[Scan]
initial_time=2016-01-18T23:16:51
final_time=2016-01-18T23:17:10
ip_count=19
run=1024
dataset=11
scan=827
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09557E0
qbias_imon=-1.0877E-4
ql1_vset=
ql1_vmon=-7.57408E-1
ql1_imon=1.41374E-8
ql2_vset=
ql2_vmon=-7.35474E-1
ql2_imon=2.00892E-9
ql3_vset=
ql3_vmon=-9.19473E0
ql3_imon=2.39599E-10
ql4_vset=
ql4_vmon=-9.1902E0
ql4_imon=-2.09594E-10
mult1=-9.82618E-9
mult2=-2.73608E-9
rf_tmon=-4.12039E-3
rf_agc=3.38601E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.48227E-3
ql5_imon=1.69184E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68407E0
bslens_imon=2.64216E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19763E1
lens5a_imon=2.01061E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12482E2
lens4a_imon=2.05066E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53817E1
cs_ef1b_imon=3.16516E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04654E2
lens23_imon=1.02222E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04414E1
cs_ea1_imon=1.09155E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37818E0
lens1_imon=2.63467E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64814E1
os_ef1alow_imon=2.97691E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0379E1
cs_ea2_imon=1.36296E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84238E1
cs_ef1a_imon=3.03978E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=1.17438E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11466E1
os_restr1_imon=4.2913E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15892E1
os_ea1_imon=2.46583E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63454E1
os_ef1bup_imon=3.08132E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22464E0
cs_ionrep_imon=9.54911E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91909E2
cs_nozzle_imon=1.93435E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01634E1
cs_anode1_imon=1.94994E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20399E0
olens4_imon=3.17275E-8
tplens_vset=1.4E-1
tplens_vmon=1.66577E0
tplens_imon=-1.50572E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25983E1
iondef3_imon=1.48388E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26612E1
iondef2_imon=1.56662E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02905E2
lens6_imon=2.98061E-4
ql6_vset=1.0E-1
ql6_vmon=9.47952E-2
ql6_imon=4.0851E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27394E0
ionrepsh_imon=8.6207E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33833E1
lens5b_imon=2.17645E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74651E1
cs_ef2b_imon=3.14794E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.43117E0
os_ea2_imon=-7.38318E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0609E2
lens4b_imon=2.00548E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71183E1
cs_ef2a_imon=3.17152E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08512E0
os_ef2alow_imon=-2.41338E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.03246E-1
os_ef2bup_imon=-5.1305E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11229E1
os_restr2_imon=3.36726E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23056E2
cs_ionfoca_imon=6.28917E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01828E1
cs_anode2_imon=2.09403E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73159E1
iondef1_imon=1.10054E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68301E1
iondef4_imon=1.10824E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=4.70291E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81569E-1
olens1_imon=7.10434E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14885E0
cs_ionaccel_imon=-9.83718E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02091E2
cs_ionfocb_imon=1.47477E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56393E1
einzel_imon=7.82632E-6
window_vset=0.0E0
window_vmon=2.413E-1
window_imon=-7.62906E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8264E2
mask1_imon=2.3917E-4
mask2_vset=0.0E0
mask2_vmon=-1.86693E1
mask2_imon=-5.12153E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92651E3
multa_neg_imon=7.96182E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93719E3
defgrida_imon=6.40822E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50132E3
multb_neg_imon=7.62115E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42435E0
defgridb_imon=6.13494E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33227E1
os_fil1_imon=9.40979E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0776E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6135E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31848E1
cs_fil1_imon=8.14108E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.79405E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63759E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.4964E-2
os_fil2_imon=-2.47537E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.03444E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.26697E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3019E-1
