[Scan]
initial_time=2016-01-18T23:18:37
final_time=2016-01-18T23:18:57
ip_count=19
run=1024
dataset=11
scan=831
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09495E0
qbias_imon=-1.08818E-4
ql1_vset=
ql1_vmon=-7.56955E-1
ql1_imon=1.42082E-8
ql2_vset=
ql2_vmon=-7.3514E-1
ql2_imon=1.99635E-9
ql3_vset=
ql3_vmon=-9.19483E0
ql3_imon=2.26057E-10
ql4_vset=
ql4_vmon=-9.19034E0
ql4_imon=-2.77126E-10
mult1=-8.86143E-9
mult2=-2.62679E-9
rf_tmon=-5.40765E-3
rf_agc=3.19577E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.673E-3
ql5_imon=1.73042E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65893E0
bslens_imon=2.30343E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19773E1
lens5a_imon=1.99389E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12475E2
lens4a_imon=2.05179E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53724E1
cs_ef1b_imon=3.16939E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04613E2
lens23_imon=1.02456E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04519E1
cs_ea1_imon=1.0894E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35093E0
lens1_imon=2.82615E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64584E1
os_ef1alow_imon=2.98991E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03955E1
cs_ea2_imon=1.34824E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8443E1
cs_ef1a_imon=3.03352E-5
olens2_vset=9.7E-1
olens2_vmon=9.69911E-1
olens2_imon=1.1674E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11508E1
os_restr1_imon=4.27616E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1524E1
os_ea1_imon=2.43297E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6402E1
os_ef1bup_imon=3.08325E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21665E0
cs_ionrep_imon=9.68277E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91917E2
cs_nozzle_imon=1.93575E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01851E1
cs_anode1_imon=1.97755E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20399E0
olens4_imon=3.165E-8
tplens_vset=1.4E-1
tplens_vmon=1.67208E0
tplens_imon=-3.06556E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26615E1
iondef3_imon=1.4946E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26681E1
iondef2_imon=1.59482E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02921E2
lens6_imon=2.9827E-4
ql6_vset=1.0E-1
ql6_vmon=9.48906E-2
ql6_imon=4.02116E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28875E0
ionrepsh_imon=8.42104E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33526E1
lens5b_imon=2.17882E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74591E1
cs_ef2b_imon=3.14704E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.43295E0
os_ea2_imon=-5.01223E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06063E2
lens4b_imon=2.00533E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70987E1
cs_ef2a_imon=3.1629E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10081E0
os_ef2alow_imon=-2.55103E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.80005E-1
os_ef2bup_imon=-5.09543E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11129E1
os_restr2_imon=3.37049E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23011E2
cs_ionfoca_imon=6.28054E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01893E1
cs_anode2_imon=2.09757E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72931E1
iondef1_imon=1.12113E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67751E1
iondef4_imon=1.10215E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=4.70905E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81283E-1
olens1_imon=7.07635E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15477E0
cs_ionaccel_imon=-8.21124E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02033E2
cs_ionfocb_imon=1.47688E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56459E1
einzel_imon=7.85002E-6
window_vset=0.0E0
window_vmon=2.36564E-1
window_imon=-8.49956E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82683E2
mask1_imon=2.39192E-4
mask2_vset=0.0E0
mask2_vmon=-1.86266E1
mask2_imon=-4.5352E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92647E3
multa_neg_imon=8.06775E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93707E3
defgrida_imon=6.61135E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5013E3
multb_neg_imon=7.42967E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.72037E0
defgridb_imon=6.00211E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3324E1
os_fil1_imon=9.41303E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0769E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6114E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31786E1
cs_fil1_imon=5.10659E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.41333E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63324E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.51823E-2
os_fil2_imon=-2.44973E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.09727E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.51559E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28098E-1
