[Scan]
initial_time=2016-01-18T22:44:31
final_time=2016-01-18T22:44:51
ip_count=19
run=1024
dataset=10
scan=755
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.31692E-2
qbias_imon=-3.81401E-6
ql1_vset=
ql1_vmon=-8.80021E1
ql1_imon=-7.57062E-10
ql2_vset=
ql2_vmon=-3.57628E-4
ql2_imon=1.46133E-9
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-2.4085E-9
ql4_vset=
ql4_vmon=5.72205E-4
ql4_imon=1.61876E-8
mult1=-1.32562E-8
mult2=-2.69067E-9
rf_tmon=-3.64724E-3
rf_agc=3.40245E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.41074E-3
ql5_imon=5.319E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68116E0
bslens_imon=2.45844E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19196E1
lens5a_imon=1.98199E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1247E2
lens4a_imon=2.05028E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5361E1
cs_ef1b_imon=2.73871E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04605E2
lens23_imon=1.02236E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0473E1
cs_ea1_imon=2.60024E-5
lens1_vset=-2.7E0
lens1_vmon=-2.99209E0
lens1_imon=1.58965E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64584E1
os_ef1alow_imon=2.94306E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03889E1
cs_ea2_imon=1.49893E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84154E1
cs_ef1a_imon=2.91675E-5
olens2_vset=9.7E-1
olens2_vmon=9.70364E-1
olens2_imon=1.17804E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1137E1
os_restr1_imon=4.27761E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15155E1
os_ea1_imon=2.41494E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.64086E1
os_ef1bup_imon=3.08361E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20523E0
cs_ionrep_imon=1.18025E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91909E2
cs_nozzle_imon=1.93597E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01665E1
cs_anode1_imon=2.89332E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20437E0
olens4_imon=3.92079E-8
tplens_vset=1.4E-1
tplens_vmon=1.6907E0
tplens_imon=-3.06556E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26338E1
iondef3_imon=1.50542E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26735E1
iondef2_imon=1.56814E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02967E2
lens6_imon=2.98241E-4
ql6_vset=1.0E-1
ql6_vmon=9.51767E-2
ql6_imon=8.93021E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29656E0
ionrepsh_imon=1.71883E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33513E1
lens5b_imon=2.1644E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74669E1
cs_ef2b_imon=3.10632E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.42994E0
os_ea2_imon=-7.8241E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06097E2
lens4b_imon=2.00569E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71114E1
cs_ef2a_imon=3.15569E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.01912E0
os_ef2alow_imon=-2.71681E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.92619E-1
os_ef2bup_imon=-5.21796E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11418E1
os_restr2_imon=3.37517E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23053E2
cs_ionfoca_imon=6.27513E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01485E1
cs_anode2_imon=2.24245E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73111E1
iondef1_imon=1.11788E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68388E1
iondef4_imon=1.10612E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=4.72491E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81784E-1
olens1_imon=7.14803E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.19321E0
cs_ionaccel_imon=-1.74014E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02074E2
cs_ionfocb_imon=1.4746E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56243E1
einzel_imon=7.62297E-6
window_vset=0.0E0
window_vmon=2.65395E-1
window_imon=-7.70669E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82627E2
mask1_imon=2.38879E-4
mask2_vset=0.0E0
mask2_vmon=-1.86638E1
mask2_imon=-6.22906E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92651E3
multa_neg_imon=7.3792E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93708E3
defgrida_imon=6.42029E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50118E3
multb_neg_imon=7.13407E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3745E0
defgridb_imon=6.12468E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33354E1
os_fil1_imon=9.41477E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06518E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6165E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30939E1
cs_fil1_imon=9.9296E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63123E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62909E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.10551E-2
