[Scan]
initial_time=2016-01-18T22:57:07
final_time=2016-01-18T22:57:26
ip_count=19
run=1024
dataset=10
scan=783
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.42513E-2
qbias_imon=-3.74841E-6
ql1_vset=
ql1_vmon=-8.80025E1
ql1_imon=-7.09891E-10
ql2_vset=
ql2_vmon=-7.39098E-4
ql2_imon=1.42953E-9
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-2.20199E-9
ql4_vset=
ql4_vmon=5.24521E-4
ql4_imon=1.61924E-8
mult1=-2.15763E-8
mult2=-2.61282E-9
rf_tmon=-4.7828E-3
rf_agc=3.28289E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.74453E-3
ql5_imon=5.5629E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67402E0
bslens_imon=2.33737E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19701E1
lens5a_imon=2.00668E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12472E2
lens4a_imon=2.04847E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53992E1
cs_ef1b_imon=2.73364E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04609E2
lens23_imon=1.01967E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04804E1
cs_ea1_imon=2.61125E-5
lens1_vset=-2.7E0
lens1_vmon=-3.03777E0
lens1_imon=1.66889E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64571E1
os_ef1alow_imon=2.97466E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03488E1
cs_ea2_imon=1.48291E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84257E1
cs_ef1a_imon=2.88184E-5
olens2_vset=9.7E-1
olens2_vmon=9.69982E-1
olens2_imon=1.16964E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11173E1
os_restr1_imon=4.28269E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1514E1
os_ea1_imon=2.43899E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63748E1
os_ef1bup_imon=3.07758E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24353E0
cs_ionrep_imon=1.18944E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91912E2
cs_nozzle_imon=1.93314E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01778E1
cs_anode1_imon=2.87997E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20451E0
olens4_imon=3.90446E-8
tplens_vset=1.4E-1
tplens_vmon=1.64143E0
tplens_imon=-4.76125E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2632E1
iondef3_imon=1.50936E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26476E1
iondef2_imon=1.55748E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02907E2
lens6_imon=2.97997E-4
ql6_vset=1.0E-1
ql6_vmon=9.50098E-2
ql6_imon=9.1697E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25332E0
ionrepsh_imon=1.74296E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34056E1
lens5b_imon=2.1749E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74532E1
cs_ef2b_imon=3.12848E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.37575E0
os_ea2_imon=-8.17711E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06049E2
lens4b_imon=2.00417E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7132E1
cs_ef2a_imon=3.15692E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04146E0
os_ef2alow_imon=-2.5818E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.66444E-1
os_ef2bup_imon=-5.19786E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11117E1
os_restr2_imon=3.37849E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2305E2
cs_ionfoca_imon=6.29524E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0184E1
cs_anode2_imon=2.23513E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72672E1
iondef1_imon=1.09799E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6854E1
iondef4_imon=1.09701E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71774E1
olens3_imon=4.75866E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81688E-1
olens1_imon=7.07894E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14948E0
cs_ionaccel_imon=-1.72475E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02078E2
cs_ionfocb_imon=1.47432E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56455E1
einzel_imon=7.6841E-6
window_vset=0.0E0
window_vmon=2.47537E-1
window_imon=-8.75184E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82647E2
mask1_imon=2.39017E-4
mask2_vset=0.0E0
mask2_vmon=-1.86244E1
mask2_imon=-6.9554E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92658E3
multa_neg_imon=7.22977E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9373E3
defgrida_imon=6.71923E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50106E3
multb_neg_imon=7.46851E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.34839E0
defgridb_imon=6.01769E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33338E1
os_fil1_imon=9.40493E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07036E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61451E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30945E1
cs_fil1_imon=9.93955E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62777E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62485E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.01474E-2
