[Scan]
initial_time=2016-01-18T23:02:27
final_time=2016-01-18T23:02:46
ip_count=19
run=1024
dataset=10
scan=795
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.23964E-2
qbias_imon=-3.75364E-6
ql1_vset=
ql1_vmon=-8.80024E1
ql1_imon=-6.83236E-10
ql2_vset=
ql2_vmon=-8.34465E-4
ql2_imon=1.47306E-9
ql3_vset=
ql3_vmon=-8.80007E1
ql3_imon=-2.24096E-9
ql4_vset=
ql4_vmon=4.52995E-4
ql4_imon=1.62436E-8
mult1=-2.68862E-8
mult2=-2.73857E-9
rf_tmon=-5.72609E-3
rf_agc=3.22942E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.81606E-3
ql5_imon=5.76067E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68897E0
bslens_imon=2.66753E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19424E1
lens5a_imon=1.99208E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12447E2
lens4a_imon=2.04891E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53953E1
cs_ef1b_imon=2.74232E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04564E2
lens23_imon=1.0224E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04676E1
cs_ea1_imon=2.62223E-5
lens1_vset=-2.7E0
lens1_vmon=-2.98428E0
lens1_imon=1.4779E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64608E1
os_ef1alow_imon=2.97802E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03474E1
cs_ea2_imon=1.49388E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8461E1
cs_ef1a_imon=2.91242E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=1.16586E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11238E1
os_restr1_imon=4.27833E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15378E1
os_ea1_imon=2.43982E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63966E1
os_ef1bup_imon=3.06992E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24789E0
cs_ionrep_imon=1.16619E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91926E2
cs_nozzle_imon=1.93352E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01965E1
cs_anode1_imon=2.88395E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20415E0
olens4_imon=3.89969E-8
tplens_vset=1.4E-1
tplens_vmon=1.64143E0
tplens_imon=-2.34457E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2626E1
iondef3_imon=1.49424E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26699E1
iondef2_imon=1.553E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0293E2
lens6_imon=2.98104E-4
ql6_vset=1.0E-1
ql6_vmon=9.51529E-2
ql6_imon=9.55284E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30377E0
ionrepsh_imon=1.71883E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33778E1
lens5b_imon=2.17125E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74724E1
cs_ef2b_imon=3.12722E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.41012E0
os_ea2_imon=-8.72534E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06103E2
lens4b_imon=2.00781E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71258E1
cs_ef2a_imon=3.14344E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.02993E0
os_ef2alow_imon=-2.39245E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.74599E-1
os_ef2bup_imon=-5.3441E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1146E1
os_restr2_imon=3.39824E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23057E2
cs_ionfoca_imon=6.28883E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01803E1
cs_anode2_imon=2.24245E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73147E1
iondef1_imon=1.09733E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67325E1
iondef4_imon=1.10179E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=4.84563E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81498E-1
olens1_imon=7.05085E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13735E0
cs_ionaccel_imon=-1.72212E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02051E2
cs_ionfocb_imon=1.47032E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56633E1
einzel_imon=7.65901E-6
window_vset=0.0E0
window_vmon=2.75607E-1
window_imon=-7.67065E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82697E2
mask1_imon=2.39113E-4
mask2_vset=0.0E0
mask2_vmon=-1.86152E1
mask2_imon=-7.49045E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92624E3
multa_neg_imon=7.38641E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93698E3
defgrida_imon=6.43831E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50149E3
multb_neg_imon=7.11965E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.32637E0
defgridb_imon=6.03456E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33335E1
os_fil1_imon=9.41045E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07389E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6131E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30927E1
cs_fil1_imon=9.932E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63099E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61896E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.95074E-2
