[Scan]
initial_time=2016-01-18T23:00:40
final_time=2016-01-18T23:01:00
ip_count=19
run=1024
dataset=10
scan=791
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.21643E-2
qbias_imon=-3.83568E-6
ql1_vset=
ql1_vmon=-8.80019E1
ql1_imon=-7.08795E-10
ql2_vset=
ql2_vmon=-1.12057E-3
ql2_imon=1.44542E-9
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-2.21692E-9
ql4_vset=
ql4_vmon=5.96046E-4
ql4_imon=1.61706E-8
mult1=-1.86638E-8
mult2=-2.74226E-9
rf_tmon=-5.13989E-3
rf_agc=3.23122E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.48227E-3
ql5_imon=5.7323E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64144E0
bslens_imon=2.22117E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19836E1
lens5a_imon=2.00209E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12511E2
lens4a_imon=2.04966E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5391E1
cs_ef1b_imon=2.72778E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04625E2
lens23_imon=1.02217E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05077E1
cs_ea1_imon=2.63422E-5
lens1_vset=-2.7E0
lens1_vmon=-2.95986E0
lens1_imon=1.19474E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64799E1
os_ef1alow_imon=2.96306E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0356E1
cs_ea2_imon=1.51188E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84464E1
cs_ef1a_imon=2.88487E-5
olens2_vset=9.7E-1
olens2_vmon=9.69934E-1
olens2_imon=1.16583E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11511E1
os_restr1_imon=4.28365E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15689E1
os_ea1_imon=2.43212E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.64203E1
os_ef1bup_imon=3.07705E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2108E0
cs_ionrep_imon=1.15263E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91949E2
cs_nozzle_imon=1.93625E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0178E1
cs_anode1_imon=2.87896E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2042E0
olens4_imon=3.9037E-8
tplens_vset=1.4E-1
tplens_vmon=1.64438E0
tplens_imon=-3.62597E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26095E1
iondef3_imon=1.50975E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2667E1
iondef2_imon=1.56461E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0293E2
lens6_imon=2.97935E-4
ql6_vset=1.0E-1
ql6_vmon=9.52244E-2
ql6_imon=9.20689E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.3046E0
ionrepsh_imon=1.73521E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33528E1
lens5b_imon=2.14543E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7471E1
cs_ef2b_imon=3.12396E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.36713E0
os_ea2_imon=-6.66986E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06145E2
lens4b_imon=2.00768E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71327E1
cs_ef2a_imon=3.16358E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0563E0
os_ef2alow_imon=-2.54678E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.93176E-1
os_ef2bup_imon=-5.30961E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11013E1
os_restr2_imon=3.37835E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23019E2
cs_ionfoca_imon=6.26247E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01804E1
cs_anode2_imon=2.22526E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73504E1
iondef1_imon=1.09635E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68412E1
iondef4_imon=1.08712E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=4.79417E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81617E-1
olens1_imon=7.04317E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13188E0
cs_ionaccel_imon=-1.66059E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02101E2
cs_ionfocb_imon=1.47435E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56486E1
einzel_imon=7.72259E-6
window_vset=0.0E0
window_vmon=2.57651E-1
window_imon=-8.75184E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82637E2
mask1_imon=2.39105E-4
mask2_vset=0.0E0
mask2_vmon=-1.86431E1
mask2_imon=-7.04896E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92655E3
multa_neg_imon=7.68248E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93717E3
defgrida_imon=6.51447E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50132E3
multb_neg_imon=7.03123E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.46461E0
defgridb_imon=5.93755E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33324E1
os_fil1_imon=9.44164E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07312E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6131E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30914E1
cs_fil1_imon=9.9368E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61706E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62111E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.07901E-2
