[Scan]
initial_time=2016-01-18T22:45:26
final_time=2016-01-18T22:45:46
ip_count=19
run=1024
dataset=10
scan=757
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.23964E-2
qbias_imon=-3.85041E-6
ql1_vset=
ql1_vmon=-8.80021E1
ql1_imon=-7.42054E-10
ql2_vset=
ql2_vmon=-6.67572E-4
ql2_imon=1.37519E-9
ql3_vset=
ql3_vmon=-8.80008E1
ql3_imon=-2.28388E-9
ql4_vset=
ql4_vmon=3.8147E-4
ql4_imon=1.61357E-8
mult1=-2.38154E-8
mult2=-2.443E-9
rf_tmon=-7.53567E-3
rf_agc=3.04894E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.673E-3
ql5_imon=5.53036E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64675E0
bslens_imon=2.47601E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19913E1
lens5a_imon=2.00315E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1249E2
lens4a_imon=2.04874E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53847E1
cs_ef1b_imon=2.72535E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04633E2
lens23_imon=1.02054E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04669E1
cs_ea1_imon=2.59812E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02121E0
lens1_imon=1.60178E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64562E1
os_ef1alow_imon=2.97592E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03696E1
cs_ea2_imon=1.47188E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8433E1
cs_ef1a_imon=2.89633E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=1.17817E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1143E1
os_restr1_imon=4.28053E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15152E1
os_ea1_imon=2.43354E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63653E1
os_ef1bup_imon=3.06349E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24856E0
cs_ionrep_imon=1.18802E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9197E2
cs_nozzle_imon=1.93537E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0196E1
cs_anode1_imon=2.90189E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20449E0
olens4_imon=3.9032E-8
tplens_vset=1.4E-1
tplens_vmon=1.6668E0
tplens_imon=-2.74111E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26036E1
iondef3_imon=1.48923E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26626E1
iondef2_imon=1.5763E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02917E2
lens6_imon=2.98087E-4
ql6_vset=1.0E-1
ql6_vmon=9.52721E-2
ql6_imon=9.25648E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29103E0
ionrepsh_imon=1.73734E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34E1
lens5b_imon=2.17941E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74744E1
cs_ef2b_imon=3.11771E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.40429E0
os_ea2_imon=-6.81143E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06058E2
lens4b_imon=2.00566E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71072E1
cs_ef2a_imon=3.15976E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05572E0
os_ef2alow_imon=-2.50508E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.73483E-1
os_ef2bup_imon=-5.2679E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11106E1
os_restr2_imon=3.37731E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23033E2
cs_ionfoca_imon=6.28265E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01919E1
cs_anode2_imon=2.23673E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73252E1
iondef1_imon=1.10874E-5
iondef4_vset=2.691E1
iondef4_vmon=2.681E1
iondef4_imon=1.09268E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=4.7863E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81569E-1
olens1_imon=7.12339E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13767E0
cs_ionaccel_imon=-1.85868E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02094E2
cs_ionfocb_imon=1.47449E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5615E1
einzel_imon=7.60096E-6
window_vset=0.0E0
window_vmon=2.51859E-1
window_imon=-8.02203E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82656E2
mask1_imon=2.39025E-4
mask2_vset=0.0E0
mask2_vmon=-1.86159E1
mask2_imon=-7.605E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92627E3
multa_neg_imon=7.53029E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93723E3
defgrida_imon=6.63835E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50116E3
multb_neg_imon=7.1905E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42623E0
defgridb_imon=6.1216E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3335E1
os_fil1_imon=9.41615E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07393E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61767E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30912E1
cs_fil1_imon=9.93732E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62806E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62581E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.93972E-2
