[Scan]
initial_time=2016-01-18T23:07:05
final_time=2016-01-18T23:07:24
ip_count=19
run=1024
dataset=11
scan=805
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09456E0
qbias_imon=-1.08831E-4
ql1_vset=
ql1_vmon=-7.58839E-1
ql1_imon=1.45799E-8
ql2_vset=
ql2_vmon=-7.35521E-1
ql2_imon=2.0411E-9
ql3_vset=
ql3_vmon=-9.19452E0
ql3_imon=1.68647E-9
ql4_vset=
ql4_vmon=-9.19001E0
ql4_imon=-3.8234E-10
mult1=-1.03183E-8
mult2=-2.73258E-9
rf_tmon=-4.43432E-3
rf_agc=3.3634E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.72069E-3
ql5_imon=1.65927E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68037E0
bslens_imon=2.82995E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19553E1
lens5a_imon=1.99819E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1247E2
lens4a_imon=2.04884E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53899E1
cs_ef1b_imon=3.15663E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04593E2
lens23_imon=1.02089E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04711E1
cs_ea1_imon=1.11299E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35899E0
lens1_imon=2.71669E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64794E1
os_ef1alow_imon=2.99607E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03832E1
cs_ea2_imon=1.36358E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84394E1
cs_ef1a_imon=3.04021E-5
olens2_vset=9.7E-1
olens2_vmon=9.69934E-1
olens2_imon=1.15536E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.115E1
os_restr1_imon=4.28748E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15341E1
os_ea1_imon=2.45725E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63664E1
os_ef1bup_imon=3.08608E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24738E0
cs_ionrep_imon=9.51235E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9193E2
cs_nozzle_imon=1.93413E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01699E1
cs_anode1_imon=1.95419E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20401E0
olens4_imon=3.14673E-8
tplens_vset=1.4E-1
tplens_vmon=1.68096E0
tplens_imon=-3.23663E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26236E1
iondef3_imon=1.51365E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26554E1
iondef2_imon=1.54692E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02926E2
lens6_imon=2.98211E-4
ql6_vset=1.0E-1
ql6_vmon=9.47952E-2
ql6_imon=3.98791E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.33586E0
ionrepsh_imon=8.55317E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33516E1
lens5b_imon=2.16985E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74374E1
cs_ef2b_imon=3.13196E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.43084E0
os_ea2_imon=-7.20077E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06073E2
lens4b_imon=2.00623E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71217E1
cs_ef2a_imon=3.1754E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.02849E0
os_ef2alow_imon=-2.40429E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.01285E-1
os_ef2bup_imon=-5.18797E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11181E1
os_restr2_imon=3.38217E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23048E2
cs_ionfoca_imon=6.28548E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01618E1
cs_anode2_imon=2.08521E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73213E1
iondef1_imon=1.12077E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68364E1
iondef4_imon=1.10658E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71776E1
olens3_imon=4.82343E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81426E-1
olens1_imon=7.02207E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15331E0
cs_ionaccel_imon=-7.95253E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02093E2
cs_ionfocb_imon=1.47306E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56399E1
einzel_imon=7.75734E-6
window_vset=0.0E0
window_vmon=2.61127E-1
window_imon=-6.70144E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82651E2
mask1_imon=2.39247E-4
mask2_vset=0.0E0
mask2_vmon=-1.86622E1
mask2_imon=-5.76312E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92636E3
multa_neg_imon=7.3427E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93726E3
defgrida_imon=6.80471E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50117E3
multb_neg_imon=7.25775E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42032E0
defgridb_imon=6.01188E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3327E1
os_fil1_imon=9.4015E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07538E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61019E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31844E1
cs_fil1_imon=6.58078E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.10034E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63033E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.47156E-2
