[Scan]
initial_time=2016-01-18T22:51:45
final_time=2016-01-18T22:52:05
ip_count=19
run=1024
dataset=10
scan=771
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.30146E-2
qbias_imon=-3.81839E-6
ql1_vset=
ql1_vmon=-8.80027E1
ql1_imon=-6.90734E-10
ql2_vset=
ql2_vmon=-5.96046E-4
ql2_imon=1.39449E-9
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-2.23656E-9
ql4_vset=
ql4_vmon=3.57628E-4
ql4_imon=1.61427E-8
mult1=-1.34609E-8
mult2=-2.58288E-9
rf_tmon=-5.70206E-3
rf_agc=3.16753E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.79221E-3
ql5_imon=5.43642E-10
bslens_vset=-6.2E0
bslens_vmon=-6.73582E0
bslens_imon=3.25468E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20668E1
lens5a_imon=1.97129E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12326E2
lens4a_imon=2.03921E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54037E1
cs_ef1b_imon=2.7297E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04643E2
lens23_imon=1.0297E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.06386E1
cs_ea1_imon=2.65865E-5
lens1_vset=-2.7E0
lens1_vmon=-2.88023E0
lens1_imon=3.52364E-7
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64831E1
os_ef1alow_imon=2.97729E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.02298E1
cs_ea2_imon=1.50091E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8428E1
cs_ef1a_imon=2.88936E-5
olens2_vset=9.7E-1
olens2_vmon=9.69958E-1
olens2_imon=1.17411E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11388E1
os_restr1_imon=4.28157E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.16668E1
os_ea1_imon=2.49866E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63527E1
os_ef1bup_imon=3.07388E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.31463E0
cs_ionrep_imon=1.12927E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9179E2
cs_nozzle_imon=1.92956E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02085E1
cs_anode1_imon=2.88575E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20434E0
olens4_imon=3.91291E-8
tplens_vset=1.4E-1
tplens_vmon=1.6898E0
tplens_imon=6.35517E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26416E1
iondef3_imon=1.49595E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26272E1
iondef2_imon=1.4825E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02904E2
lens6_imon=2.98572E-4
ql6_vset=1.0E-1
ql6_vmon=9.51052E-2
ql6_imon=9.31025E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.45266E0
ionrepsh_imon=1.76141E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33085E1
lens5b_imon=2.07712E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74687E1
cs_ef2b_imon=3.11857E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.28513E0
os_ea2_imon=-7.12998E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06221E2
lens4b_imon=2.01412E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71138E1
cs_ef2a_imon=3.16038E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04435E0
os_ef2alow_imon=-2.50418E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.90216E-1
os_ef2bup_imon=-5.31527E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11135E1
os_restr2_imon=3.37625E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23121E2
cs_ionfoca_imon=6.23628E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01725E1
cs_anode2_imon=2.23812E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73111E1
iondef1_imon=1.05317E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68424E1
iondef4_imon=1.0917E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=4.80074E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81379E-1
olens1_imon=7.11452E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12894E0
cs_ionaccel_imon=-1.75816E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0207E2
cs_ionfocb_imon=1.47331E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56297E1
einzel_imon=7.63738E-6
window_vset=0.0E0
window_vmon=2.46775E-1
window_imon=-6.98589E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82649E2
mask1_imon=2.39117E-4
mask2_vset=0.0E0
mask2_vmon=-1.8608E1
mask2_imon=-6.4453E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92582E3
multa_neg_imon=7.60815E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93731E3
defgrida_imon=5.9871E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50201E3
multb_neg_imon=7.99395E-5
defgridb_vset=0.0E0
defgridb_vmon=-5.46267E-1
defgridb_imon=5.43495E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33358E1
os_fil1_imon=9.4006E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06777E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61537E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30892E1
cs_fil1_imon=9.95374E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62306E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62629E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.18031E-2
