[Scan]
initial_time=2016-01-18T23:31:27
final_time=2016-01-18T23:31:52
ip_count=19
run=1024
dataset=11
scan=856
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09449E0
qbias_imon=-1.08768E-4
ql1_vset=
ql1_vmon=-7.5655E-1
ql1_imon=1.41077E-8
ql2_vset=
ql2_vmon=-7.3483E-1
ql2_imon=2.06302E-9
ql3_vset=
ql3_vmon=-9.19471E0
ql3_imon=1.57046E-10
ql4_vset=
ql4_vmon=-9.18987E0
ql4_imon=-2.69425E-10
mult1=-8.39994E-9
mult2=-2.6919E-9
rf_tmon=-6.71571E-3
rf_agc=3.13978E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.62532E-3
ql5_imon=1.65665E-9
bslens_vset=-6.2E0
bslens_vmon=-6.83797E0
bslens_imon=2.54136E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.18613E1
lens5a_imon=1.90773E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12365E2
lens4a_imon=2.05219E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53949E1
cs_ef1b_imon=3.16183E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04763E2
lens23_imon=1.02986E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04531E1
cs_ea1_imon=1.01154E-5
lens1_vset=-5.0E0
lens1_vmon=-5.24699E0
lens1_imon=2.45484E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64729E1
os_ef1alow_imon=2.98102E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0494E1
cs_ea2_imon=1.46324E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84456E1
cs_ef1a_imon=3.04152E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=1.17156E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11577E1
os_restr1_imon=4.28953E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15967E1
os_ea1_imon=2.39368E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6368E1
os_ef1bup_imon=3.08575E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.07185E0
cs_ionrep_imon=8.52198E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91926E2
cs_nozzle_imon=1.9421E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01845E1
cs_anode1_imon=1.96407E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20468E0
olens4_imon=3.15901E-8
tplens_vset=1.4E-1
tplens_vmon=1.80366E0
tplens_imon=-3.61844E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26331E1
iondef3_imon=1.42502E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26384E1
iondef2_imon=1.57932E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03065E2
lens6_imon=2.98775E-4
ql6_vset=1.0E-1
ql6_vmon=9.49383E-2
ql6_imon=4.02508E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29956E0
ionrepsh_imon=7.99926E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.32438E1
lens5b_imon=2.13844E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74489E1
cs_ef2b_imon=3.13706E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.57054E0
os_ea2_imon=4.31246E-8
lens4b_vset=-4.05E2
lens4b_vmon=-4.06149E2
lens4b_imon=2.00352E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71281E1
cs_ef2a_imon=3.16855E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07549E0
os_ef2alow_imon=-2.4144E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.988E-1
os_ef2bup_imon=-5.11777E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1123E1
os_restr2_imon=3.38829E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2295E2
cs_ionfoca_imon=6.22971E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01774E1
cs_anode2_imon=2.09853E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73588E1
iondef1_imon=1.19359E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6834E1
iondef4_imon=1.10317E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=4.73287E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81379E-1
olens1_imon=7.09911E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12483E0
cs_ionaccel_imon=-8.11492E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02084E2
cs_ionfocb_imon=1.47463E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56417E1
einzel_imon=7.79753E-6
window_vset=0.0E0
window_vmon=2.62043E-1
window_imon=-7.97338E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82651E2
mask1_imon=2.39204E-4
mask2_vset=0.0E0
mask2_vmon=-1.86497E1
mask2_imon=-5.67339E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9266E3
multa_neg_imon=8.66257E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93652E3
defgrida_imon=6.02735E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50178E3
multb_neg_imon=7.02231E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42262E0
defgridb_imon=6.73392E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33237E1
os_fil1_imon=9.40952E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07777E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6142E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31845E1
cs_fil1_imon=7.03362E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.29232E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63534E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.37635E-2
os_fil2_imon=-2.4553E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.05031E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.36736E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30732E-1
