[Scan]
initial_time=2016-01-18T22:58:00
final_time=2016-01-18T22:58:19
ip_count=19
run=1024
dataset=10
scan=785
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.24736E-2
qbias_imon=-3.71456E-6
ql1_vset=
ql1_vmon=-8.80024E1
ql1_imon=-7.15804E-10
ql2_vset=
ql2_vmon=-1.90735E-4
ql2_imon=1.42314E-9
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-2.19944E-9
ql4_vset=
ql4_vmon=2.6226E-4
ql4_imon=1.61876E-8
mult1=-1.7916E-8
mult2=-2.63677E-9
rf_tmon=-4.29613E-3
rf_agc=3.32675E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.17233E-3
ql5_imon=5.63979E-10
bslens_vset=-6.2E0
bslens_vmon=-6.61843E0
bslens_imon=2.24241E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19901E1
lens5a_imon=1.97554E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12492E2
lens4a_imon=2.05334E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54001E1
cs_ef1b_imon=2.7434E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04591E2
lens23_imon=1.01866E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04829E1
cs_ea1_imon=2.62219E-5
lens1_vset=-2.7E0
lens1_vmon=-2.94394E0
lens1_imon=1.72919E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64843E1
os_ef1alow_imon=2.96648E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04304E1
cs_ea2_imon=1.48002E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84292E1
cs_ef1a_imon=2.89512E-5
olens2_vset=9.7E-1
olens2_vmon=9.7034E-1
olens2_imon=1.17393E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11574E1
os_restr1_imon=4.29166E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14102E1
os_ea1_imon=2.43531E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63449E1
os_ef1bup_imon=3.06595E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25977E0
cs_ionrep_imon=1.14732E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91969E2
cs_nozzle_imon=1.9387E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01791E1
cs_anode1_imon=2.88359E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20418E0
olens4_imon=3.90896E-8
tplens_vset=1.4E-1
tplens_vmon=1.63494E0
tplens_imon=-7.0238E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2593E1
iondef3_imon=1.50515E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26398E1
iondef2_imon=1.56851E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02998E2
lens6_imon=2.97995E-4
ql6_vset=1.0E-1
ql6_vmon=9.53436E-2
ql6_imon=9.47773E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25269E0
ionrepsh_imon=1.7338E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33717E1
lens5b_imon=2.1511E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74699E1
cs_ef2b_imon=3.12217E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.42199E0
os_ea2_imon=-7.69629E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06E2
lens4b_imon=2.00442E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7136E1
cs_ef2a_imon=3.15641E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.03894E0
os_ef2alow_imon=-2.51859E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.84209E-1
os_ef2bup_imon=-5.27202E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11165E1
os_restr2_imon=3.3777E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23046E2
cs_ionfoca_imon=6.28371E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01707E1
cs_anode2_imon=2.23956E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73201E1
iondef1_imon=1.12431E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68412E1
iondef4_imon=1.0899E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=4.81621E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81331E-1
olens1_imon=7.08297E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12834E0
cs_ionaccel_imon=-1.75816E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0206E2
cs_ionfocb_imon=1.47388E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56351E1
einzel_imon=7.59053E-6
window_vset=0.0E0
window_vmon=2.5158E-1
window_imon=-7.27421E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82643E2
mask1_imon=2.39091E-4
mask2_vset=0.0E0
mask2_vmon=-1.86302E1
mask2_imon=-7.16609E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92632E3
multa_neg_imon=7.10202E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9369E3
defgrida_imon=6.50386E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50127E3
multb_neg_imon=7.28607E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.64474E0
defgridb_imon=6.15699E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33329E1
os_fil1_imon=9.41531E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07359E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61354E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30893E1
cs_fil1_imon=9.94293E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62978E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62324E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.02836E-2