cs_fil2_imon=-2.40768E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.55067E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21842E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=3.00563E-1
chamber_ion_pmon=1.19809E-7
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40054E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.18157E-1
res40_imon=-2.41408E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=163
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09557E0	-7.57074E-1	-7.34949E-1	-9.19495E0	-9.18984E0	4.05312E-3	9.50098E-2	2.73511E1	-3.26632E1	-3.26219E1	2.68887E1	1.19809E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.01347E-1
2.0E0	3.9E1	0.0E0	3.16E2	1.6E2	-2.09557E0	-7.5686E-1	-7.35068E-1	-9.19504E0	-9.18984E0	4.19617E-3	9.53913E-2	2.73473E1	-3.2675E1	-3.26083E1	2.68328E1	1.19851E-7	2.51847E-3	2.51847E-3	6.30202E-3	3.02769E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09541E0	-7.56955E-1	-7.35188E-1	-9.19487E0	-9.18984E0	4.07696E-3	9.48191E-2	2.7341E1	-3.26875E1	-3.26123E1	2.68267E1	1.19872E-7	2.5147E-3	2.5147E-3	6.33538E-3	3.01209E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09456E0	-7.57337E-1	-7.34901E-1	-9.19497E0	-9.18953E0	4.24385E-3	9.50098E-2	2.73569E1	-3.26753E1	-3.26173E1	2.68338E1	1.20177E-7	2.52197E-3	2.52197E-3	6.323E-3	2.99506E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09557E0	-7.57432E-1	-7.34878E-1	-9.19502E0	-9.1898E0	4.33922E-3	9.48906E-2	2.73169E1	-3.26708E1	-3.2639E1	2.67896E1	1.20045E-7	2.51952E-3	2.51952E-3	6.29603E-3	2.9863E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09572E0	-7.57241E-1	-7.35164E-1	-9.19487E0	-9.18977E0	4.3869E-3	9.4986E-2	2.73246E1	-3.26585E1	-3.2606E1	2.69704E1	1.198E-7	2.51739E-3	2.51739E-3	6.33436E-3	2.99686E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09533E0	-7.57122E-1	-7.35164E-1	-9.1948E0	-9.19003E0	4.24385E-3	9.48906E-2	2.73243E1	-3.26633E1	-3.26032E1	2.6816E1	1.19953E-7	2.51417E-3	2.51417E-3	6.32896E-3	2.99686E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09549E0	-7.57265E-1	-7.35235E-1	-9.19504E0	-9.19032E0	4.62532E-3	9.48191E-2	2.73057E1	-3.26603E1	-3.26182E1	2.6813E1	1.19757E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.01347E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09518E0	-7.57194E-1	-7.34878E-1	-9.19511E0	-9.19018E0	4.45843E-3	9.47714E-2	2.72855E1	-3.26511E1	-3.26358E1	2.6846E1	1.19965E-7	2.51552E-3	2.51552E-3	6.32936E-3	3.00824E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0951E0	-7.57122E-1	-7.35235E-1	-9.19509E0	-9.19003E0	4.29153E-3	9.48668E-2	2.73484E1	-3.26735E1	-3.2626E1	2.6843E1	1.20122E-7	2.51662E-3	2.51662E-3	6.3074E-3	2.9978E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09588E0	-7.57217E-1	-7.34735E-1	-9.19487E0	-9.18994E0	4.24385E-3	9.4986E-2	2.73252E1	-3.26708E1	-3.26394E1	2.68535E1	1.2035E-7	2.51581E-3	2.51581E-3	6.31858E-3	3.01475E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09526E0	-7.57265E-1	-7.34735E-1	-9.19518E0	-9.18987E0	4.26769E-3	9.49144E-2	2.73337E1	-3.26851E1	-3.25981E1	2.67018E1	1.19919E-7	2.5216E-3	2.5216E-3	6.33297E-3	2.99179E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09549E0	-7.57146E-1	-7.34878E-1	-9.19511E0	-9.18982E0	4.43459E-3	9.47475E-2	2.73039E1	-3.26915E1	-3.26326E1	2.68706E1	1.19963E-7	2.51911E-3	2.51911E-3	6.32518E-3	2.97673E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09557E0	-7.57289E-1	-7.34663E-1	-9.19502E0	-9.1902E0	4.26769E-3	9.47475E-2	2.73345E1	-3.26975E1	-3.26032E1	2.68713E1	1.19653E-7	2.5188E-3	2.5188E-3	6.32936E-3	3.00563E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09549E0	-7.57337E-1	-7.34735E-1	-9.19504E0	-9.19008E0	4.41074E-3	9.46999E-2	2.7288E1	-3.26419E1	-3.26186E1	2.68311E1	1.19705E-7	2.5188E-3	2.5188E-3	6.32936E-3	3.01085E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09503E0	-7.5717E-1	-7.35116E-1	-9.19499E0	-9.18996E0	4.31538E-3	9.49144E-2	2.73076E1	-3.26491E1	-3.26229E1	2.6777E1	1.20177E-7	2.51575E-3	2.51575E-3	6.29185E-3	2.99753E-1
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-2.09495E0	-7.5736E-1	-7.3514E-1	-9.1949E0	-9.18996E0	4.43459E-3	9.51052E-2	2.73517E1	-3.2652E1	-3.26296E1	2.68325E1	1.20045E-7	2.51838E-3	2.51838E-3	6.34164E-3	3.00794E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09487E0	-7.5736E-1	-7.35164E-1	-9.1949E0	-9.1902E0	4.55379E-3	9.4986E-2	2.73321E1	-3.26549E1	-3.26296E1	2.68706E1	1.19902E-7	2.51096E-3	2.51096E-3	6.30202E-3	3.01223E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09441E0	-7.57241E-1	-7.35092E-1	-9.19499E0	-9.18994E0	4.74453E-3	9.47237E-2	2.73213E1	-3.26675E1	-3.26164E1	2.68881E1	1.19809E-7	2.51225E-3	2.51225E-3	6.29645E-3	3.01085E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09495E0	-7.56955E-1	-7.3514E-1	-9.19483E0	-9.19034E0	4.673E-3	9.48906E-2	2.72931E1	-3.26681E1	-3.26615E1	2.67751E1	1.19809E-7	2.5188E-3	2.5188E-3	6.32936E-3	3.00563E-1
