[Scan]
initial_time=2016-01-18T23:03:47
final_time=2016-01-18T23:04:06
ip_count=19
run=1024
dataset=10
scan=798
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.24736E-2
qbias_imon=-3.82629E-6
ql1_vset=
ql1_vmon=-8.80025E1
ql1_imon=-6.86157E-10
ql2_vset=
ql2_vmon=-6.67572E-4
ql2_imon=1.45073E-9
ql3_vset=
ql3_vmon=-8.80006E1
ql3_imon=-2.27907E-9
ql4_vset=
ql4_vmon=5.00679E-4
ql4_imon=1.6212E-8
mult1=-2.56611E-8
mult2=-2.75661E-9
rf_tmon=-3.96203E-3
rf_agc=3.58463E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.41074E-3
ql5_imon=5.64504E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64262E0
bslens_imon=2.22117E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.18969E1
lens5a_imon=1.99961E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12511E2
lens4a_imon=2.05029E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54009E1
cs_ef1b_imon=2.73612E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04649E2
lens23_imon=1.02128E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04498E1
cs_ea1_imon=2.61122E-5
lens1_vset=-2.7E0
lens1_vmon=-3.00705E0
lens1_imon=1.60531E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64863E1
os_ef1alow_imon=2.96236E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03743E1
cs_ea2_imon=1.50055E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84278E1
cs_ef1a_imon=2.89425E-5
olens2_vset=9.7E-1
olens2_vmon=9.69791E-1
olens2_imon=1.15826E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1143E1
os_restr1_imon=4.27045E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14781E1
os_ea1_imon=2.42646E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63369E1
os_ef1bup_imon=3.08295E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22555E0
cs_ionrep_imon=1.17457E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91927E2
cs_nozzle_imon=1.93424E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01989E1
cs_anode1_imon=2.86714E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20434E0
olens4_imon=3.8959E-8
tplens_vset=1.4E-1
tplens_vmon=1.69806E0
tplens_imon=-4.22766E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26254E1
iondef3_imon=1.5094E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26892E1
iondef2_imon=1.5632E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02952E2
lens6_imon=2.98052E-4
ql6_vset=1.0E-1
ql6_vmon=9.49383E-2
ql6_imon=8.71897E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27156E0
ionrepsh_imon=1.70548E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33758E1
lens5b_imon=2.15039E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74542E1
cs_ef2b_imon=3.13404E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.41609E0
os_ea2_imon=-8.43956E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06088E2
lens4b_imon=2.00502E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71379E1
cs_ef2a_imon=3.15385E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.02039E0
os_ef2alow_imon=-2.49813E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.75221E-1
os_ef2bup_imon=-5.34088E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11204E1
os_restr2_imon=3.36237E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23073E2
cs_ionfoca_imon=6.29574E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01838E1
cs_anode2_imon=2.21762E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73115E1
iondef1_imon=1.10378E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68395E1
iondef4_imon=1.0972E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=4.77672E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81736E-1
olens1_imon=7.02576E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15041E0
cs_ionaccel_imon=-1.86216E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02007E2
cs_ionfocb_imon=1.47535E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56475E1
einzel_imon=7.59748E-6
window_vset=0.0E0
window_vmon=2.64023E-1
window_imon=-6.56243E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82648E2
mask1_imon=2.39025E-4
mask2_vset=0.0E0
mask2_vmon=-1.86118E1
mask2_imon=-6.38866E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92645E3
multa_neg_imon=7.70726E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9372E3
defgrida_imon=6.53217E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50125E3
multb_neg_imon=7.08432E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.19885E0
defgridb_imon=5.95171E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3335E1
os_fil1_imon=9.38354E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06987E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61107E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30892E1
cs_fil1_imon=9.92076E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63565E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62113E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.09167E-2
