[Scan]
initial_time=2016-01-18T23:20:50
final_time=2016-01-18T23:21:10
ip_count=19
run=1024
dataset=11
scan=836
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09379E0
qbias_imon=-1.0875E-4
ql1_vset=
ql1_vmon=-7.5686E-1
ql1_imon=1.41617E-8
ql2_vset=
ql2_vmon=-7.35092E-1
ql2_imon=1.99479E-9
ql3_vset=
ql3_vmon=-9.19509E0
ql3_imon=2.41351E-10
ql4_vset=
ql4_vmon=-9.19011E0
ql4_imon=-2.40314E-10
mult1=-9.70427E-9
mult2=-2.81842E-9
rf_tmon=-3.11851E-3
rf_agc=3.40726E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.41074E-3
ql5_imon=1.70879E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64391E0
bslens_imon=2.4296E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19911E1
lens5a_imon=1.97802E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12481E2
lens4a_imon=2.05035E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54067E1
cs_ef1b_imon=3.1647E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04602E2
lens23_imon=1.02402E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05138E1
cs_ea1_imon=1.09625E-5
lens1_vset=-5.0E0
lens1_vmon=-5.43505E0
lens1_imon=2.93069E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64747E1
os_ef1alow_imon=2.97838E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0354E1
cs_ea2_imon=1.35689E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84436E1
cs_ef1a_imon=3.04613E-5
olens2_vset=9.7E-1
olens2_vmon=9.6972E-1
olens2_imon=1.16848E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11454E1
os_restr1_imon=4.28337E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14939E1
os_ea1_imon=2.44126E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63347E1
os_ef1bup_imon=3.07676E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.28214E0
cs_ionrep_imon=9.44484E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91887E2
cs_nozzle_imon=1.93507E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01851E1
cs_anode1_imon=1.96818E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20415E0
olens4_imon=3.15591E-8
tplens_vset=1.4E-1
tplens_vmon=1.6895E0
tplens_imon=-4.97618E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26549E1
iondef3_imon=1.53642E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26627E1
iondef2_imon=1.57607E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02973E2
lens6_imon=2.98194E-4
ql6_vset=1.0E-1
ql6_vmon=9.52721E-2
ql6_imon=4.00776E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29055E0
ionrepsh_imon=8.94375E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33766E1
lens5b_imon=2.16728E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74844E1
cs_ef2b_imon=3.13983E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.43415E0
os_ea2_imon=-9.01373E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06091E2
lens4b_imon=2.00951E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71162E1
cs_ef2a_imon=3.17083E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06177E0
os_ef2alow_imon=-2.42489E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.0283E-1
os_ef2bup_imon=-5.20715E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11135E1
os_restr2_imon=3.39175E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23037E2
cs_ionfoca_imon=6.29604E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01863E1
cs_anode2_imon=2.08531E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73279E1
iondef1_imon=1.10238E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68425E1
iondef4_imon=1.09855E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=4.7794E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81712E-1
olens1_imon=7.0747E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13074E0
cs_ionaccel_imon=-7.995E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0206E2
cs_ionfocb_imon=1.47381E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56735E1
einzel_imon=7.87885E-6
window_vset=0.0E0
window_vmon=2.59389E-1
window_imon=-7.41837E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82666E2
mask1_imon=2.39189E-4
mask2_vset=0.0E0
mask2_vmon=-1.86488E1
mask2_imon=-5.68847E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92662E3
multa_neg_imon=7.09081E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9374E3
defgrida_imon=6.61856E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50111E3
multb_neg_imon=7.14128E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.43164E0
defgridb_imon=6.20759E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33243E1
os_fil1_imon=9.40228E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07828E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61398E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3185E1
cs_fil1_imon=7.3951E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.67161E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63265E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.69879E-2
os_fil2_imon=-2.45574E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.07925E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.42536E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31335E-1
