[Scan]
initial_time=2016-01-18T23:27:49
final_time=2016-01-18T23:28:17
ip_count=19
run=1024
dataset=11
scan=850
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0948E0
qbias_imon=-1.08821E-4
ql1_vset=
ql1_vmon=-7.56502E-1
ql1_imon=1.41588E-8
ql2_vset=
ql2_vmon=-7.34854E-1
ql2_imon=2.04664E-9
ql3_vset=
ql3_vmon=-9.19473E0
ql3_imon=1.2747E-10
ql4_vset=
ql4_vmon=-9.19006E0
ql4_imon=-2.64919E-10
mult1=-1.02113E-8
mult2=-2.90293E-9
rf_tmon=-2.84428E-3
rf_agc=3.41303E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.55379E-3
ql5_imon=1.68091E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6421E0
bslens_imon=2.58101E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20067E1
lens5a_imon=2.00506E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12459E2
lens4a_imon=2.05068E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53929E1
cs_ef1b_imon=3.15713E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04605E2
lens23_imon=1.02103E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04579E1
cs_ea1_imon=1.09481E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39419E0
lens1_imon=2.93069E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64843E1
os_ef1alow_imon=2.98126E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04027E1
cs_ea2_imon=1.35941E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84358E1
cs_ef1a_imon=3.04469E-5
olens2_vset=9.7E-1
olens2_vmon=9.70554E-1
olens2_imon=1.16811E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11256E1
os_restr1_imon=4.29238E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15306E1
os_ea1_imon=2.43117E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63623E1
os_ef1bup_imon=3.07929E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21304E0
cs_ionrep_imon=9.45926E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91923E2
cs_nozzle_imon=1.93489E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01725E1
cs_anode1_imon=1.9689E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20437E0
olens4_imon=3.16136E-8
tplens_vset=1.4E-1
tplens_vmon=1.65045E0
tplens_imon=-8.66537E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26505E1
iondef3_imon=1.50397E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26597E1
iondef2_imon=1.56129E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02939E2
lens6_imon=2.98256E-4
ql6_vset=1.0E-1
ql6_vmon=9.49621E-2
ql6_imon=4.01796E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2563E0
ionrepsh_imon=8.70943E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33598E1
lens5b_imon=2.16116E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74603E1
cs_ef2b_imon=3.12686E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44556E0
os_ea2_imon=-7.42755E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06063E2
lens4b_imon=2.00659E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71156E1
cs_ef2a_imon=3.16578E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05156E0
os_ef2alow_imon=-2.42489E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.01629E-1
os_ef2bup_imon=-5.22878E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11226E1
os_restr2_imon=3.38851E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23053E2
cs_ionfoca_imon=6.2672E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01719E1
cs_anode2_imon=2.08387E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73388E1
iondef1_imon=1.10959E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68358E1
iondef4_imon=1.10395E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=4.7328E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81712E-1
olens1_imon=7.07595E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12173E0
cs_ionaccel_imon=-8.67976E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02057E2
cs_ionfocb_imon=1.47327E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56501E1
einzel_imon=7.75632E-6
window_vset=0.0E0
window_vmon=2.55184E-1
window_imon=-7.31025E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8266E2
mask1_imon=2.39268E-4
mask2_vset=0.0E0
mask2_vmon=-1.86374E1
mask2_imon=-6.19302E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92697E3
multa_neg_imon=8.1038E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93741E3
defgrida_imon=6.53925E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50125E3
multb_neg_imon=7.20256E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.43765E0
defgridb_imon=6.18597E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33261E1
os_fil1_imon=9.40756E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08134E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61338E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31829E1
cs_fil1_imon=7.22091E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.16705E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63424E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.50533E-2
