[Scan]
initial_time=2016-01-18T22:53:33
final_time=2016-01-18T22:53:52
ip_count=19
run=1024
dataset=10
scan=775
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.15461E-2
qbias_imon=-3.82383E-6
ql1_vset=
ql1_vmon=-8.80026E1
ql1_imon=-7.07412E-10
ql2_vset=
ql2_vmon=-7.15256E-4
ql2_imon=1.43058E-9
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-2.25912E-9
ql4_vset=
ql4_vmon=6.4373E-4
ql4_imon=1.61816E-8
mult1=-1.60013E-8
mult2=-2.77225E-9
rf_tmon=-5.94883E-3
rf_agc=3.21352E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.81606E-3
ql5_imon=5.68795E-10
bslens_vset=-6.2E0
bslens_vmon=-6.77008E0
bslens_imon=2.75405E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.18841E1
lens5a_imon=1.93945E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12415E2
lens4a_imon=2.05154E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53887E1
cs_ef1b_imon=2.73907E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04711E2
lens23_imon=1.02564E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04862E1
cs_ea1_imon=2.56671E-5
lens1_vset=-2.7E0
lens1_vmon=-2.88755E0
lens1_imon=1.08856E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64692E1
os_ef1alow_imon=2.95315E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04165E1
cs_ea2_imon=1.55733E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84352E1
cs_ef1a_imon=2.90233E-5
olens2_vset=9.7E-1
olens2_vmon=9.70078E-1
olens2_imon=1.17404E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11436E1
os_restr1_imon=4.28553E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15762E1
os_ea1_imon=2.4135E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63515E1
os_ef1bup_imon=3.07064E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.15176E0
cs_ionrep_imon=1.13663E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9192E2
cs_nozzle_imon=1.93918E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01743E1
cs_anode1_imon=2.88683E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20434E0
olens4_imon=3.9106E-8
tplens_vset=1.4E-1
tplens_vmon=1.75259E0
tplens_imon=-1.47938E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25888E1
iondef3_imon=1.44377E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2675E1
iondef2_imon=1.55805E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03002E2
lens6_imon=2.98703E-4
ql6_vset=1.0E-1
ql6_vmon=9.52244E-2
ql6_imon=9.63843E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30377E0
ionrepsh_imon=1.69323E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.32907E1
lens5b_imon=2.1608E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74633E1
cs_ef2b_imon=3.12145E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4684E0
os_ea2_imon=-2.95741E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06131E2
lens4b_imon=2.00644E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71162E1
cs_ef2a_imon=3.15821E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07979E0
os_ef2alow_imon=-2.54022E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.93219E-1
os_ef2bup_imon=-5.26121E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11195E1
os_restr2_imon=3.37589E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.22957E2
cs_ionfoca_imon=6.23187E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01839E1
cs_anode2_imon=2.2392E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73075E1
iondef1_imon=1.13699E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68196E1
iondef4_imon=1.10035E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=4.79381E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81355E-1
olens1_imon=7.13587E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15116E0
cs_ionaccel_imon=-1.71851E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02069E2
cs_ionfocb_imon=1.47305E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56273E1
einzel_imon=7.6518E-6
window_vset=0.0E0
window_vmon=2.61191E-1
window_imon=-9.18431E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8265E2
mask1_imon=2.39135E-4
mask2_vset=0.0E0
mask2_vmon=-1.86392E1
mask2_imon=-6.51738E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92651E3
multa_neg_imon=7.73609E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93664E3
defgrida_imon=5.95885E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50149E3
multb_neg_imon=7.22059E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.16096E0
defgridb_imon=6.36982E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33345E1
os_fil1_imon=9.40816E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0665E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61744E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30893E1
cs_fil1_imon=9.95356E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62804E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6287E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.04102E-2
