[Scan]
initial_time=2016-01-18T23:14:11
final_time=2016-01-18T23:14:30
ip_count=19
run=1024
dataset=11
scan=821
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09472E0
qbias_imon=-1.08821E-4
ql1_vset=
ql1_vmon=-7.57384E-1
ql1_imon=1.42195E-8
ql2_vset=
ql2_vmon=-7.3514E-1
ql2_imon=2.03037E-9
ql3_vset=
ql3_vmon=-9.19476E0
ql3_imon=4.29678E-10
ql4_vset=
ql4_vmon=-9.18989E0
ql4_imon=-2.4507E-10
mult1=-9.523E-9
mult2=-2.76833E-9
rf_tmon=-5.43562E-3
rf_agc=3.26484E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.50611E-3
ql5_imon=1.67532E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67471E0
bslens_imon=2.43252E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19507E1
lens5a_imon=2.01884E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1245E2
lens4a_imon=2.05205E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53736E1
cs_ef1b_imon=3.16628E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04659E2
lens23_imon=1.02192E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04601E1
cs_ea1_imon=1.10278E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41436E0
lens1_imon=2.64216E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64558E1
os_ef1alow_imon=2.98065E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0384E1
cs_ea2_imon=1.36109E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84338E1
cs_ef1a_imon=3.04614E-5
olens2_vset=9.7E-1
olens2_vmon=9.69911E-1
olens2_imon=1.1789E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11398E1
os_restr1_imon=4.29055E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14595E1
os_ea1_imon=2.4239E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63773E1
os_ef1bup_imon=3.08282E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24461E0
cs_ionrep_imon=9.46301E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91917E2
cs_nozzle_imon=1.93603E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01996E1
cs_anode1_imon=1.95556E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20425E0
olens4_imon=3.16071E-8
tplens_vset=1.4E-1
tplens_vmon=1.68573E0
tplens_imon=-3.15291E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2616E1
iondef3_imon=1.49698E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27216E1
iondef2_imon=1.56774E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02911E2
lens6_imon=2.98222E-4
ql6_vset=1.0E-1
ql6_vmon=9.50098E-2
ql6_imon=3.99891E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25959E0
ionrepsh_imon=8.75172E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3392E1
lens5b_imon=2.16971E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74451E1
cs_ef2b_imon=3.13447E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.47484E0
os_ea2_imon=-6.22267E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06108E2
lens4b_imon=2.0057E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71089E1
cs_ef2a_imon=3.18799E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08512E0
os_ef2alow_imon=-2.51069E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.00127E-1
os_ef2bup_imon=-5.06313E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11429E1
os_restr2_imon=3.39009E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23057E2
cs_ionfoca_imon=6.30078E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01697E1
cs_anode2_imon=2.09703E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73458E1
iondef1_imon=1.11327E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68196E1
iondef4_imon=1.11273E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=4.71255E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81402E-1
olens1_imon=7.11032E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12515E0
cs_ionaccel_imon=-7.77877E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02111E2
cs_ionfocb_imon=1.47413E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56555E1
einzel_imon=7.77392E-6
window_vset=0.0E0
window_vmon=2.60013E-1
window_imon=-8.48986E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8262E2
mask1_imon=2.39234E-4
mask2_vset=0.0E0
mask2_vmon=-1.865E1
mask2_imon=-6.13203E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92674E3
multa_neg_imon=7.69228E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93717E3
defgrida_imon=6.44192E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5011E3
multb_neg_imon=7.27674E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.4712E0
defgridb_imon=6.22853E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33244E1
os_fil1_imon=9.42925E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07217E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61452E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31842E1
cs_fil1_imon=7.06197E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.00623E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63618E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.64373E-2
os_fil2_imon=-2.59389E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.99077E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.37807E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30862E-1
