[Scan]
initial_time=2016-01-18T23:11:31
final_time=2016-01-18T23:11:50
ip_count=19
run=1024
dataset=11
scan=815
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09541E0
qbias_imon=-1.08768E-4
ql1_vset=
ql1_vmon=-7.57504E-1
ql1_imon=1.43316E-8
ql2_vset=
ql2_vmon=-7.35497E-1
ql2_imon=1.97878E-9
ql3_vset=
ql3_vmon=-9.19485E0
ql3_imon=5.39863E-10
ql4_vset=
ql4_vmon=-9.19027E0
ql4_imon=-2.79295E-10
mult1=-1.0587E-8
mult2=-2.74285E-9
rf_tmon=-4.20273E-3
rf_agc=3.32796E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.36306E-3
ql5_imon=1.69355E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67034E0
bslens_imon=2.38752E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19818E1
lens5a_imon=2.00209E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12433E2
lens4a_imon=2.05238E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54078E1
cs_ef1b_imon=3.15802E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04601E2
lens23_imon=1.02309E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04746E1
cs_ea1_imon=1.11051E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38495E0
lens1_imon=2.74854E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64828E1
os_ef1alow_imon=2.98982E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0346E1
cs_ea2_imon=1.35721E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84336E1
cs_ef1a_imon=3.04959E-5
olens2_vset=9.7E-1
olens2_vmon=9.7065E-1
olens2_imon=1.18129E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11483E1
os_restr1_imon=4.28956E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14981E1
os_ea1_imon=2.42469E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63375E1
os_ef1bup_imon=3.08469E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.1878E0
cs_ionrep_imon=9.46988E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91944E2
cs_nozzle_imon=1.93732E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01821E1
cs_anode1_imon=1.95906E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20399E0
olens4_imon=3.17441E-8
tplens_vset=1.4E-1
tplens_vmon=1.66975E0
tplens_imon=-7.2365E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26467E1
iondef3_imon=1.50374E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26508E1
iondef2_imon=1.56355E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02952E2
lens6_imon=2.98187E-4
ql6_vset=1.0E-1
ql6_vmon=9.49144E-2
ql6_imon=4.01897E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29811E0
ionrepsh_imon=8.65228E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33675E1
lens5b_imon=2.17516E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74455E1
cs_ef2b_imon=3.12952E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.42022E0
os_ea2_imon=-6.81143E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06088E2
lens4b_imon=2.00651E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71379E1
cs_ef2a_imon=3.17366E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08931E0
os_ef2alow_imon=-2.4182E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.98389E-1
os_ef2bup_imon=-5.12194E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11291E1
os_restr2_imon=3.39086E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23056E2
cs_ionfoca_imon=6.28619E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0189E1
cs_anode2_imon=2.09425E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73275E1
iondef1_imon=1.11051E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68514E1
iondef4_imon=1.10032E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=4.75088E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81903E-1
olens1_imon=7.1254E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14173E0
cs_ionaccel_imon=-7.63976E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02055E2
cs_ionfocb_imon=1.47403E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56475E1
einzel_imon=7.71217E-6
window_vset=0.0E0
window_vmon=2.75607E-1
window_imon=-7.25748E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82649E2
mask1_imon=2.39195E-4
mask2_vset=0.0E0
mask2_vmon=-1.8646E1
mask2_imon=-5.41559E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92644E3
multa_neg_imon=7.58338E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93718E3
defgrida_imon=6.45077E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50142E3
multb_neg_imon=6.80117E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.19E0
defgridb_imon=6.11806E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33257E1
os_fil1_imon=9.41146E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08383E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61563E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31832E1
cs_fil1_imon=6.93989E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.51158E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63743E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.37026E-2
