[Scan]
initial_time=2016-01-18T23:30:52
final_time=2016-01-18T23:31:17
ip_count=19
run=1024
dataset=11
scan=855
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0951E0
qbias_imon=-1.0882E-4
ql1_vset=
ql1_vmon=-7.5655E-1
ql1_imon=1.41551E-8
ql2_vset=
ql2_vmon=-7.35068E-1
ql2_imon=2.04403E-9
ql3_vset=
ql3_vmon=-9.19487E0
ql3_imon=1.19185E-10
ql4_vset=
ql4_vmon=-9.19013E0
ql4_imon=-2.28953E-10
mult1=-9.921E-9
mult2=-2.88429E-9
rf_tmon=-5.20938E-3
rf_agc=3.30272E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.64916E-3
ql5_imon=1.71237E-9
bslens_vset=-6.2E0
bslens_vmon=-6.73278E0
bslens_imon=3.02422E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19713E1
lens5a_imon=1.97619E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12413E2
lens4a_imon=2.04725E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54173E1
cs_ef1b_imon=3.17115E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04666E2
lens23_imon=1.02518E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05368E1
cs_ea1_imon=1.10166E-5
lens1_vset=-5.0E0
lens1_vmon=-5.3291E0
lens1_imon=2.20514E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64808E1
os_ef1alow_imon=2.96942E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03329E1
cs_ea2_imon=1.38521E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84332E1
cs_ef1a_imon=3.03641E-5
olens2_vset=9.7E-1
olens2_vmon=9.69911E-1
olens2_imon=1.17023E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11304E1
os_restr1_imon=4.2913E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15753E1
os_ea1_imon=2.46213E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63685E1
os_ef1bup_imon=3.0787E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2319E0
cs_ionrep_imon=8.98178E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91861E2
cs_nozzle_imon=1.93475E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0169E1
cs_anode1_imon=1.95406E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20444E0
olens4_imon=3.16446E-8
tplens_vset=1.4E-1
tplens_vmon=1.72407E0
tplens_imon=2.47451E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25629E1
iondef3_imon=1.5134E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26801E1
iondef2_imon=1.52552E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02953E2
lens6_imon=2.98438E-4
ql6_vset=1.0E-1
ql6_vmon=9.49144E-2
ql6_imon=4.04922E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.33535E0
ionrepsh_imon=8.65121E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33229E1
lens5b_imon=2.12385E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74826E1
cs_ef2b_imon=3.14121E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.43146E0
os_ea2_imon=-4.10011E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06144E2
lens4b_imon=2.01027E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71214E1
cs_ef2a_imon=3.15543E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.03709E0
os_ef2alow_imon=-2.36099E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.67691E-1
os_ef2bup_imon=-4.97331E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11248E1
os_restr2_imon=3.39233E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23067E2
cs_ionfoca_imon=6.25153E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01734E1
cs_anode2_imon=2.10563E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73339E1
iondef1_imon=1.10239E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68478E1
iondef4_imon=1.09439E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=4.73627E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81522E-1
olens1_imon=7.11573E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14262E0
cs_ionaccel_imon=-7.47936E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02043E2
cs_ionfocb_imon=1.47189E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56436E1
einzel_imon=7.90117E-6
window_vset=0.0E0
window_vmon=2.02003E-1
window_imon=-8.97639E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82633E2
mask1_imon=2.3923E-4
mask2_vset=0.0E0
mask2_vmon=-1.86806E1
mask2_imon=-5.75777E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92611E3
multa_neg_imon=7.5383E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93706E3
defgrida_imon=6.24909E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50163E3
multb_neg_imon=7.78806E-5
defgridb_vset=0.0E0
defgridb_vmon=-9.50032E-1
defgridb_imon=5.95525E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3325E1
os_fil1_imon=9.40412E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06749E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6134E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31858E1
cs_fil1_imon=6.73137E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=8.80851E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6359E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.59293E-2