os_fil2_imon=-2.67798E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.92909E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.35407E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35478E-1
cs_fil2_imon=-2.5999E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.44005E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21877E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=2.99686E-1
chamber_ion_pmon=1.20055E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.0314E-1
res40_imon=-2.51138E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=197
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.868E3	0.0E0	1.47E2	4.1E1	-7.13143E-2	-8.80025E1	-4.29153E-4	-8.80004E1	6.67572E-4	4.72069E-3	9.48191E-2	2.72991E1	-3.26332E1	-3.265E1	2.6831E1	1.20017E-7	2.5188E-3	2.5188E-3	6.32936E-3	3.00563E-1
2.0E0	9.7026E4	1.08E2	3.16E2	1.6E2	-7.10825E-2	-8.80027E1	-5.24521E-4	-8.80003E1	6.4373E-4	4.52995E-3	9.49383E-2	2.73069E1	-3.26383E1	-3.26272E1	2.68076E1	1.19809E-7	2.51552E-3	2.51552E-3	6.32936E-3	3.00563E-1
3.0E0	1.4E1	0.0E0	4.85E2	2.79E2	-7.201E-2	-8.80023E1	-5.24521E-4	-8.80003E1	6.91414E-4	4.3869E-3	9.47714E-2	2.73611E1	-3.2672E1	-3.26166E1	2.68292E1	1.19965E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.01609E-1
4.0E0	2.1075E4	2.3E1	6.55E2	3.98E2	-7.16233E-2	-8.80021E1	-4.76837E-4	-8.80003E1	6.4373E-4	4.12464E-3	9.47952E-2	2.72998E1	-3.26691E1	-3.2636E1	2.68059E1	1.19851E-7	2.51203E-3	2.51203E-3	6.3074E-3	3.00966E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.18554E-2	-8.80024E1	-8.10623E-4	-8.80005E1	5.48363E-4	4.29153E-3	9.52005E-2	2.73424E1	-3.26903E1	-3.26398E1	2.68208E1	1.19861E-7	2.5188E-3	2.5188E-3	6.29098E-3	3.00563E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.17779E-2	-8.80026E1	-8.82149E-4	-8.80007E1	5.00679E-4	4.3869E-3	9.50336E-2	2.73293E1	-3.26632E1	-3.26201E1	2.68587E1	1.19861E-7	2.5199E-3	2.5199E-3	6.32386E-3	2.9952E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.22418E-2	-8.80023E1	-6.19888E-4	-8.80003E1	4.52995E-4	4.05312E-3	9.5129E-2	2.73027E1	-3.26681E1	-3.26302E1	2.68352E1	1.19953E-7	2.5131E-3	2.5131E-3	6.3074E-3	3.00197E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.18554E-2	-8.80023E1	-8.58307E-4	-8.80007E1	5.00679E-4	4.45843E-3	9.49144E-2	2.73021E1	-3.26573E1	-3.26008E1	2.68256E1	1.20226E-7	2.52428E-3	2.52428E-3	6.3074E-3	2.9952E-1
1.2E1	8.6E1	1.0E0	4.85E2	3.23E2	-7.24736E-2	-8.80025E1	-3.33786E-4	-8.80004E1	3.57628E-4	4.14848E-3	9.47952E-2	2.7352E1	-3.26362E1	-3.26194E1	2.67944E1	1.20055E-7	2.51525E-3	2.51525E-3	6.33977E-3	2.99175E-1
1.3E1	8.0E0	0.0E0	5.25E2	3.53E2	-7.17007E-2	-8.80024E1	-4.29153E-4	-8.80003E1	4.52995E-4	4.48227E-3	9.50575E-2	2.73081E1	-3.26717E1	-3.26338E1	2.68286E1	1.19819E-7	2.51804E-3	2.51804E-3	6.33538E-3	2.99613E-1
1.4E1	3.18E3	1.0E0	5.66E2	3.82E2	-7.27828E-2	-8.80022E1	-4.29153E-4	-8.80003E1	4.76837E-4	4.43459E-3	9.49383E-2	2.73467E1	-3.26517E1	-3.2626E1	2.6807E1	1.20592E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.01085E-1
1.5E1	7.9E1	0.0E0	6.06E2	4.11E2	-7.25507E-2	-8.80022E1	-4.05312E-4	-8.80004E1	5.00679E-4	4.45843E-3	9.50813E-2	2.73279E1	-3.2641E1	-3.2638E1	2.67896E1	1.19965E-7	2.51225E-3	2.51225E-3	6.33486E-3	3.01347E-1
1.6E1	3.93E2	0.0E0	6.47E2	4.41E2	-7.02322E-2	-8.80021E1	-7.15256E-4	-8.80006E1	4.52995E-4	4.48227E-3	9.49144E-2	2.73134E1	-3.26307E1	-3.26095E1	2.68022E1	1.19601E-7	2.51443E-3	2.51443E-3	6.31837E-3	2.9978E-1
1.7E1	8.81E2	0.0E0	6.87E2	4.7E2	-7.09279E-2	-8.80025E1	-5.72205E-4	-8.80004E1	3.33786E-4	4.81606E-3	9.49621E-2	2.73213E1	-3.262E1	-3.2623E1	2.68502E1	1.19913E-7	2.51334E-3	2.51334E-3	6.31837E-3	2.9926E-1
1.8E1	3.513E3	0.0E0	7.27E2	5.0E2	-7.15461E-2	-8.80023E1	-3.57628E-4	-8.8001E1	5.00679E-4	4.12464E-3	9.50575E-2	2.73112E1	-3.26627E1	-3.26199E1	2.68881E1	1.20017E-7	2.51552E-3	2.51552E-3	6.32936E-3	3.00041E-1
1.9E1	1.91E3	0.0E0	7.68E2	5.29E2	-7.22418E-2	-8.80023E1	-4.29153E-4	-8.80003E1	6.91414E-4	4.29153E-3	9.50813E-2	2.72962E1	-3.26502E1	-3.26313E1	2.68346E1	1.19653E-7	2.51662E-3	2.51662E-3	6.32936E-3	3.00563E-1
2.0E1	2.4439E4	1.0E1	8.08E2	5.58E2	-7.16233E-2	-8.80024E1	-7.39098E-4	-8.80005E1	3.09944E-4	4.64916E-3	9.4986E-2	2.72961E1	-3.26428E1	-3.2593E1	2.68545E1	1.20069E-7	2.5188E-3	2.5188E-3	6.32936E-3	3.00824E-1
2.1E1	4.8E1	0.0E0	8.49E2	5.88E2	-7.19325E-2	-8.80024E1	-5.72205E-4	-8.80004E1	1.90735E-4	4.50611E-3	9.48429E-2	2.73422E1	-3.26695E1	-3.26567E1	2.68603E1	1.19851E-7	2.52061E-3	2.52061E-3	6.32356E-3	2.99686E-1
2.2E1	1.707E3	1.0E0	8.89E2	6.17E2	-7.15461E-2	-8.80025E1	-3.33786E-4	-8.80004E1	3.09944E-4	4.45843E-3	9.5129E-2	2.73328E1	-3.26502E1	-3.26242E1	2.68684E1	1.20004E-7	2.51632E-3	2.51632E-3	6.33436E-3	3.00453E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.24736E-2	-8.80024E1	-1.90735E-4	-8.80002E1	2.6226E-4	4.17233E-3	9.53436E-2	2.73201E1	-3.26398E1	-3.2593E1	2.68412E1	1.20055E-7	2.51525E-3	2.51525E-3	6.30202E-3	2.99686E-1
