[Scan]
initial_time=2016-01-18T22:54:26
final_time=2016-01-18T22:54:46
ip_count=19
run=1024
dataset=10
scan=777
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.24736E-2
qbias_imon=-3.83857E-6
ql1_vset=
ql1_vmon=-8.80021E1
ql1_imon=-7.09474E-10
ql2_vset=
ql2_vmon=-4.05312E-4
ql2_imon=1.45231E-9
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-2.33202E-9
ql4_vset=
ql4_vmon=5.00679E-4
ql4_imon=1.61311E-8
mult1=-1.25218E-8
mult2=-2.80644E-9
rf_tmon=-5.1493E-3
rf_agc=3.32134E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.22137E-3
ql5_imon=6.16717E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66444E0
bslens_imon=2.51848E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19907E1
lens5a_imon=2.00032E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1248E2
lens4a_imon=2.04909E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54003E1
cs_ef1b_imon=2.73682E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04628E2
lens23_imon=1.02273E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04681E1
cs_ea1_imon=2.61547E-5
lens1_vset=-2.7E0
lens1_vmon=-2.98287E0
lens1_imon=1.4248E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64585E1
os_ef1alow_imon=2.96341E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03466E1
cs_ea2_imon=1.48427E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84417E1
cs_ef1a_imon=2.89668E-5
olens2_vset=9.7E-1
olens2_vmon=9.69815E-1
olens2_imon=1.17755E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11309E1
os_restr1_imon=4.27914E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14863E1
os_ea1_imon=2.41974E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63658E1
os_ef1bup_imon=3.07531E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2639E0
cs_ionrep_imon=1.17811E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9191E2
cs_nozzle_imon=1.93445E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01746E1
cs_anode1_imon=2.8939E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20396E0
olens4_imon=3.92517E-8
tplens_vset=1.4E-1
tplens_vmon=1.66562E0
tplens_imon=-1.43153E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25828E1
iondef3_imon=1.49772E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26356E1
iondef2_imon=1.53949E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02935E2
lens6_imon=2.98003E-4
ql6_vset=1.0E-1
ql6_vmon=9.49144E-2
ql6_imon=8.87108E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29929E0
ionrepsh_imon=1.70478E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33835E1
lens5b_imon=2.16844E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74773E1
cs_ef2b_imon=3.12292E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.39485E0
os_ea2_imon=-8.33338E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06092E2
lens4b_imon=2.00527E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7098E1
cs_ef2a_imon=3.15142E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0673E0
os_ef2alow_imon=-2.48423E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.77538E-1
os_ef2bup_imon=-5.27833E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1117E1
os_restr2_imon=3.37001E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23071E2
cs_ionfoca_imon=6.27132E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01832E1
cs_anode2_imon=2.22665E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73508E1
iondef1_imon=1.08149E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68333E1
iondef4_imon=1.09337E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=4.80486E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81641E-1
olens1_imon=7.11584E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13304E0
cs_ionaccel_imon=-1.80655E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02097E2
cs_ionfocb_imon=1.4732E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56556E1
einzel_imon=7.66699E-6
window_vset=0.0E0
window_vmon=2.6576E-1
window_imon=-7.91778E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82656E2
mask1_imon=2.39095E-4
mask2_vset=0.0E0
mask2_vmon=-1.86193E1
mask2_imon=-6.35391E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92631E3
multa_neg_imon=7.33208E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93706E3
defgrida_imon=6.40121E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50131E3
multb_neg_imon=7.27545E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.21362E0
defgridb_imon=5.81721E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33343E1
os_fil1_imon=9.3993E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07051E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61571E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30922E1
cs_fil1_imon=9.93715E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62963E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62596E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.95238E-2
