[Scan]
initial_time=2016-01-18T22:53:06
final_time=2016-01-18T22:53:26
ip_count=19
run=1024
dataset=10
scan=774
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.21643E-2
qbias_imon=-3.77315E-6
ql1_vset=
ql1_vmon=-8.80022E1
ql1_imon=-7.09474E-10
ql2_vset=
ql2_vmon=-4.05312E-4
ql2_imon=1.44603E-9
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-2.25214E-9
ql4_vset=
ql4_vmon=4.05312E-4
ql4_imon=1.61326E-8
mult1=-1.93941E-8
mult2=-2.60175E-9
rf_tmon=-4.30301E-3
rf_agc=3.39108E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.19617E-3
ql5_imon=5.48053E-10
bslens_vset=-6.2E0
bslens_vmon=-6.57061E0
bslens_imon=2.27459E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20205E1
lens5a_imon=2.07464E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12497E2
lens4a_imon=2.0488E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53905E1
cs_ef1b_imon=2.74015E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04537E2
lens23_imon=1.0175E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0476E1
cs_ea1_imon=2.65756E-5
lens1_vset=-2.7E0
lens1_vmon=-3.05518E0
lens1_imon=1.46348E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64927E1
os_ef1alow_imon=2.96828E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03288E1
cs_ea2_imon=1.43404E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84556E1
cs_ef1a_imon=2.90269E-5
olens2_vset=9.7E-1
olens2_vmon=9.69911E-1
olens2_imon=1.17567E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1125E1
os_restr1_imon=4.2877E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14501E1
os_ea1_imon=2.4665E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63851E1
os_ef1bup_imon=3.06884E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.30978E0
cs_ionrep_imon=1.20296E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91936E2
cs_nozzle_imon=1.93456E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01797E1
cs_anode1_imon=2.88143E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20406E0
olens4_imon=3.91507E-8
tplens_vset=1.4E-1
tplens_vmon=1.57835E0
tplens_imon=-5.62508E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26602E1
iondef3_imon=1.54183E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26266E1
iondef2_imon=1.5411E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02867E2
lens6_imon=2.97693E-4
ql6_vset=1.0E-1
ql6_vmon=9.4986E-2
ql6_imon=9.30643E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30377E0
ionrepsh_imon=1.75199E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34427E1
lens5b_imon=2.17161E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74471E1
cs_ef2b_imon=3.12506E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.3987E0
os_ea2_imon=-1.22582E-6
lens4b_vset=-4.05E2
lens4b_vmon=-4.06025E2
lens4b_imon=2.00871E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71132E1
cs_ef2a_imon=3.17119E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06657E0
os_ef2alow_imon=-2.50778E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.52975E-1
os_ef2bup_imon=-5.37293E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11256E1
os_restr2_imon=3.36724E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23152E2
cs_ionfoca_imon=6.31082E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01839E1
cs_anode2_imon=2.22262E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73086E1
iondef1_imon=1.0757E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68226E1
iondef4_imon=1.10467E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=4.7938E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81355E-1
olens1_imon=7.11901E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13735E0
cs_ionaccel_imon=-1.79059E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02064E2
cs_ionfocb_imon=1.47352E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56429E1
einzel_imon=7.84281E-6
window_vset=0.0E0
window_vmon=2.5999E-1
window_imon=-8.46352E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82633E2
mask1_imon=2.39109E-4
mask2_vset=0.0E0
mask2_vmon=-1.86338E1
mask2_imon=-6.01282E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92621E3
multa_neg_imon=7.39362E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9377E3
defgrida_imon=6.67984E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50093E3
multb_neg_imon=7.25303E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.40758E0
defgridb_imon=5.76779E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33356E1
os_fil1_imon=9.40252E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07053E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61559E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30901E1
cs_fil1_imon=9.94059E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62198E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62495E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.05392E-2
