[Scan]
initial_time=2016-01-18T23:13:44
final_time=2016-01-18T23:14:04
ip_count=19
run=1024
dataset=11
scan=820
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0968E0
qbias_imon=-1.08822E-4
ql1_vset=
ql1_vmon=-7.57694E-1
ql1_imon=1.42068E-8
ql2_vset=
ql2_vmon=-7.35378E-1
ql2_imon=2.05336E-9
ql3_vset=
ql3_vmon=-9.19483E0
ql3_imon=4.06325E-10
ql4_vset=
ql4_vmon=-9.19015E0
ql4_imon=-2.54929E-10
mult1=-9.54774E-9
mult2=-2.83638E-9
rf_tmon=-5.04115E-3
rf_agc=3.35619E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.57764E-3
ql5_imon=1.77041E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64647E0
bslens_imon=2.09496E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20013E1
lens5a_imon=2.01146E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12515E2
lens4a_imon=2.05019E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54073E1
cs_ef1b_imon=3.15468E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04615E2
lens23_imon=1.02367E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04602E1
cs_ea1_imon=1.11819E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39521E0
lens1_imon=2.78547E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64864E1
os_ef1alow_imon=2.97653E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03654E1
cs_ea2_imon=1.35326E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84488E1
cs_ef1a_imon=3.04203E-5
olens2_vset=9.7E-1
olens2_vmon=9.70078E-1
olens2_imon=1.17859E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11286E1
os_restr1_imon=4.29429E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14945E1
os_ea1_imon=2.4434E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63922E1
os_ef1bup_imon=3.07646E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22271E0
cs_ionrep_imon=9.46661E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91931E2
cs_nozzle_imon=1.93482E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01665E1
cs_anode1_imon=1.97165E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20422E0
olens4_imon=3.1747E-8
tplens_vset=1.4E-1
tplens_vmon=1.68796E0
tplens_imon=-2.37382E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26092E1
iondef3_imon=1.51083E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26398E1
iondef2_imon=1.54866E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02929E2
lens6_imon=2.98118E-4
ql6_vset=1.0E-1
ql6_vmon=9.50575E-2
ql6_imon=3.99197E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.257E0
ionrepsh_imon=8.53735E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33768E1
lens5b_imon=2.18445E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74919E1
cs_ef2b_imon=3.13447E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.40881E0
os_ea2_imon=-4.35722E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06091E2
lens4b_imon=2.00648E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70933E1
cs_ef2a_imon=3.18013E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10446E0
os_ef2alow_imon=-2.43584E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.98879E-1
os_ef2bup_imon=-5.27272E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11423E1
os_restr2_imon=3.3972E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23028E2
cs_ionfoca_imon=6.28973E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01884E1
cs_anode2_imon=2.08991E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73448E1
iondef1_imon=1.10533E-5
iondef4_vset=2.691E1
iondef4_vmon=2.69032E1
iondef4_imon=1.09589E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=4.80253E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81855E-1
olens1_imon=7.14068E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13076E0
cs_ionaccel_imon=-8.04075E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02082E2
cs_ionfocb_imon=1.47387E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56212E1
einzel_imon=7.87871E-6
window_vset=0.0E0
window_vmon=2.45042E-1
window_imon=-7.92847E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82634E2
mask1_imon=2.39294E-4
mask2_vset=0.0E0
mask2_vmon=-1.86768E1
mask2_imon=-6.54371E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92636E3
multa_neg_imon=7.78071E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93738E3
defgrida_imon=6.53558E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5012E3
multb_neg_imon=7.40607E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.5108E0
defgridb_imon=6.23807E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33223E1
os_fil1_imon=9.4038E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08521E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61451E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31828E1
cs_fil1_imon=7.81672E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.38237E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63696E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.44839E-2