os_fil2_imon=-2.66597E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.90506E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.37123E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36126E-1
cs_fil2_imon=-2.44973E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.44856E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21669E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=3.00824E-1
chamber_ion_pmon=1.20174E-7
chamber_cvt_pmon=2.51443E-3
foreline_cvt_pmon=2.51443E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.92328E-1
res40_imon=-2.51499E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=151
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.975E3	0.0E0	1.47E2	4.1E1	-7.09279E-2	-8.80025E1	-5.00679E-4	-8.80004E1	2.6226E-4	4.3869E-3	9.51767E-2	2.73234E1	-3.26602E1	-3.26378E1	2.68876E1	1.19965E-7	2.52209E-3	2.52209E-3	6.32386E-3	3.02133E-1
2.0E0	9.6947E4	7.9E1	3.16E2	1.6E2	-7.14689E-2	-8.80026E1	-5.48363E-4	-8.80001E1	5.48363E-4	4.57764E-3	9.52005E-2	2.72965E1	-3.26468E1	-3.26346E1	2.68325E1	1.20106E-7	2.51417E-3	2.51417E-3	6.33977E-3	3.03286E-1
3.0E0	1.4E1	0.0E0	4.85E2	2.79E2	-7.15461E-2	-8.80027E1	-6.4373E-4	-8.80003E1	6.4373E-4	4.95911E-3	9.51767E-2	2.73265E1	-3.26544E1	-3.26173E1	2.66437E1	1.19913E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.01085E-1
4.0E0	2.1571E4	1.5E1	6.55E2	3.98E2	-7.23189E-2	-8.80029E1	-4.52995E-4	-8.80003E1	8.58307E-4	4.8399E-3	9.5129E-2	2.72965E1	-3.2656E1	-3.26113E1	2.67007E1	1.20209E-7	2.52599E-3	2.52599E-3	6.32896E-3	3.00453E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.21643E-2	-8.80024E1	-5.48363E-4	-8.80003E1	8.34465E-4	4.64916E-3	9.4986E-2	2.72949E1	-3.26506E1	-3.26146E1	2.67499E1	1.19913E-7	2.5199E-3	2.5199E-3	6.3074E-3	2.9978E-1
6.0E0	1.0E0	1.0E0	9.93E2	6.35E2	-7.21643E-2	-8.80029E1	-6.91414E-4	-8.80003E1	4.52995E-4	4.50611E-3	9.48191E-2	2.73321E1	-3.26717E1	-3.26278E1	2.69043E1	1.19819E-7	2.52027E-3	2.52027E-3	6.3074E-3	2.98554E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.25507E-2	-8.8003E1	-8.10623E-4	-8.80001E1	8.82149E-4	4.98295E-3	9.50336E-2	2.73129E1	-3.26512E1	-3.26086E1	2.67926E1	1.20106E-7	2.50882E-3	2.50882E-3	6.31817E-3	2.99686E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.22418E-2	-8.80028E1	-5.48363E-4	-8.80003E1	4.52995E-4	4.8399E-3	9.48906E-2	2.73136E1	-3.26556E1	-3.25958E1	2.67862E1	1.19978E-7	2.50914E-3	2.50914E-3	6.31858E-3	3.00144E-1
1.2E1	6.7E1	0.0E0	4.85E2	3.23E2	-7.18554E-2	-8.80028E1	-9.53674E-4	-8.80004E1	6.67572E-4	4.91142E-3	9.51529E-2	2.73111E1	-3.26567E1	-3.26032E1	2.68917E1	1.20453E-7	2.5216E-3	2.5216E-3	6.33809E-3	3.00878E-1
1.3E1	1.6E1	0.0E0	5.25E2	3.53E2	-7.10051E-2	-8.80028E1	-4.76837E-4	-8.80004E1	7.15256E-4	4.88758E-3	9.49144E-2	2.73135E1	-3.26476E1	-3.26404E1	2.68022E1	1.20031E-7	2.51359E-3	2.51359E-3	6.31299E-3	3.0041E-1
1.4E1	3.257E3	1.0E0	5.66E2	3.82E2	-7.17007E-2	-8.80027E1	-5.72205E-4	-8.80002E1	4.76837E-4	4.72069E-3	9.5129E-2	2.73363E1	-3.26362E1	-3.26014E1	2.68514E1	1.19913E-7	2.52647E-3	2.52647E-3	6.32386E-3	2.98481E-1
1.5E1	8.9E1	0.0E0	6.06E2	4.11E2	-7.14689E-2	-8.80026E1	-5.48363E-4	-8.80001E1	4.76837E-4	4.57764E-3	9.50813E-2	2.73063E1	-3.26543E1	-3.26307E1	2.68476E1	1.20122E-7	2.51334E-3	2.51334E-3	6.3514E-3	2.97445E-1
1.6E1	3.98E2	0.0E0	6.47E2	4.41E2	-7.21643E-2	-8.80026E1	-2.6226E-4	-8.80005E1	5.24521E-4	4.673E-3	9.49144E-2	2.73502E1	-3.26386E1	-3.2605E1	2.68226E1	1.20055E-7	2.51096E-3	2.51096E-3	6.34518E-3	2.9943E-1
1.7E1	8.81E2	0.0E0	6.87E2	4.7E2	-7.23964E-2	-8.80024E1	-4.05312E-4	-8.80002E1	6.4373E-4	4.45843E-3	9.5129E-2	2.7346E1	-3.26771E1	-3.25912E1	2.6816E1	1.20017E-7	2.52538E-3	2.52538E-3	6.29098E-3	2.9978E-1
1.8E1	3.48E3	1.0E0	7.27E2	5.0E2	-7.30146E-2	-8.80025E1	-6.19888E-4	-8.80002E1	1.07288E-3	4.43459E-3	9.4986E-2	2.7349E1	-3.26789E1	-3.26224E1	2.67932E1	1.19861E-7	2.5188E-3	2.5188E-3	6.34037E-3	3.00041E-1
1.9E1	1.993E3	0.0E0	7.68E2	5.29E2	-7.23964E-2	-8.80023E1	-4.29153E-4	-8.80004E1	5.00679E-4	4.48227E-3	9.48191E-2	2.73196E1	-3.26283E1	-3.26446E1	2.68991E1	1.20174E-7	2.51552E-3	2.51552E-3	6.31288E-3	2.9874E-1
2.0E1	2.4574E4	1.3E1	8.08E2	5.58E2	-7.23964E-2	-8.80026E1	-6.91414E-4	-8.80003E1	4.29153E-4	4.57764E-3	9.50575E-2	2.73718E1	-3.26502E1	-3.2649E1	2.67241E1	1.1993E-7	2.51679E-3	2.51679E-3	6.323E-3	2.9926E-1
2.1E1	6.0E1	0.0E0	8.49E2	5.88E2	-7.286E-2	-8.80028E1	-4.05312E-4	-8.80005E1	7.15256E-4	4.60148E-3	9.51529E-2	2.73281E1	-3.26832E1	-3.26077E1	2.67485E1	1.19861E-7	2.51443E-3	2.51443E-3	6.3074E-3	2.98222E-1
2.2E1	1.743E3	0.0E0	8.89E2	6.17E2	-7.286E-2	-8.80022E1	-5.00679E-4	-8.80003E1	6.91414E-4	4.79221E-3	9.53197E-2	2.73424E1	-3.26699E1	-3.26464E1	2.69031E1	1.19902E-7	2.52276E-3	2.52276E-3	6.32896E-3	3.0148E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.23964E-2	-8.80024E1	-8.34465E-4	-8.80007E1	4.52995E-4	4.81606E-3	9.51529E-2	2.73147E1	-3.26699E1	-3.2626E1	2.67325E1	1.20174E-7	2.51443E-3	2.51443E-3	6.32386E-3	3.00824E-1
