[Scan]
initial_time=2016-01-18T22:43:08
final_time=2016-01-18T22:43:28
ip_count=19
run=1024
dataset=10
scan=752
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.30146E-2
qbias_imon=-3.79781E-6
ql1_vset=
ql1_vmon=-8.80018E1
ql1_imon=-7.6884E-10
ql2_vset=
ql2_vmon=-6.67572E-4
ql2_imon=1.38755E-9
ql3_vset=
ql3_vmon=-8.80009E1
ql3_imon=-2.44907E-9
ql4_vset=
ql4_vmon=2.38419E-4
ql4_imon=1.61636E-8
mult1=-1.78374E-8
mult2=-3.65867E-9
rf_tmon=-2.54583E-3
rf_agc=3.47427E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.14848E-3
ql5_imon=5.47707E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65112E0
bslens_imon=2.41518E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1943E1
lens5a_imon=2.00831E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1247E2
lens4a_imon=2.04981E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53983E1
cs_ef1b_imon=2.72898E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0463E2
lens23_imon=1.02125E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04826E1
cs_ea1_imon=2.6042E-5
lens1_vset=-2.7E0
lens1_vmon=-2.97707E0
lens1_imon=1.66896E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64969E1
os_ef1alow_imon=2.98234E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03913E1
cs_ea2_imon=1.48198E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84286E1
cs_ef1a_imon=2.88575E-5
olens2_vset=9.7E-1
olens2_vmon=9.70364E-1
olens2_imon=1.18054E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11472E1
os_restr1_imon=4.27725E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14945E1
os_ea1_imon=2.43009E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63773E1
os_ef1bup_imon=3.07965E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20764E0
cs_ionrep_imon=1.1734E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91963E2
cs_nozzle_imon=1.93564E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02049E1
cs_anode1_imon=2.88647E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20439E0
olens4_imon=3.91336E-8
tplens_vset=1.4E-1
tplens_vmon=1.69551E0
tplens_imon=-3.64235E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26192E1
iondef3_imon=1.48919E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26522E1
iondef2_imon=1.56309E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02915E2
lens6_imon=2.98032E-4
ql6_vset=1.0E-1
ql6_vmon=9.5129E-2
ql6_imon=9.63903E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26652E0
ionrepsh_imon=1.71234E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33946E1
lens5b_imon=2.15719E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74621E1
cs_ef2b_imon=3.12145E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.43295E0
os_ea2_imon=-8.83348E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06087E2
lens4b_imon=2.00594E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71468E1
cs_ef2a_imon=3.17119E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.01972E0
os_ef2alow_imon=-2.63032E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.91417E-1
os_ef2bup_imon=-5.17832E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11274E1
os_restr2_imon=3.38346E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23038E2
cs_ionfoca_imon=6.29027E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02007E1
cs_anode2_imon=2.2338E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73364E1
iondef1_imon=1.10599E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68429E1
iondef4_imon=1.08774E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=4.80055E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81784E-1
olens1_imon=7.13653E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13675E0
cs_ionaccel_imon=-1.75095E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0208E2
cs_ionfocb_imon=1.47453E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56489E1
einzel_imon=7.68424E-6
window_vset=0.0E0
window_vmon=2.65395E-1
window_imon=-7.52649E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8268E2
mask1_imon=2.39059E-4
mask2_vset=0.0E0
mask2_vmon=-1.86062E1
mask2_imon=-7.23817E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92627E3
multa_neg_imon=8.06054E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93704E3
defgrida_imon=6.04537E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50115E3
multb_neg_imon=7.39362E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.59104E0
defgridb_imon=6.00572E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33325E1
os_fil1_imon=9.41351E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06921E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61631E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30909E1
cs_fil1_imon=9.94071E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63027E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6265E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.02812E-2
