[Scan]
initial_time=2016-01-18T23:24:24
final_time=2016-01-18T23:24:43
ip_count=19
run=1024
dataset=11
scan=844
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09526E0
qbias_imon=-1.08849E-4
ql1_vset=
ql1_vmon=-7.56645E-1
ql1_imon=1.4164E-8
ql2_vset=
ql2_vmon=-7.34878E-1
ql2_imon=1.98603E-9
ql3_vset=
ql3_vmon=-9.19526E0
ql3_imon=1.7221E-10
ql4_vset=
ql4_vmon=-9.18994E0
ql4_imon=-2.57182E-10
mult1=-9.78855E-9
mult2=-2.65673E-9
rf_tmon=-4.32617E-3
rf_agc=3.29911E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.55379E-3
ql5_imon=1.70804E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67093E0
bslens_imon=2.47601E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19382E1
lens5a_imon=1.99288E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12487E2
lens4a_imon=2.04959E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53934E1
cs_ef1b_imon=3.15906E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04608E2
lens23_imon=1.02241E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04498E1
cs_ea1_imon=1.10166E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37905E0
lens1_imon=2.69899E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64985E1
os_ef1alow_imon=2.96862E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03885E1
cs_ea2_imon=1.37243E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84186E1
cs_ef1a_imon=3.04334E-5
olens2_vset=9.7E-1
olens2_vmon=9.7003E-1
olens2_imon=1.16737E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11401E1
os_restr1_imon=4.28852E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14314E1
os_ea1_imon=2.42717E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63658E1
os_ef1bup_imon=3.08191E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22732E0
cs_ionrep_imon=9.31061E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91944E2
cs_nozzle_imon=1.93806E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01943E1
cs_anode1_imon=1.96497E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20403E0
olens4_imon=3.15224E-8
tplens_vset=1.4E-1
tplens_vmon=1.68096E0
tplens_imon=-9.36015E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26434E1
iondef3_imon=1.49206E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26362E1
iondef2_imon=1.56391E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02959E2
lens6_imon=2.98144E-4
ql6_vset=1.0E-1
ql6_vmon=9.49621E-2
ql6_imon=4.01441E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.3046E0
ionrepsh_imon=8.47531E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3364E1
lens5b_imon=2.18401E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74762E1
cs_ef2b_imon=3.13508E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48629E0
os_ea2_imon=-7.30695E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06089E2
lens4b_imon=2.00648E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7131E1
cs_ef2a_imon=3.16949E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05456E0
os_ef2alow_imon=-2.53288E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.03023E-1
os_ef2bup_imon=-5.17407E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11054E1
os_restr2_imon=3.38843E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.22993E2
cs_ionfoca_imon=6.2876E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01734E1
cs_anode2_imon=2.09286E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73496E1
iondef1_imon=1.1006E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68112E1
iondef4_imon=1.10797E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=4.75069E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81712E-1
olens1_imon=7.06797E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14868E0
cs_ionaccel_imon=-8.02203E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02099E2
cs_ionfocb_imon=1.47518E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56324E1
einzel_imon=7.85465E-6
window_vset=0.0E0
window_vmon=2.6576E-1
window_imon=-7.22272E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82649E2
mask1_imon=2.39209E-4
mask2_vset=0.0E0
mask2_vmon=-1.8635E1
mask2_imon=-5.41559E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92658E3
multa_neg_imon=7.68956E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93698E3
defgrida_imon=6.7056E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50129E3
multb_neg_imon=7.18696E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.37012E0
defgridb_imon=6.36582E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33238E1
os_fil1_imon=9.43115E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0785E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61041E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31858E1
cs_fil1_imon=7.56543E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.43049E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63507E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.61085E-2
