[Scan]
initial_time=2016-01-18T22:47:43
final_time=2016-01-18T22:48:03
ip_count=19
run=1024
dataset=10
scan=762
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.25507E-2
qbias_imon=-3.82358E-6
ql1_vset=
ql1_vmon=-8.8002E1
ql1_imon=-7.17831E-10
ql2_vset=
ql2_vmon=-5.48363E-4
ql2_imon=1.37236E-9
ql3_vset=
ql3_vmon=-8.80008E1
ql3_imon=-2.24645E-9
ql4_vset=
ql4_vmon=5.72205E-4
ql4_imon=1.6183E-8
mult1=-1.5255E-8
mult2=-2.71262E-9
rf_tmon=-4.68666E-3
rf_agc=3.26366E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.57764E-3
ql5_imon=5.3283E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64931E0
bslens_imon=2.38634E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1964E1
lens5a_imon=1.98596E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12489E2
lens4a_imon=2.05071E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53923E1
cs_ef1b_imon=2.72898E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04673E2
lens23_imon=1.02179E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04531E1
cs_ea1_imon=2.57428E-5
lens1_vset=-2.7E0
lens1_vmon=-2.97406E0
lens1_imon=1.75548E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64698E1
os_ef1alow_imon=2.95891E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03762E1
cs_ea2_imon=1.49063E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8428E1
cs_ef1a_imon=2.89476E-5
olens2_vset=9.7E-1
olens2_vmon=9.70125E-1
olens2_imon=1.17777E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11514E1
os_restr1_imon=4.27797E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15576E1
os_ea1_imon=2.4391E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63425E1
os_ef1bup_imon=3.07604E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22146E0
cs_ionrep_imon=1.15537E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9192E2
cs_nozzle_imon=1.93629E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01905E1
cs_anode1_imon=2.90053E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20449E0
olens4_imon=3.91564E-8
tplens_vset=1.4E-1
tplens_vmon=1.63482E0
tplens_imon=-2.59691E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2626E1
iondef3_imon=1.49388E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26368E1
iondef2_imon=1.56598E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02937E2
lens6_imon=2.9809E-4
ql6_vset=1.0E-1
ql6_vmon=9.49383E-2
ql6_imon=9.10175E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26952E0
ionrepsh_imon=1.73036E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33682E1
lens5b_imon=2.16945E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74669E1
cs_ef2b_imon=3.11929E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.41853E0
os_ea2_imon=-6.92286E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06081E2
lens4b_imon=2.00493E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71126E1
cs_ef2a_imon=3.16002E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05816E0
os_ef2alow_imon=-2.59428E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.89615E-1
os_ef2bup_imon=-5.27202E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11298E1
os_restr2_imon=3.37013E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.22997E2
cs_ionfoca_imon=6.28306E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01929E1
cs_anode2_imon=2.22371E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73249E1
iondef1_imon=1.09878E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68731E1
iondef4_imon=1.10071E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=4.73344E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81402E-1
olens1_imon=7.11713E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14155E0
cs_ionaccel_imon=-1.83023E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02072E2
cs_ionfocb_imon=1.47403E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56369E1
einzel_imon=7.6482E-6
window_vset=0.0E0
window_vmon=2.58188E-1
window_imon=-9.36451E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82639E2
mask1_imon=2.39239E-4
mask2_vset=0.0E0
mask2_vmon=-1.86308E1
mask2_imon=-5.9047E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92647E3
multa_neg_imon=7.47654E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93728E3
defgrida_imon=6.5753E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50137E3
multb_neg_imon=7.1593E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42863E0
defgridb_imon=6.26527E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33331E1
os_fil1_imon=9.40985E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06927E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61504E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30897E1
cs_fil1_imon=9.94347E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62528E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62781E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.05392E-2
