[Scan]
initial_time=2016-01-18T22:49:58
final_time=2016-01-18T22:50:17
ip_count=19
run=1024
dataset=10
scan=767
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.19325E-2
qbias_imon=-3.79286E-6
ql1_vset=
ql1_vmon=-8.80024E1
ql1_imon=-7.07626E-10
ql2_vset=
ql2_vmon=-4.76837E-4
ql2_imon=1.39164E-9
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-2.2988E-9
ql4_vset=
ql4_vmon=7.15256E-4
ql4_imon=1.615E-8
mult1=-2.12271E-8
mult2=-2.73458E-9
rf_tmon=-4.77078E-3
rf_agc=3.23422E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.55379E-3
ql5_imon=5.48625E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68476E0
bslens_imon=2.48368E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19568E1
lens5a_imon=1.97766E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12454E2
lens4a_imon=2.05313E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53959E1
cs_ef1b_imon=2.73835E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04622E2
lens23_imon=1.02301E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04519E1
cs_ea1_imon=2.54689E-5
lens1_vset=-2.7E0
lens1_vmon=-2.93801E0
lens1_imon=1.70861E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64783E1
os_ef1alow_imon=2.97333E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03907E1
cs_ea2_imon=1.51587E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8422E1
cs_ef1a_imon=2.88575E-5
olens2_vset=9.7E-1
olens2_vmon=9.69696E-1
olens2_imon=1.1745E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11544E1
os_restr1_imon=4.27725E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15137E1
os_ea1_imon=2.42035E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63707E1
os_ef1bup_imon=3.071E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22206E0
cs_ionrep_imon=1.1615E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91926E2
cs_nozzle_imon=1.93784E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01887E1
cs_anode1_imon=2.89224E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20406E0
olens4_imon=3.90923E-8
tplens_vset=1.4E-1
tplens_vmon=1.70873E0
tplens_imon=-4.0389E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26386E1
iondef3_imon=1.48595E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26711E1
iondef2_imon=1.57139E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03009E2
lens6_imon=2.98216E-4
ql6_vset=1.0E-1
ql6_vmon=9.50336E-2
ql6_imon=9.39524E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28214E0
ionrepsh_imon=1.7127E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33153E1
lens5b_imon=2.16801E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74675E1
cs_ef2b_imon=3.12362E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4732E0
os_ea2_imon=-5.58903E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06089E2
lens4b_imon=2.00259E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.713E1
cs_ef2a_imon=3.1492E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05035E0
os_ef2alow_imon=-2.56184E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.80005E-1
os_ef2bup_imon=-5.29004E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11274E1
os_restr2_imon=3.37553E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.22981E2
cs_ionfoca_imon=6.26035E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02001E1
cs_anode2_imon=2.23632E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72973E1
iondef1_imon=1.14168E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68447E1
iondef4_imon=1.09314E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=4.82448E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81593E-1
olens1_imon=7.10024E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14396E0
cs_ionaccel_imon=-1.73293E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02078E2
cs_ionfocb_imon=1.47316E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56321E1
einzel_imon=7.7383E-6
window_vset=0.0E0
window_vmon=2.56386E-1
window_imon=-8.85996E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82658E2
mask1_imon=2.3907E-4
mask2_vset=0.0E0
mask2_vmon=-1.86176E1
mask2_imon=-6.94985E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92672E3
multa_neg_imon=7.664E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93689E3
defgrida_imon=6.25806E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5013E3
multb_neg_imon=7.09441E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.45871E0
defgridb_imon=6.4311E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33344E1
os_fil1_imon=9.41405E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07329E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61627E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30926E1
cs_fil1_imon=9.94834E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63249E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62553E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.91204E-2