os_fil2_imon=-2.8762E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.01318E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.27941E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3742E-1
cs_fil2_imon=-2.70201E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.01008E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21855E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=3.01085E-1
chamber_ion_pmon=1.20017E-7
chamber_cvt_pmon=2.51443E-3
foreline_cvt_pmon=2.51443E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.87523E-1
res40_imon=-2.45012E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=216
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.821E3	2.0E0	1.47E2	4.1E1	-7.31692E-2	-8.80024E1	-3.33786E-4	-8.80006E1	7.62939E-4	4.60148E-3	9.4986E-2	2.73181E1	-3.27157E1	-3.27511E1	2.68487E1	1.19913E-7	2.52099E-3	2.52099E-3	6.28552E-3	2.9952E-1
2.0E0	9.8132E4	8.3E1	3.16E2	1.6E2	-7.3401E-2	-8.80023E1	-3.33786E-4	-8.80006E1	4.52995E-4	4.57764E-3	9.51767E-2	2.73132E1	-3.26479E1	-3.26216E1	2.68051E1	1.19697E-7	2.51954E-3	2.51954E-3	6.29665E-3	2.9943E-1
3.0E0	7.0E0	0.0E0	4.85E2	2.79E2	-7.22418E-2	-8.80021E1	-5.96046E-4	-8.8E1	5.00679E-4	4.31538E-3	9.52721E-2	2.73045E1	-3.26683E1	-3.26283E1	2.68493E1	1.20031E-7	2.52585E-3	2.52585E-3	6.32418E-3	2.9829E-1
4.0E0	2.1477E4	1.8E1	6.55E2	3.98E2	-7.30146E-2	-8.80023E1	-2.14577E-4	-8.80002E1	4.29153E-4	4.64916E-3	9.51767E-2	2.73261E1	-3.26849E1	-3.26476E1	2.68466E1	1.19697E-7	2.51847E-3	2.51847E-3	6.31817E-3	2.99941E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.30146E-2	-8.80022E1	-5.96046E-4	-8.80005E1	5.96046E-4	4.69685E-3	9.4986E-2	2.73405E1	-3.26645E1	-3.26585E1	2.68424E1	1.20122E-7	2.52538E-3	2.52538E-3	6.32936E-3	2.9952E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.286E-2	-8.80024E1	-4.76837E-4	-8.80006E1	3.8147E-4	4.55379E-3	9.51052E-2	2.73201E1	-3.26458E1	-3.26002E1	2.68226E1	1.19809E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.00824E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.286E-2	-8.80022E1	-7.62939E-4	-8.80006E1	6.4373E-4	4.74453E-3	9.53197E-2	2.73157E1	-3.26885E1	-3.2616E1	2.68667E1	1.20311E-7	2.51417E-3	2.51417E-3	6.31817E-3	2.99175E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.32464E-2	-8.80021E1	-6.19888E-4	-8.80005E1	5.00679E-4	4.81606E-3	9.52721E-2	2.73016E1	-3.26762E1	-3.26024E1	2.6822E1	1.198E-7	2.5131E-3	2.5131E-3	6.32896E-3	3.01738E-1
1.2E1	7.6E1	0.0E0	4.85E2	3.23E2	-7.33239E-2	-8.80022E1	-8.82149E-4	-8.80003E1	6.4373E-4	4.673E-3	9.50575E-2	2.73075E1	-3.26615E1	-3.259E1	2.68605E1	1.20174E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.00041E-1
1.3E1	1.6E1	0.0E0	5.25E2	3.53E2	-7.27828E-2	-8.8002E1	-6.19888E-4	-8.80006E1	4.52995E-4	4.81606E-3	9.52959E-2	2.73297E1	-3.26428E1	-3.26182E1	2.684E1	1.19861E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.01085E-1
1.4E1	3.199E3	1.0E0	5.66E2	3.82E2	-7.37874E-2	-8.8002E1	-2.38419E-4	-8.80003E1	3.09944E-4	4.64916E-3	9.53674E-2	2.72997E1	-3.26669E1	-3.26326E1	2.68454E1	1.20017E-7	2.51225E-3	2.51225E-3	6.34037E-3	3.01609E-1
1.5E1	9.2E1	0.0E0	6.06E2	4.11E2	-7.37874E-2	-8.80022E1	-3.33786E-4	-8.80003E1	1.90735E-4	4.29153E-3	9.52005E-2	2.73249E1	-3.26603E1	-3.25882E1	2.68202E1	1.19601E-7	2.51771E-3	2.51771E-3	6.29645E-3	3.01609E-1
1.6E1	4.28E2	0.0E0	6.47E2	4.41E2	-7.3401E-2	-8.80021E1	-3.09944E-4	-8.80006E1	1.90735E-4	4.3869E-3	9.54151E-2	2.73087E1	-3.26663E1	-3.26248E1	2.68364E1	1.19913E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.00824E-1
1.7E1	8.54E2	0.0E0	6.87E2	4.7E2	-7.30146E-2	-8.80022E1	-4.05312E-4	-8.80003E1	3.33786E-4	4.43459E-3	9.54151E-2	2.73299E1	-3.26354E1	-3.26006E1	2.67836E1	1.20069E-7	2.52099E-3	2.52099E-3	6.29098E-3	2.9952E-1
1.8E1	3.501E3	7.0E0	7.27E2	5.0E2	-7.24736E-2	-8.80022E1	-5.96046E-4	-8.80003E1	5.24521E-4	4.48227E-3	9.53913E-2	2.73051E1	-3.26229E1	-3.26217E1	2.68635E1	1.20004E-7	2.51417E-3	2.51417E-3	6.31278E-3	2.9943E-1
1.9E1	1.915E3	0.0E0	7.68E2	5.29E2	-7.24736E-2	-8.80021E1	-6.19888E-4	-8.80004E1	3.57628E-4	4.57764E-3	9.51052E-2	2.73547E1	-3.26866E1	-3.25868E1	2.68545E1	1.20137E-7	2.51915E-3	2.51915E-3	6.30182E-3	3.02545E-1
2.0E1	2.4188E4	1.1E1	8.08E2	5.58E2	-7.286E-2	-8.80023E1	-8.10623E-4	-8.80005E1	5.72205E-4	4.74453E-3	9.51529E-2	2.73181E1	-3.26449E1	-3.26166E1	2.67764E1	1.20017E-7	2.51552E-3	2.51552E-3	6.33486E-3	3.02133E-1
2.1E1	6.2E1	0.0E0	8.49E2	5.88E2	-7.23189E-2	-8.80022E1	-5.48363E-4	-8.80005E1	3.57628E-4	4.76837E-3	9.52005E-2	2.73129E1	-3.26807E1	-3.25773E1	2.68058E1	1.19809E-7	2.52647E-3	2.52647E-3	6.33486E-3	3.00563E-1
2.2E1	1.8E3	1.0E0	8.89E2	6.17E2	-7.35556E-2	-8.80022E1	-6.4373E-4	-8.80006E1	5.00679E-4	4.88758E-3	9.51052E-2	2.73169E1	-3.26419E1	-3.26449E1	2.68496E1	1.20055E-7	2.52061E-3	2.52061E-3	6.32356E-3	3.00453E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.30146E-2	-8.80027E1	-5.96046E-4	-8.80004E1	3.57628E-4	4.79221E-3	9.51052E-2	2.73111E1	-3.26272E1	-3.26416E1	2.68424E1	1.20017E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.01085E-1
