[Scan]
initial_time=2016-01-18T22:43:36
final_time=2016-01-18T22:43:56
ip_count=19
run=1024
dataset=10
scan=753
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.23189E-2
qbias_imon=-3.75613E-6
ql1_vset=
ql1_vmon=-8.80021E1
ql1_imon=-7.68888E-10
ql2_vset=
ql2_vmon=-3.57628E-4
ql2_imon=1.43929E-9
ql3_vset=
ql3_vmon=-8.80009E1
ql3_imon=-2.4575E-9
ql4_vset=
ql4_vmon=3.33786E-4
ql4_imon=1.62554E-8
mult1=-1.64952E-8
mult2=-2.71462E-9
rf_tmon=-4.33819E-3
rf_agc=3.36039E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.50611E-3
ql5_imon=5.92101E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68657E0
bslens_imon=2.45484E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20175E1
lens5a_imon=1.99641E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12441E2
lens4a_imon=2.0514E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5393E1
cs_ef1b_imon=2.74187E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04629E2
lens23_imon=1.02182E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04543E1
cs_ea1_imon=2.59555E-5
lens1_vset=-2.7E0
lens1_vmon=-2.96806E0
lens1_imon=1.44185E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64621E1
os_ef1alow_imon=2.95782E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03919E1
cs_ea2_imon=1.50001E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84357E1
cs_ef1a_imon=2.90093E-5
olens2_vset=9.7E-1
olens2_vmon=9.70268E-1
olens2_imon=1.18564E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11373E1
os_restr1_imon=4.27521E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15005E1
os_ea1_imon=2.42468E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63579E1
os_ef1bup_imon=3.07346E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23768E0
cs_ionrep_imon=1.1889E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9194E2
cs_nozzle_imon=1.93543E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02002E1
cs_anode1_imon=2.90205E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20415E0
olens4_imon=3.92162E-8
tplens_vset=1.4E-1
tplens_vmon=1.65345E0
tplens_imon=-2.88531E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26236E1
iondef3_imon=1.50433E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26669E1
iondef2_imon=1.55048E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02937E2
lens6_imon=2.98212E-4
ql6_vset=1.0E-1
ql6_vmon=9.50336E-2
ql6_imon=8.97062E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29356E0
ionrepsh_imon=1.71234E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3358E1
lens5b_imon=2.16945E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74695E1
cs_ef2b_imon=3.12698E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44016E0
os_ea2_imon=-5.33668E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06117E2
lens4b_imon=2.00576E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71183E1
cs_ef2a_imon=3.16029E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07764E0
os_ef2alow_imon=-2.50321E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.84533E-1
os_ef2bup_imon=-5.41493E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11198E1
os_restr2_imon=3.37549E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23039E2
cs_ionfoca_imon=6.28054E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0174E1
cs_anode2_imon=2.22502E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73327E1
iondef1_imon=1.09409E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68719E1
iondef4_imon=1.09776E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71775E1
olens3_imon=4.87473E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81784E-1
olens1_imon=7.17066E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13763E0
cs_ionaccel_imon=-1.73972E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02066E2
cs_ionfocb_imon=1.47368E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56474E1
einzel_imon=7.74772E-6
window_vset=0.0E0
window_vmon=2.45666E-1
window_imon=-9.65005E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82647E2
mask1_imon=2.39084E-4
mask2_vset=0.0E0
mask2_vmon=-1.86357E1
mask2_imon=-6.46886E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92664E3
multa_neg_imon=7.71807E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93744E3
defgrida_imon=6.4311E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50139E3
multb_neg_imon=7.13767E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.22412E0
defgridb_imon=5.92641E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33342E1
os_fil1_imon=9.41135E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07229E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61813E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30898E1
cs_fil1_imon=9.94623E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6284E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6271E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.00233E-2