os_fil2_imon=-2.38805E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.10305E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.36145E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29383E-1
cs_fil2_imon=-2.40052E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.63523E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21697E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=3.01609E-1
chamber_ion_pmon=1.198E-7
chamber_cvt_pmon=2.52169E-3
foreline_cvt_pmon=2.52169E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.75404E-1
res40_imon=-2.50695E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=159
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09572E0	-7.57337E-1	-7.35021E-1	-9.19471E0	-9.19018E0	4.52995E-3	9.48191E-2	2.73423E1	-3.26296E1	-3.26136E1	2.68244E1	1.19861E-7	2.51552E-3	2.51552E-3	6.29098E-3	3.00302E-1
2.0E0	1.9E1	0.0E0	3.16E2	1.6E2	-2.09565E0	-7.57194E-1	-7.34687E-1	-9.19456E0	-9.19032E0	4.3869E-3	9.46283E-2	2.73302E1	-3.26505E1	-3.26425E1	2.68263E1	1.19749E-7	2.51417E-3	2.51417E-3	6.28592E-3	3.01738E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09495E0	-7.57313E-1	-7.34854E-1	-9.19459E0	-9.19034E0	4.52995E-3	9.4676E-2	2.73057E1	-3.26376E1	-3.26301E1	2.6854E1	1.19607E-7	2.5147E-3	2.5147E-3	6.32978E-3	3.01742E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09526E0	-7.57146E-1	-7.34711E-1	-9.19445E0	-9.19003E0	4.48227E-3	9.49621E-2	2.73163E1	-3.26708E1	-3.26614E1	2.68268E1	1.19902E-7	2.51954E-3	2.51954E-3	6.32356E-3	3.01223E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09588E0	-7.5717E-1	-7.34878E-1	-9.19447E0	-9.1902E0	4.55379E-3	9.51767E-2	2.73302E1	-3.26523E1	-3.26474E1	2.67686E1	1.19953E-7	2.51632E-3	2.51632E-3	6.29128E-3	3.0071E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09549E0	-7.57217E-1	-7.35164E-1	-9.19442E0	-9.19006E0	4.81606E-3	9.52005E-2	2.73472E1	-3.26699E1	-3.26122E1	2.68502E1	1.19925E-7	2.51248E-3	2.51248E-3	6.31299E-3	2.99083E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09619E0	-7.57027E-1	-7.35021E-1	-9.1948E0	-9.19008E0	4.91142E-3	9.50098E-2	2.73092E1	-3.26266E1	-3.26372E1	2.68971E1	1.19809E-7	2.5188E-3	2.5188E-3	6.31837E-3	2.9952E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09595E0	-7.5736E-1	-7.34949E-1	-9.19468E0	-9.19027E0	4.91142E-3	9.47237E-2	2.73099E1	-3.26765E1	-3.26242E1	2.6796E1	1.20106E-7	2.51525E-3	2.51525E-3	6.31817E-3	2.99175E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09549E0	-7.57027E-1	-7.34735E-1	-9.19485E0	-9.1902E0	4.81606E-3	9.47475E-2	2.73159E1	-3.26591E1	-3.26104E1	2.68681E1	1.19697E-7	2.52707E-3	2.52707E-3	6.31817E-3	3.00453E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09541E0	-7.5717E-1	-7.34663E-1	-9.19476E0	-9.19046E0	4.72069E-3	9.50813E-2	2.73279E1	-3.26819E1	-3.25996E1	2.68094E1	1.19925E-7	2.52139E-3	2.52139E-3	6.32418E-3	3.00942E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.0958E0	-7.57408E-1	-7.34878E-1	-9.19471E0	-9.19003E0	4.69685E-3	9.4986E-2	2.73311E1	-3.26667E1	-3.26048E1	2.6879E1	1.19965E-7	2.5199E-3	2.5199E-3	6.31837E-3	2.9978E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09472E0	-7.57813E-1	-7.34687E-1	-9.19445E0	-9.19006E0	4.88758E-3	9.50336E-2	2.73293E1	-3.26685E1	-3.25883E1	2.6855E1	1.20311E-7	2.52061E-3	2.52061E-3	6.33436E-3	3.0148E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09526E0	-7.57766E-1	-7.34615E-1	-9.19452E0	-9.18994E0	4.673E-3	9.50813E-2	2.73399E1	-3.26868E1	-3.26001E1	2.67578E1	1.20004E-7	2.51954E-3	2.51954E-3	6.32896E-3	2.99941E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09503E0	-7.57957E-1	-7.34973E-1	-9.19456E0	-9.19023E0	4.74453E-3	9.51052E-2	2.7288E1	-3.26358E1	-3.25881E1	2.68785E1	1.20004E-7	2.5131E-3	2.5131E-3	6.30202E-3	3.01995E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09472E0	-7.57527E-1	-7.35068E-1	-9.19456E0	-9.18992E0	4.41074E-3	9.51052E-2	2.73305E1	-3.26685E1	-3.26272E1	2.68689E1	1.19913E-7	2.51552E-3	2.51552E-3	6.33486E-3	2.98481E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09456E0	-7.57527E-1	-7.35116E-1	-9.19471E0	-9.18992E0	4.29153E-3	9.49144E-2	2.73246E1	-3.26036E1	-3.26697E1	2.68484E1	1.20017E-7	2.52538E-3	2.52538E-3	6.32936E-3	2.98481E-1
2.0E1	8.0E0	0.0E0	8.08E2	5.58E2	-2.09518E0	-7.57599E-1	-7.35021E-1	-9.19471E0	-9.18982E0	4.673E-3	9.48906E-2	2.73364E1	-3.26965E1	-3.26165E1	2.68205E1	1.19749E-7	2.51739E-3	2.51739E-3	6.33436E-3	2.99686E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09472E0	-7.57575E-1	-7.35116E-1	-9.19499E0	-9.18987E0	4.86374E-3	9.53197E-2	2.73089E1	-3.26292E1	-3.2647E1	2.69142E1	1.20161E-7	2.51549E-3	2.51549E-3	6.32273E-3	3.00635E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09634E0	-7.57456E-1	-7.35378E-1	-9.19497E0	-9.19008E0	4.62532E-3	9.49383E-2	2.73511E1	-3.26502E1	-3.26526E1	2.68136E1	1.19895E-7	2.51874E-3	2.51874E-3	6.33065E-3	3.0147E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0968E0	-7.57694E-1	-7.35378E-1	-9.19483E0	-9.19015E0	4.57764E-3	9.50575E-2	2.73448E1	-3.26398E1	-3.26092E1	2.69032E1	1.198E-7	2.52169E-3	2.52169E-3	6.31817E-3	3.01609E-1