cs_fil2_imon=-2.16973E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.12998E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21845E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33658E-3
inlet_lpb_pmon=2.99644E-1
chamber_ion_pmon=1.19703E-7
chamber_cvt_pmon=2.51958E-3
foreline_cvt_pmon=2.51958E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.64374E-1
res40_imon=-2.3273E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=156
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.0E0	0.0E0	1.47E2	4.1E1	-2.09533E0	-7.57241E-1	-7.34925E-1	-9.19456E0	-9.1902E0	5.05447E-3	9.51529E-2	2.73694E1	-3.26325E1	-3.259E1	2.6825E1	1.1984E-7	2.51527E-3	2.51527E-3	6.31321E-3	3.01193E-1
2.0E0	2.9E1	0.0E0	3.16E2	1.6E2	-2.09426E0	-7.57146E-1	-7.34806E-1	-9.19504E0	-9.19023E0	4.91142E-3	9.5129E-2	2.72913E1	-3.26567E1	-3.26518E1	2.6852E1	1.20042E-7	2.52553E-3	2.52553E-3	6.32328E-3	3.01104E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09518E0	-7.57241E-1	-7.35116E-1	-9.19507E0	-9.19032E0	4.62532E-3	9.5129E-2	2.7344E1	-3.26644E1	-3.26384E1	2.6846E1	1.19601E-7	2.52757E-3	2.52757E-3	6.31837E-3	3.01347E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.09518E0	-7.57241E-1	-7.35307E-1	-9.19502E0	-9.19003E0	4.76837E-3	9.56297E-2	2.7308E1	-3.26585E1	-3.2649E1	2.684E1	1.198E-7	2.52169E-3	2.52169E-3	6.3074E-3	3.0071E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09449E0	-7.57551E-1	-7.34901E-1	-9.19478E0	-9.19046E0	4.60148E-3	9.51529E-2	2.73009E1	-3.26873E1	-3.25821E1	2.68214E1	1.20055E-7	2.5131E-3	2.5131E-3	6.32356E-3	3.00966E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09533E0	-7.57313E-1	-7.35116E-1	-9.1948E0	-9.19018E0	4.41074E-3	9.51529E-2	2.73123E1	-3.26236E1	-3.26182E1	2.68448E1	1.19978E-7	2.52139E-3	2.52139E-3	6.29624E-3	3.00144E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0948E0	-7.57241E-1	-7.35044E-1	-9.19468E0	-9.19018E0	4.74453E-3	9.4986E-2	2.73263E1	-3.2652E1	-3.26354E1	2.67821E1	1.20004E-7	2.51525E-3	2.51525E-3	6.31817E-3	2.99941E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09518E0	-7.57265E-1	-7.35068E-1	-9.19476E0	-9.19018E0	4.8399E-3	9.48429E-2	2.73183E1	-3.26482E1	-3.25924E1	2.69109E1	1.19861E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.00563E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09572E0	-7.56955E-1	-7.34854E-1	-9.1949E0	-9.19008E0	4.76837E-3	9.48906E-2	2.73189E1	-3.26446E1	-3.25948E1	2.68268E1	1.20209E-7	2.52169E-3	2.52169E-3	6.30202E-3	2.9943E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09526E0	-7.57051E-1	-7.3483E-1	-9.19456E0	-9.18996E0	4.673E-3	9.48906E-2	2.73393E1	-3.26608E1	-3.26248E1	2.67956E1	1.20122E-7	2.5199E-3	2.5199E-3	6.29098E-3	3.00302E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.0948E0	-7.57146E-1	-7.34901E-1	-9.19476E0	-9.19006E0	4.72069E-3	9.50813E-2	2.73454E1	-3.26849E1	-3.25978E1	2.6831E1	1.19902E-7	2.51847E-3	2.51847E-3	6.30202E-3	2.99941E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09441E0	-7.57098E-1	-7.35092E-1	-9.19492E0	-9.19039E0	4.60148E-3	9.49144E-2	2.73045E1	-3.26521E1	-3.26289E1	2.67955E1	1.2033E-7	2.51334E-3	2.51334E-3	6.32386E-3	3.03185E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09518E0	-7.57027E-1	-7.34711E-1	-9.19454E0	-9.19015E0	4.55379E-3	9.49383E-2	2.73363E1	-3.26633E1	-3.25972E1	2.68328E1	1.20209E-7	2.52276E-3	2.52276E-3	6.32896E-3	3.00453E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09503E0	-7.57003E-1	-7.35116E-1	-9.19461E0	-9.19003E0	4.36306E-3	9.52721E-2	2.73466E1	-3.26867E1	-3.26218E1	2.68166E1	1.20174E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.00563E-1
1.8E1	4.0E0	0.0E0	7.27E2	5.0E2	-2.09518E0	-7.56788E-1	-7.35426E-1	-9.19454E0	-9.19001E0	4.31538E-3	9.48668E-2	2.73327E1	-3.26518E1	-3.26098E1	2.68508E1	1.20017E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.00563E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09495E0	-7.57003E-1	-7.35331E-1	-9.19473E0	-9.19001E0	4.05312E-3	9.49383E-2	2.72937E1	-3.26663E1	-3.2647E1	2.68017E1	1.20004E-7	2.51847E-3	2.51847E-3	6.3074E-3	2.99686E-1
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-2.09526E0	-7.56884E-1	-7.35331E-1	-9.19483E0	-9.18999E0	4.33922E-3	9.47475E-2	2.73381E1	-3.26591E1	-3.26224E1	2.68454E1	1.20435E-7	2.5199E-3	2.5199E-3	6.32936E-3	3.01609E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09549E0	-7.57241E-1	-7.35283E-1	-9.19476E0	-9.18994E0	4.55379E-3	9.48429E-2	2.73149E1	-3.26573E1	-3.26498E1	2.67956E1	1.19809E-7	2.5199E-3	2.5199E-3	6.29645E-3	3.00041E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09549E0	-7.57194E-1	-7.35259E-1	-9.19466E0	-9.18989E0	4.55379E-3	9.50575E-2	2.72878E1	-3.26574E1	-3.26233E1	2.68563E1	1.19851E-7	2.51525E-3	2.51525E-3	6.31817E-3	2.99175E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09557E0	-7.57408E-1	-7.35474E-1	-9.19473E0	-9.1902E0	4.48227E-3	9.47952E-2	2.73159E1	-3.26612E1	-3.25983E1	2.68301E1	1.19703E-7	2.51958E-3	2.51958E-3	6.33658E-3	2.99644E-1