cs_fil2_imon=-2.15725E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.51047E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21751E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33436E-3
inlet_lpb_pmon=2.96634E-1
chamber_ion_pmon=1.19646E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.06167E-1
res40_imon=-2.3797E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=167
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	8.0E0	0.0E0	1.47E2	4.1E1	-2.09541E0	-7.57122E-1	-7.35307E-1	-9.19487E0	-9.19001E0	4.33922E-3	9.46045E-2	2.73222E1	-3.26472E1	-3.26219E1	2.68496E1	1.201E-7	2.52066E-3	2.52066E-3	6.3245E-3	3.01337E-1
2.0E0	3.0E1	0.0E0	3.16E2	1.6E2	-2.09526E0	-7.57265E-1	-7.34973E-1	-9.19492E0	-9.19015E0	3.91006E-3	9.47952E-2	2.73255E1	-3.26885E1	-3.26044E1	2.68496E1	1.20383E-7	2.52428E-3	2.52428E-3	6.31288E-3	3.02396E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09518E0	-7.5736E-1	-7.35211E-1	-9.19468E0	-9.18996E0	4.26769E-3	9.49144E-2	2.73275E1	-3.26579E1	-3.26461E1	2.68496E1	1.19861E-7	2.51662E-3	2.51662E-3	6.32936E-3	3.00563E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09487E0	-7.57384E-1	-7.35235E-1	-9.19487E0	-9.18987E0	4.24385E-3	9.48191E-2	2.72967E1	-3.26645E1	-3.26597E1	2.68401E1	1.19902E-7	2.52276E-3	2.52276E-3	6.32356E-3	3.0148E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09526E0	-7.57098E-1	-7.35164E-1	-9.19476E0	-9.18977E0	4.14848E-3	9.49621E-2	2.73201E1	-3.26158E1	-3.26278E1	2.67938E1	1.19749E-7	2.51739E-3	2.51739E-3	6.29128E-3	3.00453E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09572E0	-7.57408E-1	-7.35164E-1	-9.1948E0	-9.1898E0	4.31538E-3	9.48429E-2	2.73357E1	-3.26801E1	-3.26536E1	2.68526E1	1.20278E-7	2.51443E-3	2.51443E-3	6.3074E-3	3.00302E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09572E0	-7.5717E-1	-7.35188E-1	-9.19459E0	-9.18972E0	4.33922E-3	9.46283E-2	2.73051E1	-3.26337E1	-3.26154E1	2.68292E1	1.20278E-7	2.51334E-3	2.51334E-3	6.33486E-3	2.9978E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0958E0	-7.5748E-1	-7.3514E-1	-9.19497E0	-9.18968E0	4.31538E-3	9.48906E-2	2.72847E1	-3.26398E1	-3.26182E1	2.68683E1	1.19705E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.00563E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09557E0	-7.57074E-1	-7.3514E-1	-9.19485E0	-9.19001E0	4.12464E-3	9.46283E-2	2.72973E1	-3.26362E1	-3.26224E1	2.68214E1	1.19653E-7	2.51552E-3	2.51552E-3	6.34588E-3	3.00041E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09557E0	-7.57337E-1	-7.35211E-1	-9.19466E0	-9.19025E0	4.36306E-3	9.47714E-2	2.73057E1	-3.26278E1	-3.26278E1	2.67836E1	1.19861E-7	2.51771E-3	2.51771E-3	6.29098E-3	2.9952E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09588E0	-7.5736E-1	-7.35044E-1	-9.19428E0	-9.1902E0	4.60148E-3	9.52482E-2	2.73514E1	-3.26819E1	-3.25719E1	2.68671E1	1.19851E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.00453E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09518E0	-7.57098E-1	-7.34854E-1	-9.19435E0	-9.19011E0	4.45843E-3	9.52959E-2	2.73198E1	-3.26661E1	-3.26107E1	2.68296E1	1.20069E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.01347E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0948E0	-7.57289E-1	-7.35259E-1	-9.19473E0	-9.18975E0	4.57764E-3	9.49621E-2	2.73364E1	-3.2672E1	-3.26101E1	2.67986E1	1.20055E-7	2.51739E-3	2.51739E-3	6.33977E-3	2.9943E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09495E0	-7.57122E-1	-7.35354E-1	-9.19485E0	-9.19006E0	4.76837E-3	9.50098E-2	2.73363E1	-3.26829E1	-3.2634E1	2.68208E1	1.19851E-7	2.51525E-3	2.51525E-3	6.31278E-3	3.00966E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09449E0	-7.56931E-1	-7.35402E-1	-9.19504E0	-9.18956E0	4.50611E-3	9.49383E-2	2.73526E1	-3.27053E1	-3.25966E1	2.68478E1	1.19653E-7	2.51662E-3	2.51662E-3	6.3074E-3	2.9874E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0951E0	-7.56955E-1	-7.35211E-1	-9.19499E0	-9.19015E0	4.33922E-3	9.49383E-2	2.73387E1	-3.26944E1	-3.26378E1	2.68172E1	1.20017E-7	2.51552E-3	2.51552E-3	6.3074E-3	2.9952E-1
2.0E1	7.0E0	0.0E0	8.08E2	5.58E2	-2.09464E0	-7.57265E-1	-7.35402E-1	-9.19516E0	-9.19011E0	4.17233E-3	9.50813E-2	2.72967E1	-3.26524E1	-3.2629E1	2.68863E1	1.19705E-7	2.52428E-3	2.52428E-3	6.32936E-3	3.00824E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09449E0	-7.57074E-1	-7.35068E-1	-9.19495E0	-9.18992E0	4.24385E-3	9.50098E-2	2.73428E1	-3.26474E1	-3.26486E1	2.68395E1	1.20069E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.01347E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09418E0	-7.57146E-1	-7.35474E-1	-9.19523E0	-9.19015E0	4.48227E-3	9.51052E-2	2.73357E1	-3.26687E1	-3.262E1	2.67995E1	1.20092E-7	2.52553E-3	2.52553E-3	6.29684E-3	2.99093E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09472E0	-7.57384E-1	-7.3514E-1	-9.19476E0	-9.18989E0	4.50611E-3	9.50098E-2	2.73458E1	-3.27216E1	-3.2616E1	2.68196E1	1.19646E-7	2.51632E-3	2.51632E-3	6.33436E-3	2.96634E-1