os_fil2_imon=-2.58188E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.845E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.37123E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35996E-1
cs_fil2_imon=-2.63593E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.17226E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21875E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31269E-3
inlet_lpb_pmon=3.006E-1
chamber_ion_pmon=1.19941E-7
chamber_cvt_pmon=2.51709E-3
foreline_cvt_pmon=2.51709E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.05833E-1
res40_imon=-2.42129E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=151
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.932E3	2.0E0	1.47E2	4.1E1	-7.22418E-2	-8.80021E1	-3.57628E-4	-8.80004E1	6.19888E-4	4.76837E-3	9.47475E-2	2.73399E1	-3.26573E1	-3.26313E1	2.68395E1	1.20137E-7	2.5147E-3	2.5147E-3	6.32418E-3	3.00676E-1
2.0E0	9.7587E4	9.4E1	3.16E2	1.6E2	-7.27828E-2	-8.8002E1	-6.19888E-4	-8.80005E1	5.48363E-4	4.673E-3	9.49383E-2	2.73273E1	-3.26933E1	-3.26302E1	2.68112E1	1.20192E-7	2.51498E-3	2.51498E-3	6.3074E-3	3.01104E-1
3.0E0	2.0E1	0.0E0	4.85E2	2.79E2	-7.17779E-2	-8.80024E1	-6.91414E-4	-8.80004E1	6.91414E-4	4.64916E-3	9.52244E-2	2.7321E1	-3.26543E1	-3.26331E1	2.68376E1	1.20403E-7	2.5147E-3	2.5147E-3	6.30182E-3	3.00676E-1
4.0E0	2.1439E4	1.1E1	6.55E2	3.98E2	-7.17779E-2	-8.80022E1	-6.4373E-4	-8.80002E1	7.15256E-4	4.55379E-3	9.51052E-2	2.73387E1	-3.26831E1	-3.26218E1	2.67914E1	1.198E-7	2.51739E-3	2.51739E-3	6.31278E-3	2.99175E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.29374E-2	-8.80023E1	-7.62939E-4	-8.80006E1	4.29153E-4	4.57764E-3	9.49144E-2	2.73285E1	-3.26476E1	-3.26158E1	2.68364E1	1.198E-7	2.51847E-3	2.51847E-3	6.29128E-3	2.97647E-1
6.0E0	0.0E0	2.0E0	9.93E2	6.35E2	-7.30146E-2	-8.80022E1	-9.53674E-4	-8.80005E1	5.96046E-4	4.52995E-3	9.50575E-2	2.73484E1	-3.26657E1	-3.26254E1	2.6843E1	1.19913E-7	2.51662E-3	2.51662E-3	6.31837E-3	2.9874E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.37874E-2	-8.80018E1	-7.15256E-4	-8.8001E1	5.96046E-4	4.673E-3	9.51767E-2	2.73177E1	-3.26621E1	-3.2614E1	2.68383E1	1.19913E-7	2.52099E-3	2.52099E-3	6.32386E-3	2.9978E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.42513E-2	-8.80022E1	-8.58307E-4	-8.80009E1	6.4373E-4	4.62532E-3	9.52244E-2	2.73147E1	-3.26543E1	-3.26182E1	2.68537E1	1.20069E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.00041E-1
1.2E1	9.5E1	0.0E0	4.85E2	3.23E2	-7.26282E-2	-8.8002E1	-1.0252E-3	-8.80005E1	5.48363E-4	4.673E-3	9.55343E-2	2.73434E1	-3.26856E1	-3.26065E1	2.68592E1	1.20069E-7	2.51552E-3	2.51552E-3	6.33486E-3	3.00302E-1
1.3E1	9.0E0	0.0E0	5.25E2	3.53E2	-7.32464E-2	-8.80025E1	-6.91414E-4	-8.80003E1	5.72205E-4	4.45843E-3	9.55105E-2	2.731E1	-3.26603E1	-3.26242E1	2.68388E1	1.19757E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.00041E-1
1.4E1	3.214E3	0.0E0	5.66E2	3.82E2	-7.40192E-2	-8.80024E1	-5.72205E-4	-8.80003E1	5.48363E-4	4.22001E-3	9.5439E-2	2.73316E1	-3.26762E1	-3.26001E1	2.68322E1	1.20226E-7	2.52099E-3	2.52099E-3	6.32386E-3	2.98481E-1
1.5E1	6.5E1	0.0E0	6.06E2	4.11E2	-7.25507E-2	-8.80025E1	-6.91414E-4	-8.80003E1	2.86102E-4	4.05312E-3	9.53674E-2	2.73291E1	-3.26416E1	-3.26296E1	2.68316E1	1.19705E-7	2.51552E-3	2.51552E-3	6.30192E-3	2.9926E-1
1.6E1	4.03E2	0.0E0	6.47E2	4.41E2	-7.37874E-2	-8.80024E1	-8.10623E-4	-8.80007E1	5.96046E-4	3.88622E-3	9.52005E-2	2.73429E1	-3.26609E1	-3.2617E1	2.68208E1	1.20069E-7	2.52318E-3	2.52318E-3	6.30192E-3	2.9952E-1
1.7E1	8.09E2	0.0E0	6.87E2	4.7E2	-7.36328E-2	-8.80023E1	-3.33786E-4	-8.80006E1	4.05312E-4	4.02927E-3	9.51052E-2	2.73363E1	-3.26422E1	-3.26675E1	2.6855E1	1.20069E-7	2.51662E-3	2.51662E-3	6.31837E-3	2.9978E-1
1.8E1	3.317E3	1.0E0	7.27E2	5.0E2	-7.30918E-2	-8.80021E1	-3.57628E-4	-8.80005E1	5.00679E-4	4.14848E-3	9.5129E-2	2.72964E1	-3.26637E1	-3.26144E1	2.68493E1	1.19922E-7	2.51405E-3	2.51405E-3	6.31274E-3	3.00527E-1
1.9E1	2.006E3	0.0E0	7.68E2	5.29E2	-7.33239E-2	-8.8002E1	-4.29153E-4	-8.80008E1	7.86781E-4	3.86238E-3	9.52244E-2	2.73457E1	-3.26479E1	-3.25948E1	2.68207E1					
2.0E1	2.4596E4	1.1E1	8.08E2	5.58E2	-7.3401E-2	-8.80021E1	-6.4373E-4	-8.80008E1	4.52995E-4	4.22001E-3	9.4986E-2	2.73213E1	-3.26621E1	-3.26338E1	2.68184E1	1.1995E-7	2.5199E-3	2.5199E-3	6.31321E-3	2.9871E-1
2.1E1	5.9E1	0.0E0	8.49E2	5.88E2	-7.32464E-2	-8.80018E1	-6.67572E-4	-8.80007E1	3.57628E-4	4.19617E-3	9.51052E-2	2.73111E1	-3.26639E1	-3.2635E1	2.6828E1	1.20106E-7	2.51525E-3	2.51525E-3	6.30202E-3	2.9943E-1
2.2E1	1.798E3	1.0E0	8.89E2	6.17E2	-7.26282E-2	-8.80021E1	-6.4373E-4	-8.80006E1	8.58307E-4	4.26769E-3	9.51767E-2	2.73139E1	-3.26443E1	-3.26207E1	2.68424E1	1.19925E-7	2.51581E-3	2.51581E-3	6.31858E-3	2.99348E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.25507E-2	-8.8002E1	-5.48363E-4	-8.80008E1	5.72205E-4	4.57764E-3	9.49383E-2	2.73249E1	-3.26368E1	-3.2626E1	2.68731E1	1.19941E-7	2.51709E-3	2.51709E-3	6.31269E-3	3.006E-1
