[Scan]
initial_time=2016-01-18T22:55:46
final_time=2016-01-18T22:56:06
ip_count=19
run=1024
dataset=10
scan=780
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.16233E-2
qbias_imon=-3.82241E-6
ql1_vset=
ql1_vmon=-8.80029E1
ql1_imon=-6.81925E-10
ql2_vset=
ql2_vmon=-7.62939E-4
ql2_imon=1.4097E-9
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-2.23793E-9
ql4_vset=
ql4_vmon=5.48363E-4
ql4_imon=1.6171E-8
mult1=-1.79762E-8
mult2=-2.83239E-9
rf_tmon=-5.32354E-3
rf_agc=3.24023E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.05447E-3
ql5_imon=5.55372E-10
bslens_vset=-6.2E0
bslens_vmon=-6.62889E0
bslens_imon=2.4296E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20001E1
lens5a_imon=2.01443E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12497E2
lens4a_imon=2.04779E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54043E1
cs_ef1b_imon=2.73655E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04576E2
lens23_imon=1.02006E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04634E1
cs_ea1_imon=2.63917E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02814E0
lens1_imon=1.35533E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64488E1
os_ef1alow_imon=2.97117E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03798E1
cs_ea2_imon=1.47658E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8455E1
cs_ef1a_imon=2.90233E-5
olens2_vset=9.7E-1
olens2_vmon=9.69839E-1
olens2_imon=1.16978E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.114E1
os_restr1_imon=4.274E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14747E1
os_ea1_imon=2.43657E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63683E1
os_ef1bup_imon=3.07532E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.28214E0
cs_ionrep_imon=1.1889E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91957E2
cs_nozzle_imon=1.93222E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02049E1
cs_anode1_imon=2.89044E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20391E0
olens4_imon=3.90651E-8
tplens_vset=1.4E-1
tplens_vmon=1.59337E0
tplens_imon=-4.61569E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26404E1
iondef3_imon=1.51154E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26699E1
iondef2_imon=1.54651E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02908E2
lens6_imon=2.97949E-4
ql6_vset=1.0E-1
ql6_vmon=9.51767E-2
ql6_imon=9.21786E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29896E0
ionrepsh_imon=1.73866E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34072E1
lens5b_imon=2.16476E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74531E1
cs_ef2b_imon=3.12253E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.39029E0
os_ea2_imon=-1.04197E-6
lens4b_vset=-4.05E2
lens4b_vmon=-4.06039E2
lens4b_imon=2.00706E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71288E1
cs_ef2a_imon=3.16722E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.03954E0
os_ef2alow_imon=-2.55103E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.80605E-1
os_ef2bup_imon=-5.31527E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1128E1
os_restr2_imon=3.36832E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23067E2
cs_ionfoca_imon=6.30577E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01845E1
cs_anode2_imon=2.24209E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73604E1
iondef1_imon=1.08364E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68364E1
iondef4_imon=1.10215E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71777E1
olens3_imon=4.7927E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8145E-1
olens1_imon=7.07898E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13855E0
cs_ionaccel_imon=-1.78699E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02081E2
cs_ionfocb_imon=1.47302E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56741E1
einzel_imon=7.6554E-6
window_vset=0.0E0
window_vmon=2.84617E-1
window_imon=-1.01213E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82649E2
mask1_imon=2.39189E-4
mask2_vset=0.0E0
mask2_vmon=-1.86452E1
mask2_imon=-7.95896E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92604E3
multa_neg_imon=7.17733E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93721E3
defgrida_imon=6.41668E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50107E3
multb_neg_imon=7.24582E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.44367E0
defgridb_imon=6.02374E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33348E1
os_fil1_imon=9.40648E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07203E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61371E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30936E1
cs_fil1_imon=9.92485E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62924E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62351E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.09261E-2
