[Scan]
initial_time=2016-01-18T23:32:01
final_time=2016-01-18T23:32:27
ip_count=19
run=1024
dataset=11
scan=857
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09518E0
qbias_imon=-1.0877E-4
ql1_vset=
ql1_vmon=-7.56502E-1
ql1_imon=1.412E-8
ql2_vset=
ql2_vmon=-7.34758E-1
ql2_imon=2.06298E-9
ql3_vset=
ql3_vmon=-9.19485E0
ql3_imon=1.75738E-10
ql4_vset=
ql4_vmon=-9.19018E0
ql4_imon=-2.37262E-10
mult1=-9.00591E-9
mult2=-2.75654E-9
rf_tmon=-4.7888E-3
rf_agc=3.37121E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.93526E-3
ql5_imon=1.72033E-9
bslens_vset=-6.2E0
bslens_vmon=-6.56652E0
bslens_imon=1.67964E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.18521E1
lens5a_imon=2.03005E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12606E2
lens4a_imon=2.05567E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53881E1
cs_ef1b_imon=3.15281E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04651E2
lens23_imon=1.01636E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.03266E1
cs_ea1_imon=1.03972E-5
lens1_vset=-5.0E0
lens1_vmon=-5.45633E0
lens1_imon=3.70418E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6456E1
os_ef1alow_imon=2.97693E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.05489E1
cs_ea2_imon=1.35614E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84358E1
cs_ef1a_imon=3.04505E-5
olens2_vset=9.7E-1
olens2_vmon=9.69958E-1
olens2_imon=1.16891E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11334E1
os_restr1_imon=4.28842E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.13577E1
os_ea1_imon=2.35143E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63719E1
os_ef1bup_imon=3.08541E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.18721E0
cs_ionrep_imon=9.91585E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92079E2
cs_nozzle_imon=1.93969E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02049E1
cs_anode1_imon=1.96746E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20406E0
olens4_imon=3.15812E-8
tplens_vset=1.4E-1
tplens_vmon=1.62787E0
tplens_imon=-1.24745E-6
iondef3_vset=-3.249E1
iondef3_vmon=-3.26074E1
iondef3_imon=1.51931E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26326E1
iondef2_imon=1.64319E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02943E2
lens6_imon=2.97627E-4
ql6_vset=1.0E-1
ql6_vmon=9.52005E-2
ql6_imon=4.05394E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.17541E0
ionrepsh_imon=8.27002E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.34059E1
lens5b_imon=2.2325E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74693E1
cs_ef2b_imon=3.13154E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.51401E0
os_ea2_imon=-6.49289E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06004E2
lens4b_imon=1.99865E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71174E1
cs_ef2a_imon=3.17047E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05396E0
os_ef2alow_imon=-2.39245E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.87813E-1
os_ef2bup_imon=-5.24679E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11147E1
os_restr2_imon=3.37842E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.22948E2
cs_ionfoca_imon=6.33291E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01821E1
cs_anode2_imon=2.08531E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73249E1
iondef1_imon=1.17953E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68785E1
iondef4_imon=1.10467E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=4.75602E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81784E-1
olens1_imon=7.097E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14576E0
cs_ionaccel_imon=-7.56253E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02076E2
cs_ionfocb_imon=1.4754E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56309E1
einzel_imon=7.67703E-6
window_vset=0.0E0
window_vmon=2.44973E-1
window_imon=-7.41837E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82639E2
mask1_imon=2.39088E-4
mask2_vset=0.0E0
mask2_vmon=-1.86482E1
mask2_imon=-5.97678E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92729E3
multa_neg_imon=7.72141E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93703E3
defgrida_imon=7.67186E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50043E3
multb_neg_imon=6.16761E-5
defgridb_vset=0.0E0
defgridb_vmon=-2.33867E0
defgridb_imon=6.59942E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33238E1
os_fil1_imon=9.38582E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0811E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61382E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31866E1
cs_fil1_imon=7.12481E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.94191E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63533E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.35759E-2
os_fil2_imon=-2.38966E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.15133E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.44772E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31853E-1