os_fil2_imon=-2.68399E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.86302E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.31967E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34831E-1
cs_fil2_imon=-2.46775E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.7609E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2185E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33977E-3
inlet_lpb_pmon=3.0071E-1
chamber_ion_pmon=1.20158E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.73107E-1
res40_imon=-2.58346E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=165
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.861E3	1.0E0	1.47E2	4.1E1	-7.07733E-2	-8.80025E1	-7.15256E-4	-8.80001E1	6.91414E-4	4.79221E-3	9.50575E-2	2.73116E1	-3.25753E1	-3.2636E1	2.68667E1	1.198E-7	2.5131E-3	2.5131E-3	6.32356E-3	3.00966E-1
2.0E0	9.6924E4	7.8E1	3.16E2	1.6E2	-7.20871E-2	-8.80022E1	-8.34465E-4	-8.80003E1	2.6226E-4	4.62532E-3	9.49621E-2	2.73291E1	-3.26717E1	-3.26176E1	2.68486E1	1.19697E-7	2.51096E-3	2.51096E-3	6.30202E-3	2.97901E-1
3.0E0	1.5E1	0.0E0	4.85E2	2.79E2	-7.23964E-2	-8.80024E1	-7.62939E-4	-8.80002E1	1.66893E-4	4.52995E-3	9.50336E-2	2.7308E1	-3.26691E1	-3.26278E1	2.68566E1	1.20122E-7	2.5188E-3	2.5188E-3	6.32386E-3	2.98481E-1
4.0E0	2.1441E4	1.1E1	6.55E2	3.98E2	-7.25507E-2	-8.80022E1	-4.52995E-4	-8.80003E1	2.38419E-4	4.45843E-3	9.52005E-2	2.73228E1	-3.2649E1	-3.2626E1	2.68366E1	1.19851E-7	2.51847E-3	2.51847E-3	6.31817E-3	2.97901E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.286E-2	-8.80023E1	-5.96046E-4	-8.80001E1	4.29153E-4	4.50611E-3	9.49383E-2	2.73086E1	-3.26638E1	-3.26119E1	2.68064E1	1.20106E-7	2.51525E-3	2.51525E-3	6.31278E-3	2.99941E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.20871E-2	-8.80024E1	-6.19888E-4	-8.80001E1	1.19209E-4	4.673E-3	9.52005E-2	2.73302E1	-3.2645E1	-3.26144E1	2.68481E1	1.19757E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.00302E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.16233E-2	-8.80022E1	-5.72205E-4	-8.8E1	1.66893E-4	4.69685E-3	9.50098E-2	2.73111E1	-3.26957E1	-3.26482E1	2.68635E1	1.20137E-7	2.52362E-3	2.52362E-3	6.30182E-3	2.99348E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.17779E-2	-8.80024E1	-1.07288E-3	-8.80002E1	6.4373E-4	4.55379E-3	9.51767E-2	2.73576E1	-3.26537E1	-3.26236E1	2.68464E1	1.19705E-7	2.51662E-3	2.51662E-3	6.30192E-3	2.9874E-1
1.2E1	6.7E1	0.0E0	4.85E2	3.23E2	-7.23189E-2	-8.80024E1	-9.05991E-4	-8.80002E1	6.19888E-4	4.29153E-3	9.52005E-2	2.73431E1	-3.26903E1	-3.26113E1	2.68244E1	1.19991E-7	2.52236E-3	2.52236E-3	6.33388E-3	2.99093E-1
1.3E1	1.5E1	0.0E0	5.25E2	3.53E2	-7.23964E-2	-8.80023E1	-7.15256E-4	-8.80004E1	4.76837E-4	3.93391E-3	9.51529E-2	2.72937E1	-3.265E1	-3.26579E1	2.68653E1	1.20084E-7	2.51581E-3	2.51581E-3	6.31299E-3	3.00144E-1
1.4E1	3.173E3	0.0E0	5.66E2	3.82E2	-7.18554E-2	-8.80023E1	-8.10623E-4	-8.80005E1	4.76837E-4	4.19617E-3	9.50813E-2	2.73476E1	-3.26384E1	-3.26266E1	2.68226E1	1.19861E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.00041E-1
1.5E1	8.2E1	0.0E0	6.06E2	4.11E2	-7.20871E-2	-8.80023E1	-8.10623E-4	-8.80004E1	9.53674E-4	4.19617E-3	9.51052E-2	2.72961E1	-3.26681E1	-3.26278E1	2.6825E1	1.20017E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.01085E-1
1.6E1	4.3E2	0.0E0	6.47E2	4.41E2	-7.17779E-2	-8.80025E1	-5.24521E-4	-8.80003E1	4.05312E-4	4.36306E-3	9.51052E-2	2.73315E1	-3.26765E1	-3.2596E1	2.68442E1	1.20055E-7	2.5131E-3	2.5131E-3	6.31278E-3	3.00197E-1
1.7E1	8.55E2	1.0E0	6.87E2	4.7E2	-7.13143E-2	-8.80024E1	-8.34465E-4	-8.80003E1	5.96046E-4	4.29153E-3	9.48906E-2	2.73616E1	-3.26741E1	-3.26008E1	2.6852E1	1.20069E-7	2.51007E-3	2.51007E-3	6.34037E-3	2.9874E-1
1.8E1	3.597E3	2.0E0	7.27E2	5.0E2	-7.18554E-2	-8.80022E1	-6.19888E-4	-8.80001E1	3.09944E-4	4.22001E-3	9.50813E-2	2.73159E1	-3.26699E1	-3.2647E1	2.6831E1	1.20017E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.00041E-1
1.9E1	1.949E3	2.0E0	7.68E2	5.29E2	-7.17779E-2	-8.80025E1	-4.52995E-4	-8.8E1	3.8147E-4	4.17233E-3	9.49144E-2	2.73237E1	-3.26699E1	-3.26224E1	2.6837E1	1.20084E-7	2.5147E-3	2.5147E-3	6.29624E-3	2.99879E-1
2.0E1	2.4365E4	1.0E1	8.08E2	5.58E2	-7.19325E-2	-8.80023E1	-6.19888E-4	-8.8E1	8.82149E-4	4.3869E-3	9.5129E-2	2.73199E1	-3.26624E1	-3.26089E1	2.68362E1	1.20055E-7	2.51739E-3	2.51739E-3	6.29128E-3	3.01995E-1
2.1E1	4.8E1	0.0E0	8.49E2	5.88E2	-7.19325E-2	-8.80025E1	-5.00679E-4	-8.8E1	7.62939E-4	4.45843E-3	9.51529E-2	2.73544E1	-3.26454E1	-3.26154E1	2.68614E1	1.20276E-7	2.5199E-3	2.5199E-3	6.3282E-3	2.99753E-1
2.2E1	1.684E3	1.0E0	8.89E2	6.17E2	-7.20871E-2	-8.80024E1	-4.29153E-4	-8.80003E1	4.29153E-4	4.673E-3	9.4986E-2	2.73688E1	-3.26344E1	-3.26104E1	2.68273E1	1.19895E-7	2.52338E-3	2.52338E-3	6.31902E-3	3.00363E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.21643E-2	-8.80022E1	-4.05312E-4	-8.80002E1	4.05312E-4	4.19617E-3	9.4986E-2	2.73086E1	-3.26266E1	-3.26602E1	2.68226E1	1.20158E-7	2.51632E-3	2.51632E-3	6.33977E-3	3.0071E-1