os_fil2_imon=-2.81399E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.79072E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.51353E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37143E-1
cs_fil2_imon=-2.23478E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.81364E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21781E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34231E-3
inlet_lpb_pmon=2.98161E-1
chamber_ion_pmon=1.20171E-7
chamber_cvt_pmon=2.51296E-3
foreline_cvt_pmon=2.51296E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.2929E-1
res40_imon=-2.5016E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=165
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.802E3	0.0E0	1.47E2	4.1E1	-7.27053E-2	-8.80025E1	-9.77516E-4	-8.80002E1	3.8147E-4	4.57764E-3	9.52482E-2	2.73181E1	-3.26543E1	-3.26207E1	2.6852E1	1.20106E-7	2.51632E-3	2.51632E-3	6.31278E-3	2.99941E-1
2.0E0	9.6956E4	1.19E2	3.16E2	1.6E2	-7.286E-2	-8.80028E1	-9.05991E-4	-8.80003E1	4.52995E-4	4.76837E-3	9.48906E-2	2.73093E1	-3.26801E1	-3.26194E1	2.67986E1	1.198E-7	2.52061E-3	2.52061E-3	6.33977E-3	3.00966E-1
3.0E0	1.6E1	0.0E0	4.85E2	2.79E2	-7.29374E-2	-8.80026E1	-1.12057E-3	-8.80002E1	4.29153E-4	4.81606E-3	9.51529E-2	2.72951E1	-3.26543E1	-3.26148E1	2.68534E1	1.20244E-7	2.51804E-3	2.51804E-3	6.30182E-3	3.00676E-1
4.0E0	2.1516E4	1.3E1	6.55E2	3.98E2	-7.18554E-2	-8.80026E1	-4.52995E-4	-8.80003E1	6.19888E-4	4.93526E-3	9.51529E-2	2.73299E1	-3.26579E1	-3.26178E1	2.68196E1	1.1974E-7	2.51182E-3	2.51182E-3	6.32328E-3	2.99845E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.26282E-2	-8.80024E1	-6.19888E-4	-8.79999E1	5.48363E-4	4.72069E-3	9.48429E-2	2.73099E1	-3.26567E1	-3.26194E1	2.68737E1	1.19965E-7	2.52209E-3	2.52209E-3	6.3074E-3	3.01871E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.24736E-2	-8.80026E1	-7.86781E-4	-8.80002E1	9.29832E-4	4.55379E-3	9.50575E-2	2.73381E1	-3.26567E1	-3.26296E1	2.68508E1	1.20017E-7	2.52099E-3	2.52099E-3	6.32936E-3	3.00563E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.30146E-2	-8.80024E1	-8.10623E-4	-8.80003E1	3.33786E-4	4.52995E-3	9.48668E-2	2.73177E1	-3.26663E1	-3.26134E1	2.68424E1	1.19861E-7	2.51771E-3	2.51771E-3	6.32936E-3	2.9926E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.30146E-2	-8.80024E1	-1.0252E-3	-8.80002E1	1.19209E-4	4.43459E-3	9.52005E-2	2.73141E1	-3.26518E1	-3.26284E1	2.68352E1	1.20174E-7	2.51552E-3	2.51552E-3	6.31288E-3	2.9978E-1
1.2E1	1.06E2	0.0E0	4.85E2	3.23E2	-7.23964E-2	-8.80025E1	-9.29832E-4	-8.80003E1	2.38419E-4	5.03063E-3	9.53674E-2	2.73159E1	-3.26579E1	-3.26182E1	2.67806E1	1.20055E-7	2.51954E-3	2.51954E-3	6.34518E-3	3.00197E-1
1.3E1	1.9E1	0.0E0	5.25E2	3.53E2	-7.25507E-2	-8.80025E1	-7.15256E-4	-8.80003E1	5.00679E-4	4.52995E-3	9.51767E-2	2.73195E1	-3.26482E1	-3.26452E1	2.69211E1	1.20137E-7	2.52027E-3	2.52027E-3	6.30182E-3	2.99613E-1
1.4E1	3.27E3	1.0E0	5.66E2	3.82E2	-7.22418E-2	-8.80026E1	-6.67572E-4	-8.80001E1	4.76837E-4	4.76837E-3	9.51052E-2	2.7298E1	-3.26614E1	-3.26455E1	2.68636E1	1.19902E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.00966E-1
1.5E1	7.8E1	0.0E0	6.06E2	4.11E2	-7.17779E-2	-8.80023E1	-9.05991E-4	-8.80002E1	3.57628E-4	4.55379E-3	9.51052E-2	2.73267E1	-3.26795E1	-3.26212E1	2.681E1	1.19861E-7	2.5199E-3	2.5199E-3	6.32936E-3	3.00824E-1
1.6E1	4.26E2	0.0E0	6.47E2	4.41E2	-7.13915E-2	-8.80026E1	-1.09673E-3	-8.80001E1	4.52995E-4	4.33922E-3	9.50813E-2	2.73334E1	-3.26655E1	-3.26071E1	2.6819E1	1.19953E-7	2.51203E-3	2.51203E-3	6.3074E-3	3.00197E-1
1.7E1	8.21E2	1.0E0	6.87E2	4.7E2	-7.19325E-2	-8.80025E1	-1.09673E-3	-8.80001E1	2.14577E-4	4.36306E-3	9.48429E-2	2.73069E1	-3.26615E1	-3.26474E1	2.68695E1	1.20017E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.00041E-1
1.8E1	3.357E3	5.0E0	7.27E2	5.0E2	-7.17779E-2	-8.80023E1	-9.77516E-4	-8.80002E1	2.86102E-4	4.55379E-3	9.52244E-2	2.73411E1	-3.26765E1	-3.26164E1	2.68364E1	1.19809E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.01871E-1
1.9E1	1.949E3	1.0E0	7.68E2	5.29E2	-7.24736E-2	-8.80023E1	-8.34465E-4	-8.80004E1	4.05312E-4	4.64916E-3	9.5129E-2	2.73352E1	-3.26537E1	-3.26366E1	2.68569E1	1.20017E-7	2.51116E-3	2.51116E-3	6.30192E-3	3.01347E-1
2.0E1	2.4252E4	1.4E1	8.08E2	5.58E2	-7.22418E-2	-8.80026E1	-5.96046E-4	-8.80003E1	4.05312E-4	4.52995E-3	9.53674E-2	2.73322E1	-3.26697E1	-3.26119E1	2.68343E1	1.19851E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.00453E-1
2.1E1	3.9E1	0.0E0	8.49E2	5.88E2	-7.29374E-2	-8.80029E1	-8.82149E-4	-8.80006E1	7.15256E-5	4.81606E-3	9.50098E-2	2.73185E1	-3.26355E1	-3.26344E1	2.68423E1	1.20209E-7	2.51847E-3	2.51847E-3	6.30202E-3	2.99175E-1
2.2E1	1.718E3	1.0E0	8.89E2	6.17E2	-7.29374E-2	-8.80026E1	-9.53674E-4	-8.80007E1	1.90735E-4	4.72069E-3	9.50098E-2	2.73463E1	-3.26834E1	-3.26179E1	2.68113E1	1.20016E-7	2.5216E-3	2.5216E-3	6.3074E-3	2.98696E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.24736E-2	-8.80025E1	-6.67572E-4	-8.80006E1	5.00679E-4	4.41074E-3	9.49383E-2	2.73115E1	-3.26892E1	-3.26254E1	2.68395E1	1.20171E-7	2.51296E-3	2.51296E-3	6.34231E-3	2.98161E-1
