[Scan]
initial_time=2016-01-18T22:44:03
final_time=2016-01-18T22:44:23
ip_count=19
run=1024
dataset=10
scan=754
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.36328E-2
qbias_imon=-3.75982E-6
ql1_vset=
ql1_vmon=-8.80019E1
ql1_imon=-7.61032E-10
ql2_vset=
ql2_vmon=-4.05312E-4
ql2_imon=1.45774E-9
ql3_vset=
ql3_vmon=-8.80007E1
ql3_imon=-2.48104E-9
ql4_vset=
ql4_vmon=3.57628E-4
ql4_imon=1.61164E-8
mult1=-1.75427E-8
mult2=-2.57489E-9
rf_tmon=-6.66939E-3
rf_agc=3.2162E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.24385E-3
ql5_imon=5.87463E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67215E0
bslens_imon=2.40797E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19701E1
lens5a_imon=1.99713E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12481E2
lens4a_imon=2.05133E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53826E1
cs_ef1b_imon=2.73835E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04592E2
lens23_imon=1.02078E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04297E1
cs_ea1_imon=2.61033E-5
lens1_vset=-2.7E0
lens1_vmon=-2.98308E0
lens1_imon=1.4779E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64867E1
os_ef1alow_imon=2.95531E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03756E1
cs_ea2_imon=1.48054E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8437E1
cs_ef1a_imon=2.91278E-5
olens2_vset=9.7E-1
olens2_vmon=9.69863E-1
olens2_imon=1.18456E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11718E1
os_restr1_imon=4.28553E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15167E1
os_ea1_imon=2.42071E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63695E1
os_ef1bup_imon=3.08685E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23648E0
cs_ionrep_imon=1.17953E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91936E2
cs_nozzle_imon=1.93582E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01917E1
cs_anode1_imon=2.8771E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2038E0
olens4_imon=3.91515E-8
tplens_vset=1.4E-1
tplens_vmon=1.65165E0
tplens_imon=-4.21914E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26176E1
iondef3_imon=1.50469E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26549E1
iondef2_imon=1.55336E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02944E2
lens6_imon=2.97924E-4
ql6_vset=1.0E-1
ql6_vmon=9.52482E-2
ql6_imon=9.39357E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30197E0
ionrepsh_imon=1.75812E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33796E1
lens5b_imon=2.16548E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74513E1
cs_ef2b_imon=3.11641E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.42213E0
os_ea2_imon=-8.65324E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0607E2
lens4b_imon=2.00518E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71102E1
cs_ef2a_imon=3.15353E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.03173E0
os_ef2alow_imon=-2.56544E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.77001E-1
os_ef2bup_imon=-5.23959E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1155E1
os_restr2_imon=3.40256E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23067E2
cs_ionfoca_imon=6.28883E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01563E1
cs_anode2_imon=2.2529E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73267E1
iondef1_imon=1.0995E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68328E1
iondef4_imon=1.09386E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=4.86783E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81236E-1
olens1_imon=7.13401E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14636E0
cs_ionaccel_imon=-1.55994E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02041E2
cs_ionfocb_imon=1.47006E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56315E1
einzel_imon=7.54368E-6
window_vset=0.0E0
window_vmon=2.55184E-1
window_imon=-9.00411E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82653E2
mask1_imon=2.39052E-4
mask2_vset=0.0E0
mask2_vmon=-1.86362E1
mask2_imon=-3.41797E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92671E3
multa_neg_imon=7.20977E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93708E3
defgrida_imon=6.76997E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50118E3
multb_neg_imon=7.16291E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.46472E0
defgridb_imon=6.03456E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3332E1
os_fil1_imon=9.40792E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06933E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61715E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30965E1
cs_fil1_imon=9.93825E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63669E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62989E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.93784E-2
