[Scan]
initial_time=2016-01-18T23:02:53
final_time=2016-01-18T23:03:13
ip_count=19
run=1024
dataset=10
scan=796
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.12368E-2
qbias_imon=-3.7752E-6
ql1_vset=
ql1_vmon=-8.80024E1
ql1_imon=-6.75857E-10
ql2_vset=
ql2_vmon=-3.57628E-4
ql2_imon=1.41255E-9
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-2.26103E-9
ql4_vset=
ql4_vmon=5.72205E-4
ql4_imon=1.61567E-8
mult1=-1.68052E-8
mult2=-2.75069E-9
rf_tmon=-4.56257E-3
rf_agc=3.29198E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.05312E-3
ql5_imon=5.66089E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67275E0
bslens_imon=2.60625E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19863E1
lens5a_imon=1.99569E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1249E2
lens4a_imon=2.0492E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53923E1
cs_ef1b_imon=2.72718E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04641E2
lens23_imon=1.0246E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04682E1
cs_ea1_imon=2.58979E-5
lens1_vset=-2.7E0
lens1_vmon=-2.99029E0
lens1_imon=1.48871E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64723E1
os_ef1alow_imon=2.96937E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03985E1
cs_ea2_imon=1.48703E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8431E1
cs_ef1a_imon=2.89044E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=1.16766E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1152E1
os_restr1_imon=4.26607E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15372E1
os_ea1_imon=2.43369E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63828E1
os_ef1bup_imon=3.07208E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23347E0
cs_ionrep_imon=1.17448E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9194E2
cs_nozzle_imon=1.93546E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01917E1
cs_anode1_imon=2.87494E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20451E0
olens4_imon=3.89882E-8
tplens_vset=1.4E-1
tplens_vmon=1.68529E0
tplens_imon=-3.4621E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26001E1
iondef3_imon=1.49568E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26649E1
iondef2_imon=1.55769E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02982E2
lens6_imon=2.98137E-4
ql6_vset=1.0E-1
ql6_vmon=9.50813E-2
ql6_imon=9.29523E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.31759E0
ionrepsh_imon=1.72928E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33664E1
lens5b_imon=2.16837E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74603E1
cs_ef2b_imon=3.12794E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.42934E0
os_ea2_imon=-5.19248E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06092E2
lens4b_imon=2.00385E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71318E1
cs_ef2a_imon=3.16434E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.02212E0
os_ef2alow_imon=-2.64473E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.76401E-1
os_ef2bup_imon=-5.28644E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1122E1
os_restr2_imon=3.37193E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23026E2
cs_ionfoca_imon=6.29243E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01785E1
cs_anode2_imon=2.22695E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73269E1
iondef1_imon=1.11464E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68442E1
iondef4_imon=1.10071E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=4.77257E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81712E-1
olens1_imon=7.05404E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12834E0
cs_ionaccel_imon=-1.69689E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02081E2
cs_ionfocb_imon=1.47233E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56321E1
einzel_imon=7.69865E-6
window_vset=0.0E0
window_vmon=2.29356E-1
window_imon=-8.89599E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82639E2
mask1_imon=2.39034E-4
mask2_vset=0.0E0
mask2_vmon=-1.86368E1
mask2_imon=-6.80569E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92627E3
multa_neg_imon=7.45851E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93694E3
defgrida_imon=6.4996E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50116E3
multb_neg_imon=6.99708E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.48277E0
defgridb_imon=5.95525E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3334E1
os_fil1_imon=9.4227E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06867E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61312E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30939E1
cs_fil1_imon=9.94479E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62396E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62352E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.1313E-2