os_fil2_imon=-2.61792E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.79094E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.4215E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36514E-1
cs_fil2_imon=-2.46174E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.63806E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21897E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.99175E-1
chamber_ion_pmon=1.19851E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.40982E-1
res40_imon=-2.47534E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=213
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.886E3	1.0E0	1.47E2	4.1E1	-7.24736E-2	-8.80022E1	-3.8147E-4	-8.80004E1	4.29153E-4	4.36306E-3	9.52482E-2	2.7344E1	-3.2685E1	-3.25894E1	2.6814E1	1.20017E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.02922E-1
2.0E0	9.7528E4	8.9E1	3.16E2	1.6E2	-7.15461E-2	-8.80024E1	-5.96046E-4	-8.80004E1	5.00679E-4	4.14848E-3	9.52482E-2	2.73345E1	-3.26738E1	-3.26144E1	2.68469E1	1.19851E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.0148E-1
3.0E0	1.8E1	0.0E0	4.85E2	2.79E2	-7.17007E-2	-8.80026E1	-8.82149E-4	-8.80003E1	7.62939E-4	4.43459E-3	9.54151E-2	2.72993E1	-3.26509E1	-3.26243E1	2.67711E1	1.19925E-7	2.5225E-3	2.5225E-3	6.33538E-3	2.98819E-1
4.0E0	2.1331E4	1.1E1	6.55E2	3.98E2	-7.05415E-2	-8.80023E1	-6.4373E-4	-8.80004E1	8.58307E-4	4.41074E-3	9.52959E-2	2.73243E1	-3.26554E1	-3.25966E1	2.68965E1	1.19941E-7	2.51603E-3	2.51603E-3	6.32328E-3	2.99343E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.14689E-2	-8.80021E1	-4.76837E-4	-8.80004E1	5.24521E-4	4.43459E-3	9.49144E-2	2.73399E1	-3.27041E1	-3.2614E1	2.678E1	1.19913E-7	2.52209E-3	2.52209E-3	6.32936E-3	3.00563E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.10825E-2	-8.80022E1	-5.24521E-4	-8.80003E1	3.8147E-4	4.69685E-3	9.51767E-2	2.73375E1	-3.26549E1	-3.26225E1	2.68464E1	1.20278E-7	2.51552E-3	2.51552E-3	6.33486E-3	2.99E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.02322E-2	-8.8002E1	-3.57628E-4	-8.80004E1	4.05312E-4	4.57764E-3	9.52244E-2	2.73285E1	-3.26194E1	-3.26266E1	2.67982E1	1.19851E-7	2.51954E-3	2.51954E-3	6.29665E-3	2.9892E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.13143E-2	-8.80022E1	-3.8147E-4	-8.80006E1	6.19888E-4	4.43459E-3	9.52244E-2	2.73424E1	-3.26645E1	-3.26242E1	2.68574E1	1.20278E-7	2.5188E-3	2.5188E-3	6.29645E-3	2.9874E-1
1.2E1	9.3E1	0.0E0	4.85E2	3.23E2	-7.18554E-2	-8.80025E1	-5.72205E-4	-8.80005E1	4.29153E-4	4.673E-3	9.51052E-2	2.73234E1	-3.26248E1	-3.26001E1	2.67914E1	1.20069E-7	2.51662E-3	2.51662E-3	6.31837E-3	2.99E-1
1.3E1	1.3E1	0.0E0	5.25E2	3.53E2	-7.22418E-2	-8.80025E1	-6.4373E-4	-8.80001E1	6.67572E-4	4.43459E-3	9.49621E-2	2.73428E1	-3.26417E1	-3.26249E1	2.68632E1	1.20158E-7	2.51739E-3	2.51739E-3	6.31278E-3	3.00453E-1
1.4E1	3.176E3	3.0E0	5.66E2	3.82E2	-7.16233E-2	-8.80025E1	-4.52995E-4	-8.80002E1	4.05312E-4	4.50611E-3	9.50336E-2	2.73369E1	-3.26849E1	-3.2605E1	2.68148E1	1.19991E-7	2.51287E-3	2.51287E-3	6.32328E-3	3.00852E-1
1.5E1	9.1E1	0.0E0	6.06E2	4.11E2	-7.19325E-2	-8.80021E1	-4.05312E-4	-8.80004E1	3.57628E-4	4.76837E-3	9.53674E-2	2.73204E1	-3.26319E1	-3.26349E1	2.68448E1	1.20122E-7	2.50898E-3	2.50898E-3	6.31288E-3	3.02922E-1
1.6E1	4.06E2	0.0E0	6.47E2	4.41E2	-7.20871E-2	-8.80022E1	-2.38419E-5	-8.80005E1	6.19888E-4	4.41074E-3	9.52244E-2	2.73081E1	-3.26567E1	-3.25972E1	2.67992E1	1.20269E-7	2.51647E-3	2.51647E-3	6.32099E-3	3.01025E-1
1.7E1	8.09E2	1.0E0	6.87E2	4.7E2	-7.19325E-2	-8.80024E1	-3.8147E-4	-8.80005E1	4.52995E-4	4.52995E-3	9.49144E-2	2.73472E1	-3.26693E1	-3.26807E1	2.68389E1					
1.8E1	3.436E3	4.0E0	7.27E2	5.0E2	-7.20871E-2	-8.80024E1	-3.57628E-4	-8.80008E1	7.62939E-4	4.55379E-3	9.49621E-2	2.7321E1	-3.26321E1	-3.26291E1	2.682E1	1.20017E-7	2.5199E-3	2.5199E-3	6.32936E-3	3.00824E-1
1.9E1	1.971E3	1.0E0	7.68E2	5.29E2	-7.21643E-2	-8.80025E1	-6.91414E-4	-8.80004E1	6.4373E-4	4.69685E-3	9.48906E-2	2.73198E1	-3.26242E1	-3.26649E1	2.68001E1	1.20297E-7	2.52027E-3	2.52027E-3	6.31858E-3	3.00676E-1
2.0E1	2.4593E4	1.1E1	8.08E2	5.58E2	-7.3401E-2	-8.80028E1	-5.72205E-4	-8.80003E1	5.96046E-4	4.76837E-3	9.50575E-2	2.73177E1	-3.26633E1	-3.26176E1	2.6846E1	1.20209E-7	2.51417E-3	2.51417E-3	6.3074E-3	2.97647E-1
2.1E1	5.2E1	0.0E0	8.49E2	5.88E2	-7.20871E-2	-8.80028E1	-7.62939E-4	-8.80003E1	2.86102E-4	4.72069E-3	9.47952E-2	2.73306E1	-3.26689E1	-3.26156E1	2.69013E1	1.19902E-7	2.52061E-3	2.52061E-3	6.31817E-3	2.9892E-1
2.2E1	1.767E3	0.0E0	8.89E2	6.17E2	-7.20871E-2	-8.80027E1	-7.39098E-4	-8.8E1	5.96046E-4	4.62532E-3	9.50575E-2	2.73653E1	-3.26909E1	-3.26396E1	2.67989E1	1.19953E-7	2.52061E-3	2.52061E-3	6.3074E-3	3.00966E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.16233E-2	-8.80029E1	-7.62939E-4	-8.80005E1	5.48363E-4	5.05447E-3	9.51767E-2	2.73604E1	-3.26699E1	-3.26404E1	2.68364E1	1.19851E-7	2.51739E-3	2.51739E-3	6.3074E-3	2.99175E-1