os_fil2_imon=-2.4257E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.97714E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.42279E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29652E-1
cs_fil2_imon=-2.62392E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.3945E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21798E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32047E-3
inlet_lpb_pmon=3.00363E-1
chamber_ion_pmon=1.1995E-7
chamber_cvt_pmon=2.52193E-3
foreline_cvt_pmon=2.52193E-3
chamber_tmon=1.40037E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.9384E-1
res40_imon=-2.57986E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=207
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.0948E0	-7.56383E-1	-7.34806E-1	-9.19487E0	-9.19003E0	4.50611E-3	9.50098E-2	2.73576E1	-3.26579E1	-3.26301E1	2.68466E1	1.19861E-7	2.51334E-3	2.51334E-3	6.33486E-3	2.98222E-1
2.0E0	2.3E1	0.0E0	3.16E2	1.6E2	-2.09541E0	-7.56359E-1	-7.35068E-1	-9.19497E0	-9.19015E0	4.673E-3	9.47475E-2	2.73297E1	-3.26681E1	-3.26056E1	2.68442E1	1.19953E-7	2.52169E-3	2.52169E-3	6.3074E-3	2.97394E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09557E0	-7.56693E-1	-7.35188E-1	-9.19485E0	-9.19011E0	4.43459E-3	9.49383E-2	2.73105E1	-3.26837E1	-3.26296E1	2.68136E1	1.19872E-7	2.52027E-3	2.52027E-3	6.30182E-3	2.98554E-1
4.0E0	8.0E0	0.0E0	6.55E2	3.98E2	-2.09456E0	-7.56621E-1	-7.34997E-1	-9.19502E0	-9.18987E0	4.45843E-3	9.49144E-2	2.73652E1	-3.26639E1	-3.26254E1	2.68244E1	1.19965E-7	2.51552E-3	2.51552E-3	6.31288E-3	2.9874E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09449E0	-7.56764E-1	-7.35092E-1	-9.19456E0	-9.19013E0	4.3869E-3	9.51767E-2	2.73446E1	-3.26449E1	-3.26213E1	2.68708E1	1.19851E-7	2.51203E-3	2.51203E-3	6.32356E-3	3.00453E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09433E0	-7.5686E-1	-7.34758E-1	-9.19476E0	-9.19003E0	4.43459E-3	9.5129E-2	2.73195E1	-3.26777E1	-3.26032E1	2.68184E1	1.20004E-7	2.52061E-3	2.52061E-3	6.33436E-3	3.02769E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09541E0	-7.56955E-1	-7.34973E-1	-9.19468E0	-9.18989E0	4.43459E-3	9.49383E-2	2.72974E1	-3.26531E1	-3.25883E1	2.68629E1	1.19913E-7	2.5199E-3	2.5199E-3	6.29645E-3	3.01871E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09518E0	-7.56598E-1	-7.34997E-1	-9.19483E0	-9.18999E0	4.50611E-3	9.51529E-2	2.7308E1	-3.26278E1	-3.26349E1	2.68118E1	1.20311E-7	2.52061E-3	2.52061E-3	6.3074E-3	2.99686E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09526E0	-7.56574E-1	-7.35354E-1	-9.19447E0	-9.19001E0	4.29153E-3	9.52005E-2	2.73297E1	-3.26368E1	-3.2602E1	2.68435E1	1.20017E-7	2.51116E-3	2.51116E-3	6.29098E-3	3.00563E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09557E0	-7.56741E-1	-7.34949E-1	-9.19456E0	-9.19023E0	4.673E-3	9.49383E-2	2.73261E1	-3.26362E1	-3.26116E1	2.67962E1	1.19965E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.00824E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09549E0	-7.56574E-1	-7.34973E-1	-9.19423E0	-9.18989E0	4.74453E-3	9.51767E-2	2.73357E1	-3.26789E1	-3.26224E1	2.68707E1	1.19902E-7	2.51954E-3	2.51954E-3	6.3074E-3	2.97901E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09526E0	-7.5655E-1	-7.34925E-1	-9.19476E0	-9.19001E0	4.60148E-3	9.5129E-2	2.73153E1	-3.26627E1	-3.26158E1	2.684E1	1.20017E-7	2.51334E-3	2.51334E-3	6.3074E-3	2.9874E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0951E0	-7.56454E-1	-7.34854E-1	-9.19447E0	-9.18982E0	4.72069E-3	9.49621E-2	2.73075E1	-3.26708E1	-3.26077E1	2.67872E1	1.20017E-7	2.52099E-3	2.52099E-3	6.31837E-3	2.9952E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.0951E0	-7.56812E-1	-7.34735E-1	-9.19459E0	-9.18992E0	4.72069E-3	9.5129E-2	2.73267E1	-3.26687E1	-3.26272E1	2.6846E1	1.19953E-7	2.51739E-3	2.51739E-3	6.32896E-3	2.99686E-1
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.0958E0	-7.56764E-1	-7.34711E-1	-9.19442E0	-9.19008E0	4.3869E-3	9.53913E-2	2.73381E1	-3.26201E1	-3.26531E1	2.67839E1	1.20069E-7	2.52318E-3	2.52318E-3	6.32386E-3	3.00563E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09557E0	-7.56741E-1	-7.34639E-1	-9.19461E0	-9.18994E0	4.72069E-3	9.53436E-2	2.73399E1	-3.26861E1	-3.26314E1	2.68138E1	1.19902E-7	2.51847E-3	2.51847E-3	6.32356E-3	3.01738E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.0948E0	-7.56598E-1	-7.34925E-1	-9.19492E0	-9.1903E0	4.50611E-3	9.51767E-2	2.73219E1	-3.26512E1	-3.2635E1	2.6852E1	1.19925E-7	2.51915E-3	2.51915E-3	6.32978E-3	3.0041E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09541E0	-7.56645E-1	-7.34949E-1	-9.19497E0	-9.19034E0	4.43459E-3	9.52721E-2	2.72985E1	-3.26675E1	-3.26374E1	2.68036E1	1.19882E-7	2.51755E-3	2.51755E-3	6.32099E-3	2.99475E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09541E0	-7.56526E-1	-7.35259E-1	-9.1949E0	-9.19006E0	4.57764E-3	9.52959E-2	2.73545E1	-3.265E1	-3.26585E1	2.67767E1					
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0948E0	-7.56502E-1	-7.34854E-1	-9.19473E0	-9.19006E0	4.55379E-3	9.49621E-2	2.73388E1	-3.26597E1	-3.26505E1	2.68358E1	1.1995E-7	2.52193E-3	2.52193E-3	6.32047E-3	3.00363E-1
