[Scan]
initial_time=2016-01-18T23:22:37
final_time=2016-01-18T23:22:57
ip_count=19
run=1024
dataset=11
scan=840
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0951E0
qbias_imon=-1.08804E-4
ql1_vset=
ql1_vmon=-7.57051E-1
ql1_imon=1.40769E-8
ql2_vset=
ql2_vmon=-7.35068E-1
ql2_imon=2.02075E-9
ql3_vset=
ql3_vmon=-9.19511E0
ql3_imon=2.01118E-10
ql4_vset=
ql4_vmon=-9.18984E0
ql4_imon=-2.31326E-10
mult1=-9.82637E-9
mult2=-2.78282E-9
rf_tmon=-4.5467E-3
rf_agc=3.29154E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.33922E-3
ql5_imon=1.73562E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64616E0
bslens_imon=2.41938E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19441E1
lens5a_imon=1.99784E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12477E2
lens4a_imon=2.0492E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54001E1
cs_ef1b_imon=3.15533E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04637E2
lens23_imon=1.02432E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04799E1
cs_ea1_imon=1.10485E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39439E0
lens1_imon=2.70961E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6468E1
os_ef1alow_imon=2.97009E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03909E1
cs_ea2_imon=1.34659E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84274E1
cs_ef1a_imon=3.05586E-5
olens2_vset=9.7E-1
olens2_vmon=9.69958E-1
olens2_imon=1.16113E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11544E1
os_restr1_imon=4.28301E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15247E1
os_ea1_imon=2.44911E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63635E1
os_ef1bup_imon=3.08253E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25092E0
cs_ionrep_imon=9.50174E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9193E2
cs_nozzle_imon=1.93537E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02007E1
cs_anode1_imon=1.9635E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20415E0
olens4_imon=3.15358E-8
tplens_vset=1.4E-1
tplens_vmon=1.68214E0
tplens_imon=-1.96244E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26361E1
iondef3_imon=1.50621E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26484E1
iondef2_imon=1.577E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02933E2
lens6_imon=2.98286E-4
ql6_vset=1.0E-1
ql6_vmon=9.48906E-2
ql6_imon=4.02486E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29339E0
ionrepsh_imon=8.80093E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33882E1
lens5b_imon=2.18472E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74465E1
cs_ef2b_imon=3.13371E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.41432E0
os_ea2_imon=-8.2272E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06095E2
lens4b_imon=2.00821E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7121E1
cs_ef2a_imon=3.17191E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05696E0
os_ef2alow_imon=-2.47174E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.99827E-1
os_ef2bup_imon=-5.19634E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11045E1
os_restr2_imon=3.37697E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23071E2
cs_ionfoca_imon=6.27875E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01809E1
cs_anode2_imon=2.08639E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73028E1
iondef1_imon=1.11971E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68893E1
iondef4_imon=1.10323E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=4.75727E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81808E-1
olens1_imon=7.04943E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14276E0
cs_ionaccel_imon=-8.24728E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02001E2
cs_ionfocb_imon=1.47558E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56471E1
einzel_imon=7.67703E-6
window_vset=0.0E0
window_vmon=2.79211E-1
window_imon=-7.95896E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82663E2
mask1_imon=2.39181E-4
mask2_vset=0.0E0
mask2_vmon=-1.86422E1
mask2_imon=-7.41837E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9266E3
multa_neg_imon=7.57984E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93679E3
defgrida_imon=6.74808E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50144E3
multb_neg_imon=7.39225E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.49119E0
defgridb_imon=6.17469E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33251E1
os_fil1_imon=9.41639E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08062E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61321E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31858E1
cs_fil1_imon=7.76751E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.5755E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63269E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.66151E-2