os_fil2_imon=-2.65181E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.92973E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.29459E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34271E-1
cs_fil2_imon=-2.48384E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.62454E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21839E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33919E-3
inlet_lpb_pmon=2.98842E-1
chamber_ion_pmon=1.19941E-7
chamber_cvt_pmon=2.52448E-3
foreline_cvt_pmon=2.52448E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.42033E-1
res40_imon=-2.50508E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=154
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.762E3	1.0E0	1.47E2	4.1E1	-7.23189E-2	-8.80024E1	-8.82149E-4	-8.80006E1	8.34465E-4	4.3869E-3	9.47714E-2	2.73358E1	-3.26413E1	-3.26166E1	2.68453E1	1.1969E-7	2.52025E-3	2.52025E-3	6.3074E-3	3.01104E-1
2.0E0	9.754E4	9.9E1	3.16E2	1.6E2	-7.25507E-2	-8.80023E1	-6.67572E-4	-8.80005E1	5.72205E-4	4.31538E-3	9.50813E-2	2.73424E1	-3.26462E1	-3.26223E1	2.68219E1	1.19851E-7	2.51417E-3	2.51417E-3	6.33977E-3	3.01738E-1
3.0E0	1.4E1	0.0E0	4.85E2	2.79E2	-7.10825E-2	-8.80024E1	-5.96046E-4	-8.80004E1	3.09944E-4	4.52995E-3	9.50336E-2	2.73329E1	-3.26625E1	-3.26503E1	2.68024E1	1.19713E-7	2.51915E-3	2.51915E-3	6.31858E-3	3.0201E-1
4.0E0	2.1703E4	7.0E0	6.55E2	3.98E2	-7.23189E-2	-8.80026E1	-8.34465E-4	-8.80005E1	4.29153E-4	4.05312E-3	9.47952E-2	2.73328E1	-3.26626E1	-3.26236E1	2.68593E1	1.19841E-7	2.51709E-3	2.51709E-3	6.31269E-3	3.02368E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.17779E-2	-8.80023E1	-4.29153E-4	-8.80004E1	5.48363E-4	4.12464E-3	9.50336E-2	2.73259E1	-3.26566E1	-3.26383E1	2.68418E1	1.20069E-7	2.52318E-3	2.52318E-3	6.29645E-3	2.9978E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.05415E-2	-8.80023E1	-5.00679E-4	-8.80004E1	5.00679E-4	4.22001E-3	9.50098E-2	2.73219E1	-3.26615E1	-3.26488E1	2.6798E1	1.20069E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.00824E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.08504E-2	-8.80026E1	-5.72205E-4	-8.80006E1	8.82149E-4	4.14848E-3	9.48906E-2	2.73381E1	-3.26316E1	-3.25902E1	2.68585E1	1.19705E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.00041E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.09279E-2	-8.80026E1	-7.15256E-4	-8.80003E1	6.4373E-4	4.24385E-3	9.50336E-2	2.73235E1	-3.26457E1	-3.25967E1	2.6886E1	1.20064E-7	2.51752E-3	2.51752E-3	6.31251E-3	3.00878E-1
1.2E1	9.5E1	0.0E0	4.85E2	3.23E2	-7.12368E-2	-8.80025E1	-6.67572E-4	-8.80004E1	4.52995E-4	4.17233E-3	9.48668E-2	2.73279E1	-3.26591E1	-3.26368E1	2.67836E1	1.19794E-7	2.51675E-3	2.51675E-3	6.3074E-3	3.00761E-1
1.3E1	1.2E1	0.0E0	5.25E2	3.53E2	-7.15461E-2	-8.80026E1	-8.10623E-4	-8.80003E1	6.4373E-4	4.07696E-3	9.50098E-2	2.73213E1	-3.26494E1	-3.26446E1	2.68603E1	1.19809E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.00041E-1
1.4E1	3.203E3	0.0E0	5.66E2	3.82E2	-7.19325E-2	-8.80025E1	-6.4373E-4	-8.80002E1	5.24521E-4	4.52995E-3	9.51052E-2	2.73514E1	-3.26544E1	-3.2622E1	2.68514E1	1.198E-7	2.51525E-3	2.51525E-3	6.28592E-3	3.01995E-1
1.5E1	8.1E1	0.0E0	6.06E2	4.11E2	-7.08504E-2	-8.80028E1	-6.4373E-4	-8.80007E1	5.00679E-4	4.55379E-3	9.50098E-2	2.73075E1	-3.2653E1	-3.2653E1	2.67908E1	1.19841E-7	2.52236E-3	2.52236E-3	6.3445E-3	3.00097E-1
1.6E1	4.47E2	0.0E0	6.47E2	4.41E2	-7.17007E-2	-8.80028E1	-6.67572E-4	-8.80006E1	6.91414E-4	4.57764E-3	9.49621E-2	2.72841E1	-3.26651E1	-3.25864E1	2.68346E1	1.19809E-7	2.5199E-3	2.5199E-3	6.3514E-3	3.00563E-1
1.7E1	8.3E2	3.0E0	6.87E2	4.7E2	-7.17779E-2	-8.80021E1	-3.57628E-4	-8.80002E1	8.82149E-4	4.43459E-3	9.52482E-2	2.7344E1	-3.26638E1	-3.26472E1	2.68695E1	1.2033E-7	2.51662E-3	2.51662E-3	6.3074E-3	2.9978E-1
1.8E1	3.403E3	2.0E0	7.27E2	5.0E2	-7.20871E-2	-8.80024E1	-3.57628E-4	-8.80002E1	9.53674E-4	4.29153E-3	9.4986E-2	2.73442E1	-3.26735E1	-3.26224E1	2.68635E1	1.20106E-7	2.51954E-3	2.51954E-3	6.32896E-3	3.00453E-1
1.9E1	1.958E3	0.0E0	7.68E2	5.29E2	-7.19325E-2	-8.80027E1	-4.52995E-4	-8.80003E1	7.86781E-4	4.29153E-3	9.50813E-2	2.73069E1	-3.26494E1	-3.26128E1	2.67668E1	1.20031E-7	2.51915E-3	2.51915E-3	6.31299E-3	3.01209E-1
2.0E1	2.4648E4	7.0E0	8.08E2	5.58E2	-7.13143E-2	-8.80026E1	-5.72205E-4	-8.80004E1	6.67572E-4	4.26769E-3	9.48191E-2	2.73255E1	-3.26687E1	-3.26098E1	2.68556E1	1.19749E-7	2.52169E-3	2.52169E-3	6.31278E-3	2.98156E-1
2.1E1	5.5E1	0.0E0	8.49E2	5.88E2	-7.20871E-2	-8.80023E1	-2.86102E-4	-8.80004E1	6.19888E-4	4.88758E-3	9.48191E-2	2.72998E1	-3.26927E1	-3.25841E1	2.66382E1	1.19913E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.00041E-1
2.2E1	1.746E3	2.0E0	8.89E2	6.17E2	-7.23964E-2	-8.80024E1	2.38419E-5	-8.80002E1	7.15256E-4	4.74453E-3	9.49144E-2	2.73057E1	-3.26608E1	-3.2604E1	2.69425E1	1.19851E-7	2.52169E-3	2.52169E-3	6.2752E-3	2.98156E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.24736E-2	-8.80021E1	-4.05312E-4	-8.80004E1	5.00679E-4	5.22137E-3	9.49144E-2	2.73508E1	-3.26356E1	-3.25828E1	2.68333E1	1.19941E-7	2.52448E-3	2.52448E-3	6.33919E-3	2.98842E-1
