[Scan]
initial_time=2016-01-18T23:17:17
final_time=2016-01-18T23:17:37
ip_count=19
run=1024
dataset=11
scan=828
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09487E0
qbias_imon=-1.08839E-4
ql1_vset=
ql1_vmon=-7.56979E-1
ql1_imon=1.42255E-8
ql2_vset=
ql2_vmon=-7.35378E-1
ql2_imon=2.04403E-9
ql3_vset=
ql3_vmon=-9.19442E0
ql3_imon=3.36671E-10
ql4_vset=
ql4_vmon=-9.18999E0
ql4_imon=-2.60901E-10
mult1=-9.87765E-9
mult2=-2.63703E-9
rf_tmon=-4.9342E-3
rf_agc=3.39344E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.33922E-3
ql5_imon=1.65628E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6556E0
bslens_imon=2.5468E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19624E1
lens5a_imon=1.99111E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12495E2
lens4a_imon=2.04888E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5398E1
cs_ef1b_imon=3.16601E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04609E2
lens23_imon=1.02195E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04652E1
cs_ea1_imon=1.11263E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37728E0
lens1_imon=2.68483E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64881E1
os_ef1alow_imon=2.97626E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03549E1
cs_ea2_imon=1.35614E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84261E1
cs_ef1a_imon=3.05133E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=1.17197E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11419E1
os_restr1_imon=4.28226E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15482E1
os_ea1_imon=2.4523E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63595E1
os_ef1bup_imon=3.08678E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23912E0
cs_ionrep_imon=9.31061E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91944E2
cs_nozzle_imon=1.93509E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02192E1
cs_anode1_imon=1.96427E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20451E0
olens4_imon=3.15854E-8
tplens_vset=1.4E-1
tplens_vmon=1.68096E0
tplens_imon=-2.10402E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2629E1
iondef3_imon=1.50445E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26225E1
iondef2_imon=1.55435E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02928E2
lens6_imon=2.98286E-4
ql6_vset=1.0E-1
ql6_vmon=9.50098E-2
ql6_imon=4.02311E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28159E0
ionrepsh_imon=8.59565E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33905E1
lens5b_imon=2.1787E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74669E1
cs_ef2b_imon=3.13995E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.46977E0
os_ea2_imon=-7.51931E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06075E2
lens4b_imon=2.00729E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71182E1
cs_ef2a_imon=3.16289E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08062E0
os_ef2alow_imon=-2.1923E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.81592E-1
os_ef2bup_imon=-5.1567E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11187E1
os_restr2_imon=3.38843E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2306E2
cs_ionfoca_imon=6.29433E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01792E1
cs_anode2_imon=2.10467E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73098E1
iondef1_imon=1.11369E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68478E1
iondef4_imon=1.10901E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71777E1
olens3_imon=4.77095E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81593E-1
olens1_imon=7.12061E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11682E0
cs_ionaccel_imon=-1.01419E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02076E2
cs_ionfocb_imon=1.47393E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56307E1
einzel_imon=7.82685E-6
window_vset=0.0E0
window_vmon=2.47225E-1
window_imon=-7.84827E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82647E2
mask1_imon=2.39147E-4
mask2_vset=0.0E0
mask2_vmon=-1.86529E1
mask2_imon=-5.20708E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92647E3
multa_neg_imon=7.42056E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93732E3
defgrida_imon=6.2384E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50113E3
multb_neg_imon=7.3427E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.55615E0
defgridb_imon=6.07205E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3326E1
os_fil1_imon=9.41053E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07578E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61529E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31832E1
cs_fil1_imon=6.96885E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.00097E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63689E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.62352E-2
os_fil2_imon=-2.47805E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.14983E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.34901E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30276E-1
