[Scan]
initial_time=2016-01-18T22:47:16
final_time=2016-01-18T22:47:36
ip_count=19
run=1024
dataset=10
scan=761
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.30146E-2
qbias_imon=-3.86591E-6
ql1_vset=
ql1_vmon=-8.80021E1
ql1_imon=-7.31337E-10
ql2_vset=
ql2_vmon=-7.15256E-4
ql2_imon=1.46255E-9
ql3_vset=
ql3_vmon=-8.80006E1
ql3_imon=-2.34549E-9
ql4_vset=
ql4_vmon=6.91414E-4
ql4_imon=1.61389E-8
mult1=-1.72768E-8
mult2=-2.75422E-9
rf_tmon=-5.19376E-3
rf_agc=3.35645E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.29153E-3
ql5_imon=5.64945E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65324E0
bslens_imon=2.25303E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.196E1
lens5a_imon=1.99855E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12472E2
lens4a_imon=2.05104E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54049E1
cs_ef1b_imon=2.73979E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04644E2
lens23_imon=1.02266E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04481E1
cs_ea1_imon=2.58927E-5
lens1_vset=-2.7E0
lens1_vmon=-2.96871E0
lens1_imon=1.52037E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64777E1
os_ef1alow_imon=2.96612E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03637E1
cs_ea2_imon=1.47471E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84334E1
cs_ef1a_imon=2.89945E-5
olens2_vset=9.7E-1
olens2_vmon=9.69315E-1
olens2_imon=1.17708E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11526E1
os_restr1_imon=4.27761E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15081E1
os_ea1_imon=2.42009E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63587E1
os_ef1bup_imon=3.06559E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20314E0
cs_ionrep_imon=1.16218E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91925E2
cs_nozzle_imon=1.93654E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01797E1
cs_anode1_imon=2.88395E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20456E0
olens4_imon=3.90836E-8
tplens_vset=1.4E-1
tplens_vmon=1.68509E0
tplens_imon=-3.76754E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25949E1
iondef3_imon=1.49241E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26799E1
iondef2_imon=1.55577E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0293E2
lens6_imon=2.98041E-4
ql6_vset=1.0E-1
ql6_vmon=9.50575E-2
ql6_imon=9.32491E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29162E0
ionrepsh_imon=1.69911E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33551E1
lens5b_imon=2.1557E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74585E1
cs_ef2b_imon=3.12686E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.445E0
os_ea2_imon=-6.66986E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06105E2
lens4b_imon=2.0063E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71516E1
cs_ef2a_imon=3.16218E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04255E0
os_ef2alow_imon=-2.5222E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.74599E-1
os_ef2bup_imon=-5.29725E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1134E1
os_restr2_imon=3.36977E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2306E2
cs_ionfoca_imon=6.28017E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01797E1