os_fil2_imon=-2.64602E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.90077E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.39077E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35395E-1
cs_fil2_imon=-2.7329E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.45077E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21838E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31251E-3
inlet_lpb_pmon=3.00635E-1
chamber_ion_pmon=1.20453E-7
chamber_cvt_pmon=2.51854E-3
foreline_cvt_pmon=2.51854E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.54196E-1
res40_imon=-2.4877E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=167
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.886E3	0.0E0	1.47E2	4.1E1	-7.31692E-2	-8.80027E1	-9.29832E-4	-8.80004E1	4.05312E-4	4.52995E-3	9.51529E-2	2.73204E1	-3.26526E1	-3.26201E1	2.68178E1	1.19851E-7	2.51417E-3	2.51417E-3	6.32356E-3	3.01223E-1
2.0E0	9.7178E4	1.15E2	3.16E2	1.6E2	-7.27828E-2	-8.80025E1	-8.34465E-4	-8.80004E1	5.48363E-4	4.55379E-3	9.50336E-2	2.73149E1	-3.2637E1	-3.26193E1	2.67962E1	1.198E-7	2.51847E-3	2.51847E-3	6.32356E-3	3.00453E-1
3.0E0	2.1E1	0.0E0	4.85E2	2.79E2	-7.23189E-2	-8.80026E1	-7.86781E-4	-8.80005E1	5.00679E-4	4.26769E-3	9.50336E-2	2.73346E1	-3.26614E1	-3.2626E1	2.68887E1	1.19925E-7	2.51359E-3	2.51359E-3	6.31858E-3	3.00676E-1
4.0E0	2.1394E4	1.7E1	6.55E2	3.98E2	-7.16233E-2	-8.80024E1	-7.62939E-4	-8.80005E1	5.72205E-4	4.31538E-3	9.4986E-2	2.73252E1	-3.26219E1	-3.26142E1	2.68274E1	1.20042E-7	2.51814E-3	2.51814E-3	6.31798E-3	3.006E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.13143E-2	-8.80027E1	-7.15256E-4	-8.80006E1	5.24521E-4	4.45843E-3	9.50575E-2	2.73436E1	-3.26629E1	-3.25881E1	2.68163E1	1.20363E-7	2.52061E-3	2.52061E-3	6.32356E-3	2.97901E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.17007E-2	-8.80027E1	-8.10623E-4	-8.80004E1	6.91414E-4	4.93526E-3	9.50098E-2	2.73298E1	-3.26591E1	-3.26228E1	2.68427E1	1.20194E-7	2.51823E-3	2.51823E-3	6.32247E-3	3.00293E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.26282E-2	-8.80026E1	-7.15256E-4	-8.80002E1	4.29153E-4	4.55379E-3	9.53197E-2	2.72806E1	-3.26676E1	-3.26187E1	2.68436E1	1.20584E-7	2.51793E-3	2.51793E-3	6.31332E-3	3.03312E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.35556E-2	-8.80024E1	-6.67572E-4	-8.80003E1	6.91414E-4	4.14848E-3	9.5439E-2	2.72945E1	-3.26425E1	-3.25883E1	2.68076E1	1.19819E-7	2.51359E-3	2.51359E-3	6.31858E-3	3.00676E-1
1.2E1	7.1E1	0.0E0	4.85E2	3.23E2	-7.37103E-2	-8.80023E1	-1.12057E-3	-8.80002E1	6.91414E-4	4.48227E-3	9.55105E-2	2.73129E1	-3.26494E1	-3.26146E1	2.68617E1	1.20158E-7	2.52169E-3	2.52169E-3	6.3074E-3	3.01995E-1
1.3E1	1.7E1	0.0E0	5.25E2	3.53E2	-7.34782E-2	-8.80023E1	-5.48363E-4	-8.80003E1	7.39098E-4	4.62532E-3	9.52482E-2	2.73454E1	-3.26278E1	-3.26657E1	2.6831E1	1.20226E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.00824E-1
1.4E1	3.203E3	0.0E0	5.66E2	3.82E2	-7.25507E-2	-8.80025E1	-6.19888E-4	-8.80005E1	5.24521E-4	4.76837E-3	9.53197E-2	2.72895E1	-3.26699E1	-3.2611E1	2.68893E1	1.20017E-7	2.5188E-3	2.5188E-3	6.29098E-3	3.02396E-1
1.5E1	8.6E1	0.0E0	6.06E2	4.11E2	-7.23964E-2	-8.80022E1	-8.82149E-4	-8.80007E1	6.4373E-4	4.91142E-3	9.50098E-2	2.73219E1	-3.26615E1	-3.2647E1	2.67956E1	1.19913E-7	2.52099E-3	2.52099E-3	6.31837E-3	3.00302E-1
1.6E1	4.27E2	1.0E0	6.47E2	4.41E2	-7.286E-2	-8.80023E1	-1.00136E-3	-8.80005E1	4.29153E-4	4.95911E-3	9.52244E-2	2.73327E1	-3.2641E1	-3.2623E1	2.67704E1	1.20174E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.00302E-1
1.7E1	8.9E2	5.0E0	6.87E2	4.7E2	-7.286E-2	-8.80025E1	-9.05991E-4	-8.80007E1	2.86102E-4	4.55379E-3	9.52959E-2	2.73195E1	-3.26627E1	-3.2635E1	2.68376E1	1.19965E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.00302E-1
1.8E1	3.617E3	3.0E0	7.27E2	5.0E2	-7.32464E-2	-8.80021E1	-1.04904E-3	-8.80006E1	2.14577E-4	4.673E-3	9.49383E-2	2.73393E1	-3.26425E1	-3.26449E1	2.68689E1	1.20278E-7	2.51662E-3	2.51662E-3	6.32936E-3	3.00041E-1
1.9E1	1.982E3	2.0E0	7.68E2	5.29E2	-7.25507E-2	-8.80018E1	-9.05991E-4	-8.80003E1	4.29153E-4	4.3869E-3	9.49621E-2	2.73313E1	-3.26425E1	-3.26283E1	2.68194E1	1.19809E-7	2.51771E-3	2.51771E-3	6.32386E-3	2.9874E-1
2.0E1	2.3924E4	8.0E0	8.08E2	5.58E2	-7.23189E-2	-8.80021E1	-8.58307E-4	-8.80005E1	4.05312E-4	4.57764E-3	9.53436E-2	2.73534E1	-3.26406E1	-3.26413E1	2.68348E1	1.19967E-7	2.51956E-3	2.51956E-3	6.3074E-3	2.99663E-1
2.1E1	6.2E1	0.0E0	8.49E2	5.88E2	-7.27828E-2	-8.80021E1	-8.10623E-4	-8.80001E1	5.24521E-4	4.45843E-3	9.50813E-2	2.73285E1	-3.26579E1	-3.26062E1	2.6852E1	1.20116E-7	2.51296E-3	2.51296E-3	6.3016E-3	3.00363E-1
2.2E1	1.628E3	1.0E0	8.89E2	6.17E2	-7.25507E-2	-8.80022E1	-7.15256E-4	-8.80001E1	5.00679E-4	4.48227E-3	9.52244E-2	2.73196E1	-3.26959E1	-3.26266E1	2.68194E1	1.2033E-7	2.52099E-3	2.52099E-3	6.30192E-3	2.9978E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.21643E-2	-8.80019E1	-1.12057E-3	-8.80003E1	5.96046E-4	4.48227E-3	9.52244E-2	2.73504E1	-3.2667E1	-3.26095E1	2.68412E1	1.20453E-7	2.51854E-3	2.51854E-3	6.31251E-3	3.00635E-1
