[Scan]
initial_time=2016-01-18T22:48:37
final_time=2016-01-18T22:48:57
ip_count=19
run=1024
dataset=10
scan=764
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.286E-2
qbias_imon=-3.81608E-6
ql1_vset=
ql1_vmon=-8.80021E1
ql1_imon=-7.98643E-10
ql2_vset=
ql2_vmon=-3.57628E-4
ql2_imon=1.44409E-9
ql3_vset=
ql3_vmon=-8.80006E1
ql3_imon=-2.3E-9
ql4_vset=
ql4_vmon=5.72205E-4
ql4_imon=1.61943E-8
mult1=-1.56112E-8
mult2=-2.68798E-9
rf_tmon=-5.04039E-3
rf_agc=3.29965E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.26769E-3
ql5_imon=5.81515E-10
bslens_vset=-6.2E0
bslens_vmon=-6.71661E0
bslens_imon=2.66032E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19394E1
lens5a_imon=1.97911E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12464E2
lens4a_imon=2.05205E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53881E1
cs_ef1b_imon=2.73583E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04646E2
lens23_imon=1.0228E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04742E1
cs_ea1_imon=2.59555E-5
lens1_vset=-2.7E0
lens1_vmon=-2.93561E0
lens1_imon=1.30125E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64512E1
os_ef1alow_imon=2.97009E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03858E1
cs_ea2_imon=1.48631E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84358E1
cs_ef1a_imon=2.90558E-5
olens2_vset=9.7E-1
olens2_vmon=9.69815E-1
olens2_imon=1.17659E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11478E1
os_restr1_imon=4.28265E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15306E1
os_ea1_imon=2.40305E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63575E1
os_ef1bup_imon=3.06595E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.19682E0
cs_ionrep_imon=1.16691E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91978E2
cs_nozzle_imon=1.93571E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01821E1
cs_anode1_imon=2.88539E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20451E0
olens4_imon=3.90793E-8
tplens_vset=1.4E-1
tplens_vmon=1.70452E0
tplens_imon=-4.21914E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26372E1
iondef3_imon=1.48523E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26443E1
iondef2_imon=1.54976E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02957E2
lens6_imon=2.98194E-4
ql6_vset=1.0E-1
ql6_vmon=9.47237E-2
ql6_imon=9.00686E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28514E0
ionrepsh_imon=1.71522E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33231E1
lens5b_imon=2.1644E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74705E1
cs_ef2b_imon=3.12289E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44496E0
os_ea2_imon=-5.48088E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06098E2
lens4b_imon=2.00644E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71342E1
cs_ef2a_imon=3.15569E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05095E0
os_ef2alow_imon=-2.5222E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.8481E-1
os_ef2bup_imon=-5.26842E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11304E1
os_restr2_imon=3.37661E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23018E2
cs_ionfoca_imon=6.26972E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01785E1
cs_anode2_imon=2.23308E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73033E1
iondef1_imon=1.12581E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68146E1
iondef4_imon=1.09927E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=4.82069E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81903E-1
olens1_imon=7.11329E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12774E0
cs_ionaccel_imon=-1.86267E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02051E2
cs_ionfocb_imon=1.4732E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56399E1
einzel_imon=7.59053E-6
window_vset=0.0E0
window_vmon=2.34161E-1
window_imon=-8.46352E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82643E2
mask1_imon=2.3921E-4
mask2_vset=0.0E0
mask2_vmon=-1.86422E1
mask2_imon=-6.12094E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92661E3
multa_neg_imon=7.68563E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93708E3
defgrida_imon=6.38424E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50115E3
multb_neg_imon=7.31071E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.25419E0
defgridb_imon=6.23283E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33366E1
os_fil1_imon=9.41081E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06855E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61513E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30904E1
cs_fil1_imon=9.93879E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63195E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62608E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.00233E-2