os_fil2_imon=-2.64194E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.88104E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.25651E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37679E-1
cs_fil2_imon=-2.86419E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.1242E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21794E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=2.9892E-1
chamber_ion_pmon=1.20055E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.89926E-1
res40_imon=-2.54022E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=173
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.941E3	2.0E0	1.47E2	4.1E1	-7.23189E-2	-8.8002E1	-7.15256E-4	-8.80004E1	3.8147E-4	4.45843E-3	9.5129E-2	2.72614E1	-3.26278E1	-3.26319E1	2.68082E1	1.19913E-7	2.51007E-3	2.51007E-3	6.30192E-3	3.01085E-1
2.0E0	9.7833E4	8.6E1	3.16E2	1.6E2	-7.26282E-2	-8.80025E1	-7.39098E-4	-8.80008E1	4.05312E-4	4.45843E-3	9.49383E-2	2.73087E1	-3.26771E1	-3.26296E1	2.68529E1	1.19902E-7	2.51739E-3	2.51739E-3	6.33977E-3	3.00966E-1
3.0E0	1.1E1	0.0E0	4.85E2	2.79E2	-7.42513E-2	-8.80022E1	-5.24521E-4	-8.80009E1	4.29153E-4	4.64916E-3	9.5129E-2	2.73027E1	-3.26673E1	-3.26496E1	2.68053E1	1.19705E-7	2.52099E-3	2.52099E-3	6.31837E-3	3.00563E-1
4.0E0	2.1586E4	2.1E1	6.55E2	3.98E2	-7.38649E-2	-8.80025E1	-3.8147E-4	-8.80008E1	2.86102E-4	4.57764E-3	9.48429E-2	2.72993E1	-3.26556E1	-3.26301E1	2.68742E1	1.19902E-7	2.51203E-3	2.51203E-3	6.31278E-3	2.98665E-1
5.0E0	0.0E0	1.0E0	8.24E2	5.17E2	-7.37874E-2	-8.80024E1	-6.19888E-4	-8.8001E1	6.4373E-4	4.3869E-3	9.4986E-2	2.73486E1	-3.26438E1	-3.26138E1	2.68319E1	1.20092E-7	2.52553E-3	2.52553E-3	6.31269E-3	2.98592E-1
6.0E0	2.0E0	0.0E0	9.93E2	6.35E2	-7.3401E-2	-8.80027E1	-6.91414E-4	-8.80007E1	9.29832E-4	4.31538E-3	9.51052E-2	2.73145E1	-3.26555E1	-3.2616E1	2.67931E1	1.20191E-7	2.52139E-3	2.52139E-3	6.3074E-3	2.99879E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.16233E-2	-8.80026E1	-6.19888E-4	-8.80005E1	7.39098E-4	4.76837E-3	9.48191E-2	2.73381E1	-3.26651E1	-3.2614E1	2.68406E1	1.20004E-7	2.51632E-3	2.51632E-3	6.3074E-3	3.01223E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.34782E-2	-8.80027E1	-6.67572E-4	-8.80007E1	5.00679E-4	4.673E-3	9.51529E-2	2.73116E1	-3.26272E1	-3.26183E1	2.68653E1	1.19861E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.01085E-1
1.2E1	1.03E2	1.0E0	4.85E2	3.23E2	-7.30918E-2	-8.80024E1	-5.96046E-4	-8.80007E1	6.4373E-4	4.57764E-3	9.53197E-2	2.73014E1	-3.26744E1	-3.2637E1	2.6843E1	1.20055E-7	2.52384E-3	2.52384E-3	6.32896E-3	2.99941E-1
1.3E1	1.5E1	0.0E0	5.25E2	3.53E2	-7.35556E-2	-8.80025E1	-5.24521E-4	-8.80009E1	4.52995E-4	4.48227E-3	9.52005E-2	2.73369E1	-3.26356E1	-3.25888E1	2.68587E1	1.20031E-7	2.51804E-3	2.51804E-3	6.32978E-3	2.97236E-1
1.4E1	3.305E3	0.0E0	5.66E2	3.82E2	-7.35556E-2	-8.80022E1	-5.24521E-4	-8.80008E1	6.91414E-4	4.62532E-3	9.51052E-2	2.73556E1	-3.26729E1	-3.26032E1	2.68695E1	1.19913E-7	2.51334E-3	2.51334E-3	6.33486E-3	2.9952E-1
1.5E1	7.0E1	0.0E0	6.06E2	4.11E2	-7.37874E-2	-8.80022E1	-5.24521E-4	-8.80006E1	5.00679E-4	4.48227E-3	9.53436E-2	2.73181E1	-3.26366E1	-3.26354E1	2.67872E1	1.20278E-7	2.5188E-3	2.5188E-3	6.31288E-3	2.9874E-1
1.6E1	4.46E2	0.0E0	6.47E2	4.41E2	-7.30918E-2	-8.80021E1	-7.39098E-4	-8.80009E1	2.86102E-4	4.45843E-3	9.53436E-2	2.73616E1	-3.26266E1	-3.26422E1	2.68538E1	1.198E-7	2.51525E-3	2.51525E-3	6.31817E-3	2.98156E-1
1.7E1	7.92E2	0.0E0	6.87E2	4.7E2	-7.37874E-2	-8.80021E1	-3.33786E-4	-8.80007E1	1.90735E-4	4.52995E-3	9.51529E-2	2.73387E1	-3.26636E1	-3.26175E1	2.68585E1	1.20069E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.02396E-1
1.8E1	3.353E3	2.0E0	7.27E2	5.0E2	-7.38649E-2	-8.80021E1	-5.96046E-4	-8.80007E1	6.4373E-4	4.3869E-3	9.53436E-2	2.73213E1	-3.26627E1	-3.26585E1	2.67866E1	1.19683E-7	2.51265E-3	2.51265E-3	6.31779E-3	3.00494E-1
1.9E1	1.957E3	2.0E0	7.68E2	5.29E2	-7.23964E-2	-8.80019E1	-6.4373E-4	-8.80004E1	6.19888E-4	4.48227E-3	9.53436E-2	2.73003E1	-3.26591E1	-3.26452E1	2.68683E1	1.19965E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.00041E-1
2.0E1	2.4506E4	1.7E1	8.08E2	5.58E2	-7.29374E-2	-8.80022E1	-4.29153E-4	-8.80003E1	5.24521E-4	4.26769E-3	9.52721E-2	2.73069E1	-3.26585E1	-3.2616E1	2.68528E1	1.19809E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.00824E-1
2.1E1	4.7E1	0.0E0	8.49E2	5.88E2	-7.22418E-2	-8.8002E1	-5.96046E-4	-8.80006E1	3.33786E-4	4.33922E-3	9.52005E-2	2.73299E1	-3.26502E1	-3.26502E1	2.68022E1	1.19953E-7	2.5131E-3	2.5131E-3	6.32896E-3	2.99941E-1
2.2E1	1.764E3	1.0E0	8.89E2	6.17E2	-7.23189E-2	-8.80023E1	-5.72205E-4	-8.80005E1	5.72205E-4	4.45843E-3	9.51529E-2	2.72945E1	-3.26826E1	-3.2639E1	2.68124E1	1.19851E-7	2.51632E-3	2.51632E-3	6.31817E-3	2.9892E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.19325E-2	-8.80024E1	-4.76837E-4	-8.80002E1	7.15256E-4	4.55379E-3	9.50336E-2	2.72973E1	-3.26711E1	-3.26386E1	2.68447E1	1.20055E-7	2.51847E-3	2.51847E-3	6.31817E-3	2.9892E-1
