult1=-1.75972E-8
mult2=-2.492E-9
rf_tmon=-4.3384E-3
rf_agc=3.33976E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.88758E-3
ql5_imon=5.57625E-10
bslens_vset=-6.2E0
bslens_vmon=-6.62768E0
bslens_imon=2.15923E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19761E1
lens5a_imon=2.00686E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12461E2
lens4a_imon=2.05017E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53875E1
cs_ef1b_imon=2.74015E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04636E2
lens23_imon=1.02099E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04658E1
cs_ea1_imon=2.60673E-5
lens1_vset=-2.7E0
lens1_vmon=-2.9987E0
lens1_imon=1.39138E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64861E1
os_ef1alow_imon=2.97189E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03834E1
cs_ea2_imon=1.48342E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84388E1
cs_ef1a_imon=2.90666E-5
olens2_vset=9.7E-1
olens2_vmon=9.69434E-1
olens2_imon=1.18188E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11364E1
os_restr1_imon=4.28229E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14987E1
os_ea1_imon=2.42288E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63611E1
os_ef1bup_imon=3.08758E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23588E0
cs_ionrep_imon=1.16799E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91894E2
cs_nozzle_imon=1.93654E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01827E1
cs_anode1_imon=2.88107E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20396E0
olens4_imon=3.91936E-8
tplens_vset=1.4E-1
tplens_vmon=1.6186E0
tplens_imon=-4.36334E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26632E1
iondef3_imon=1.51947E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26378E1
iondef2_imon=1.55228E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02953E2
lens6_imon=2.9809E-4
ql6_vset=1.0E-1
ql6_vmon=9.50098E-2
ql6_imon=9.31001E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26291E0
ionrepsh_imon=1.73289E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33922E1
lens5b_imon=2.16692E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74796E1
cs_ef2b_imon=3.13046E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4017E0
os_ea2_imon=-6.99496E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06089E2
lens4b_imon=2.00381E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71168E1
cs_ef2a_imon=3.1683E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05156E0
os_ef2alow_imon=-2.57626E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.73998E-1
os_ef2bup_imon=-5.36212E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11262E1
os_restr2_imon=3.37481E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23056E2
cs_ionfoca_imon=6.31623E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01845E1
cs_anode2_imon=2.23308E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72732E1
iondef1_imon=1.10238E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68626E1
iondef4_imon=1.08882E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=4.78617E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81402E-1
olens1_imon=7.12726E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15537E0
cs_ionaccel_imon=-1.77978E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02076E2
cs_ionfocb_imon=1.47378E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56645E1
einzel_imon=7.80317E-6
window_vset=0.0E0
window_vmon=2.38366E-1
window_imon=-7.05797E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8264E2
mask1_imon=2.39077E-4
mask2_vset=0.0E0
mask2_vmon=-1.86332E1
mask2_imon=-7.88688E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92662E3
multa_neg_imon=7.36118E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93758E3
defgrida_imon=6.58251E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50108E3
multb_neg_imon=7.43688E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.31735E0
defgridb_imon=6.1355E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33321E1
os_fil1_imon=9.39062E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07732E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61812E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30908E1
cs_fil1_imon=9.93218E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61909E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62801E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.92494E-2
os_fil2_imon=-2.56386E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.9411E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.19335E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33795E-1