os_fil2_imon=-2.47537E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.25899E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.45732E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29921E-1
cs_fil2_imon=-2.94943E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.90968E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21743E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=3.00453E-1
chamber_ion_pmon=1.19953E-7
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.83513E-1
res40_imon=-2.5556E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=148
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09433E0	-7.56574E-1	-7.34663E-1	-9.19456E0	-9.18977E0	4.76837E-3	9.46522E-2	2.738E1	-3.27399E1	-3.25417E1	2.68684E1	1.20031E-7	2.5147E-3	2.5147E-3	6.30182E-3	3.0041E-1
2.0E0	2.8E1	0.0E0	3.16E2	1.6E2	-2.09379E0	-7.56693E-1	-7.34735E-1	-9.19449E0	-9.18977E0	4.72069E-3	9.48191E-2	2.73265E1	-3.26578E1	-3.26432E1	2.68038E1	1.20106E-7	2.51954E-3	2.51954E-3	6.31817E-3	3.01223E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09387E0	-7.56645E-1	-7.34854E-1	-9.19471E0	-9.1898E0	4.45843E-3	9.5129E-2	2.73149E1	-3.2659E1	-3.26353E1	2.67949E1	1.19978E-7	2.51693E-3	2.51693E-3	6.30182E-3	3.00676E-1
4.0E0	1.0E1	0.0E0	6.55E2	3.98E2	-2.09356E0	-7.56502E-1	-7.35068E-1	-9.19478E0	-9.18984E0	4.55379E-3	9.50813E-2	2.73246E1	-3.26502E1	-3.26354E1	2.68626E1	1.19941E-7	2.52236E-3	2.52236E-3	6.32858E-3	3.01104E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09394E0	-7.56502E-1	-7.35044E-1	-9.19487E0	-9.18994E0	4.76837E-3	9.52005E-2	2.73163E1	-3.26797E1	-3.26313E1	2.68779E1	1.19851E-7	2.51203E-3	2.51203E-3	6.31278E-3	3.00453E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09441E0	-7.56431E-1	-7.3514E-1	-9.19473E0	-9.18972E0	4.55379E-3	9.4986E-2	2.73051E1	-3.26695E1	-3.25868E1	2.684E1	1.20004E-7	2.51847E-3	2.51847E-3	6.31817E-3	2.99175E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09449E0	-7.56359E-1	-7.34997E-1	-9.19483E0	-9.18987E0	4.50611E-3	9.49621E-2	2.73033E1	-3.26449E1	-3.26148E1	2.68436E1	1.20297E-7	2.51581E-3	2.51581E-3	6.32418E-3	3.01475E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09309E0	-7.56502E-1	-7.34639E-1	-9.19497E0	-9.18994E0	4.74453E-3	9.48429E-2	2.7321E1	-3.26438E1	-3.26156E1	2.68022E1	1.19953E-7	2.51632E-3	2.51632E-3	6.33436E-3	3.0071E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09387E0	-7.56526E-1	-7.34949E-1	-9.19495E0	-9.18994E0	4.91142E-3	9.50098E-2	2.73033E1	-3.2672E1	-3.26136E1	2.68593E1	1.19872E-7	2.52139E-3	2.52139E-3	6.29067E-3	3.0041E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0934E0	-7.56288E-1	-7.35021E-1	-9.19492E0	-9.1897E0	4.8399E-3	9.46522E-2	2.72951E1	-3.26514E1	-3.26236E1	2.68574E1	1.20055E-7	2.51847E-3	2.51847E-3	6.32356E-3	3.00453E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09356E0	-7.56359E-1	-7.34735E-1	-9.19497E0	-9.18992E0	4.45843E-3	9.49144E-2	2.73461E1	-3.2645E1	-3.26364E1	2.68013E1	1.2033E-7	2.52318E-3	2.52318E-3	6.32936E-3	2.9978E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09426E0	-7.56502E-1	-7.34735E-1	-9.19483E0	-9.19003E0	4.64916E-3	9.48429E-2	2.73526E1	-3.26807E1	-3.26651E1	2.6798E1	1.19965E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.01347E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09503E0	-7.56574E-1	-7.3483E-1	-9.19499E0	-9.19023E0	4.72069E-3	9.49621E-2	2.73027E1	-3.26649E1	-3.26012E1	2.68545E1	1.19913E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.00302E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0951E0	-7.56741E-1	-7.34973E-1	-9.19504E0	-9.18996E0	4.79221E-3	9.49383E-2	2.73207E1	-3.26801E1	-3.26464E1	2.68028E1	1.20055E-7	2.51954E-3	2.51954E-3	6.33436E-3	2.9841E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09441E0	-7.56788E-1	-7.34949E-1	-9.19504E0	-9.1903E0	4.74453E-3	9.49383E-2	2.73051E1	-3.26543E1	-3.2623E1	2.68484E1	1.20226E-7	2.51771E-3	2.51771E-3	6.30192E-3	2.97445E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09487E0	-7.56598E-1	-7.35068E-1	-9.1949E0	-9.19006E0	4.673E-3	9.52005E-2	2.73484E1	-3.26392E1	-3.2614E1	2.6816E1	1.19913E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.00041E-1
2.0E1	1.0E1	0.0E0	8.08E2	5.58E2	-2.09495E0	-7.56598E-1	-7.35021E-1	-9.19514E0	-9.1902E0	4.93526E-3	9.49383E-2	2.73128E1	-3.26614E1	-3.26254E1	2.68388E1	1.20069E-7	2.51334E-3	2.51334E-3	6.31837E-3	3.00302E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09456E0	-7.56693E-1	-7.3483E-1	-9.19507E0	-9.19025E0	4.673E-3	9.4986E-2	2.73157E1	-3.26419E1	-3.2649E1	2.68476E1	1.20106E-7	2.51525E-3	2.51525E-3	6.31278E-3	3.00197E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09456E0	-7.56526E-1	-7.34639E-1	-9.19511E0	-9.19032E0	4.64916E-3	9.48906E-2	2.73246E1	-3.26443E1	-3.26119E1	2.6831E1	1.20004E-7	2.52492E-3	2.52492E-3	6.31817E-3	3.00453E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0951E0	-7.5655E-1	-7.35068E-1	-9.19487E0	-9.19013E0	4.64916E-3	9.49144E-2	2.73339E1	-3.26801E1	-3.25629E1	2.68478E1	1.19953E-7	2.51954E-3	2.51954E-3	6.31817E-3	3.00453E-1