os_fil2_imon=-2.57072E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.06295E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.61984E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28903E-1
cs_fil2_imon=-2.46067E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.58221E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21954E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32978E-3
inlet_lpb_pmon=2.99613E-1
chamber_ion_pmon=1.20031E-7
chamber_cvt_pmon=2.52139E-3
foreline_cvt_pmon=2.52139E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.62102E-1
res40_imon=-2.55373E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=208
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09394E0	-7.56454E-1	-7.34735E-1	-9.19487E0	-9.19015E0	4.55379E-3	9.50098E-2	2.73291E1	-3.26729E1	-3.26506E1	2.68545E1	1.19902E-7	2.52276E-3	2.52276E-3	6.31817E-3	2.97647E-1
2.0E0	2.8E1	0.0E0	3.16E2	1.6E2	-2.09418E0	-7.56526E-1	-7.35092E-1	-9.19492E0	-9.18992E0	4.52995E-3	9.45568E-2	2.73429E1	-3.26416E1	-3.26164E1	2.67902E1	1.20069E-7	2.51334E-3	2.51334E-3	6.30192E-3	2.9874E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09387E0	-7.56526E-1	-7.34782E-1	-9.19514E0	-9.18987E0	4.31538E-3	9.48191E-2	2.73664E1	-3.2672E1	-3.26266E1	2.68418E1	1.20017E-7	2.52538E-3	2.52538E-3	6.32386E-3	2.9874E-1
4.0E0	7.0E0	0.0E0	6.55E2	3.98E2	-2.09402E0	-7.56454E-1	-7.34901E-1	-9.19495E0	-9.18994E0	4.41074E-3	9.47952E-2	2.72949E1	-3.26741E1	-3.26332E1	2.68496E1	1.20106E-7	2.5131E-3	2.5131E-3	6.35059E-3	2.99175E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09418E0	-7.56192E-1	-7.34735E-1	-9.19485E0	-9.1902E0	4.52995E-3	9.48191E-2	2.73051E1	-3.26508E1	-3.26543E1	2.6849E1	1.20004E-7	2.51847E-3	2.51847E-3	6.29128E-3	3.02253E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09433E0	-7.56383E-1	-7.34806E-1	-9.19471E0	-9.18992E0	4.76837E-3	9.50813E-2	2.73399E1	-3.26789E1	-3.25972E1	2.6834E1	1.20043E-7	2.51826E-3	2.51826E-3	6.32112E-3	2.9965E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09418E0	-7.56168E-1	-7.34687E-1	-9.1949E0	-9.19023E0	4.76837E-3	9.50813E-2	2.73297E1	-3.2632E1	-3.26116E1	2.68388E1					
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09503E0	-7.56383E-1	-7.34997E-1	-9.19499E0	-9.19011E0	4.64916E-3	9.50575E-2	2.73033E1	-3.26402E1	-3.26201E1	2.68644E1	1.20055E-7	2.51632E-3	2.51632E-3	6.33977E-3	2.9841E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09533E0	-7.56311E-1	-7.34949E-1	-9.19466E0	-9.18989E0	4.50611E-3	9.4533E-2	2.73081E1	-3.26579E1	-3.26014E1	2.67968E1	1.20055E-7	2.51847E-3	2.51847E-3	6.32356E-3	2.98665E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09495E0	-7.56311E-1	-7.35044E-1	-9.19468E0	-9.19015E0	4.69685E-3	9.48191E-2	2.73357E1	-3.26741E1	-3.2641E1	2.68419E1	1.19819E-7	2.52027E-3	2.52027E-3	6.31299E-3	2.99613E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09487E0	-7.56383E-1	-7.34973E-1	-9.19485E0	-9.19015E0	4.48227E-3	9.48191E-2	2.73171E1	-3.26488E1	-3.26326E1	2.6829E1	1.20122E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.02133E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09418E0	-7.56574E-1	-7.35116E-1	-9.19507E0	-9.18992E0	4.33922E-3	9.4533E-2	2.73183E1	-3.26458E1	-3.26278E1	2.68659E1	1.20122E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.00563E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09464E0	-7.56025E-1	-7.34901E-1	-9.19495E0	-9.19011E0	4.33922E-3	9.48191E-2	2.73039E1	-3.26633E1	-3.26338E1	2.68364E1	1.20174E-7	2.5199E-3	2.5199E-3	6.31288E-3	2.97187E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09557E0	-7.56359E-1	-7.34997E-1	-9.19502E0	-9.19011E0	4.24385E-3	9.51767E-2	2.73553E1	-3.26346E1	-3.26309E1	2.68238E1	1.19913E-7	2.51334E-3	2.51334E-3	6.32936E-3	2.96414E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09472E0	-7.5655E-1	-7.34925E-1	-9.19487E0	-9.19006E0	4.36306E-3	9.48668E-2	2.73057E1	-3.26484E1	-3.26201E1	2.68516E1	1.20191E-7	2.52139E-3	2.52139E-3	6.35223E-3	2.97762E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0941E0	-7.56717E-1	-7.35092E-1	-9.1949E0	-9.19001E0	4.1008E-3	9.47714E-2	2.73293E1	-3.26661E1	-3.26325E1	2.68448E1	1.19953E-7	2.5131E-3	2.5131E-3	6.31278E-3	2.95623E-1
2.0E1	7.0E0	0.0E0	8.08E2	5.58E2	-2.09565E0	-7.5655E-1	-7.34687E-1	-9.19497E0	-9.19006E0	4.14848E-3	9.47475E-2	2.72967E1	-3.26939E1	-3.25894E1	2.68286E1	1.19902E-7	2.52276E-3	2.52276E-3	6.30202E-3	2.97394E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09487E0	-7.56526E-1	-7.34735E-1	-9.1948E0	-9.18994E0	4.43459E-3	9.48191E-2	2.73074E1	-3.26567E1	-3.26347E1	2.6796E1	1.19809E-7	2.51443E-3	2.51443E-3	6.29645E-3	2.98481E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09503E0	-7.56741E-1	-7.34782E-1	-9.19497E0	-9.18975E0	4.07696E-3	9.5129E-2	2.73528E1	-3.26597E1	-3.26395E1	2.68532E1	1.20142E-7	2.51498E-3	2.51498E-3	6.29157E-3	3.01609E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09526E0	-7.56645E-1	-7.34878E-1	-9.19526E0	-9.18994E0	4.55379E-3	9.49621E-2	2.73496E1	-3.26362E1	-3.26434E1	2.68112E1	1.20031E-7	2.52139E-3	2.52139E-3	6.32978E-3	2.99613E-1