os_fil2_imon=-2.64379E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.87226E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.17144E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34492E-1
cs_fil2_imon=-2.3132E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.99186E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21807E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=3.00453E-1
chamber_ion_pmon=1.20106E-7
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.82464E-1
res40_imon=-2.57057E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=149
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.85E3	0.0E0	1.47E2	4.1E1	-7.12368E-2	-8.80016E1	-9.53674E-4	-8.80009E1	3.8147E-4	4.31538E-3	9.53436E-2	2.73352E1	-3.2652E1	-3.26231E1	2.68505E1	1.20069E-7	2.51443E-3	2.51443E-3	6.32386E-3	3.00563E-1
2.0E0	9.8047E4	7.2E1	3.16E2	1.6E2	-7.10825E-2	-8.80018E1	-9.53674E-4	-8.80007E1	6.67572E-4	4.62532E-3	9.49383E-2	2.73033E1	-3.26725E1	-3.26309E1	2.68675E1	1.19749E-7	2.51632E-3	2.51632E-3	6.29665E-3	3.00966E-1
3.0E0	1.9E1	0.0E0	4.85E2	2.79E2	-7.14689E-2	-8.80016E1	-9.77516E-4	-8.80004E1	5.96046E-4	4.24385E-3	9.51529E-2	2.7324E1	-3.26815E1	-3.26579E1	2.68146E1	1.2033E-7	2.52373E-3	2.52373E-3	6.30466E-3	3.00432E-1
4.0E0	2.1519E4	1.3E1	6.55E2	3.98E2	-7.14689E-2	-8.8002E1	-9.05991E-4	-8.80006E1	6.91414E-4	4.43459E-3	9.50575E-2	2.73328E1	-3.26708E1	-3.26531E1	2.68352E1	1.198E-7	2.51417E-3	2.51417E-3	6.35059E-3	3.00966E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.13915E-2	-8.80019E1	-5.72205E-4	-8.80006E1	5.48363E-4	4.673E-3	9.50336E-2	2.73087E1	-3.26386E1	-3.26464E1	2.68448E1					
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.12368E-2	-8.80019E1	-9.53674E-4	-8.80006E1	6.91414E-4	3.83854E-3	9.50336E-2	2.73189E1	-3.26591E1	-3.26332E1	2.68412E1	1.19913E-7	2.52209E-3	2.52209E-3	6.31837E-3	3.01085E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.13143E-2	-8.80018E1	-5.96046E-4	-8.80004E1	9.29832E-4	4.33922E-3	9.47475E-2	2.73375E1	-3.26603E1	-3.26002E1	2.68215E1	1.19965E-7	2.51334E-3	2.51334E-3	6.31837E-3	2.9952E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.11597E-2	-8.80017E1	-7.62939E-4	-8.80004E1	7.39098E-4	4.31538E-3	9.50813E-2	2.7311E1	-3.26703E1	-3.26024E1	2.68304E1	1.20017E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.00824E-1
1.2E1	8.5E1	0.0E0	4.85E2	3.23E2	-7.17779E-2	-8.80019E1	-7.15256E-4	-8.80008E1	3.8147E-4	4.52995E-3	9.52959E-2	2.72901E1	-3.26422E1	-3.26362E1	2.68671E1	1.20055E-7	2.51525E-3	2.51525E-3	6.32896E-3	3.01995E-1
1.3E1	1.4E1	0.0E0	5.25E2	3.53E2	-7.19325E-2	-8.80019E1	-7.15256E-4	-8.80009E1	5.24521E-4	4.3869E-3	9.49621E-2	2.73273E1	-3.26446E1	-3.2617E1	2.68478E1	1.20278E-7	2.51116E-3	2.51116E-3	6.31288E-3	3.01871E-1
1.4E1	3.332E3	0.0E0	5.66E2	3.82E2	-7.22418E-2	-8.80017E1	-7.86781E-4	-8.8001E1	6.19888E-4	4.41074E-3	9.50098E-2	2.7346E1	-3.26909E1	-3.26458E1	2.68058E1	1.20069E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.00824E-1
1.5E1	8.5E1	0.0E0	6.06E2	4.11E2	-7.19325E-2	-8.80019E1	-7.86781E-4	-8.80003E1	5.72205E-4	4.24385E-3	9.48429E-2	2.73535E1	-3.27027E1	-3.25947E1	2.68268E1	1.19913E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.00563E-1
1.6E1	4.29E2	1.0E0	6.47E2	4.41E2	-7.27053E-2	-8.80017E1	-9.77516E-4	-8.80002E1	6.19888E-4	4.64916E-3	9.49144E-2	2.72871E1	-3.26657E1	-3.25954E1	2.6876E1	1.19851E-7	2.51847E-3	2.51847E-3	6.31817E-3	3.00453E-1
1.7E1	7.81E2	0.0E0	6.87E2	4.7E2	-7.27053E-2	-8.80021E1	-9.53674E-4	-8.80006E1	6.67572E-4	4.62532E-3	9.48906E-2	2.73399E1	-3.26561E1	-3.26172E1	2.68412E1	1.2033E-7	2.5188E-3	2.5188E-3	6.32936E-3	3.00563E-1
1.8E1	3.362E3	0.0E0	7.27E2	5.0E2	-7.21643E-2	-8.80023E1	-6.19888E-4	-8.80006E1	7.15256E-4	4.36306E-3	9.48191E-2	2.73243E1	-3.26579E1	-3.25755E1	2.68466E1	1.19965E-7	2.52209E-3	2.52209E-3	6.28552E-3	3.00041E-1
1.9E1	1.966E3	6.0E0	7.68E2	5.29E2	-7.21643E-2	-8.80022E1	-7.62939E-4	-8.80009E1	4.05312E-4	4.43459E-3	9.4986E-2	2.73069E1	-3.26467E1	-3.26478E1	2.68208E1	1.20004E-7	2.51847E-3	2.51847E-3	6.31278E-3	3.0148E-1
2.0E1	2.4564E4	1.6E1	8.08E2	5.58E2	-7.201E-2	-8.80019E1	-4.52995E-4	-8.80008E1	8.34465E-4	4.52995E-3	9.5129E-2	2.73284E1	-3.26658E1	-3.26676E1	2.6852E1	1.20004E-7	2.51954E-3	2.51954E-3	6.31817E-3	3.01223E-1
2.1E1	4.9E1	0.0E0	8.49E2	5.88E2	-7.286E-2	-8.80016E1	-3.57628E-4	-8.8001E1	4.05312E-4	4.72069E-3	9.49383E-2	2.7311E1	-3.26579E1	-3.26638E1	2.6822E1	1.19713E-7	2.51693E-3	2.51693E-3	6.30182E-3	3.00144E-1
2.2E1	1.802E3	2.0E0	8.89E2	6.17E2	-7.34782E-2	-8.8002E1	-1.19209E-4	-8.80011E1	4.05312E-4	4.17233E-3	9.48906E-2	2.72868E1	-3.26567E1	-3.26443E1	2.68279E1	1.19902E-7	2.52061E-3	2.52061E-3	6.31278E-3	3.00453E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.23189E-2	-8.80021E1	-3.57628E-4	-8.80009E1	3.33786E-4	4.50611E-3	9.50336E-2	2.73327E1	-3.26669E1	-3.26236E1	2.68719E1	1.20106E-7	2.51954E-3	2.51954E-3	6.32896E-3	3.00453E-1