os_fil2_imon=-2.42592E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.14983E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.52492E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30401E-1
cs_fil2_imon=-2.2174E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.33894E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21737E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33977E-3
inlet_lpb_pmon=3.0071E-1
chamber_ion_pmon=1.20004E-7
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.18865E-1
res40_imon=-2.47728E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=167
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09487E0	-7.5922E-1	-7.35402E-1	-9.19437E0	-9.18975E0	4.36306E-3	9.50813E-2	2.73526E1	-3.26724E1	-3.26306E1	2.69096E1	1.20004E-7	2.51739E-3	2.51739E-3	6.31278E-3	3.00197E-1
2.0E0	2.5E1	0.0E0	3.16E2	1.6E2	-2.09449E0	-7.59363E-1	-7.35378E-1	-9.19409E0	-9.18953E0	4.64916E-3	9.51767E-2	2.72702E1	-3.26958E1	-3.25954E1	2.69866E1	1.20192E-7	2.51919E-3	2.51919E-3	6.31269E-3	3.00348E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09495E0	-7.59172E-1	-7.35283E-1	-9.19421E0	-9.18956E0	4.69685E-3	9.52482E-2	2.73429E1	-3.26645E1	-3.26242E1	2.69884E1	1.19872E-7	2.51693E-3	2.51693E-3	6.31299E-3	3.0041E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09394E0	-7.58672E-1	-7.35068E-1	-9.19461E0	-9.18999E0	5.17368E-3	9.4986E-2	2.73105E1	-3.26681E1	-3.2617E1	2.68702E1	1.20069E-7	2.52099E-3	2.52099E-3	6.31837E-3	2.9926E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09302E0	-7.59006E-1	-7.35521E-1	-9.19461E0	-9.18994E0	4.8399E-3	9.5129E-2	2.73297E1	-3.26374E1	-3.26368E1	2.69117E1	1.20004E-7	2.52169E-3	2.52169E-3	6.29665E-3	2.99686E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0934E0	-7.58958E-1	-7.35068E-1	-9.19435E0	-9.18992E0	4.8399E-3	9.47475E-2	2.73139E1	-3.2662E1	-3.26248E1	2.70625E1	1.20031E-7	2.52921E-3	2.52921E-3	6.30182E-3	2.99879E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09418E0	-7.58934E-1	-7.35378E-1	-9.1943E0	-9.18982E0	4.95911E-3	9.50575E-2	2.73165E1	-3.26744E1	-3.2601E1	2.67879E1	1.198E-7	2.51417E-3	2.51417E-3	6.33436E-3	3.01738E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09356E0	-7.58791E-1	-7.3545E-1	-9.19428E0	-9.18989E0	4.88758E-3	9.48429E-2	2.73261E1	-3.26572E1	-3.26184E1	2.68768E1	1.1988E-7	2.51679E-3	2.51679E-3	6.3282E-3	3.03227E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09394E0	-7.58767E-1	-7.35664E-1	-9.1943E0	-9.18984E0	4.3869E-3	9.46283E-2	2.73134E1	-3.26673E1	-3.26284E1	2.6962E1	1.20171E-7	2.5199E-3	2.5199E-3	6.33065E-3	3.0147E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09557E0	-7.58862E-1	-7.35641E-1	-9.19442E0	-9.18996E0	4.60148E-3	9.49621E-2	2.73087E1	-3.26314E1	-3.26098E1	2.68671E1	1.19953E-7	2.5131E-3	2.5131E-3	6.32896E-3	2.9892E-1
1.4E1	5.0E0	0.0E0	5.66E2	3.82E2	-2.09487E0	-7.59077E-1	-7.35593E-1	-9.19442E0	-9.1902E0	4.29153E-3	9.50098E-2	2.72961E1	-3.26356E1	-3.2632E1	2.69121E1	1.19861E-7	2.51662E-3	2.51662E-3	6.31288E-3	2.97704E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09456E0	-7.58886E-1	-7.36046E-1	-9.19442E0	-9.18992E0	4.31538E-3	9.4986E-2	2.73261E1	-3.2626E1	-3.26044E1	2.66857E1	1.19705E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.00041E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09495E0	-7.58886E-1	-7.35855E-1	-9.1944E0	-9.18961E0	4.52995E-3	9.4986E-2	2.73381E1	-3.26779E1	-3.26036E1	2.69571E1	1.19913E-7	2.52209E-3	2.52209E-3	6.32386E-3	2.98481E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09495E0	-7.58958E-1	-7.35664E-1	-9.1943E0	-9.18994E0	4.673E-3	9.51052E-2	2.7355E1	-3.26597E1	-3.26314E1	2.68382E1	1.20106E-7	2.52384E-3	2.52384E-3	6.32356E-3	2.9841E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09472E0	-7.586E-1	-7.35569E-1	-9.19449E0	-9.18956E0	4.52995E-3	9.4986E-2	2.73594E1	-3.26384E1	-3.26561E1	2.67848E1	1.19913E-7	2.51771E-3	2.51771E-3	6.32936E-3	2.9978E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09464E0	-7.58839E-1	-7.35307E-1	-9.1944E0	-9.18989E0	4.55379E-3	9.4986E-2	2.73253E1	-3.27056E1	-3.26383E1	2.69439E1	1.20106E-7	2.51417E-3	2.51417E-3	6.30202E-3	2.99941E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09495E0	-7.59292E-1	-7.35497E-1	-9.19442E0	-9.19003E0	4.33922E-3	9.48668E-2	2.73009E1	-3.26843E1	-3.25834E1	2.67644E1	1.19913E-7	2.52209E-3	2.52209E-3	6.33486E-3	3.02396E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09472E0	-7.58743E-1	-7.35664E-1	-9.19447E0	-9.18977E0	4.62532E-3	9.49144E-2	2.73576E1	-3.26956E1	-3.26036E1	2.68785E1	1.19766E-7	2.5147E-3	2.5147E-3	6.28511E-3	3.0041E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09449E0	-7.59125E-1	-7.36046E-1	-9.19459E0	-9.18996E0	4.24385E-3	9.49621E-2	2.73293E1	-3.26815E1	-3.25912E1	2.68406E1	1.20004E-7	2.51525E-3	2.51525E-3	6.35059E-3	3.0071E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09456E0	-7.58839E-1	-7.35521E-1	-9.19452E0	-9.19001E0	4.72069E-3	9.47952E-2	2.73213E1	-3.26554E1	-3.26236E1	2.68364E1	1.20004E-7	2.51954E-3	2.51954E-3	6.33977E-3	3.0071E-1