os_fil2_imon=-2.62993E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.89906E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.2346E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35996E-1
cs_fil2_imon=-2.29356E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.1242E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21926E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32063E-3
inlet_lpb_pmon=3.01104E-1
chamber_ion_pmon=1.19715E-7
chamber_cvt_pmon=2.51287E-3
foreline_cvt_pmon=2.51287E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.82117E-1
res40_imon=-2.54382E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=206
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.842E3	0.0E0	1.47E2	4.1E1	-7.26282E-2	-8.80017E1	-3.09944E-4	-8.80007E1	5.24521E-4	4.36306E-3	9.50575E-2	2.73287E1	-3.26437E1	-3.26343E1	2.68777E1	1.19913E-7	2.52209E-3	2.52209E-3	6.32936E-3	3.00824E-1
2.0E0	9.8216E4	7.0E1	3.16E2	1.6E2	-7.21643E-2	-8.80019E1	-3.57628E-4	-8.80003E1	5.00679E-4	4.26769E-3	9.50813E-2	2.73189E1	-3.2653E1	-3.2644E1	2.68288E1	1.20158E-7	2.51954E-3	2.51954E-3	6.3074E-3	3.03027E-1
3.0E0	1.8E1	0.0E0	4.85E2	2.79E2	-7.11597E-2	-8.80018E1	-7.39098E-4	-8.80005E1	3.8147E-4	4.26769E-3	9.4986E-2	2.73219E1	-3.26451E1	-3.26335E1	2.68951E1	1.19809E-7	2.5188E-3	2.5188E-3	6.33486E-3	3.01085E-1
4.0E0	2.19E4	1.3E1	6.55E2	3.98E2	-7.18554E-2	-8.80018E1	-7.62939E-4	-8.80006E1	3.8147E-4	4.64916E-3	9.48906E-2	2.73263E1	-3.26697E1	-3.26248E1	2.68476E1	1.20293E-7	2.51814E-3	2.51814E-3	6.29684E-3	3.00852E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.06187E-2	-8.80017E1	-5.24521E-4	-8.80006E1	4.52995E-4	4.3869E-3	9.48429E-2	2.73033E1	-3.26719E1	-3.26187E1	2.68136E1	1.20174E-7	2.51662E-3	2.51662E-3	6.33486E-3	2.9978E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.03869E-2	-8.80018E1	-1.66893E-4	-8.80003E1	4.05312E-4	4.14848E-3	9.52005E-2	2.73069E1	-3.26585E1	-3.26086E1	2.68827E1	1.19809E-7	2.51116E-3	2.51116E-3	6.30192E-3	3.00563E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.10825E-2	-8.80019E1	-1.90735E-4	-8.80007E1	6.19888E-4	4.14848E-3	9.52959E-2	2.73147E1	-3.26699E1	-3.26014E1	2.68358E1	1.19809E-7	2.51443E-3	2.51443E-3	6.30192E-3	3.00302E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.08504E-2	-8.80017E1	-5.96046E-4	-8.80005E1	4.05312E-4	4.31538E-3	9.52959E-2	2.73219E1	-3.26452E1	-3.26074E1	2.68358E1	1.19861E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.00302E-1
1.2E1	8.7E1	0.0E0	4.85E2	3.23E2	-7.12368E-2	-8.80018E1	-4.76837E-4	-8.80006E1	6.67572E-4	4.43459E-3	9.52482E-2	2.73092E1	-3.27068E1	-3.26207E1	2.68641E1	1.20122E-7	2.51116E-3	2.51116E-3	6.31837E-3	3.00824E-1
1.3E1	1.4E1	0.0E0	5.25E2	3.53E2	-7.16233E-2	-8.80018E1	-1.66893E-4	-8.80007E1	4.76837E-4	4.14848E-3	9.52005E-2	2.73411E1	-3.26741E1	-3.26524E1	2.68412E1	1.198E-7	2.52061E-3	2.52061E-3	6.31278E-3	3.00966E-1
1.4E1	3.263E3	2.0E0	5.66E2	3.82E2	-7.32464E-2	-8.8002E1	-3.57628E-4	-8.80006E1	5.48363E-4	4.17233E-3	9.50336E-2	2.73321E1	-3.26885E1	-3.26176E1	2.6828E1	1.20122E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.00041E-1
1.5E1	7.4E1	0.0E0	6.06E2	4.11E2	-7.27053E-2	-8.80019E1	-4.29153E-4	-8.80007E1	4.52995E-4	4.33922E-3	9.48906E-2	2.73279E1	-3.26506E1	-3.26122E1	2.68556E1	1.19809E-7	2.52428E-3	2.52428E-3	6.32936E-3	3.00041E-1
1.6E1	3.87E2	1.0E0	6.47E2	4.41E2	-7.27828E-2	-8.80017E1	-5.24521E-4	-8.80007E1	4.05312E-4	4.3869E-3	9.50336E-2	2.73285E1	-3.26543E1	-3.26134E1	2.6831E1	1.20174E-7	2.52538E-3	2.52538E-3	6.29098E-3	3.00302E-1
1.7E1	7.63E2	1.0E0	6.87E2	4.7E2	-7.27828E-2	-8.80017E1	-5.24521E-4	-8.80006E1	3.09944E-4	4.52995E-3	9.5129E-2	2.73305E1	-3.26608E1	-3.26095E1	2.68556E1	1.19861E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.00563E-1
1.8E1	3.429E3	2.0E0	7.27E2	5.0E2	-7.12368E-2	-8.80018E1	-4.76837E-4	-8.80006E1	4.05312E-4	4.12464E-3	9.52959E-2	2.73291E1	-3.26651E1	-3.26386E1	2.68238E1	1.198E-7	2.51954E-3	2.51954E-3	6.32896E-3	2.99175E-1
1.9E1	1.914E3	2.0E0	7.68E2	5.29E2	-7.21643E-2	-8.80017E1	-4.52995E-4	-8.80007E1	4.52995E-4	4.48227E-3	9.53436E-2	2.73508E1	-3.26482E1	-3.26374E1	2.68219E1	1.20017E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.00302E-1
2.0E1	2.4457E4	1.1E1	8.08E2	5.58E2	-7.201E-2	-8.80018E1	-4.52995E-4	-8.8001E1	7.15256E-4	4.33922E-3	9.49383E-2	2.73369E1	-3.26374E1	-3.26158E1	2.68442E1	1.20017E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.00824E-1
2.1E1	5.3E1	0.0E0	8.49E2	5.88E2	-7.19325E-2	-8.8002E1	-7.39098E-4	-8.80009E1	1.90735E-4	4.22001E-3	9.47952E-2	2.7311E1	-3.26744E1	-3.26319E1	2.68464E1	1.20069E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.00824E-1
2.2E1	1.736E3	2.0E0	8.89E2	6.17E2	-7.21643E-2	-8.80018E1	-5.96046E-4	-8.8001E1	6.19888E-4	4.43459E-3	9.50098E-2	2.73505E1	-3.26614E1	-3.26343E1	2.68262E1	1.198E-7	2.51847E-3	2.51847E-3	6.33436E-3	2.99941E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.30146E-2	-8.80018E1	-6.67572E-4	-8.80009E1	2.38419E-4	4.14848E-3	9.5129E-2	2.73364E1	-3.26522E1	-3.26192E1	2.68429E1	1.19715E-7	2.51287E-3	2.51287E-3	6.32063E-3	3.01104E-1
