[Scan]
initial_time=2016-01-18T23:26:31
final_time=2016-01-18T23:26:59
ip_count=19
run=1024
dataset=11
scan=848
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09387E0
qbias_imon=-1.08824E-4
ql1_vset=
ql1_vmon=-7.56454E-1
ql1_imon=1.41425E-8
ql2_vset=
ql2_vmon=-7.34544E-1
ql2_imon=2.03503E-9
ql3_vset=
ql3_vmon=-9.19499E0
ql3_imon=1.46902E-10
ql4_vset=
ql4_vmon=-9.18994E0
ql4_imon=-2.49362E-10
mult1=-9.28355E-9
mult2=-2.81983E-9
rf_tmon=-4.10846E-3
rf_agc=3.2872E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.60148E-3
ql5_imon=1.69071E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6403E0
bslens_imon=2.55938E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19658E1
lens5a_imon=1.99677E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12464E2
lens4a_imon=2.05093E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54109E1
cs_ef1b_imon=3.16074E-5
lens23_vset=-2.05E2
lens23_vmon=-2.046E2
lens23_imon=1.02089E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04784E1
cs_ea1_imon=1.11356E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38818E0
lens1_imon=2.71079E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64873E1
os_ef1alow_imon=2.97369E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03852E1
cs_ea2_imon=1.34968E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84412E1
cs_ef1a_imon=3.05082E-5
olens2_vset=9.7E-1
olens2_vmon=9.69958E-1
olens2_imon=1.1604E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11418E1
os_restr1_imon=4.30247E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15005E1
os_ea1_imon=2.4665E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63707E1
os_ef1bup_imon=3.08325E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20163E0
cs_ionrep_imon=9.4881E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9192E2
cs_nozzle_imon=1.93416E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01863E1
cs_anode1_imon=1.97611E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20434E0
olens4_imon=3.15837E-8
tplens_vset=1.4E-1
tplens_vmon=1.68169E0
tplens_imon=-1.22703E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26171E1
iondef3_imon=1.5119E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27017E1
iondef2_imon=1.54831E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02914E2
lens6_imon=2.98122E-4
ql6_vset=1.0E-1
ql6_vmon=9.47952E-2
ql6_imon=4.09608E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28394E0
ionrepsh_imon=8.63373E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33712E1
lens5b_imon=2.14529E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74754E1
cs_ef2b_imon=3.13587E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.42874E0
os_ea2_imon=-8.68929E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06104E2
lens4b_imon=2.00756E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71204E1
cs_ef2a_imon=3.18056E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04315E0
os_ef2alow_imon=-2.60148E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.95021E-1
os_ef2bup_imon=-5.13868E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11388E1
os_restr2_imon=3.39103E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23071E2
cs_ionfoca_imon=6.28775E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01731E1
cs_anode2_imon=2.08423E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73401E1
iondef1_imon=1.10346E-5
iondef4_vset=2.691E1
iondef4_vmon=2.69485E1
iondef4_imon=1.10648E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=4.73518E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81021E-1
olens1_imon=7.06382E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15957E0
cs_ionaccel_imon=-8.89599E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02072E2
cs_ionfocb_imon=1.47464E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56603E1
einzel_imon=7.8356E-6
window_vset=0.0E0
window_vmon=2.40168E-1
window_imon=-7.74273E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82646E2
mask1_imon=2.39109E-4
mask2_vset=0.0E0
mask2_vmon=-1.8644E1
mask2_imon=-5.9047E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92627E3
multa_neg_imon=7.77214E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93712E3
defgrida_imon=6.70868E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50107E3
multb_neg_imon=7.47654E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.31735E0
defgridb_imon=6.17875E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33233E1
os_fil1_imon=9.40132E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08531E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61145E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31853E1
cs_fil1_imon=6.81847E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.63557E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63436E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.46664E-2
