[Scan]
initial_time=2016-01-18T23:16:24
final_time=2016-01-18T23:16:44
ip_count=19
run=1024
dataset=11
scan=826
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09526E0
qbias_imon=-1.08793E-4
ql1_vset=
ql1_vmon=-7.57241E-1
ql1_imon=1.42212E-8
ql2_vset=
ql2_vmon=-7.35021E-1
ql2_imon=2.05141E-9
ql3_vset=
ql3_vmon=-9.19461E0
ql3_imon=3.21305E-10
ql4_vset=
ql4_vmon=-9.19032E0
ql4_imon=-2.53129E-10
mult1=-1.01377E-8
mult2=-2.79969E-9
rf_tmon=-4.62746E-3
rf_agc=3.32206E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.62532E-3
ql5_imon=1.67856E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67624E0
bslens_imon=2.44062E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1963E1
lens5a_imon=2.00492E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12444E2
lens4a_imon=2.05075E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53839E1
cs_ef1b_imon=3.15281E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04622E2
lens23_imon=1.0216E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05023E1
cs_ea1_imon=1.10485E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36371E0
lens1_imon=2.6636E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64668E1
os_ef1alow_imon=2.97982E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0392E1
cs_ea2_imon=1.34269E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84316E1
cs_ef1a_imon=3.04685E-5
olens2_vset=9.7E-1
olens2_vmon=9.69887E-1
olens2_imon=1.17594E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11526E1
os_restr1_imon=4.28445E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15105E1
os_ea1_imon=2.43566E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63461E1
os_ef1bup_imon=3.07893E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22909E0
cs_ionrep_imon=9.68579E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91877E2
cs_nozzle_imon=1.93593E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02043E1
cs_anode1_imon=1.96098E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20418E0
olens4_imon=3.16429E-8
tplens_vset=1.4E-1
tplens_vmon=1.63789E0
tplens_imon=-1.14838E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26119E1
iondef3_imon=1.49064E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26608E1
iondef2_imon=1.57205E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02955E2
lens6_imon=2.98254E-4
ql6_vset=1.0E-1
ql6_vmon=9.50098E-2
ql6_imon=4.02495E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2987E0
ionrepsh_imon=8.51778E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33551E1
lens5b_imon=2.19003E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74465E1
cs_ef2b_imon=3.14416E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44205E0
os_ea2_imon=-6.20973E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.061E2
lens4b_imon=2.00626E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71294E1
cs_ef2a_imon=3.16362E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07738E0
os_ef2alow_imon=-2.48255E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.04031E-1
os_ef2bup_imon=-5.17111E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1125E1
os_restr2_imon=3.37914E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23054E2
cs_ionfoca_imon=6.27415E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01743E1
cs_anode2_imon=2.09396E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73293E1
iondef1_imon=1.08396E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6803E1
iondef4_imon=1.09494E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=4.77943E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81474E-1
olens1_imon=7.11153E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14155E0
cs_ionaccel_imon=-8.42748E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02066E2
cs_ionfocb_imon=1.47381E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56537E1
einzel_imon=7.75632E-6
window_vset=0.0E0
window_vmon=2.54584E-1
window_imon=-7.67065E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82658E2
mask1_imon=2.3916E-4
mask2_vset=0.0E0
mask2_vmon=-1.86368E1
mask2_imon=-4.85955E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92633E3
multa_neg_imon=7.41348E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93707E3
defgrida_imon=6.48262E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50138E3
multb_neg_imon=7.48781E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.53548E0
defgridb_imon=6.02958E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33213E1
os_fil1_imon=9.40786E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07515E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61525E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31819E1
cs_fil1_imon=7.13081E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.24514E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63735E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.49689E-2