cs_fil2_imon=-2.53983E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.25034E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21744E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=3.00197E-1
chamber_ion_pmon=1.19851E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.80916E-1
res40_imon=-2.39606E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=207
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09487E0	-7.57122E-1	-7.34854E-1	-9.19509E0	-9.19015E0	4.22001E-3	9.49383E-2	2.72987E1	-3.2721E1	-3.25947E1	2.68453E1	1.20122E-7	2.52318E-3	2.52318E-3	6.3074E-3	3.00041E-1
2.0E0	4.7E1	0.0E0	3.16E2	1.6E2	-2.09549E0	-7.57098E-1	-7.34973E-1	-9.19511E0	-9.18999E0	4.29153E-3	9.48906E-2	2.7299E1	-3.26591E1	-3.26383E1	2.68695E1	1.19851E-7	2.52599E-3	2.52599E-3	6.31278E-3	3.00966E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09541E0	-7.57003E-1	-7.34758E-1	-9.19507E0	-9.19008E0	4.29153E-3	9.50098E-2	2.73458E1	-3.26868E1	-3.26101E1	2.67974E1	1.20069E-7	2.52099E-3	2.52099E-3	6.30192E-3	2.9926E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.0948E0	-7.56979E-1	-7.34854E-1	-9.19533E0	-9.19023E0	4.33922E-3	9.52482E-2	2.73057E1	-3.26496E1	-3.26236E1	2.68629E1	1.20414E-7	2.5131E-3	2.5131E-3	6.31817E-3	3.00966E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09456E0	-7.57003E-1	-7.34997E-1	-9.19526E0	-9.19018E0	4.24385E-3	9.53197E-2	2.73213E1	-3.2635E1	-3.26218E1	2.68526E1	1.19965E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.01871E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09464E0	-7.5686E-1	-7.34639E-1	-9.19535E0	-9.18992E0	4.22001E-3	9.52482E-2	2.73201E1	-3.26699E1	-3.26242E1	2.68262E1	1.19809E-7	2.51225E-3	2.51225E-3	6.31288E-3	3.02133E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09487E0	-7.57003E-1	-7.34544E-1	-9.19514E0	-9.18975E0	4.19617E-3	9.51767E-2	2.73171E1	-3.26224E1	-3.26224E1	2.68238E1	1.19851E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.02253E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09441E0	-7.57289E-1	-7.34782E-1	-9.19509E0	-9.19003E0	4.3869E-3	9.50098E-2	2.73688E1	-3.2644E1	-3.26356E1	2.68484E1	1.20174E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.02133E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09464E0	-7.5717E-1	-7.34711E-1	-9.19497E0	-9.18999E0	4.31538E-3	9.50098E-2	2.72967E1	-3.26621E1	-3.2641E1	2.68022E1	1.19965E-7	2.5199E-3	2.5199E-3	6.34037E-3	3.01347E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09426E0	-7.57074E-1	-7.34496E-1	-9.19476E0	-9.19037E0	4.33922E-3	9.48906E-2	2.73198E1	-3.2698E1	-3.26266E1	2.68178E1	1.19861E-7	2.51662E-3	2.51662E-3	6.29098E-3	3.02133E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.0941E0	-7.56979E-1	-7.34639E-1	-9.1949E0	-9.19015E0	4.41074E-3	9.52721E-2	2.73213E1	-3.26861E1	-3.25972E1	2.68593E1	1.20158E-7	2.51739E-3	2.51739E-3	6.30202E-3	3.00966E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0948E0	-7.56907E-1	-7.34925E-1	-9.19502E0	-9.19037E0	4.55379E-3	9.48191E-2	2.73141E1	-3.26476E1	-3.26536E1	2.6816E1	1.19913E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.00563E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09441E0	-7.5686E-1	-7.35092E-1	-9.19497E0	-9.19006E0	4.3869E-3	9.50813E-2	2.73225E1	-3.26573E1	-3.25816E1	2.68496E1	1.19965E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.01609E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09364E0	-7.57051E-1	-7.35092E-1	-9.19521E0	-9.19039E0	4.55379E-3	9.48906E-2	2.73228E1	-3.26561E1	-3.26313E1	2.68707E1	1.19965E-7	2.5188E-3	2.5188E-3	6.33486E-3	3.00041E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09402E0	-7.57051E-1	-7.34973E-1	-9.19483E0	-9.18996E0	4.33922E-3	9.50098E-2	2.73351E1	-3.26494E1	-3.26488E1	2.68142E1	1.19965E-7	2.51552E-3	2.51552E-3	6.31837E-3	2.9978E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09387E0	-7.56979E-1	-7.35092E-1	-9.19495E0	-9.19018E0	4.64916E-3	9.51529E-2	2.73167E1	-3.26799E1	-3.26278E1	2.68424E1	1.19861E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.00563E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09426E0	-7.56884E-1	-7.34997E-1	-9.19483E0	-9.18996E0	4.36306E-3	9.53197E-2	2.73173E1	-3.26446E1	-3.26503E1	2.68493E1	1.19965E-7	2.51443E-3	2.51443E-3	6.3074E-3	3.00563E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09441E0	-7.57122E-1	-7.35116E-1	-9.19507E0	-9.19003E0	4.36306E-3	9.50813E-2	2.733E1	-3.26689E1	-3.26098E1	2.68314E1	1.19953E-7	2.51954E-3	2.51954E-3	6.31817E-3	3.01738E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09356E0	-7.57122E-1	-7.34806E-1	-9.19502E0	-9.19006E0	4.29153E-3	9.53674E-2	2.73175E1	-3.26437E1	-3.26236E1	2.6814E1	1.20276E-7	2.51472E-3	2.51472E-3	6.31779E-3	3.01981E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09379E0	-7.5686E-1	-7.35092E-1	-9.19509E0	-9.19011E0	4.41074E-3	9.52721E-2	2.73279E1	-3.26627E1	-3.26549E1	2.68425E1	1.19851E-7	2.51525E-3	2.51525E-3	6.31817E-3	3.00197E-1