os_fil2_imon=-2.42592E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.97028E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.29333E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28154E-1
cs_fil2_imon=-2.20003E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.28102E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21834E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33977E-3
inlet_lpb_pmon=2.99686E-1
chamber_ion_pmon=1.20209E-7
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.11914E-1
res40_imon=-2.46337E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=212
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09193E0	-7.5748E-1	-7.35497E-1	-9.19452E0	-9.18989E0	4.79221E-3	9.53436E-2	2.73123E1	-3.26693E1	-3.26554E1	2.66935E1	1.19902E-7	2.51954E-3	2.51954E-3	6.31278E-3	3.0071E-1
2.0E0	3.4E1	0.0E0	3.16E2	1.6E2	-2.09209E0	-7.57527E-1	-7.35354E-1	-9.19452E0	-9.19018E0	4.48227E-3	9.48429E-2	2.73222E1	-3.26658E1	-3.26413E1	2.69494E1	1.19913E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.01871E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09309E0	-7.57241E-1	-7.3514E-1	-9.19452E0	-9.19006E0	4.43459E-3	9.51052E-2	2.7359E1	-3.26724E1	-3.26324E1	2.68196E1	1.20244E-7	2.50692E-3	2.50692E-3	6.31858E-3	3.0041E-1
4.0E0	7.0E0	0.0E0	6.55E2	3.98E2	-2.09325E0	-7.57861E-1	-7.3514E-1	-9.19461E0	-9.19001E0	4.45843E-3	9.4986E-2	2.73333E1	-3.26801E1	-3.26116E1	2.68346E1	1.20042E-7	2.51919E-3	2.51919E-3	6.3074E-3	3.01104E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09294E0	-7.57694E-1	-7.35378E-1	-9.19476E0	-9.19011E0	4.31538E-3	9.4986E-2	2.72901E1	-3.26573E1	-3.26194E1	2.68175E1	1.20122E-7	2.52318E-3	2.52318E-3	6.3514E-3	3.01085E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09294E0	-7.5779E-1	-7.3545E-1	-9.1944E0	-9.19001E0	4.36306E-3	9.48906E-2	2.7349E1	-3.26765E1	-3.25966E1	2.68625E1	1.19757E-7	2.51334E-3	2.51334E-3	6.33486E-3	3.00824E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09325E0	-7.5748E-1	-7.35283E-1	-9.19466E0	-9.19015E0	4.57764E-3	9.47714E-2	2.72985E1	-3.26416E1	-3.26164E1	2.68448E1	1.19809E-7	2.5199E-3	2.5199E-3	6.31288E-3	2.99E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09394E0	-7.57551E-1	-7.35021E-1	-9.19454E0	-9.18999E0	4.62532E-3	9.49383E-2	2.73297E1	-3.26494E1	-3.26224E1	2.68569E1	1.19861E-7	2.52099E-3	2.52099E-3	6.31288E-3	2.97963E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09441E0	-7.5736E-1	-7.35283E-1	-9.19487E0	-9.18975E0	4.62532E-3	9.50336E-2	2.73291E1	-3.26771E1	-3.26416E1	2.68154E1	1.20122E-7	2.51334E-3	2.51334E-3	6.31288E-3	2.98481E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09379E0	-7.57384E-1	-7.35354E-1	-9.19468E0	-9.19003E0	4.64916E-3	9.48906E-2	2.73351E1	-3.26529E1	-3.26168E1	2.68142E1	1.20122E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.01609E-1
1.4E1	3.0E0	0.0E0	5.66E2	3.82E2	-2.09394E0	-7.57933E-1	-7.35569E-1	-9.1944E0	-9.18996E0	4.31538E-3	9.51052E-2	2.73213E1	-3.26758E1	-3.26144E1	2.68163E1	1.1966E-7	2.51804E-3	2.51804E-3	6.3074E-3	2.99613E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09426E0	-7.57694E-1	-7.35307E-1	-9.19483E0	-9.1898E0	4.50611E-3	9.52005E-2	2.73201E1	-3.26639E1	-3.26104E1	2.68953E1	1.19941E-7	2.51709E-3	2.51709E-3	6.33388E-3	3.00852E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09441E0	-7.57575E-1	-7.35211E-1	-9.1949E0	-9.18992E0	4.50611E-3	9.47952E-2	2.73249E1	-3.26813E1	-3.26549E1	2.68304E1	1.19913E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.00302E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09394E0	-7.57599E-1	-7.35474E-1	-9.19433E0	-9.18953E0	4.55379E-3	9.4986E-2	2.73275E1	-3.2636E1	-3.26071E1	2.684E1	1.20226E-7	2.52209E-3	2.52209E-3	6.32936E-3	2.9874E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09418E0	-7.57599E-1	-7.35593E-1	-9.19473E0	-9.19011E0	4.74453E-3	9.49383E-2	2.73249E1	-3.26723E1	-3.26392E1	2.68232E1	1.19851E-7	2.51525E-3	2.51525E-3	6.32356E-3	2.98156E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09464E0	-7.5748E-1	-7.35426E-1	-9.19473E0	-9.19015E0	4.86374E-3	9.50813E-2	2.73405E1	-3.2647E1	-3.26248E1	2.6822E1	1.19757E-7	2.5199E-3	2.5199E-3	6.34037E-3	3.01085E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09441E0	-7.57432E-1	-7.35116E-1	-9.19461E0	-9.19046E0	4.673E-3	9.5129E-2	2.73496E1	-3.26669E1	-3.26164E1	2.68082E1	1.20137E-7	2.51915E-3	2.51915E-3	6.3074E-3	3.01209E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09418E0	-7.5748E-1	-7.35235E-1	-9.19473E0	-9.19011E0	4.72069E-3	9.50575E-2	2.73281E1	-3.26413E1	-3.26384E1	2.68186E1	1.20209E-7	2.52169E-3	2.52169E-3	6.32356E-3	3.00453E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09472E0	-7.57647E-1	-7.35474E-1	-9.19468E0	-9.1903E0	4.95911E-3	9.50575E-2	2.73393E1	-3.26639E1	-3.25972E1	2.68376E1	1.19653E-7	2.52099E-3	2.52099E-3	6.34588E-3	2.9926E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09541E0	-7.57504E-1	-7.35497E-1	-9.19485E0	-9.19027E0	4.36306E-3	9.49144E-2	2.73275E1	-3.26508E1	-3.26467E1	2.68514E1	1.20209E-7	2.51954E-3	2.51954E-3	6.33977E-3	2.99686E-1