cs_anode2_imon=2.2338E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73531E1
iondef1_imon=1.11157E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68341E1
iondef4_imon=1.08521E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=4.81648E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81379E-1
olens1_imon=7.09889E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14936E0
cs_ionaccel_imon=-1.78338E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0207E2
cs_ionfocb_imon=1.47435E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56459E1
einzel_imon=7.74911E-6
window_vset=0.0E0
window_vmon=2.44973E-1
window_imon=-8.93203E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82658E2
mask1_imon=2.39181E-4
mask2_vset=0.0E0
mask2_vmon=-1.86266E1
mask2_imon=-6.2651E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92636E3
multa_neg_imon=7.6577E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93703E3
defgrida_imon=6.65959E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50133E3
multb_neg_imon=7.23297E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.37307E0
defgridb_imon=6.09682E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3337E1
os_fil1_imon=9.41273E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06464E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61685E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30936E1
cs_fil1_imon=9.95218E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6218E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62419E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.04102E-2
os_fil2_imon=-2.76207E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.88704E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.19208E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33407E-1
cs_fil2_imon=-2.37164E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.80044E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2185E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31744E-3
inlet_lpb_pmon=3.01249E-1
chamber_ion_pmon=1.19765E-7
chamber_cvt_pmon=2.51823E-3
foreline_cvt_pmon=2.51823E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.58091E-1
res40_imon=-2.45732E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=154
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.846E3	0.0E0	1.47E2	4.1E1	-7.29374E-2	-8.80023E1	-7.62939E-4	-8.80004E1	9.77516E-4	4.3869E-3	9.47714E-2	2.73159E1	-3.26717E1	-3.2629E1	2.68499E1	1.19861E-7	2.51334E-3	2.51334E-3	6.32386E-3	3.02922E-1
2.0E0	9.7897E4	1.21E2	3.16E2	1.6E2	-7.30918E-2	-8.80019E1	-8.10623E-4	-8.80006E1	5.72205E-4	4.45843E-3	9.49621E-2	2.73249E1	-3.26609E1	-3.26224E1	2.68126E1	1.2026E-7	2.52815E-3	2.52815E-3	6.32356E-3	3.00197E-1
3.0E0	1.7E1	0.0E0	4.85E2	2.79E2	-7.35556E-2	-8.80018E1	-6.91414E-4	-8.80002E1	7.62939E-4	4.41074E-3	9.52005E-2	2.73316E1	-3.26354E1	-3.26408E1	2.68424E1	1.19766E-7	2.51359E-3	2.51359E-3	6.31858E-3	3.00144E-1
4.0E0	2.1464E4	1.5E1	6.55E2	3.98E2	-7.44831E-2	-8.80018E1	-5.96046E-4	-8.80004E1	9.05991E-4	4.72069E-3	9.5439E-2	2.73405E1	-3.26458E1	-3.26242E1	2.68448E1	1.19991E-7	2.51393E-3	2.51393E-3	6.31798E-3	2.98342E-1
