[Scan]
initial_time=2016-01-18T23:17:44
final_time=2016-01-18T23:18:03
ip_count=19
run=1024
dataset=11
scan=829
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09619E0
qbias_imon=-1.08732E-4
ql1_vset=
ql1_vmon=-7.57241E-1
ql1_imon=1.41614E-8
ql2_vset=
ql2_vmon=-7.35116E-1
ql2_imon=2.02497E-9
ql3_vset=
ql3_vmon=-9.19464E0
ql3_imon=2.41125E-10
ql4_vset=
ql4_vmon=-9.19001E0
ql4_imon=-2.41077E-10
mult1=-9.921E-9
mult2=-2.74057E-9
rf_tmon=-4.62658E-3
rf_agc=3.33997E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.98159E-3
ql5_imon=1.70739E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67447E0
bslens_imon=2.69545E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19594E1
lens5a_imon=1.98651E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12428E2
lens4a_imon=2.05288E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53977E1
cs_ef1b_imon=3.1611E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04632E2
lens23_imon=1.02128E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04534E1
cs_ea1_imon=1.10272E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39085E0
lens1_imon=2.7804E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64753E1
os_ef1alow_imon=2.97729E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03395E1
cs_ea2_imon=1.35437E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8443E1
cs_ef1a_imon=3.03568E-5
olens2_vset=9.7E-1
olens2_vmon=9.70387E-1
olens2_imon=1.16998E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11442E1
os_restr1_imon=4.2949E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14981E1
os_ea1_imon=2.45973E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63539E1
os_ef1bup_imon=3.08613E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.18898E0
cs_ionrep_imon=9.30707E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91938E2
cs_nozzle_imon=1.93611E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01959E1
cs_anode1_imon=1.96494E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20434E0
olens4_imon=3.16862E-8
tplens_vset=1.4E-1
tplens_vmon=1.67093E0
tplens_imon=-3.55518E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26308E1
iondef3_imon=1.51365E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26518E1
iondef2_imon=1.5632E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02933E2
lens6_imon=2.98399E-4
ql6_vset=1.0E-1
ql6_vmon=9.49383E-2
ql6_imon=4.01808E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30991E0
ionrepsh_imon=8.51424E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33374E1
lens5b_imon=2.18614E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74627E1
cs_ef2b_imon=3.14164E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.47154E0
os_ea2_imon=-8.7935E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06055E2
lens4b_imon=2.00658E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71318E1
cs_ef2a_imon=3.16758E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06957E0
os_ef2alow_imon=-2.46093E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.04031E-1
os_ef2bup_imon=-5.33689E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11075E1
os_restr2_imon=3.38454E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23053E2
cs_ionfoca_imon=6.3184E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01719E1
cs_anode2_imon=2.07955E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73189E1
iondef1_imon=1.09458E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68486E1
iondef4_imon=1.11188E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=4.74911E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81545E-1
olens1_imon=7.10226E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.17039E0
cs_ionaccel_imon=-7.81481E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02085E2
cs_ionfocb_imon=1.47435E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56537E1
einzel_imon=7.69505E-6
window_vset=0.0E0
window_vmon=2.46775E-1
window_imon=-7.995E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82639E2
mask1_imon=2.39174E-4
mask2_vset=0.0E0
mask2_vmon=-1.86506E1
mask2_imon=-6.19302E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92613E3
multa_neg_imon=7.41348E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93741E3
defgrida_imon=6.67021E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50129E3
multb_neg_imon=7.325E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.47347E0
defgridb_imon=6.08975E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33229E1
os_fil1_imon=9.41801E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07563E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62046E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31851E1
cs_fil1_imon=6.37398E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.42534E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.635E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.58553E-2
