[Scan]
initial_time=2016-01-18T23:08:24
final_time=2016-01-18T23:08:44
ip_count=19
run=1024
dataset=11
scan=808
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09456E0
qbias_imon=-1.08776E-4
ql1_vset=
ql1_vmon=-7.5829E-1
ql1_imon=1.44655E-8
ql2_vset=
ql2_vmon=-7.35378E-1
ql2_imon=2.00458E-9
ql3_vset=
ql3_vmon=-9.19471E0
ql3_imon=1.12183E-9
ql4_vset=
ql4_vmon=-9.18968E0
ql4_imon=-3.3232E-10
mult1=-1.02481E-8
mult2=-2.80938E-9
rf_tmon=-5.61738E-3
rf_agc=3.26244E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.8399E-3
ql5_imon=1.66442E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67455E0
bslens_imon=2.41518E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19682E1
lens5a_imon=1.99389E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12495E2
lens4a_imon=2.05075E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54015E1
cs_ef1b_imon=3.15767E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04606E2
lens23_imon=1.0228E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04345E1
cs_ea1_imon=1.09986E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38818E0
lens1_imon=2.71439E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6473E1
os_ef1alow_imon=2.98808E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03943E1
cs_ea2_imon=1.34572E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84394E1
cs_ef1a_imon=3.03117E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=1.15387E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11303E1
os_restr1_imon=4.2979E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1542E1
os_ea1_imon=2.4373E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6378E1
os_ef1bup_imon=3.08156E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20043E0
cs_ionrep_imon=9.63591E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91954E2
cs_nozzle_imon=1.93687E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01786E1
cs_anode1_imon=1.96844E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20411E0
olens4_imon=3.13921E-8
tplens_vset=1.4E-1
tplens_vmon=1.70272E0
tplens_imon=-3.17371E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25893E1
iondef3_imon=1.50217E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26566E1
iondef2_imon=1.56706E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02961E2
lens6_imon=2.98065E-4
ql6_vset=1.0E-1
ql6_vmon=9.46999E-2
ql6_imon=3.99572E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27253E0
ionrepsh_imon=8.69862E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33399E1
lens5b_imon=2.18531E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74658E1
cs_ef2b_imon=3.13022E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4684E0
os_ea2_imon=-4.72384E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06063E2
lens4b_imon=2.00406E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71194E1
cs_ef2a_imon=3.17887E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06904E0
os_ef2alow_imon=-2.4599E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.82751E-1
os_ef2bup_imon=-5.13932E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11204E1
os_restr2_imon=3.38947E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23053E2
cs_ionfoca_imon=6.26684E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01902E1
cs_anode2_imon=2.09425E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73247E1
iondef1_imon=1.10887E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68328E1
iondef4_imon=1.10206E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=4.67629E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81927E-1
olens1_imon=7.01797E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11682E0
cs_ionaccel_imon=-8.16104E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02053E2
cs_ionfocb_imon=1.47324E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56318E1
einzel_imon=7.96934E-6
window_vset=0.0E0
window_vmon=2.55334E-1
window_imon=-8.50857E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8265E2
mask1_imon=2.39383E-4
mask2_vset=0.0E0
mask2_vmon=-1.8639E1
mask2_imon=-6.1454E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92619E3
multa_neg_imon=7.19535E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93718E3
defgrida_imon=6.43471E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50122E3
multb_neg_imon=7.16291E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.48878E0
defgridb_imon=6.05258E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33246E1
os_fil1_imon=9.41702E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07694E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60846E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31829E1
cs_fil1_imon=7.38588E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.32044E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62816E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.33766E-2