os_fil2_imon=-2.43171E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.10929E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.3275E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29652E-1
cs_fil2_imon=-2.37765E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.62275E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21874E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29645E-3
inlet_lpb_pmon=2.9952E-1
chamber_ion_pmon=1.20226E-7
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.43074E-1
res40_imon=-2.36723E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=170
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09441E0	-7.56812E-1	-7.35164E-1	-9.19478E0	-9.19025E0	4.88758E-3	9.48429E-2	2.73506E1	-3.26663E1	-3.26255E1	2.67839E1	1.19902E-7	2.52169E-3	2.52169E-3	6.31278E-3	2.99175E-1
2.0E0	2.6E1	0.0E0	3.16E2	1.6E2	-2.09449E0	-7.56836E-1	-7.35283E-1	-9.19487E0	-9.19023E0	4.81606E-3	9.49621E-2	2.73232E1	-3.26404E1	-3.26229E1	2.68843E1	1.19735E-7	2.52365E-3	2.52365E-3	6.29333E-3	3.01272E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09325E0	-7.57313E-1	-7.35188E-1	-9.19492E0	-9.19006E0	4.86374E-3	9.50336E-2	2.73165E1	-3.26772E1	-3.26123E1	2.68007E1	1.20154E-7	2.51271E-3	2.51271E-3	6.33021E-3	3.04068E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09464E0	-7.57289E-1	-7.35259E-1	-9.19483E0	-9.18987E0	4.69685E-3	9.50813E-2	2.73309E1	-3.26657E1	-3.262E1	2.67824E1	1.20142E-7	2.51919E-3	2.51919E-3	6.32858E-3	3.01862E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09464E0	-7.57265E-1	-7.34925E-1	-9.19502E0	-9.18992E0	4.88758E-3	9.48906E-2	2.73069E1	-3.26873E1	-3.26116E1	2.67992E1	1.20004E-7	2.51632E-3	2.51632E-3	6.32896E-3	3.00966E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09464E0	-7.57074E-1	-7.35021E-1	-9.19516E0	-9.19003E0	4.33922E-3	9.48429E-2	2.73273E1	-3.26657E1	-3.26705E1	2.68833E1	1.20122E-7	2.5188E-3	2.5188E-3	6.32386E-3	2.9952E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09387E0	-7.57146E-1	-7.35188E-1	-9.19521E0	-9.19015E0	4.45843E-3	9.52959E-2	2.72933E1	-3.26484E1	-3.26148E1	2.68214E1	1.19809E-7	2.5188E-3	2.5188E-3	6.31837E-3	2.9874E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09433E0	-7.57241E-1	-7.35211E-1	-9.19497E0	-9.18975E0	4.673E-3	9.51052E-2	2.73213E1	-3.26801E1	-3.26158E1	2.68635E1	1.19851E-7	2.51632E-3	2.51632E-3	6.33977E-3	3.01223E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09441E0	-7.57194E-1	-7.34997E-1	-9.19466E0	-9.1902E0	4.33922E-3	9.50575E-2	2.73351E1	-3.26633E1	-3.26494E1	2.68684E1	1.19913E-7	2.51552E-3	2.51552E-3	6.32936E-3	3.00302E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0941E0	-7.56979E-1	-7.34949E-1	-9.19454E0	-9.18987E0	4.50611E-3	9.50575E-2	2.73305E1	-3.26502E1	-3.26172E1	2.68094E1	1.20069E-7	2.51334E-3	2.51334E-3	6.31288E-3	2.9952E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09533E0	-7.56836E-1	-7.34639E-1	-9.1948E0	-9.1902E0	4.57764E-3	9.52005E-2	2.73252E1	-3.26956E1	-3.26378E1	2.68701E1	1.20069E-7	2.51662E-3	2.51662E-3	6.33486E-3	2.9952E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09557E0	-7.57122E-1	-7.34901E-1	-9.19487E0	-9.1902E0	4.74453E-3	9.50575E-2	2.73261E1	-3.26362E1	-3.26386E1	2.68154E1	1.20158E-7	2.52492E-3	2.52492E-3	6.33977E-3	3.0071E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09495E0	-7.57408E-1	-7.3514E-1	-9.19478E0	-9.19025E0	4.69685E-3	9.49144E-2	2.73486E1	-3.26707E1	-3.2585E1	2.6813E1	1.19913E-7	2.52757E-3	2.52757E-3	6.33486E-3	3.01609E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09441E0	-7.57527E-1	-7.34878E-1	-9.19492E0	-9.19025E0	4.48227E-3	9.49621E-2	2.73204E1	-3.26236E1	-3.26691E1	2.68638E1	1.20017E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.01085E-1
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09464E0	-7.5736E-1	-7.34615E-1	-9.19492E0	-9.19015E0	4.55379E-3	9.47714E-2	2.73287E1	-3.26608E1	-3.26006E1	2.68346E1	1.20106E-7	2.51847E-3	2.51847E-3	6.3074E-3	3.01223E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09418E0	-7.5717E-1	-7.34949E-1	-9.19504E0	-9.19013E0	4.76837E-3	9.48906E-2	2.73175E1	-3.26986E1	-3.26189E1	2.68617E1	1.19809E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.01085E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09518E0	-7.5717E-1	-7.35044E-1	-9.19487E0	-9.19008E0	4.60148E-3	9.47952E-2	2.73051E1	-3.26505E1	-3.26334E1	2.67938E1	1.19953E-7	2.52061E-3	2.52061E-3	6.31278E-3	2.9892E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09456E0	-7.57217E-1	-7.35044E-1	-9.19502E0	-9.19006E0	4.48227E-3	9.48668E-2	2.73255E1	-3.26302E1	-3.2614E1	2.68635E1	1.20226E-7	2.51771E-3	2.51771E-3	6.3074E-3	2.98481E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09588E0	-7.5736E-1	-7.34901E-1	-9.19468E0	-9.18987E0	4.52995E-3	9.50098E-2	2.73116E1	-3.26366E1	-3.26207E1	2.68142E1	1.20069E-7	2.52209E-3	2.52209E-3	6.3074E-3	2.98222E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09526E0	-7.57241E-1	-7.35021E-1	-9.19461E0	-9.19032E0	4.62532E-3	9.50098E-2	2.73293E1	-3.26608E1	-3.26119E1	2.6803E1	1.20226E-7	2.51771E-3	2.51771E-3	6.29645E-3	2.9952E-1