os_fil2_imon=-2.48577E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.04922E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.95416E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29522E-1
cs_fil2_imon=-2.29356E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.46658E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21838E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.9952E-1
chamber_ion_pmon=1.20069E-7
chamber_cvt_pmon=2.5199E-3
foreline_cvt_pmon=2.5199E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.24454E-1
res40_imon=-2.34921E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=209
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09449E0	-7.56907E-1	-7.35044E-1	-9.19478E0	-9.18999E0	4.33922E-3	9.52482E-2	2.73177E1	-3.26621E1	-3.26458E1	2.6825E1	1.20055E-7	2.52169E-3	2.52169E-3	6.31278E-3	3.00453E-1
2.0E0	3.2E1	0.0E0	3.16E2	1.6E2	-2.09387E0	-7.56979E-1	-7.3483E-1	-9.19464E0	-9.1903E0	4.55379E-3	9.50098E-2	2.73165E1	-3.26452E1	-3.26236E1	2.68307E1	1.19861E-7	2.52538E-3	2.52538E-3	6.34588E-3	3.00824E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09394E0	-7.56931E-1	-7.35116E-1	-9.19487E0	-9.19006E0	4.55379E-3	9.48668E-2	2.73279E1	-3.26675E1	-3.2599E1	2.68286E1	1.20017E-7	2.52209E-3	2.52209E-3	6.31288E-3	2.9978E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-2.09456E0	-7.57098E-1	-7.35188E-1	-9.19487E0	-9.19011E0	4.29153E-3	9.48906E-2	2.73375E1	-3.26508E1	-3.26337E1	2.68256E1	1.19913E-7	2.52318E-3	2.52318E-3	6.29098E-3	3.00041E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09495E0	-7.57265E-1	-7.34878E-1	-9.19499E0	-9.18996E0	4.86374E-3	9.46999E-2	2.72751E1	-3.26356E1	-3.2626E1	2.68755E1	1.20158E-7	2.52061E-3	2.52061E-3	6.33436E-3	2.99941E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09456E0	-7.56979E-1	-7.34949E-1	-9.19499E0	-9.19008E0	4.64916E-3	9.50813E-2	2.73405E1	-3.26803E1	-3.25747E1	2.68316E1	1.20226E-7	2.5199E-3	2.5199E-3	6.30192E-3	2.98222E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09441E0	-7.57313E-1	-7.34496E-1	-9.19518E0	-9.18982E0	4.72069E-3	9.4533E-2	2.72992E1	-3.26537E1	-3.2616E1	2.68464E1	1.20055E-7	2.51954E-3	2.51954E-3	6.3074E-3	2.99941E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09402E0	-7.57146E-1	-7.35021E-1	-9.19499E0	-9.19018E0	4.50611E-3	9.50098E-2	2.7373E1	-3.26921E1	-3.25635E1	2.68484E1	1.19953E-7	2.51954E-3	2.51954E-3	6.31817E-3	2.9943E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09418E0	-7.5717E-1	-7.34925E-1	-9.19483E0	-9.19008E0	4.31538E-3	9.50336E-2	2.72929E1	-3.26422E1	-3.26434E1	2.68383E1	1.20122E-7	2.51552E-3	2.51552E-3	6.33486E-3	3.00563E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09387E0	-7.57027E-1	-7.35164E-1	-9.19492E0	-9.19006E0	4.41074E-3	9.49621E-2	2.73263E1	-3.26653E1	-3.26216E1	2.685E1	1.19851E-7	2.51417E-3	2.51417E-3	6.33436E-3	3.00966E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09449E0	-7.57313E-1	-7.35211E-1	-9.19523E0	-9.19018E0	4.19617E-3	9.53674E-2	2.73305E1	-3.26655E1	-3.26231E1	2.67926E1	1.20084E-7	2.52027E-3	2.52027E-3	6.29067E-3	3.01209E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09464E0	-7.57027E-1	-7.34949E-1	-9.19507E0	-9.19015E0	4.19617E-3	9.51052E-2	2.73434E1	-3.2659E1	-3.26378E1	2.68484E1	1.20004E-7	2.52061E-3	2.52061E-3	6.30202E-3	3.01738E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09526E0	-7.57217E-1	-7.35021E-1	-9.19471E0	-9.1898E0	4.48227E-3	9.53913E-2	2.73063E1	-3.26488E1	-3.26579E1	2.68695E1	1.19697E-7	2.5131E-3	2.5131E-3	6.33436E-3	3.00197E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09487E0	-7.5717E-1	-7.34782E-1	-9.1948E0	-9.18989E0	4.45843E-3	9.5129E-2	2.72973E1	-3.262E1	-3.265E1	2.67788E1	1.20137E-7	2.5225E-3	2.5225E-3	6.31858E-3	3.02545E-1
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.0951E0	-7.57146E-1	-7.34782E-1	-9.1949E0	-9.18982E0	4.48227E-3	9.52005E-2	2.73432E1	-3.26704E1	-3.26101E1	2.68175E1	1.20158E-7	2.51525E-3	2.51525E-3	6.30202E-3	3.00966E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09433E0	-7.57122E-1	-7.34949E-1	-9.1948E0	-9.19011E0	4.64916E-3	9.52959E-2	2.73388E1	-3.2654E1	-3.26165E1	2.68618E1	1.20028E-7	2.52093E-3	2.52093E-3	6.31779E-3	2.97786E-1
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-2.09456E0	-7.57146E-1	-7.34878E-1	-9.19464E0	-9.19008E0	4.52995E-3	9.52005E-2	2.73285E1	-3.26386E1	-3.26242E1	2.68406E1	1.2006E-7	2.51758E-3	2.51758E-3	6.31902E-3	2.98161E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09541E0	-7.57265E-1	-7.35116E-1	-9.19476E0	-9.18984E0	4.55379E-3	9.49144E-2	2.73228E1	-3.26891E1	-3.26272E1	2.6813E1	1.20122E-7	2.52318E-3	2.52318E-3	6.31288E-3	2.9926E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0968E0	-7.57074E-1	-7.34854E-1	-9.19502E0	-9.18989E0	4.26769E-3	9.49383E-2	2.73237E1	-3.26705E1	-3.2623E1	2.68157E1	1.20004E-7	2.51739E-3	2.51739E-3	6.33977E-3	3.01223E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09619E0	-7.57241E-1	-7.35116E-1	-9.19464E0	-9.19001E0	3.98159E-3	9.49383E-2	2.73189E1	-3.26518E1	-3.26308E1	2.68486E1	1.20069E-7	2.5199E-3	2.5199E-3	6.3074E-3	2.9952E-1