os_fil2_imon=-2.71402E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.96513E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.29206E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31335E-1
cs_fil2_imon=-2.24551E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.10018E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21791E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=3.00453E-1
chamber_ion_pmon=1.20106E-7
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.2116E-1
res40_imon=-2.32758E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=172
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09464E0	-7.5686E-1	-7.35092E-1	-9.19456E0	-9.18972E0	4.19617E-3	9.4986E-2	2.73405E1	-3.26639E1	-3.26266E1	2.69061E1	1.198E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.01738E-1
2.0E0	3.3E1	0.0E0	3.16E2	1.6E2	-2.09449E0	-7.56669E-1	-7.35116E-1	-9.19483E0	-9.18994E0	4.29153E-3	9.50336E-2	2.73262E1	-3.26772E1	-3.26021E1	2.67254E1	1.20017E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.02922E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09387E0	-7.56717E-1	-7.35116E-1	-9.19454E0	-9.18982E0	4.31538E-3	9.52244E-2	2.7307E1	-3.27093E1	-3.25942E1	2.6893E1	1.20092E-7	2.52236E-3	2.52236E-3	6.31269E-3	3.01104E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.09456E0	-7.56836E-1	-7.35021E-1	-9.19478E0	-9.19001E0	4.41074E-3	9.51052E-2	2.73482E1	-3.26602E1	-3.26343E1	2.68124E1	1.19667E-7	2.52293E-3	2.52293E-3	6.3245E-3	3.00251E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09557E0	-7.56764E-1	-7.35235E-1	-9.19464E0	-9.19008E0	4.45843E-3	9.52482E-2	2.73238E1	-3.26486E1	-3.25897E1	2.6786E1	1.20004E-7	2.51783E-3	2.51783E-3	6.3282E-3	3.00494E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0948E0	-7.56907E-1	-7.35092E-1	-9.19452E0	-9.19008E0	4.43459E-3	9.51767E-2	2.73526E1	-3.26717E1	-3.2647E1	2.68575E1					
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09433E0	-7.57098E-1	-7.3514E-1	-9.19447E0	-9.18999E0	4.48227E-3	9.53674E-2	2.7308E1	-3.26649E1	-3.25912E1	2.68532E1	1.19861E-7	2.51225E-3	2.51225E-3	6.32936E-3	3.01085E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09433E0	-7.5736E-1	-7.35307E-1	-9.19459E0	-9.18977E0	4.673E-3	9.52244E-2	2.73039E1	-3.26358E1	-3.26058E1	2.67553E1	1.20174E-7	2.51662E-3	2.51662E-3	6.32936E-3	3.01609E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09472E0	-7.57217E-1	-7.34901E-1	-9.19492E0	-9.19006E0	4.41074E-3	9.50575E-2	2.73201E1	-3.26801E1	-3.26032E1	2.66598E1	1.20069E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.01347E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09526E0	-7.56884E-1	-7.34973E-1	-9.19485E0	-9.18972E0	4.52995E-3	9.48668E-2	2.73676E1	-3.26602E1	-3.26278E1	2.68196E1	1.20017E-7	2.5199E-3	2.5199E-3	6.35692E-3	3.00824E-1
1.4E1	3.0E0	0.0E0	5.66E2	3.82E2	-2.09518E0	-7.56812E-1	-7.34735E-1	-9.19471E0	-9.18987E0	4.45843E-3	9.4986E-2	2.73393E1	-3.26344E1	-3.26567E1	2.67989E1	1.20158E-7	2.52169E-3	2.52169E-3	6.32896E-3	3.0071E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09487E0	-7.56764E-1	-7.34854E-1	-9.19483E0	-9.18996E0	4.48227E-3	9.51052E-2	2.72978E1	-3.26468E1	-3.25868E1	2.68375E1	1.19809E-7	2.51552E-3	2.51552E-3	6.31837E-3	2.98222E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09456E0	-7.56884E-1	-7.3483E-1	-9.19485E0	-9.18982E0	4.3869E-3	9.51529E-2	2.72927E1	-3.26437E1	-3.2659E1	2.6858E1	1.19872E-7	2.51693E-3	2.51693E-3	6.3074E-3	3.0041E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09495E0	-7.56764E-1	-7.34758E-1	-9.19495E0	-9.19006E0	4.60148E-3	9.47475E-2	2.73393E1	-3.26478E1	-3.26071E1	2.6804E1	1.2026E-7	2.51632E-3	2.51632E-3	6.33436E-3	3.01223E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09456E0	-7.56907E-1	-7.34949E-1	-9.19492E0	-9.18992E0	4.60148E-3	9.4986E-2	2.73398E1	-3.26772E1	-3.26306E1	2.68613E1	1.20209E-7	2.51847E-3	2.51847E-3	6.31278E-3	3.00197E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09449E0	-7.57074E-1	-7.34925E-1	-9.19497E0	-9.18984E0	4.57764E-3	9.49383E-2	2.73339E1	-3.26524E1	-3.2617E1	2.67163E1	1.1988E-7	2.51886E-3	2.51886E-3	6.33863E-3	3.00989E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09487E0	-7.56907E-1	-7.35044E-1	-9.1949E0	-9.18951E0	4.48227E-3	9.50575E-2	2.73279E1	-3.26446E1	-3.25942E1	2.6831E1	1.19913E-7	2.52318E-3	2.52318E-3	6.31288E-3	2.98222E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09449E0	-7.57051E-1	-7.34949E-1	-9.19504E0	-9.1897E0	4.36306E-3	9.52244E-2	2.73028E1	-3.26687E1	-3.26004E1	2.68424E1	1.19913E-7	2.5199E-3	2.5199E-3	6.32936E-3	2.97704E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09449E0	-7.56884E-1	-7.34973E-1	-9.19485E0	-9.18958E0	4.33922E-3	9.51529E-2	2.73321E1	-3.26458E1	-3.26128E1	2.67421E1	1.19941E-7	2.51709E-3	2.51709E-3	6.32858E-3	2.98842E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0951E0	-7.57051E-1	-7.35068E-1	-9.19511E0	-9.18984E0	4.33922E-3	9.48906E-2	2.73028E1	-3.26484E1	-3.26361E1	2.68893E1	1.20106E-7	2.51417E-3	2.51417E-3	6.32356E-3	3.00453E-1