os_fil2_imon=-2.68745E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.94711E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.36014E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37719E-1
cs_fil2_imon=-2.63131E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.27968E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21938E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.00563E-1
chamber_ion_pmon=1.20226E-7
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.71236E-1
res40_imon=-2.44332E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=154
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.892E3	2.0E0	1.47E2	4.1E1	-7.03869E-2	-8.80024E1	-5.72205E-4	-8.80005E1	6.4373E-4	4.26769E-3	9.52005E-2	2.73428E1	-3.26933E1	-3.26113E1	2.68215E1	1.19937E-7	2.51725E-3	2.51725E-3	6.3245E-3	2.9971E-1
2.0E0	9.7001E4	9.4E1	3.16E2	1.6E2	-7.16233E-2	-8.80024E1	-1.12057E-3	-8.80004E1	4.29153E-4	4.43459E-3	9.48906E-2	2.73265E1	-3.26578E1	-3.26413E1	2.68151E1	1.20055E-7	2.51739E-3	2.51739E-3	6.33977E-3	2.9892E-1
3.0E0	2.2E1	0.0E0	4.85E2	2.79E2	-7.201E-2	-8.80025E1	-6.67572E-4	-8.80004E1	4.52995E-4	4.36306E-3	9.50813E-2	2.73445E1	-3.26318E1	-3.2593E1	2.68018E1	1.20122E-7	2.51007E-3	2.51007E-3	6.31288E-3	2.98481E-1
4.0E0	2.1417E4	1.5E1	6.55E2	3.98E2	-7.16233E-2	-8.80025E1	-6.67572E-4	-8.80004E1	4.52995E-4	4.43459E-3	9.48906E-2	2.72951E1	-3.26343E1	-3.26343E1	2.68516E1	1.20004E-7	2.52061E-3	2.52061E-3	6.33436E-3	3.0148E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.25507E-2	-8.80024E1	-5.24521E-4	-8.80004E1	2.86102E-4	4.48227E-3	9.50575E-2	2.72996E1	-3.26891E1	-3.26193E1	2.68307E1	1.19902E-7	2.51632E-3	2.51632E-3	6.30202E-3	3.0071E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.22418E-2	-8.80026E1	-8.58307E-4	-8.80001E1	8.10623E-4	4.26769E-3	9.50098E-2	2.73193E1	-3.26608E1	-3.26012E1	2.68597E1	1.20017E-7	2.51662E-3	2.51662E-3	6.30192E-3	3.00302E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.19325E-2	-8.80024E1	-4.52995E-4	-8.80006E1	4.52995E-4	4.36306E-3	9.49144E-2	2.73008E1	-3.26811E1	-3.26266E1	2.68169E1	1.20017E-7	2.5188E-3	2.5188E-3	6.29098E-3	3.00041E-1
8.0E0	1.0E0	0.0E0	1.332E3	8.73E2	-7.23964E-2	-8.80024E1	-7.62939E-4	-8.80004E1	5.00679E-4	4.45843E-3	9.49383E-2	2.73423E1	-3.26472E1	-3.26077E1	2.68186E1	1.19965E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.01085E-1
1.2E1	6.8E1	0.0E0	4.85E2	3.23E2	-7.26282E-2	-8.80021E1	-6.19888E-4	-8.80004E1	9.53674E-5	4.62532E-3	9.52244E-2	2.73327E1	-3.26687E1	-3.26116E1	2.68526E1	1.19965E-7	2.50789E-3	2.50789E-3	6.31288E-3	3.01085E-1
1.3E1	1.2E1	0.0E0	5.25E2	3.53E2	-7.23189E-2	-8.80024E1	-7.86781E-4	-8.80003E1	4.76837E-4	4.79221E-3	9.50575E-2	2.73234E1	-3.26425E1	-3.26266E1	2.68466E1	1.20055E-7	2.50882E-3	2.50882E-3	6.32896E-3	2.99941E-1
1.4E1	3.234E3	1.0E0	5.66E2	3.82E2	-7.20871E-2	-8.8002E1	-6.67572E-4	-8.80007E1	5.00679E-4	4.64916E-3	9.50336E-2	2.73216E1	-3.26529E1	-3.26309E1	2.68442E1	1.20174E-7	2.5199E-3	2.5199E-3	6.32386E-3	2.9952E-1
1.5E1	8.3E1	0.0E0	6.06E2	4.11E2	-7.286E-2	-8.80021E1	-4.29153E-4	-8.80007E1	5.00679E-4	4.62532E-3	9.50575E-2	2.73279E1	-3.26326E1	-3.25972E1	2.6825E1	1.20017E-7	2.51225E-3	2.51225E-3	6.30192E-3	3.01085E-1
1.6E1	4.34E2	0.0E0	6.47E2	4.41E2	-7.25507E-2	-8.80022E1	-8.82149E-4	-8.80006E1	5.00679E-4	4.62532E-3	9.49383E-2	2.73478E1	-3.26591E1	-3.26392E1	2.68424E1	1.19965E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.01085E-1
1.7E1	8.41E2	2.0E0	6.87E2	4.7E2	-7.17779E-2	-8.80025E1	-9.05991E-4	-8.80004E1	5.48363E-4	4.3869E-3	9.50813E-2	2.73225E1	-3.26356E1	-3.26212E1	2.6825E1	1.19872E-7	2.51581E-3	2.51581E-3	6.27399E-3	2.99879E-1
1.8E1	3.561E3	2.0E0	7.27E2	5.0E2	-7.22418E-2	-8.80025E1	-9.53674E-4	-8.80008E1	6.4373E-4	4.76837E-3	9.50336E-2	2.73345E1	-3.2653E1	-3.26146E1	2.68538E1	1.19953E-7	2.51525E-3	2.51525E-3	6.29665E-3	2.99686E-1
1.9E1	1.982E3	1.0E0	7.68E2	5.29E2	-7.286E-2	-8.80022E1	-8.34465E-4	-8.80007E1	7.62939E-4	4.50611E-3	9.48191E-2	2.73424E1	-3.26554E1	-3.26284E1	2.68466E1	1.20017E-7	2.51771E-3	2.51771E-3	6.33486E-3	2.9926E-1
2.0E1	2.4649E4	8.0E0	8.08E2	5.58E2	-7.32464E-2	-8.8002E1	-8.34465E-4	-8.80003E1	4.52995E-4	4.55379E-3	9.48429E-2	2.73075E1	-3.26543E1	-3.25983E1	2.68172E1	1.19978E-7	2.52027E-3	2.52027E-3	6.31299E-3	3.01742E-1
2.1E1	4.0E1	0.0E0	8.49E2	5.88E2	-7.38649E-2	-8.80024E1	-7.86781E-4	-8.80006E1	5.72205E-4	4.43459E-3	9.5129E-2	2.73381E1	-3.26717E1	-3.26302E1	2.68442E1	1.19953E-7	2.51525E-3	2.51525E-3	6.29128E-3	3.03286E-1
2.2E1	1.684E3	0.0E0	8.89E2	6.17E2	-7.37874E-2	-8.80023E1	-6.19888E-4	-8.80006E1	2.6226E-4	4.74453E-3	9.50575E-2	2.73476E1	-3.26484E1	-3.26042E1	2.684E1	1.20004E-7	2.51525E-3	2.51525E-3	6.33977E-3	3.00453E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.42513E-2	-8.80025E1	-7.39098E-4	-8.80004E1	5.24521E-4	4.74453E-3	9.50098E-2	2.72672E1	-3.26476E1	-3.2632E1	2.6854E1	1.20226E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.00563E-1