os_fil2_imon=-2.50701E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.06295E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.55426E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29527E-1
cs_fil2_imon=-2.32745E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.40844E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21666E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32328E-3
inlet_lpb_pmon=3.00852E-1
chamber_ion_pmon=1.20042E-7
chamber_cvt_pmon=2.51814E-3
foreline_cvt_pmon=2.51814E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.28132E-1
res40_imon=-2.4599E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=212
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09541E0	-7.58529E-1	-7.35259E-1	-9.19464E0	-9.18968E0	4.45843E-3	9.5439E-2	2.73086E1	-3.26561E1	-3.25971E1	2.68556E1	1.19749E-7	2.51739E-3	2.51739E-3	6.31278E-3	2.99175E-1
2.0E0	3.5E1	0.0E0	3.16E2	1.6E2	-2.09572E0	-7.58481E-1	-7.34997E-1	-9.19452E0	-9.18982E0	4.86374E-3	9.51529E-2	2.73296E1	-3.26468E1	-3.25764E1	2.68456E1	1.20017E-7	2.51552E-3	2.51552E-3	6.32936E-3	3.00302E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09387E0	-7.58481E-1	-7.35188E-1	-9.19461E0	-9.1898E0	4.31538E-3	9.50575E-2	2.73115E1	-3.26799E1	-3.26098E1	2.6814E1	1.20244E-7	2.5147E-3	2.5147E-3	6.31858E-3	3.0041E-1
4.0E0	7.0E0	0.0E0	6.55E2	3.98E2	-2.09464E0	-7.58362E-1	-7.35044E-1	-9.19442E0	-9.19023E0	4.48227E-3	9.47237E-2	2.73237E1	-3.2638E1	-3.26128E1	2.67836E1	1.19991E-7	2.52342E-3	2.52342E-3	6.33388E-3	3.00852E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09433E0	-7.58505E-1	-7.35116E-1	-9.19468E0	-9.18996E0	4.52995E-3	9.51052E-2	2.73399E1	-3.26693E1	-3.25984E1	2.68839E1	1.19913E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.00041E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09487E0	-7.58529E-1	-7.34878E-1	-9.19466E0	-9.18989E0	4.57764E-3	9.48191E-2	2.73293E1	-3.26791E1	-3.26366E1	2.68065E1	1.20106E-7	2.51632E-3	2.51632E-3	6.3074E-3	2.99941E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09572E0	-7.58362E-1	-7.3514E-1	-9.19473E0	-9.18999E0	4.86374E-3	9.48429E-2	2.72997E1	-3.26488E1	-3.26422E1	2.6837E1	1.20069E-7	2.52099E-3	2.52099E-3	6.33486E-3	3.00041E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09572E0	-7.58338E-1	-7.35402E-1	-9.19454E0	-9.19001E0	4.76837E-3	9.51767E-2	2.73165E1	-3.26633E1	-3.2605E1	2.68605E1	1.20106E-7	2.51632E-3	2.51632E-3	6.32356E-3	2.99941E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09464E0	-7.58314E-1	-7.35426E-1	-9.19456E0	-9.18989E0	4.86374E-3	9.4986E-2	2.72973E1	-3.26567E1	-3.26092E1	2.68268E1	1.20122E-7	2.51225E-3	2.51225E-3	6.3074E-3	3.01085E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09433E0	-7.58481E-1	-7.35378E-1	-9.19454E0	-9.1898E0	4.69685E-3	9.48191E-2	2.73388E1	-3.26664E1	-3.25917E1	2.68556E1	1.19872E-7	2.5147E-3	2.5147E-3	6.28511E-3	2.99879E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09441E0	-7.58505E-1	-7.35688E-1	-9.19454E0	-9.18949E0	4.52995E-3	9.4676E-2	2.73299E1	-3.26673E1	-3.26154E1	2.68226E1	1.20017E-7	2.50898E-3	2.50898E-3	6.31837E-3	2.9926E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0948E0	-7.58481E-1	-7.35426E-1	-9.19454E0	-9.19008E0	4.72069E-3	9.47714E-2	2.73111E1	-3.26428E1	-3.26314E1	2.68556E1	1.20017E-7	2.51225E-3	2.51225E-3	6.33486E-3	3.00041E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09487E0	-7.58553E-1	-7.35593E-1	-9.19428E0	-9.18972E0	4.74453E-3	9.46522E-2	2.73434E1	-3.26938E1	-3.26449E1	2.68316E1	1.19953E-7	2.51203E-3	2.51203E-3	6.30202E-3	3.00453E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09503E0	-7.58314E-1	-7.35283E-1	-9.1948E0	-9.18975E0	4.3869E-3	9.49383E-2	2.73213E1	-3.26657E1	-3.26717E1	2.6813E1	1.20122E-7	2.5188E-3	2.5188E-3	6.31837E-3	2.97704E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09449E0	-7.58386E-1	-7.35188E-1	-9.19504E0	-9.18965E0	4.55379E-3	9.4986E-2	2.73243E1	-3.26693E1	-3.2602E1	2.68665E1	1.19953E-7	2.52061E-3	2.52061E-3	6.3074E-3	2.99175E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09394E0	-7.58338E-1	-7.35116E-1	-9.19468E0	-9.18977E0	4.69685E-3	9.50575E-2	2.72744E1	-3.26779E1	-3.26207E1	2.67879E1	1.20084E-7	2.51693E-3	2.51693E-3	6.30182E-3	2.98026E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09487E0	-7.58266E-1	-7.35235E-1	-9.19452E0	-9.18951E0	4.62532E-3	9.48668E-2	2.7334E1	-3.26649E1	-3.26242E1	2.68581E1	1.19902E-7	2.51793E-3	2.51793E-3	6.31548E-3	3.00325E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09456E0	-7.5829E-1	-7.35116E-1	-9.19428E0	-9.18963E0	4.60148E-3	9.47475E-2	2.73478E1	-3.26627E1	-3.262E1	2.68148E1					
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09503E0	-7.58386E-1	-7.35354E-1	-9.19476E0	-9.18961E0	4.72069E-3	9.47714E-2	2.73271E1	-3.26961E1	-3.26075E1	2.6858E1	1.19965E-7	2.51552E-3	2.51552E-3	6.34037E-3	2.9952E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09456E0	-7.5829E-1	-7.35378E-1	-9.19471E0	-9.18968E0	4.8399E-3	9.46999E-2	2.73247E1	-3.26566E1	-3.25893E1	2.68328E1	1.20042E-7	2.51814E-3	2.51814E-3	6.32328E-3	3.00852E-1