os_fil2_imon=-2.88221E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.00117E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.17917E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37161E-1
cs_fil2_imon=-2.70201E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.00407E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21857E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32087E-3
inlet_lpb_pmon=3.0148E-1
chamber_ion_pmon=1.20055E-7
chamber_cvt_pmon=2.519E-3
foreline_cvt_pmon=2.519E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.55688E-1
res40_imon=-2.6123E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=152
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.899E3	8.0E0	1.47E2	4.1E1	-7.21643E-2	-8.80027E1	-5.24521E-4	-8.80003E1	4.52995E-4	4.3869E-3	9.50336E-2	2.73641E1	-3.27157E1	-3.2639E1	2.68262E1	1.19851E-7	2.51096E-3	2.51096E-3	6.32356E-3	2.99175E-1
2.0E0	9.7541E4	7.8E1	3.16E2	1.6E2	-7.18554E-2	-8.80025E1	-4.29153E-4	-8.80002E1	5.48363E-4	4.74453E-3	9.48906E-2	2.73339E1	-3.26585E1	-3.26401E1	2.68356E1	1.198E-7	2.51632E-3	2.51632E-3	6.31278E-3	2.97901E-1
3.0E0	2.7E1	0.0E0	4.85E2	2.79E2	-7.11597E-2	-8.80026E1	-4.29153E-4	-8.80006E1	6.91414E-4	4.33922E-3	9.50575E-2	2.73491E1	-3.2688E1	-3.26202E1	2.68447E1	1.19766E-7	2.5225E-3	2.5225E-3	6.32978E-3	2.98554E-1
4.0E0	2.1775E4	1.5E1	6.55E2	3.98E2	-7.15461E-2	-8.80028E1	-4.52995E-4	-8.80007E1	3.57628E-4	4.29153E-3	9.5129E-2	2.73345E1	-3.26352E1	-3.26774E1	2.68382E1	1.19851E-7	2.51739E-3	2.51739E-3	6.3074E-3	2.9943E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.10051E-2	-8.80029E1	-6.4373E-4	-8.80007E1	3.33786E-4	4.45843E-3	9.4986E-2	2.73163E1	-3.26726E1	-3.26231E1	2.6825E1	1.19913E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.00302E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.201E-2	-8.8003E1	-9.53674E-5	-8.80005E1	5.00679E-4	4.673E-3	9.52721E-2	2.73033E1	-3.26272E1	-3.26278E1	2.68538E1	1.19809E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.01609E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.10051E-2	-8.80028E1	-4.29153E-4	-8.80004E1	9.53674E-5	4.48227E-3	9.52959E-2	2.7324E1	-3.26543E1	-3.26484E1	2.68388E1	1.20069E-7	2.51007E-3	2.51007E-3	6.33486E-3	3.02659E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.14689E-2	-8.80028E1	-2.86102E-4	-8.80008E1	2.86102E-4	4.55379E-3	9.50336E-2	2.73092E1	-3.26673E1	-3.26354E1	2.68123E1	1.19902E-7	2.52061E-3	2.52061E-3	6.31278E-3	3.01223E-1
1.2E1	7.7E1	0.0E0	4.85E2	3.23E2	-7.09279E-2	-8.80028E1	-3.33786E-4	-8.80004E1	1.43051E-4	4.74453E-3	9.50575E-2	2.73345E1	-3.26579E1	-3.25954E1	2.68364E1	1.198E-7	2.51632E-3	2.51632E-3	6.3074E-3	2.97901E-1
1.3E1	1.0E1	0.0E0	5.25E2	3.53E2	-7.17007E-2	-8.80026E1	-4.29153E-4	-8.80007E1	4.52995E-4	4.52995E-3	9.50575E-2	2.73333E1	-3.26621E1	-3.26416E1	2.67908E1	1.19705E-7	2.51771E-3	2.51771E-3	6.3074E-3	2.99E-1
1.4E1	3.277E3	3.0E0	5.66E2	3.82E2	-7.17007E-2	-8.80026E1	-3.09944E-4	-8.80008E1	5.00679E-4	4.60148E-3	9.50575E-2	2.7296E1	-3.26738E1	-3.263E1	2.6818E1	1.19757E-7	2.51771E-3	2.51771E-3	6.34037E-3	2.9874E-1
1.5E1	9.8E1	0.0E0	6.06E2	4.11E2	-7.24736E-2	-8.80027E1	-3.8147E-4	-8.80006E1	5.48363E-4	4.81606E-3	9.52005E-2	2.73131E1	-3.26548E1	-3.2626E1	2.68225E1	1.20276E-7	2.52301E-3	2.52301E-3	6.3282E-3	2.97051E-1
1.6E1	3.94E2	1.0E0	6.47E2	4.41E2	-7.27828E-2	-8.80026E1	-5.48363E-4	-8.80007E1	3.33786E-4	4.81606E-3	9.5439E-2	2.72967E1	-3.26687E1	-3.2611E1	2.684E1	1.201E-7	2.51384E-3	2.51384E-3	6.33592E-3	2.9971E-1
1.7E1	8.14E2	0.0E0	6.87E2	4.7E2	-7.23964E-2	-8.80021E1	-5.96046E-4	-8.80008E1	5.24521E-4	4.93526E-3	9.51052E-2	2.73514E1	-3.26615E1	-3.26248E1	2.68163E1	1.19653E-7	2.51662E-3	2.51662E-3	6.30192E-3	3.01347E-1
1.8E1	3.59E3	0.0E0	7.27E2	5.0E2	-7.23964E-2	-8.80024E1	-5.00679E-4	-8.80007E1	2.38419E-4	4.72069E-3	9.51052E-2	2.73187E1	-3.26543E1	-3.26396E1	2.6843E1	1.20004E-7	2.51417E-3	2.51417E-3	6.33977E-3	2.99175E-1
1.9E1	1.983E3	1.0E0	7.68E2	5.29E2	-7.21643E-2	-8.80026E1	-4.29153E-4	-8.80003E1	3.8147E-4	4.81606E-3	9.50336E-2	2.73225E1	-3.26254E1	-3.262E1	2.68088E1	1.20174E-7	2.51552E-3	2.51552E-3	6.34037E-3	3.01609E-1
2.0E1	2.4356E4	2.0E1	8.08E2	5.58E2	-7.24736E-2	-8.80028E1	-5.72205E-4	-8.80008E1	3.57628E-4	4.72069E-3	9.50575E-2	2.73104E1	-3.26325E1	-3.26455E1	2.68376E1	1.19913E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.00563E-1
2.1E1	6.9E1	1.0E0	8.49E2	5.88E2	-7.29374E-2	-8.80022E1	-7.62939E-4	-8.80004E1	4.76837E-4	4.91142E-3	9.52482E-2	2.73099E1	-3.26633E1	-3.26188E1	2.6825E1	1.20055E-7	2.51417E-3	2.51417E-3	6.32356E-3	2.99686E-1
2.2E1	1.795E3	0.0E0	8.89E2	6.17E2	-7.18554E-2	-8.80026E1	-2.38419E-4	-8.80005E1	4.29153E-4	4.72069E-3	9.5129E-2	2.73484E1	-3.26681E1	-3.26122E1	2.68389E1	1.19861E-7	2.50898E-3	2.50898E-3	6.33486E-3	2.9952E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.15461E-2	-8.80026E1	-7.15256E-4	-8.80002E1	6.4373E-4	4.81606E-3	9.52244E-2	2.73075E1	-3.2675E1	-3.25888E1	2.68196E1	1.20055E-7	2.519E-3	2.519E-3	6.32087E-3	3.0148E-1