os_fil2_imon=-2.72603E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.97113E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.22171E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35349E-1
cs_fil2_imon=-2.68399E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.05853E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21973E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.01223E-1
chamber_ion_pmon=1.20004E-7
chamber_cvt_pmon=2.51203E-3
foreline_cvt_pmon=2.51203E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.39781E-1
res40_imon=-2.41408E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=157
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.977E3	0.0E0	1.47E2	4.1E1	-7.27828E-2	-8.80024E1	-5.72205E-4	-8.8001E1	3.57628E-4	4.36306E-3	9.52482E-2	2.73364E1	-3.26573E1	-3.26189E1	2.68274E1	1.20017E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.01085E-1
2.0E0	9.8103E4	1.03E2	3.16E2	1.6E2	-7.32464E-2	-8.80021E1	-4.76837E-4	-8.80008E1	5.24521E-4	4.64916E-3	9.50336E-2	2.73388E1	-3.26762E1	-3.26015E1	2.68412E1	1.2026E-7	2.5131E-3	2.5131E-3	6.29665E-3	2.99941E-1
3.0E0	1.1E1	0.0E0	4.85E2	2.79E2	-7.25507E-2	-8.80022E1	-9.53674E-5	-8.8001E1	4.76837E-4	4.69685E-3	9.51767E-2	2.73269E1	-3.26496E1	-3.26296E1	2.6822E1	1.19925E-7	2.51693E-3	2.51693E-3	6.3074E-3	2.9829E-1
4.0E0	2.1652E4	4.0E0	6.55E2	3.98E2	-7.30918E-2	-8.80021E1	-3.09944E-4	-8.80007E1	7.39098E-4	4.24385E-3	9.50336E-2	2.73087E1	-3.26753E1	-3.26236E1	2.68454E1	1.198E-7	2.51954E-3	2.51954E-3	6.31278E-3	2.98156E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.286E-2	-8.80023E1	-3.33786E-4	-8.80005E1	5.48363E-4	4.88758E-3	9.4986E-2	2.7321E1	-3.26555E1	-3.26048E1	2.6847E1	1.20174E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.99E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.23964E-2	-8.80018E1	-6.91414E-4	-8.80005E1	6.4373E-4	4.22001E-3	9.4986E-2	2.73311E1	-3.26785E1	-3.26248E1	2.68268E1	1.20004E-7	2.51739E-3	2.51739E-3	6.34518E-3	3.01223E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.30918E-2	-8.8002E1	-3.8147E-4	-8.80006E1	5.96046E-4	5.03063E-3	9.52959E-2	2.73112E1	-3.26615E1	-3.26107E1	2.68298E1	1.20106E-7	2.5131E-3	2.5131E-3	6.32356E-3	3.02769E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.17779E-2	-8.8002E1	-6.4373E-4	-8.8001E1	4.52995E-4	4.8399E-3	9.53197E-2	2.72898E1	-3.26573E1	-3.26248E1	2.6843E1	1.20297E-7	2.51915E-3	2.51915E-3	6.3074E-3	2.99083E-1
1.2E1	8.9E1	0.0E0	4.85E2	3.23E2	-7.20871E-2	-8.80018E1	-4.29153E-4	-8.80005E1	6.67572E-4	4.43459E-3	9.52244E-2	2.73111E1	-3.26579E1	-3.26236E1	2.6792E1	1.19902E-7	2.51954E-3	2.51954E-3	6.32356E-3	2.98665E-1
1.3E1	9.0E0	0.0E0	5.25E2	3.53E2	-7.20871E-2	-8.80018E1	-2.86102E-4	-8.80003E1	7.86781E-4	4.24385E-3	9.51052E-2	2.73357E1	-3.26783E1	-3.26759E1	2.68435E1	1.19757E-7	2.5199E-3	2.5199E-3	6.30192E-3	2.98481E-1
1.4E1	3.191E3	1.0E0	5.66E2	3.82E2	-7.21643E-2	-8.80019E1	-4.05312E-4	-8.80005E1	7.86781E-4	4.33922E-3	9.50813E-2	2.73604E1	-3.26561E1	-3.25996E1	2.684E1	1.20069E-7	2.51771E-3	2.51771E-3	6.29645E-3	2.98481E-1
1.5E1	8.9E1	0.0E0	6.06E2	4.11E2	-7.27828E-2	-8.80021E1	2.38419E-5	-8.80007E1	7.39098E-4	4.43459E-3	9.50813E-2	2.73219E1	-3.2644E1	-3.2629E1	2.67854E1	1.20069E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.00302E-1
1.6E1	4.16E2	0.0E0	6.47E2	4.41E2	-7.17007E-2	-8.80025E1	4.76837E-5	-8.80007E1	5.72205E-4	4.72069E-3	9.51529E-2	2.73381E1	-3.26518E1	-3.26681E1	2.68413E1	1.19697E-7	2.52061E-3	2.52061E-3	6.30202E-3	3.00197E-1
1.7E1	8.19E2	0.0E0	6.87E2	4.7E2	-7.13915E-2	-8.80024E1	-2.6226E-4	-8.80007E1	6.4373E-4	4.8399E-3	9.50575E-2	2.73135E1	-3.26194E1	-3.26873E1	2.68041E1	1.20297E-7	2.51915E-3	2.51915E-3	6.31299E-3	3.0201E-1
1.8E1	3.384E3	5.0E0	7.27E2	5.0E2	-7.15461E-2	-8.80021E1	-3.8147E-4	-8.80006E1	5.72205E-4	4.45843E-3	9.51767E-2	2.72962E1	-3.26478E1	-3.26148E1	2.68141E1	1.19809E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.00824E-1
1.9E1	1.991E3	1.0E0	7.68E2	5.29E2	-7.07733E-2	-8.80024E1	-2.14577E-4	-8.80007E1	5.48363E-4	4.81606E-3	9.48191E-2	2.73159E1	-3.26603E1	-3.25894E1	2.68502E1	1.20209E-7	2.51417E-3	2.51417E-3	6.29665E-3	3.00197E-1
2.0E1	2.434E4	1.6E1	8.08E2	5.58E2	-7.13915E-2	-8.80024E1	-7.15256E-5	-8.80006E1	6.4373E-4	4.31538E-3	9.47475E-2	2.73255E1	-3.26386E1	-3.25978E1	2.68851E1	1.20122E-7	2.51007E-3	2.51007E-3	6.31288E-3	2.99E-1
2.1E1	6.0E1	0.0E0	8.49E2	5.88E2	-7.12368E-2	-8.80026E1	-3.09944E-4	-8.80008E1	4.29153E-4	4.36306E-3	9.50813E-2	2.73327E1	-3.26765E1	-3.26206E1	2.6822E1	1.19809E-7	2.52209E-3	2.52209E-3	6.29098E-3	3.00824E-1
2.2E1	1.79E3	3.0E0	8.89E2	6.17E2	-7.22418E-2	-8.80023E1	-1.90735E-4	-8.80007E1	5.48363E-4	4.43459E-3	9.51052E-2	2.73753E1	-3.26649E1	-3.26349E1	2.68629E1	1.19965E-7	2.52099E-3	2.52099E-3	6.28552E-3	3.01871E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.31692E-2	-8.80021E1	-3.57628E-4	-8.80004E1	5.72205E-4	4.41074E-3	9.51767E-2	2.73111E1	-3.26735E1	-3.26338E1	2.68388E1	1.20004E-7	2.51203E-3	2.51203E-3	6.3074E-3	3.01223E-1