cs_fil2_imon=-2.12473E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.2926E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21845E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=3.00563E-1
chamber_ion_pmon=1.20122E-7
chamber_cvt_pmon=2.52538E-3
foreline_cvt_pmon=2.52538E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.21181E-1
res40_imon=-2.34522E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=176
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09526E0	-7.5736E-1	-7.34735E-1	-9.19471E0	-9.18999E0	4.05312E-3	9.45807E-2	2.73135E1	-3.26699E1	-3.25978E1	2.6819E1	1.20158E-7	2.51417E-3	2.51417E-3	6.33436E-3	3.0071E-1
2.0E0	3.5E1	0.0E0	3.16E2	1.6E2	-2.09557E0	-7.57456E-1	-7.34782E-1	-9.19495E0	-9.19015E0	4.33922E-3	9.50098E-2	2.7318E1	-3.26646E1	-3.26266E1	2.684E1	1.19965E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.00041E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09541E0	-7.57265E-1	-7.34663E-1	-9.1948E0	-9.19032E0	4.41074E-3	9.46045E-2	2.73346E1	-3.26425E1	-3.26419E1	2.68202E1	1.20084E-7	2.51915E-3	2.51915E-3	6.3074E-3	3.00942E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-2.09472E0	-7.5748E-1	-7.34997E-1	-9.19471E0	-9.18999E0	4.22001E-3	9.49383E-2	2.73352E1	-3.26655E1	-3.26189E1	2.68268E1	1.20106E-7	2.51847E-3	2.51847E-3	6.3074E-3	3.00453E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09426E0	-7.57146E-1	-7.34901E-1	-9.19478E0	-9.19011E0	4.69685E-3	9.45807E-2	2.73063E1	-3.26579E1	-3.26446E1	2.68603E1	1.19953E-7	2.51847E-3	2.51847E-3	6.31817E-3	3.0071E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09441E0	-7.56812E-1	-7.35044E-1	-9.19483E0	-9.19003E0	4.45843E-3	9.47237E-2	2.72859E1	-3.26368E1	-3.26188E1	2.68581E1	1.19913E-7	2.51771E-3	2.51771E-3	6.3074E-3	2.9978E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0941E0	-7.56836E-1	-7.3514E-1	-9.19459E0	-9.19023E0	4.62532E-3	9.51052E-2	2.73075E1	-3.26639E1	-3.2641E1	2.68076E1	1.20017E-7	2.51771E-3	2.51771E-3	6.32936E-3	2.9952E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09487E0	-7.56955E-1	-7.34973E-1	-9.19461E0	-9.18992E0	4.88758E-3	9.51767E-2	2.73183E1	-3.26428E1	-3.26362E1	2.68388E1	1.20174E-7	2.5188E-3	2.5188E-3	6.30192E-3	3.00041E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09518E0	-7.56788E-1	-7.35116E-1	-9.19471E0	-9.1902E0	4.93526E-3	9.49383E-2	2.72949E1	-3.26506E1	-3.2602E1	2.68256E1	1.20084E-7	2.51693E-3	2.51693E-3	6.3074E-3	3.00676E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09379E0	-7.56812E-1	-7.34949E-1	-9.19468E0	-9.19001E0	4.57764E-3	9.50813E-2	2.73111E1	-3.26711E1	-3.26308E1	2.68304E1	1.19851E-7	2.51739E-3	2.51739E-3	6.3074E-3	3.01995E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09518E0	-7.57122E-1	-7.34782E-1	-9.19497E0	-9.18989E0	4.36306E-3	9.50336E-2	2.73257E1	-3.26708E1	-3.26225E1	2.67992E1	1.19757E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.98481E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0948E0	-7.56907E-1	-7.34806E-1	-9.19487E0	-9.19015E0	4.19617E-3	9.49144E-2	2.73015E1	-3.2641E1	-3.26032E1	2.68256E1	1.19809E-7	2.5199E-3	2.5199E-3	6.32386E-3	2.99E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09495E0	-7.5686E-1	-7.34901E-1	-9.19466E0	-9.19003E0	4.19617E-3	9.48191E-2	2.73423E1	-3.26815E1	-3.26113E1	2.68454E1	1.20004E-7	2.52384E-3	2.52384E-3	6.32356E-3	2.98665E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09572E0	-7.56884E-1	-7.35116E-1	-9.19464E0	-9.18994E0	4.50611E-3	9.51767E-2	2.73252E1	-3.26472E1	-3.26124E1	2.68458E1	1.20278E-7	2.52538E-3	2.52538E-3	6.3074E-3	3.01347E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09588E0	-7.56812E-1	-7.35211E-1	-9.19471E0	-9.18982E0	4.05312E-3	9.53674E-2	2.72929E1	-3.26664E1	-3.26217E1	2.68294E1	1.1974E-7	2.52131E-3	2.52131E-3	6.31269E-3	3.01356E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09533E0	-7.56812E-1	-7.35426E-1	-9.19492E0	-9.18996E0	4.36306E-3	9.52244E-2	2.73213E1	-3.26494E1	-3.26116E1	2.68453E1	1.19819E-7	2.52473E-3	2.52473E-3	6.31858E-3	3.01475E-1
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-2.09456E0	-7.56788E-1	-7.35021E-1	-9.19495E0	-9.19001E0	4.43459E-3	9.51052E-2	2.73261E1	-3.26579E1	-3.25731E1	2.68051E1	1.19913E-7	2.51662E-3	2.51662E-3	6.32936E-3	2.9978E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09557E0	-7.56693E-1	-7.35259E-1	-9.1948E0	-9.19003E0	4.52995E-3	9.5129E-2	2.7308E1	-3.26498E1	-3.25965E1	2.68365E1	1.20278E-7	2.51443E-3	2.51443E-3	6.3074E-3	2.98222E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09387E0	-7.56788E-1	-7.35664E-1	-9.19456E0	-9.19011E0	4.33922E-3	9.49383E-2	2.73129E1	-3.26524E1	-3.26242E1	2.68615E1	1.19841E-7	2.51498E-3	2.51498E-3	6.31798E-3	3.01104E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09487E0	-7.56979E-1	-7.35378E-1	-9.19442E0	-9.18999E0	4.33922E-3	9.50098E-2	2.73098E1	-3.26225E1	-3.2629E1	2.68478E1	1.20122E-7	2.52538E-3	2.52538E-3	6.32936E-3	3.00563E-1