os_fil2_imon=-2.49178E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.79694E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.13534E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.39751E-1
cs_fil2_imon=-2.14339E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=4.63476E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22007E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=2.9978E-1
chamber_ion_pmon=1.20017E-7
chamber_cvt_pmon=2.52099E-3
foreline_cvt_pmon=2.52099E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.31972E-1
res40_imon=-2.64473E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=180
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.858E3	1.0E0	1.47E2	4.1E1	-7.201E-2	-8.80023E1	-4.05312E-4	-8.80007E1	4.52995E-4	4.50611E-3	9.49383E-2	2.73216E1	-3.26561E1	-3.26154E1	2.67908E1	1.19913E-7	2.52209E-3	2.52209E-3	6.32386E-3	3.01871E-1
2.0E0	9.8145E4	1.15E2	3.16E2	1.6E2	-7.21643E-2	-8.80022E1	-3.57628E-4	-8.80007E1	4.29153E-4	4.14848E-3	9.52244E-2	2.73577E1	-3.26713E1	-3.2626E1	2.68148E1	1.20055E-7	2.52169E-3	2.52169E-3	6.3074E-3	3.00453E-1
3.0E0	1.8E1	0.0E0	4.85E2	2.79E2	-7.14689E-2	-8.80021E1	-5.72205E-4	-8.80008E1	4.29153E-4	4.24385E-3	9.50813E-2	2.73198E1	-3.26644E1	-3.26272E1	2.68827E1	1.19978E-7	2.51693E-3	2.51693E-3	6.34099E-3	3.00942E-1
4.0E0	2.1117E4	1.1E1	6.55E2	3.98E2	-7.23964E-2	-8.80022E1	-4.76837E-4	-8.80006E1	2.14577E-4	4.52995E-3	9.49621E-2	2.73063E1	-3.26213E1	-3.26679E1	2.6829E1	1.20004E-7	2.52061E-3	2.52061E-3	6.32896E-3	2.98665E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.21643E-2	-8.8002E1	-6.67572E-4	-8.80009E1	4.29153E-4	4.43459E-3	9.50575E-2	2.73316E1	-3.2659E1	-3.26231E1	2.6822E1	1.19953E-7	2.51847E-3	2.51847E-3	6.31817E-3	2.98665E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.19325E-2	-8.80016E1	-5.72205E-4	-8.80007E1	2.38419E-4	4.31538E-3	9.50813E-2	2.73171E1	-3.2641E1	-3.26188E1	2.681E1	1.20017E-7	2.51225E-3	2.51225E-3	6.31837E-3	3.00041E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.14689E-2	-8.8002E1	-4.29153E-4	-8.80005E1	5.48363E-4	4.43459E-3	9.52959E-2	2.73099E1	-3.26627E1	-3.26146E1	2.6846E1	1.19851E-7	2.50989E-3	2.50989E-3	6.32356E-3	3.00453E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.20871E-2	-8.8002E1	-7.15256E-4	-8.80005E1	7.15256E-4	4.69685E-3	9.5129E-2	2.73333E1	-3.26921E1	-3.26206E1	2.6822E1	1.20174E-7	2.5188E-3	2.5188E-3	6.33486E-3	3.00302E-1
1.2E1	1.05E2	0.0E0	4.85E2	3.23E2	-7.23964E-2	-8.80019E1	-8.34465E-4	-8.80007E1	5.96046E-4	4.29153E-3	9.50813E-2	2.73149E1	-3.26444E1	-3.26144E1	2.68496E1	1.19861E-7	2.5199E-3	2.5199E-3	6.32936E-3	3.03185E-1
1.3E1	8.0E0	0.0E0	5.25E2	3.53E2	-7.30146E-2	-8.80018E1	-6.4373E-4	-8.80007E1	2.86102E-4	4.22001E-3	9.5129E-2	2.73333E1	-3.26783E1	-3.26314E1	2.68989E1	1.20084E-7	2.52473E-3	2.52473E-3	6.33538E-3	3.00144E-1
1.4E1	3.171E3	0.0E0	5.66E2	3.82E2	-7.18554E-2	-8.8002E1	-5.24521E-4	-8.80007E1	4.76837E-4	4.24385E-3	9.51767E-2	2.73225E1	-3.26753E1	-3.26194E1	2.68154E1	1.19913E-7	2.51662E-3	2.51662E-3	6.34037E-3	3.01085E-1
1.5E1	1.01E2	0.0E0	6.06E2	4.11E2	-7.26282E-2	-8.80018E1	-3.09944E-4	-8.80004E1	2.38419E-4	4.17233E-3	9.53436E-2	2.73637E1	-3.26835E1	-3.26032E1	2.68065E1	1.19705E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.01347E-1
1.6E1	4.17E2	0.0E0	6.47E2	4.41E2	-7.25507E-2	-8.80017E1	-3.09944E-4	-8.80006E1	1.19209E-4	4.05312E-3	9.53436E-2	2.73488E1	-3.26884E1	-3.25886E1	2.68144E1	1.19991E-7	2.51709E-3	2.51709E-3	6.32858E-3	3.00097E-1
1.7E1	8.43E2	1.0E0	6.87E2	4.7E2	-7.22418E-2	-8.8002E1	-6.67572E-4	-8.80007E1	1.66893E-4	4.02927E-3	9.52244E-2	2.73189E1	-3.26651E1	-3.2647E1	2.6825E1	1.19978E-7	2.51804E-3	2.51804E-3	6.29067E-3	3.0041E-1
1.8E1	3.316E3	3.0E0	7.27E2	5.0E2	-7.17007E-2	-8.80019E1	-6.91414E-4	-8.80008E1	3.57628E-4	4.64916E-3	9.50813E-2	2.73246E1	-3.26626E1	-3.26042E1	2.67827E1	1.19861E-7	2.5199E-3	2.5199E-3	6.32936E-3	3.00824E-1
1.9E1	1.894E3	1.0E0	7.68E2	5.29E2	-7.13915E-2	-8.80018E1	-4.05312E-4	-8.80008E1	1.43051E-4	4.43459E-3	9.50336E-2	2.73438E1	-3.26744E1	-3.26169E1	2.68331E1	1.20106E-7	2.51847E-3	2.51847E-3	6.32356E-3	2.9943E-1
2.0E1	2.4601E4	1.0E1	8.08E2	5.58E2	-7.23189E-2	-8.80018E1	-1.43051E-4	-8.80008E1	1.66893E-4	4.55379E-3	9.49621E-2	2.73257E1	-3.26678E1	-3.25967E1	2.68263E1	1.1988E-7	2.5199E-3	2.5199E-3	6.33341E-3	3.00989E-1
2.1E1	5.5E1	0.0E0	8.49E2	5.88E2	-7.19325E-2	-8.80019E1	-1.90735E-4	-8.80008E1	1.19209E-4	4.14848E-3	9.48429E-2	2.7311E1	-3.26685E1	-3.26484E1	2.68667E1	1.19829E-7	2.52521E-3	2.52521E-3	6.34164E-3	3.01065E-1
2.2E1	1.73E3	0.0E0	8.89E2	6.17E2	-7.22418E-2	-8.80021E1	-6.4373E-4	-8.80008E1	2.38419E-4	4.57764E-3	9.53674E-2	2.72931E1	-3.26404E1	-3.26272E1	2.68268E1	1.20055E-7	2.51417E-3	2.51417E-3	6.3074E-3	2.99686E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.36328E-2	-8.80019E1	-4.05312E-4	-8.80007E1	3.57628E-4	4.24385E-3	9.52482E-2	2.73267E1	-3.26549E1	-3.26176E1	2.68328E1	1.20017E-7	2.52099E-3	2.52099E-3	6.32386E-3	2.9978E-1