os_fil2_imon=-2.70394E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.91815E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.19968E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35645E-1
cs_fil2_imon=-2.47225E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.10325E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21891E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=3.00563E-1
chamber_ion_pmon=1.19913E-7
chamber_cvt_pmon=2.50571E-3
foreline_cvt_pmon=2.50571E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.19241E-1
res40_imon=-2.34174E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=220
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.914E3	1.0E0	1.47E2	4.1E1	-7.22418E-2	-8.80021E1	-5.72205E-4	-8.80005E1	4.52995E-4	4.57764E-3	9.46999E-2	2.72987E1	-3.27007E1	-3.26243E1	2.69235E1	1.20004E-7	2.51847E-3	2.51847E-3	6.31817E-3	2.9841E-1
2.0E0	9.729E4	1.06E2	3.16E2	1.6E2	-7.27828E-2	-8.80021E1	-9.53674E-5	-8.80003E1	6.19888E-4	4.33922E-3	9.50098E-2	2.73057E1	-3.26647E1	-3.26173E1	2.68419E1	1.19841E-7	2.51498E-3	2.51498E-3	6.30212E-3	2.99093E-1
3.0E0	2.1E1	0.0E0	4.85E2	2.79E2	-7.30918E-2	-8.80019E1	-2.86102E-4	-8.80007E1	2.86102E-4	4.50611E-3	9.47714E-2	2.73375E1	-3.26756E1	-3.26431E1	2.68298E1	1.19883E-7	2.51725E-3	2.51725E-3	6.3245E-3	3.00522E-1
4.0E0	2.1515E4	1.4E1	6.55E2	3.98E2	-7.23964E-2	-8.80018E1	-4.29153E-4	-8.80005E1	6.19888E-4	4.64916E-3	9.47237E-2	2.73405E1	-3.26644E1	-3.26248E1	2.68719E1	1.20158E-7	2.51739E-3	2.51739E-3	6.31278E-3	3.00966E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.25507E-2	-8.80018E1	-1.43051E-4	-8.80007E1	5.00679E-4	4.22001E-3	9.48429E-2	2.73309E1	-3.26567E1	-3.26452E1	2.68268E1	1.19891E-7	2.52025E-3	2.52025E-3	6.31269E-3	3.00348E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.35556E-2	-8.8002E1	-7.15256E-5	-8.80005E1	7.86781E-4	4.76837E-3	9.50575E-2	2.73291E1	-3.26488E1	-3.26116E1	2.68605E1	1.20191E-7	2.51693E-3	2.51693E-3	6.3074E-3	2.98554E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.42513E-2	-8.80021E1	-2.6226E-4	-8.80006E1	8.82149E-4	4.64916E-3	9.49383E-2	2.73273E1	-3.26561E1	-3.26032E1	2.68202E1	1.20106E-7	2.52276E-3	2.52276E-3	6.29665E-3	2.9841E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.39421E-2	-8.80019E1	-1.43051E-4	-8.80006E1	8.58307E-4	4.33922E-3	9.49144E-2	2.7344E1	-3.26679E1	-3.26349E1	2.68731E1	1.19913E-7	2.52209E-3	2.52209E-3	6.31288E-3	2.98481E-1
1.2E1	8.5E1	0.0E0	4.85E2	3.23E2	-7.37103E-2	-8.8002E1	-5.72205E-4	-8.80006E1	4.05312E-4	4.52995E-3	9.48906E-2	2.7346E1	-3.26591E1	-3.26002E1	2.68204E1	1.20174E-7	2.52538E-3	2.52538E-3	6.31288E-3	2.97963E-1
1.3E1	1.5E1	0.0E0	5.25E2	3.53E2	-7.23964E-2	-8.80018E1	-4.05312E-4	-8.80008E1	4.29153E-4	4.86374E-3	9.53674E-2	2.73039E1	-3.2641E1	-3.26549E1	2.67884E1	1.19851E-7	2.51954E-3	2.51954E-3	6.31817E-3	3.00197E-1
1.4E1	3.234E3	0.0E0	5.66E2	3.82E2	-7.32464E-2	-8.8002E1	-5.96046E-4	-8.80007E1	5.24521E-4	4.26769E-3	9.4986E-2	2.73183E1	-3.26609E1	-3.26338E1	2.68791E1	1.19809E-7	2.51662E-3	2.51662E-3	6.30192E-3	3.01085E-1
1.5E1	8.8E1	2.0E0	6.06E2	4.11E2	-7.29374E-2	-8.80021E1	-6.67572E-4	-8.80006E1	4.76837E-4	4.57764E-3	9.47237E-2	2.73405E1	-3.26543E1	-3.26296E1	2.68486E1	1.19653E-7	2.51771E-3	2.51771E-3	6.29098E-3	3.00041E-1
1.6E1	4.01E2	1.0E0	6.47E2	4.41E2	-7.29374E-2	-8.8002E1	-5.96046E-4	-8.80006E1	3.8147E-4	4.95911E-3	9.48429E-2	2.73346E1	-3.26667E1	-3.25959E1	2.68512E1	1.19913E-7	2.51552E-3	2.51552E-3	6.30192E-3	2.97963E-1
1.7E1	8.06E2	1.0E0	6.87E2	4.7E2	-7.35556E-2	-8.80021E1	-5.96046E-4	-8.80004E1	4.29153E-4	4.673E-3	9.50098E-2	2.73249E1	-3.26645E1	-3.26314E1	2.68214E1	1.19913E-7	2.50789E-3	2.50789E-3	6.31288E-3	3.00041E-1
1.8E1	3.279E3	2.0E0	7.27E2	5.0E2	-7.31692E-2	-8.80019E1	-4.52995E-4	-8.80007E1	5.48363E-4	4.45843E-3	9.53436E-2	2.73273E1	-3.26789E1	-3.2623E1	2.67469E1	1.20435E-7	2.51116E-3	2.51116E-3	6.3074E-3	2.97963E-1
1.9E1	1.882E3	0.0E0	7.68E2	5.29E2	-7.24736E-2	-8.8002E1	-4.76837E-4	-8.80007E1	3.8147E-4	4.3869E-3	9.48906E-2	2.73219E1	-3.26597E1	-3.25966E1	2.68797E1	1.20226E-7	2.52428E-3	2.52428E-3	6.3074E-3	2.97187E-1
2.0E1	2.4634E4	3.0E1	8.08E2	5.58E2	-7.27053E-2	-8.80018E1	-3.57628E-4	-8.80006E1	2.14577E-4	4.36306E-3	9.50336E-2	2.73219E1	-3.2638E1	-3.2611E1	2.6801E1	1.20004E-7	2.5131E-3	2.5131E-3	6.31817E-3	2.9841E-1
2.1E1	4.6E1	0.0E0	8.49E2	5.88E2	-7.32464E-2	-8.80023E1	-1.43051E-4	-8.80009E1	6.4373E-4	4.24385E-3	9.48429E-2	2.73198E1	-3.26703E1	-3.25971E1	2.68129E1	1.19819E-7	2.51915E-3	2.51915E-3	6.32978E-3	2.98554E-1
2.2E1	1.677E3	1.0E0	8.89E2	6.17E2	-7.30918E-2	-8.80019E1	-3.8147E-4	-8.80005E1	5.48363E-4	4.55379E-3	9.48429E-2	2.73255E1	-3.26735E1	-3.26482E1	2.68017E1	1.19941E-7	2.51182E-3	2.51182E-3	6.3445E-3	2.99594E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.23964E-2	-8.80021E1	-6.67572E-4	-8.80008E1	3.8147E-4	4.673E-3	9.52721E-2	2.73252E1	-3.26626E1	-3.26036E1	2.681E1	1.19913E-7	2.50571E-3	2.50571E-3	6.32386E-3	3.00563E-1