os_fil2_imon=-2.59389E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.76691E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.40345E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32889E-1
cs_fil2_imon=-2.56986E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.62024E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21866E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=3.03185E-1
chamber_ion_pmon=1.19705E-7
chamber_cvt_pmon=2.51334E-3
foreline_cvt_pmon=2.51334E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.86322E-1
res40_imon=-2.4393E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=206
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.912E3	0.0E0	1.47E2	4.1E1	-7.17779E-2	-8.8002E1	-1.00136E-3	-8.80003E1	5.96046E-4	4.24385E-3	9.54151E-2	2.73219E1	-3.26506E1	-3.2635E1	2.68933E1	1.19766E-7	2.51359E-3	2.51359E-3	6.32418E-3	2.99879E-1
2.0E0	9.838E4	1.11E2	3.16E2	1.6E2	-7.15461E-2	-8.80018E1	-6.91414E-4	-8.80004E1	4.05312E-4	4.64916E-3	9.50575E-2	2.73334E1	-3.26819E1	-3.2633E1	2.68344E1	1.19851E-7	2.5131E-3	2.5131E-3	6.33977E-3	3.01223E-1
3.0E0	1.4E1	0.0E0	4.85E2	2.79E2	-7.0464E-2	-8.80019E1	-6.91414E-4	-8.80004E1	4.29153E-4	4.72069E-3	9.50098E-2	2.73252E1	-3.26626E1	-3.26337E1	2.68334E1	1.1988E-7	2.52108E-3	2.52108E-3	6.30963E-3	3.01024E-1
4.0E0	2.1761E4	7.0E0	6.55E2	3.98E2	-7.15461E-2	-8.80021E1	-3.57628E-4	-8.80003E1	5.00679E-4	4.36306E-3	9.49383E-2	2.73293E1	-3.26543E1	-3.2613E1	2.68018E1					
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.12368E-2	-8.80021E1	-7.62939E-4	-8.80006E1	2.86102E-4	4.62532E-3	9.48668E-2	2.72973E1	-3.26506E1	-3.26212E1	2.68454E1	1.20004E-7	2.5131E-3	2.5131E-3	6.31817E-3	2.99686E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.12368E-2	-8.80024E1	-5.72205E-4	-8.80006E1	7.39098E-4	4.57764E-3	9.48429E-2	2.73844E1	-3.26729E1	-3.26026E1	2.68611E1	1.20062E-7	2.52026E-3	2.52026E-3	6.29926E-3	3.00378E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.19325E-2	-8.80022E1	-6.4373E-4	-8.80003E1	6.4373E-4	4.36306E-3	9.50336E-2	2.73165E1	-3.2653E1	-3.2647E1	2.6855E1					
8.0E0	1.0E0	0.0E0	1.332E3	8.73E2	-7.23189E-2	-8.80023E1	-7.86781E-4	-8.80002E1	6.67572E-4	4.24385E-3	9.48906E-2	2.72961E1	-3.26777E1	-3.259E1	2.67631E1	1.20017E-7	2.51552E-3	2.51552E-3	6.30192E-3	2.97704E-1
1.2E1	8.5E1	0.0E0	4.85E2	3.23E2	-7.27828E-2	-8.80024E1	-7.86781E-4	-8.80004E1	7.39098E-4	4.31538E-3	9.50336E-2	2.73297E1	-3.26506E1	-3.26128E1	2.67505E1	1.20174E-7	2.51771E-3	2.51771E-3	6.32386E-3	2.9952E-1
1.3E1	2.1E1	0.0E0	5.25E2	3.53E2	-7.20871E-2	-8.80025E1	-7.39098E-4	-8.80006E1	6.91414E-4	4.69685E-3	9.52482E-2	2.73153E1	-3.26663E1	-3.26452E1	2.68815E1	1.20017E-7	2.52428E-3	2.52428E-3	6.30192E-3	2.9978E-1
1.4E1	3.219E3	2.0E0	5.66E2	3.82E2	-7.23964E-2	-8.80025E1	-4.29153E-4	-8.80004E1	3.09944E-4	4.57764E-3	9.51052E-2	2.73309E1	-3.26122E1	-3.26146E1	2.68791E1	1.20122E-7	2.51334E-3	2.51334E-3	6.32386E-3	3.00824E-1
1.5E1	9.1E1	5.0E0	6.06E2	4.11E2	-7.18554E-2	-8.80023E1	-6.19888E-4	-8.80009E1	6.67572E-4	4.52995E-3	9.46999E-2	2.72913E1	-3.26434E1	-3.26344E1	2.68388E1	1.20069E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.00824E-1
1.6E1	3.97E2	0.0E0	6.47E2	4.41E2	-7.23189E-2	-8.80022E1	-5.72205E-4	-8.8001E1	5.48363E-4	4.45843E-3	9.52959E-2	2.7334E1	-3.26467E1	-3.26349E1	2.68406E1	1.19861E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.03185E-1
1.7E1	8.43E2	2.0E0	6.87E2	4.7E2	-7.17779E-2	-8.80023E1	-4.29153E-4	-8.8001E1	5.48363E-4	4.41074E-3	9.52005E-2	2.73435E1	-3.26717E1	-3.25888E1	2.68088E1	1.20017E-7	2.5188E-3	2.5188E-3	6.29645E-3	3.02133E-1
1.8E1	3.379E3	3.0E0	7.27E2	5.0E2	-7.23189E-2	-8.80021E1	-4.76837E-4	-8.80008E1	6.91414E-4	4.24385E-3	9.53197E-2	2.73033E1	-3.26524E1	-3.26188E1	2.68511E1	1.19965E-7	2.52209E-3	2.52209E-3	6.29645E-3	3.01085E-1
1.9E1	2.028E3	1.0E0	7.68E2	5.29E2	-7.22418E-2	-8.80022E1	-5.72205E-4	-8.80006E1	5.72205E-4	4.52995E-3	9.52959E-2	2.73339E1	-3.26795E1	-3.26206E1	2.6828E1	1.198E-7	2.51417E-3	2.51417E-3	6.31817E-3	2.97901E-1
2.0E1	2.4761E4	1.8E1	8.08E2	5.58E2	-7.29374E-2	-8.80019E1	-5.48363E-4	-8.80006E1	7.39098E-4	4.48227E-3	9.52482E-2	2.73381E1	-3.26645E1	-3.26543E1	2.68256E1	1.19809E-7	2.51443E-3	2.51443E-3	6.32386E-3	2.98481E-1
2.1E1	6.1E1	0.0E0	8.49E2	5.88E2	-7.24736E-2	-8.8002E1	-1.90735E-4	-8.80005E1	6.19888E-4	4.76837E-3	9.48906E-2	2.72892E1	-3.26502E1	-3.26231E1	2.68004E1	1.19965E-7	2.52099E-3	2.52099E-3	6.32936E-3	3.01609E-1
2.2E1	1.769E3	1.0E0	8.89E2	6.17E2	-7.286E-2	-8.80021E1	-3.09944E-4	-8.80005E1	4.29153E-4	4.52995E-3	9.48191E-2	2.73357E1	-3.26512E1	-3.26554E1	2.68004E1	1.19851E-7	2.51847E-3	2.51847E-3	6.30202E-3	3.00453E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.286E-2	-8.80021E1	-3.57628E-4	-8.80006E1	5.72205E-4	4.26769E-3	9.47237E-2	2.73033E1	-3.26443E1	-3.26372E1	2.68146E1	1.19705E-7	2.51334E-3	2.51334E-3	6.32386E-3	3.03185E-1