cs_fil2_imon=-2.75006E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.23232E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21896E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.99941E-1
chamber_ion_pmon=1.20004E-7
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.91127E-1
res40_imon=-2.55463E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=207
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.801E3	3.0E0	1.47E2	4.1E1	-7.20871E-2	-8.80018E1	-2.38419E-4	-8.80006E1	6.67572E-4	4.79221E-3	9.51529E-2	2.73243E1	-3.26512E1	-3.26254E1	2.68545E1	1.19925E-7	2.5147E-3	2.5147E-3	6.30182E-3	3.00942E-1
2.0E0	9.7471E4	8.8E1	3.16E2	1.6E2	-7.22418E-2	-8.80015E1	0.0E0	-8.80007E1	5.00679E-4	4.24385E-3	9.4986E-2	2.73382E1	-3.26731E1	-3.26125E1	2.68202E1	1.198E-7	2.51525E-3	2.51525E-3	6.32356E-3	2.99941E-1
3.0E0	1.8E1	0.0E0	4.85E2	2.79E2	-7.10825E-2	-8.80019E1	-3.8147E-4	-8.80006E1	4.05312E-4	4.43459E-3	9.49144E-2	2.73262E1	-3.2675E1	-3.26363E1	2.68592E1	1.19766E-7	2.5225E-3	2.5225E-3	6.31299E-3	3.00144E-1
4.0E0	2.1543E4	1.1E1	6.55E2	3.98E2	-7.13143E-2	-8.80016E1	-3.57628E-4	-8.80007E1	5.48363E-4	4.43459E-3	9.5129E-2	2.73207E1	-3.26651E1	-3.25761E1	2.68052E1	1.19941E-7	2.51393E-3	2.51393E-3	6.30212E-3	2.99845E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.17779E-2	-8.80018E1	-4.05312E-4	-8.80007E1	5.72205E-4	4.29153E-3	9.5129E-2	2.72991E1	-3.26536E1	-3.26212E1	2.68358E1	1.19851E-7	2.5131E-3	2.5131E-3	6.32356E-3	2.9943E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.21643E-2	-8.80019E1	-4.52995E-4	-8.80005E1	5.24521E-4	3.98159E-3	9.50336E-2	2.7334E1	-3.26732E1	-3.26579E1	2.68791E1	1.20017E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.01609E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.22418E-2	-8.80018E1	-3.57628E-4	-8.80006E1	5.00679E-4	4.33922E-3	9.56059E-2	2.73281E1	-3.26543E1	-3.26136E1	2.6792E1	1.20004E-7	2.51847E-3	2.51847E-3	6.28592E-3	3.0071E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.18554E-2	-8.80017E1	-4.05312E-4	-8.80006E1	5.00679E-4	4.57764E-3	9.52244E-2	2.73314E1	-3.26309E1	-3.26334E1	2.68749E1	1.20106E-7	2.52276E-3	2.52276E-3	6.3074E-3	3.02253E-1
1.2E1	8.9E1	2.0E0	4.85E2	3.23E2	-7.17007E-2	-8.80018E1	-4.52995E-4	-8.80008E1	2.38419E-4	4.62532E-3	9.51052E-2	2.73448E1	-3.26843E1	-3.2608E1	2.68453E1	1.20191E-7	2.51693E-3	2.51693E-3	6.31858E-3	2.98554E-1
1.3E1	1.1E1	0.0E0	5.25E2	3.53E2	-7.23189E-2	-8.80018E1	-3.57628E-4	-8.80004E1	1.43051E-4	4.36306E-3	9.47714E-2	2.73016E1	-3.26349E1	-3.26891E1	2.6825E1	1.19861E-7	2.51771E-3	2.51771E-3	6.3074E-3	2.98481E-1
1.4E1	3.129E3	1.0E0	5.66E2	3.82E2	-7.14689E-2	-8.80018E1	-1.66893E-4	-8.80003E1	3.8147E-4	4.24385E-3	9.50813E-2	2.7346E1	-3.26536E1	-3.26332E1	2.68418E1	1.198E-7	2.51632E-3	2.51632E-3	6.31278E-3	2.97647E-1
1.5E1	7.6E1	0.0E0	6.06E2	4.11E2	-7.23189E-2	-8.80016E1	-3.09944E-4	-8.80004E1	8.82149E-4	4.50611E-3	9.52244E-2	2.73189E1	-3.26494E1	-3.26837E1	2.6825E1	1.19809E-7	2.52318E-3	2.52318E-3	6.32386E-3	2.98481E-1
1.6E1	4.27E2	1.0E0	6.47E2	4.41E2	-7.25507E-2	-8.80018E1	-4.29153E-4	-8.80004E1	1.00136E-3	4.74453E-3	9.50813E-2	2.73246E1	-3.26667E1	-3.26644E1	2.68454E1	1.20017E-7	2.51552E-3	2.51552E-3	6.32936E-3	2.9874E-1
1.7E1	8.12E2	0.0E0	6.87E2	4.7E2	-7.286E-2	-8.80017E1	-3.09944E-4	-8.80005E1	4.76837E-4	4.62532E-3	9.53913E-2	2.73189E1	-3.26591E1	-3.25882E1	2.68532E1	1.20004E-7	2.51954E-3	2.51954E-3	6.31817E-3	3.00197E-1
1.8E1	3.411E3	1.0E0	7.27E2	5.0E2	-7.286E-2	-8.8002E1	-2.6226E-4	-8.80006E1	4.52995E-4	4.79221E-3	9.52959E-2	2.7329E1	-3.26291E1	-3.26187E1	2.68106E1	1.20017E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.01085E-1
1.9E1	1.937E3	1.0E0	7.68E2	5.29E2	-7.21643E-2	-8.80019E1	-3.8147E-4	-8.80005E1	6.91414E-4	4.93526E-3	9.49621E-2	2.73254E1	-3.26463E1	-3.26138E1	2.68551E1	1.20031E-7	2.5147E-3	2.5147E-3	6.30182E-3	3.02277E-1
2.0E1	2.4384E4	1.2E1	8.08E2	5.58E2	-7.23964E-2	-8.80017E1	-5.24521E-4	-8.80006E1	4.29153E-4	4.673E-3	9.53197E-2	2.72787E1	-3.26266E1	-3.26404E1	2.68448E1	1.19891E-7	2.51603E-3	2.51603E-3	6.31269E-3	3.01356E-1
2.1E1	5.0E1	0.0E0	8.49E2	5.88E2	-7.25507E-2	-8.80016E1	-4.76837E-4	-8.80008E1	4.52995E-4	5.05447E-3	9.48668E-2	2.73189E1	-3.26488E1	-3.2617E1	2.68328E1	1.19913E-7	2.51771E-3	2.51771E-3	6.33486E-3	3.01609E-1
2.2E1	1.844E3	0.0E0	8.89E2	6.17E2	-7.27053E-2	-8.80017E1	-4.76837E-4	-8.8001E1	4.76837E-4	4.8399E-3	9.49621E-2	2.73198E1	-3.26602E1	-3.26384E1	2.68106E1	1.20174E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.00563E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.21643E-2	-8.80016E1	-3.09944E-4	-8.80006E1	6.4373E-4	4.88758E-3	9.50098E-2	2.72732E1	-3.26378E1	-3.26632E1	2.68626E1	1.20004E-7	2.51417E-3	2.51417E-3	6.3074E-3	2.99941E-1