os_fil2_imon=-2.46775E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.18137E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.61871E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31206E-1
cs_fil2_imon=-2.37164E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.50262E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21846E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=
inlet_lpb_pmon=
chamber_ion_pmon=
chamber_cvt_pmon=
foreline_cvt_pmon=
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.43675E-1
res40_imon=-2.41768E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=172
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09572E0	-7.56478E-1	-7.34806E-1	-9.19518E0	-9.19006E0	4.52995E-3	9.46045E-2	2.73363E1	-3.26476E1	-3.25948E1	2.6849E1	1.20017E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.00302E-1
2.0E0	3.9E1	0.0E0	3.16E2	1.6E2	-2.09533E0	-7.56431E-1	-7.34997E-1	-9.19485E0	-9.19011E0	4.43459E-3	9.47952E-2	2.73321E1	-3.26789E1	-3.26212E1	2.67896E1	1.19902E-7	2.52169E-3	2.52169E-3	6.31278E-3	2.9943E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09449E0	-7.56383E-1	-7.3514E-1	-9.19497E0	-9.19039E0	4.3869E-3	9.47714E-2	2.73126E1	-3.26683E1	-3.26208E1	2.67821E1	1.19861E-7	2.51443E-3	2.51443E-3	6.29645E-3	3.00824E-1
4.0E0	7.0E0	0.0E0	6.55E2	3.98E2	-2.09487E0	-7.56502E-1	-7.34925E-1	-9.19483E0	-9.19034E0	4.31538E-3	9.48191E-2	2.73039E1	-3.26514E1	-3.2639E1	2.68352E1	1.1974E-7	2.52025E-3	2.52025E-3	6.32328E-3	2.98342E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0941E0	-7.56335E-1	-7.34663E-1	-9.19478E0	-9.19023E0	4.3869E-3	9.52244E-2	2.73118E1	-3.26774E1	-3.26125E1	2.68617E1	1.20122E-7	2.51443E-3	2.51443E-3	6.34037E-3	2.9952E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09449E0	-7.56478E-1	-7.35164E-1	-9.19478E0	-9.18999E0	4.33922E-3	9.49621E-2	2.73159E1	-3.26681E1	-3.26242E1	2.68466E1	1.20084E-7	2.52473E-3	2.52473E-3	6.32418E-3	3.0041E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0941E0	-7.56454E-1	-7.35116E-1	-9.19483E0	-9.19023E0	4.52995E-3	9.49144E-2	2.7288E1	-3.26408E1	-3.26054E1	2.68196E1	1.19749E-7	2.52169E-3	2.52169E-3	6.31278E-3	2.9943E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09371E0	-7.5655E-1	-7.35188E-1	-9.1949E0	-9.19042E0	4.52995E-3	9.53674E-2	2.73405E1	-3.26657E1	-3.26086E1	2.68593E1	1.19809E-7	2.51771E-3	2.51771E-3	6.29098E-3	3.00302E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0934E0	-7.56407E-1	-7.35426E-1	-9.1949E0	-9.19003E0	4.50611E-3	9.52482E-2	2.73522E1	-3.26652E1	-3.26193E1	2.6807E1	1.20174E-7	2.51552E-3	2.51552E-3	6.30192E-3	2.9978E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09441E0	-7.56454E-1	-7.34973E-1	-9.19466E0	-9.19001E0	4.57764E-3	9.51052E-2	2.73303E1	-3.26506E1	-3.2596E1	2.68322E1	1.20174E-7	2.52209E-3	2.52209E-3	6.3074E-3	3.00824E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09387E0	-7.56478E-1	-7.34925E-1	-9.19497E0	-9.19003E0	4.33922E-3	9.52005E-2	2.73234E1	-3.26467E1	-3.26419E1	2.67932E1	1.19965E-7	2.51662E-3	2.51662E-3	6.31288E-3	2.9874E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09302E0	-7.56478E-1	-7.34878E-1	-9.19521E0	-9.19013E0	4.31538E-3	9.52244E-2	2.73159E1	-3.26524E1	-3.26236E1	2.68322E1	1.20122E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.00824E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0934E0	-7.56407E-1	-7.34639E-1	-9.19476E0	-9.1898E0	4.29153E-3	9.50098E-2	2.73435E1	-3.26603E1	-3.2611E1	2.69187E1	1.19965E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.00824E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09379E0	-7.5655E-1	-7.34687E-1	-9.19468E0	-9.19011E0	4.43459E-3	9.50813E-2	2.73237E1	-3.265E1	-3.26272E1	2.66917E1	1.19965E-7	2.51443E-3	2.51443E-3	6.33486E-3	3.01347E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09394E0	-7.56407E-1	-7.34806E-1	-9.1949E0	-9.19003E0	4.33922E-3	9.51529E-2	2.72943E1	-3.26753E1	-3.26428E1	2.69373E1	1.20226E-7	2.51552E-3	2.51552E-3	6.32936E-3	3.01609E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09426E0	-7.56407E-1	-7.34687E-1	-9.19523E0	-9.18992E0	4.24385E-3	9.51529E-2	2.73428E1	-3.26732E1	-3.26408E1	2.67662E1	1.19953E-7	2.51954E-3	2.51954E-3	6.33436E-3	2.99686E-1
2.0E1	9.0E0	0.0E0	8.08E2	5.58E2	-2.09394E0	-7.56359E-1	-7.34687E-1	-9.19514E0	-9.18989E0	4.45843E-3	9.5129E-2	2.73216E1	-3.26444E1	-3.26321E1	2.68647E1	1.19861E-7	2.52647E-3	2.52647E-3	6.30192E-3	2.9874E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09371E0	-7.56621E-1	-7.34496E-1	-9.19526E0	-9.18958E0	4.45843E-3	9.51052E-2	2.73498E1	-3.2642E1	-3.26344E1	2.68411E1	1.19913E-7	2.5199E-3	2.5199E-3	6.30192E-3	2.98222E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0934E0	-7.56454E-1	-7.34591E-1	-9.19502E0	-9.18972E0	4.69685E-3	9.47952E-2	2.73176E1	-3.26334E1	-3.2657E1	2.67212E1	1.20109E-7	2.51744E-3	2.51744E-3	6.30247E-3	2.99611E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09387E0	-7.56454E-1	-7.34544E-1	-9.19499E0	-9.18994E0	4.60148E-3	9.47952E-2	2.73401E1	-3.27017E1	-3.26171E1	2.69485E1					