os_fil2_imon=-2.71402E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.71886E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.4911E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36643E-1
cs_fil2_imon=-2.40168E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.25985E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21835E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33486E-3
inlet_lpb_pmon=2.9978E-1
chamber_ion_pmon=1.20069E-7
chamber_cvt_pmon=2.52209E-3
foreline_cvt_pmon=2.52209E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.73708E-1
res40_imon=-2.64113E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=157
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.874E3	1.0E0	1.47E2	4.1E1	-7.24736E-2	-8.80025E1	-4.52995E-4	-8.80004E1	3.33786E-4	4.41074E-3	9.52721E-2	2.73027E1	-3.26815E1	-3.25918E1	2.67589E1	1.19861E-7	2.52099E-3	2.52099E-3	6.34037E-3	3.00302E-1
2.0E0	9.6811E4	9.6E1	3.16E2	1.6E2	-7.23189E-2	-8.80022E1	-1.19209E-4	-8.80005E1	4.29153E-4	4.43459E-3	9.50336E-2	2.73472E1	-3.26717E1	-3.26248E1	2.68953E1	1.19861E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.00563E-1
3.0E0	2.2E1	1.0E0	4.85E2	2.79E2	-7.18554E-2	-8.80023E1	-5.24521E-4	-8.80007E1	7.15256E-4	4.31538E-3	9.52482E-2	2.73001E1	-3.26506E1	-3.26075E1	2.68843E1	1.20122E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.00563E-1
4.0E0	2.1317E4	1.2E1	6.55E2	3.98E2	-7.20871E-2	-8.80021E1	-4.29153E-4	-8.80003E1	5.24521E-4	4.45843E-3	9.52005E-2	2.73541E1	-3.26719E1	-3.26395E1	2.68154E1	1.1986E-7	2.51823E-3	2.51823E-3	6.31242E-3	3.00293E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.21643E-2	-8.80025E1	-6.19888E-4	-8.80006E1	6.67572E-4	4.19617E-3	9.54628E-2	2.73327E1	-3.26543E1	-3.2623E1	2.68196E1	1.201E-7	2.51838E-3	2.51838E-3	6.28468E-3	2.9917E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.23189E-2	-8.80022E1	-7.62939E-4	-8.80005E1	5.72205E-4	4.14848E-3	9.53436E-2	2.73201E1	-3.26951E1	-3.26206E1	2.6855E1	1.20122E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.00824E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.286E-2	-8.80023E1	-5.96046E-4	-8.80004E1	4.52995E-4	4.02927E-3	9.52959E-2	2.73352E1	-3.26661E1	-3.26236E1	2.68484E1	1.20055E-7	2.51632E-3	2.51632E-3	6.32356E-3	3.01738E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.22418E-2	-8.80022E1	-6.67572E-4	-8.80005E1	6.67572E-4	4.33922E-3	9.52244E-2	2.73086E1	-3.27115E1	-3.25629E1	2.68262E1	1.19965E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.02659E-1
1.2E1	9.6E1	0.0E0	4.85E2	3.23E2	-7.23964E-2	-8.80024E1	-7.86781E-4	-8.80007E1	4.29153E-4	4.17233E-3	9.51767E-2	2.72837E1	-3.26695E1	-3.25988E1	2.68348E1	1.19891E-7	2.51393E-3	2.51393E-3	6.31269E-3	3.02621E-1
1.3E1	1.7E1	0.0E0	5.25E2	3.53E2	-7.14689E-2	-8.80025E1	-7.39098E-4	-8.80007E1	5.72205E-4	4.33922E-3	9.48906E-2	2.73309E1	-3.2638E1	-3.26518E1	2.68563E1	1.198E-7	2.51417E-3	2.51417E-3	6.31278E-3	3.0071E-1
1.4E1	3.128E3	1.0E0	5.66E2	3.82E2	-7.14689E-2	-8.80024E1	-2.38419E-4	-8.80006E1	4.52995E-4	4.31538E-3	9.5129E-2	2.73616E1	-3.26344E1	-3.26278E1	2.69067E1	1.19809E-7	2.51443E-3	2.51443E-3	6.32386E-3	3.02133E-1
1.5E1	8.5E1	0.0E0	6.06E2	4.11E2	-7.23964E-2	-8.80023E1	-7.39098E-4	-8.80008E1	7.62939E-4	4.41074E-3	9.50813E-2	2.73187E1	-3.26467E1	-3.26207E1	2.6822E1	1.20106E-7	2.51417E-3	2.51417E-3	6.32896E-3	3.00453E-1
1.6E1	4.6E2	0.0E0	6.47E2	4.41E2	-7.22418E-2	-8.80022E1	-6.67572E-4	-8.80006E1	2.14577E-4	4.50611E-3	9.51052E-2	2.73448E1	-3.26398E1	-3.26512E1	2.67571E1	1.19809E-7	2.5188E-3	2.5188E-3	6.32936E-3	3.00302E-1
1.7E1	8.97E2	2.0E0	6.87E2	4.7E2	-7.16233E-2	-8.80024E1	-5.96046E-4	-8.80005E1	5.48363E-4	4.673E-3	9.51529E-2	2.7349E1	-3.26615E1	-3.2617E1	2.69241E1	1.19861E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.00302E-1
1.8E1	3.599E3	0.0E0	7.27E2	5.0E2	-7.16233E-2	-8.80024E1	-6.4373E-4	-8.80004E1	6.67572E-4	4.43459E-3	9.51767E-2	2.73163E1	-3.26549E1	-3.26178E1	2.67978E1	1.19445E-7	2.52318E-3	2.52318E-3	6.34037E-3	3.00563E-1
1.9E1	1.94E3	0.0E0	7.68E2	5.29E2	-7.16233E-2	-8.80023E1	-4.05312E-4	-8.80007E1	3.8147E-4	4.26769E-3	9.52244E-2	2.73183E1	-3.26681E1	-3.26416E1	2.68448E1	1.19851E-7	2.51954E-3	2.51954E-3	6.31817E-3	2.9943E-1
2.0E1	2.4209E4	1.2E1	8.08E2	5.58E2	-7.23189E-2	-8.80026E1	-5.00679E-4	-8.80003E1	4.76837E-4	4.57764E-3	9.48906E-2	2.73129E1	-3.26573E1	-3.2623E1	2.67668E1	1.19913E-7	2.5188E-3	2.5188E-3	6.32386E-3	2.9952E-1
2.1E1	6.3E1	0.0E0	8.49E2	5.88E2	-7.11597E-2	-8.80025E1	-5.72205E-4	-8.80002E1	6.67572E-4	4.33922E-3	9.49383E-2	2.73285E1	-3.26549E1	-3.26446E1	2.68436E1	1.20004E-7	2.51632E-3	2.51632E-3	6.29128E-3	2.9943E-1
2.2E1	1.726E3	0.0E0	8.89E2	6.17E2	-7.19325E-2	-8.80022E1	-6.4373E-4	-8.80005E1	7.62939E-4	4.17233E-3	9.52244E-2	2.73293E1	-3.2685E1	-3.26166E1	2.68599E1	1.19757E-7	2.51662E-3	2.51662E-3	6.30192E-3	2.9978E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.12368E-2	-8.80024E1	-3.57628E-4	-8.80003E1	5.72205E-4	4.05312E-3	9.50813E-2	2.73269E1	-3.26649E1	-3.26001E1	2.68442E1	1.20069E-7	2.52209E-3	2.52209E-3	6.33486E-3	2.9978E-1