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-7.37103E-2	-8.80019E1	-6.91414E-4	-8.80003E1	3.8147E-4	4.57764E-3	9.5129E-2	2.73189E1	-3.26663E1	-3.26074E1	2.68082E1	1.19965E-7	2.52099E-3	2.52099E-3	6.32936E-3	2.98222E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.37874E-2	-8.80017E1	-1.66893E-4	-8.80005E1	4.05312E-4	4.8399E-3	9.51529E-2	2.73003E1	-3.26603E1	-3.26356E1	2.68376E1	1.20174E-7	2.51443E-3	2.51443E-3	6.32936E-3	3.00302E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.3401E-2	-8.80019E1	-6.91414E-4	-8.80005E1	5.24521E-4	4.64916E-3	9.51767E-2	2.73111E1	-3.26404E1	-3.26146E1	2.6843E1	1.20122E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.01347E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.38649E-2	-8.80021E1	-5.00679E-4	-8.80007E1	5.24521E-4	4.3869E-3	9.5439E-2	2.7298E1	-3.26172E1	-3.259E1	2.68364E1	1.19913E-7	2.52538E-3	2.52538E-3	6.3074E-3	2.9952E-1
1.2E1	8.0E1	0.0E0	4.85E2	3.23E2	-7.35556E-2	-8.80021E1	-5.48363E-4	-8.80007E1	1.43051E-4	4.74453E-3	9.52482E-2	2.73285E1	-3.26687E1	-3.26146E1	2.6786E1	1.19861E-7	2.52209E-3	2.52209E-3	6.3074E-3	3.00041E-1
1.3E1	1.3E1	0.0E0	5.25E2	3.53E2	-7.25507E-2	-8.80018E1	-4.76837E-4	-8.80007E1	4.52995E-4	4.60148E-3	9.5439E-2	2.73528E1	-3.27001E1	-3.26009E1	2.68454E1	1.20017E-7	2.5188E-3	2.5188E-3	6.29645E-3	2.9874E-1
1.4E1	3.156E3	1.0E0	5.66E2	3.82E2	-7.29374E-2	-8.80021E1	-3.33786E-4	-8.80006E1	6.91414E-4	4.69685E-3	9.53436E-2	2.73252E1	-3.26738E1	-3.26166E1	2.69271E1	1.20174E-7	2.51225E-3	2.51225E-3	6.33486E-3	2.9874E-1
1.5E1	9.8E1	0.0E0	6.06E2	4.11E2	-7.27828E-2	-8.8002E1	-3.8147E-4	-8.80004E1	2.6226E-4	4.50611E-3	9.52721E-2	2.73586E1	-3.26645E1	-3.26068E1	2.68094E1	1.19913E-7	2.5199E-3	2.5199E-3	6.31288E-3	2.9978E-1
1.6E1	3.99E2	0.0E0	6.47E2	4.41E2	-7.37103E-2	-8.80023E1	-4.76837E-4	-8.80006E1	5.00679E-4	4.673E-3	9.55343E-2	2.73228E1	-3.2637E1	-3.26407E1	2.68346E1	1.19861E-7	2.5188E-3	2.5188E-3	6.30192E-3	2.99E-1
1.7E1	8.01E2	0.0E0	6.87E2	4.7E2	-7.30918E-2	-8.8002E1	-5.72205E-4	-8.80006E1	2.6226E-4	4.45843E-3	9.53913E-2	2.73075E1	-3.26747E1	-3.26332E1	2.68328E1	1.20069E-7	2.51007E-3	2.51007E-3	6.33486E-3	3.00563E-1
1.8E1	3.464E3	2.0E0	7.27E2	5.0E2	-7.27053E-2	-8.80019E1	-6.19888E-4	-8.80007E1	7.15256E-5	4.05312E-3	9.55105E-2	2.73285E1	-3.26609E1	-3.26188E1	2.67884E1	1.20084E-7	2.51693E-3	2.51693E-3	6.3074E-3	3.0201E-1
1.9E1	1.933E3	4.0E0	7.68E2	5.29E2	-7.24736E-2	-8.80021E1	-6.91414E-4	-8.80007E1	3.33786E-4	4.29153E-3	9.53674E-2	2.73075E1	-3.26777E1	-3.26188E1	2.68184E1	1.19697E-7	2.51417E-3	2.51417E-3	6.32356E-3	2.99941E-1
2.0E1	2.454E4	1.0E1	8.08E2	5.58E2	-7.286E-2	-8.80022E1	-6.67572E-4	-8.80008E1	2.14577E-4	4.74453E-3	9.54151E-2	2.73125E1	-3.26613E1	-3.25975E1	2.68204E1	1.20174E-7	2.52318E-3	2.52318E-3	6.30192E-3	2.9926E-1
2.1E1	4.4E1	0.0E0	8.49E2	5.88E2	-7.36328E-2	-8.80023E1	-3.33786E-4	-8.80005E1	5.48363E-4	4.52995E-3	9.51052E-2	2.73412E1	-3.26548E1	-3.26107E1	2.68376E1	1.20042E-7	2.51709E-3	2.51709E-3	6.32328E-3	2.99093E-1
2.2E1	1.723E3	0.0E0	8.89E2	6.17E2	-7.29374E-2	-8.80023E1	-5.24521E-4	-8.80007E1	6.67572E-4	4.45843E-3	9.51529E-2	2.73208E1	-3.26249E1	-3.26461E1	2.68339E1	1.19713E-7	2.51915E-3	2.51915E-3	6.31299E-3	2.99348E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.30146E-2	-8.80021E1	-7.15256E-4	-8.80006E1	6.91414E-4	4.29153E-3	9.50575E-2	2.73531E1	-3.26799E1	-3.25949E1	2.68341E1	1.19765E-7	2.51823E-3	2.51823E-3	6.31744E-3	3.01249E-1