cs_fil2_imon=-2.35504E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.3957E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21847E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34518E-3
inlet_lpb_pmon=2.99686E-1
chamber_ion_pmon=1.20106E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.70158E-1
res40_imon=-2.43564E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=209
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.0941E0	-7.56526E-1	-7.34782E-1	-9.19497E0	-9.18996E0	4.3869E-3	9.50575E-2	2.71907E1	-3.25464E1	-3.27292E1	2.67962E1	1.20017E-7	2.51771E-3	2.51771E-3	6.3074E-3	2.97963E-1
2.0E0	2.3E1	0.0E0	3.16E2	1.6E2	-2.09464E0	-7.56598E-1	-7.34925E-1	-9.19495E0	-9.19018E0	4.3869E-3	9.53197E-2	2.73045E1	-3.26933E1	-3.26076E1	2.68406E1	1.20055E-7	2.51739E-3	2.51739E-3	6.32356E-3	2.9943E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09619E0	-7.56574E-1	-7.34591E-1	-9.19468E0	-9.18996E0	4.45843E-3	9.48429E-2	2.73387E1	-3.26724E1	-3.26359E1	2.68522E1	1.19925E-7	2.52139E-3	2.52139E-3	6.32418E-3	3.01475E-1
4.0E0	7.0E0	0.0E0	6.55E2	3.98E2	-2.09549E0	-7.56764E-1	-7.34925E-1	-9.1948E0	-9.19008E0	4.45843E-3	9.49383E-2	2.73139E1	-3.26632E1	-3.26307E1	2.68322E1	1.1979E-7	2.51919E-3	2.51919E-3	6.33388E-3	3.00852E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09495E0	-7.56788E-1	-7.34925E-1	-9.19483E0	-9.18994E0	4.52995E-3	9.50336E-2	2.73339E1	-3.26681E1	-3.26344E1	2.68202E1	1.19953E-7	2.51847E-3	2.51847E-3	6.31817E-3	3.00197E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0965E0	-7.56574E-1	-7.34663E-1	-9.19471E0	-9.19042E0	4.74453E-3	9.48906E-2	2.73271E1	-3.26682E1	-3.26334E1	2.6828E1	1.19809E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.01871E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09588E0	-7.56526E-1	-7.3483E-1	-9.1949E0	-9.19008E0	4.64916E-3	9.50813E-2	2.73327E1	-3.26452E1	-3.26098E1	2.68478E1	1.19978E-7	2.51693E-3	2.51693E-3	6.31299E-3	3.0201E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0948E0	-7.57003E-1	-7.34735E-1	-9.19495E0	-9.19006E0	4.8399E-3	9.51052E-2	2.73027E1	-3.2636E1	-3.26242E1	2.68436E1	1.19809E-7	2.51225E-3	2.51225E-3	6.32936E-3	3.01609E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09449E0	-7.56574E-1	-7.34758E-1	-9.19492E0	-9.19023E0	4.60148E-3	9.48668E-2	2.73129E1	-3.26524E1	-3.26026E1	2.68322E1	1.20209E-7	2.51954E-3	2.51954E-3	6.34518E-3	2.99686E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09449E0	-7.56407E-1	-7.34615E-1	-9.19514E0	-9.19001E0	4.50611E-3	9.48906E-2	2.73135E1	-3.265E1	-3.26266E1	2.68526E1	1.19705E-7	2.52209E-3	2.52209E-3	6.32936E-3	2.9978E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09418E0	-7.56288E-1	-7.34758E-1	-9.19521E0	-9.19018E0	4.86374E-3	9.48668E-2	2.73307E1	-3.26875E1	-3.26123E1	2.68127E1	1.19965E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.00824E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09418E0	-7.56288E-1	-7.34997E-1	-9.19504E0	-9.18999E0	4.60148E-3	9.49383E-2	2.73509E1	-3.26839E1	-3.26177E1	2.67952E1	1.19979E-7	2.51886E-3	2.51886E-3	6.323E-3	3.00989E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09472E0	-7.56574E-1	-7.3483E-1	-9.19499E0	-9.19008E0	4.673E-3	9.48191E-2	2.73393E1	-3.26819E1	-3.26242E1	2.68286E1	1.1995E-7	2.51642E-3	2.51642E-3	6.31321E-3	2.99535E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09371E0	-7.56645E-1	-7.35235E-1	-9.19511E0	-9.19001E0	4.62532E-3	9.48668E-2	2.73027E1	-3.26579E1	-3.26603E1	2.68478E1	1.19965E-7	2.5199E-3	2.5199E-3	6.32386E-3	2.97704E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09394E0	-7.56454E-1	-7.35044E-1	-9.1953E0	-9.18989E0	4.45843E-3	9.48191E-2	2.73417E1	-3.26651E1	-3.26248E1	2.67878E1	1.20226E-7	2.52099E-3	2.52099E-3	6.31288E-3	2.97963E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09495E0	-7.56598E-1	-7.34997E-1	-9.19507E0	-9.18977E0	4.72069E-3	9.49144E-2	2.73202E1	-3.26668E1	-3.26148E1	2.68211E1	1.19601E-7	2.51225E-3	2.51225E-3	6.30192E-3	2.9926E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09456E0	-7.56741E-1	-7.34663E-1	-9.19504E0	-9.18987E0	4.60148E-3	9.50813E-2	2.73088E1	-3.26664E1	-3.26266E1	2.68412E1	1.19919E-7	2.52058E-3	2.52058E-3	6.32273E-3	2.99179E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-2.09503E0	-7.56788E-1	-7.34878E-1	-9.19533E0	-9.18972E0	4.60148E-3	9.47475E-2	2.73265E1	-3.26884E1	-3.2656E1	2.68444E1	1.19978E-7	2.51693E-3	2.51693E-3	6.3074E-3	3.00144E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09541E0	-7.56621E-1	-7.34973E-1	-9.1949E0	-9.1898E0	4.45843E-3	9.50098E-2	2.73269E1	-3.26667E1	-3.26136E1	2.68499E1	1.20031E-7	2.51248E-3	2.51248E-3	6.32418E-3	3.03618E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09449E0	-7.5655E-1	-7.3483E-1	-9.19471E0	-9.18987E0	4.62532E-3	9.49383E-2	2.73588E1	-3.26384E1	-3.26331E1	2.6834E1	1.20106E-7	2.51739E-3	2.51739E-3	6.34518E-3	2.99686E-1