cs_fil2_imon=-2.44372E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.52665E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21775E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29128E-3
inlet_lpb_pmon=3.00197E-1
chamber_ion_pmon=1.20158E-7
chamber_cvt_pmon=2.5131E-3
foreline_cvt_pmon=2.5131E-3
chamber_tmon=1.40064E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.45787E-1
res40_imon=-2.42129E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=207
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09387E0	-7.56741E-1	-7.34425E-1	-9.19461E0	-9.19018E0	4.26769E-3	9.48906E-2	2.73614E1	-3.25666E1	-3.2544E1	2.68136E1					
2.0E0	3.4E1	0.0E0	3.16E2	1.6E2	-2.0951E0	-7.56431E-1	-7.34663E-1	-9.19461E0	-9.19018E0	4.50611E-3	9.47952E-2	2.72973E1	-3.26693E1	-3.26056E1	2.68472E1	1.20017E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.00302E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09518E0	-7.56502E-1	-7.34854E-1	-9.19487E0	-9.19006E0	4.3869E-3	9.49144E-2	2.72774E1	-3.26738E1	-3.25947E1	2.6831E1	1.20122E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.01609E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.09541E0	-7.56693E-1	-7.35068E-1	-9.19483E0	-9.19006E0	4.48227E-3	9.47714E-2	2.72992E1	-3.26413E1	-3.26119E1	2.68851E1	1.20055E-7	2.52169E-3	2.52169E-3	6.29128E-3	3.0148E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09603E0	-7.56621E-1	-7.34496E-1	-9.19507E0	-9.19015E0	4.41074E-3	9.44614E-2	2.72751E1	-3.26789E1	-3.26122E1	2.68511E1	1.20055E-7	2.51954E-3	2.51954E-3	6.33436E-3	3.00197E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0951E0	-7.56645E-1	-7.34735E-1	-9.19497E0	-9.19001E0	4.3869E-3	9.47714E-2	2.72721E1	-3.26508E1	-3.25995E1	2.68274E1	1.19757E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.00824E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09572E0	-7.56598E-1	-7.35188E-1	-9.19492E0	-9.19037E0	4.74453E-3	9.50336E-2	2.73193E1	-3.26077E1	-3.26154E1	2.6869E1	1.19902E-7	2.52169E-3	2.52169E-3	6.29665E-3	2.99941E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09549E0	-7.56788E-1	-7.35164E-1	-9.19518E0	-9.19023E0	4.57764E-3	9.50098E-2	2.73299E1	-3.26726E1	-3.26071E1	2.68532E1	1.2026E-7	2.51954E-3	2.51954E-3	6.30202E-3	3.01223E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09518E0	-7.56598E-1	-7.34568E-1	-9.19504E0	-9.1902E0	4.45843E-3	9.5129E-2	2.72739E1	-3.26428E1	-3.26014E1	2.68502E1	1.20004E-7	2.51954E-3	2.51954E-3	6.29128E-3	3.00453E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09557E0	-7.56598E-1	-7.34735E-1	-9.19507E0	-9.19013E0	4.673E-3	9.53197E-2	2.72859E1	-3.26356E1	-3.26627E1	2.67806E1	1.19861E-7	2.52318E-3	2.52318E-3	6.28006E-3	2.97963E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09441E0	-7.56407E-1	-7.34997E-1	-9.19526E0	-9.19015E0	4.76837E-3	9.51767E-2	2.72987E1	-3.2655E1	-3.2604E1	2.68447E1	1.20122E-7	2.51552E-3	2.51552E-3	6.30192E-3	2.9874E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09549E0	-7.56478E-1	-7.34973E-1	-9.19514E0	-9.19001E0	4.74453E-3	9.52005E-2	2.73111E1	-3.26536E1	-3.26248E1	2.67998E1	1.1974E-7	2.51498E-3	2.51498E-3	6.3074E-3	2.98592E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09533E0	-7.56574E-1	-7.34901E-1	-9.19478E0	-9.19011E0	4.62532E-3	9.53197E-2	2.72957E1	-3.26785E1	-3.25694E1	2.68476E1	1.20122E-7	2.51771E-3	2.51771E-3	6.32936E-3	2.9874E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09464E0	-7.56335E-1	-7.34878E-1	-9.19509E0	-9.19032E0	4.57764E-3	9.50336E-2	2.73424E1	-3.26392E1	-3.26368E1	2.69055E1	1.20158E-7	2.52061E-3	2.52061E-3	6.3074E-3	3.00197E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09487E0	-7.56645E-1	-7.3483E-1	-9.19492E0	-9.19018E0	4.69685E-3	9.52721E-2	2.73437E1	-3.2656E1	-3.26376E1	2.68487E1	1.19809E-7	2.51334E-3	2.51334E-3	6.29645E-3	2.9952E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09472E0	-7.56693E-1	-7.34925E-1	-9.19456E0	-9.18999E0	4.55379E-3	9.53674E-2	2.73411E1	-3.26777E1	-3.26446E1	2.67812E1	1.19925E-7	2.52697E-3	2.52697E-3	6.34099E-3	3.0201E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09402E0	-7.56645E-1	-7.34758E-1	-9.19497E0	-9.19046E0	4.52995E-3	9.53913E-2	2.73087E1	-3.26897E1	-3.2587E1	2.68394E1	1.20017E-7	2.51334E-3	2.51334E-3	6.3074E-3	3.01871E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09472E0	-7.56645E-1	-7.34615E-1	-9.19516E0	-9.19008E0	4.76837E-3	9.53436E-2	2.72874E1	-3.26408E1	-3.26036E1	2.6876E1	1.19809E-7	2.52099E-3	2.52099E-3	6.31837E-3	3.00041E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09518E0	-7.56693E-1	-7.34925E-1	-9.19487E0	-9.19037E0	5.00679E-3	9.52959E-2	2.7308E1	-3.26508E1	-3.26107E1	2.68424E1	1.19953E-7	2.51203E-3	2.51203E-3	6.30202E-3	3.00453E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09518E0	-7.56502E-1	-7.34758E-1	-9.19485E0	-9.19018E0	4.93526E-3	9.52005E-2	2.73249E1	-3.26326E1	-3.26074E1	2.68785E1	1.20158E-7	2.5131E-3	2.5131E-3	6.29128E-3	3.00197E-1
