[Scan]
initial_time=2016-01-18T23:33:46
final_time=2016-01-18T23:34:12
ip_count=19
run=1024
dataset=11
scan=860
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09441E0
qbias_imon=-1.08802E-4
ql1_vset=
ql1_vmon=-7.56693E-1
ql1_imon=1.41769E-8
ql2_vset=
ql2_vmon=-7.34377E-1
ql2_imon=2.07591E-9
ql3_vset=
ql3_vmon=-9.19514E0
ql3_imon=1.70398E-10
ql4_vset=
ql4_vmon=-9.18992E0
ql4_imon=-2.70093E-10
mult1=-9.75944E-9
mult2=-2.96627E-9
rf_tmon=-4.52717E-3
rf_agc=3.44122E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.52995E-3
ql5_imon=1.69486E-9
bslens_vset=-6.2E0
bslens_vmon=-6.7142E0
bslens_imon=2.10876E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.18234E1
lens5a_imon=1.96433E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12532E2
lens4a_imon=2.0572E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54043E1
cs_ef1b_imon=3.16578E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04699E2
lens23_imon=1.02074E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04243E1
cs_ea1_imon=1.04831E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40861E0
lens1_imon=3.20827E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64734E1
os_ef1alow_imon=2.98847E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04495E1
cs_ea2_imon=1.36014E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84166E1
cs_ef1a_imon=3.04181E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=1.17223E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11574E1
os_restr1_imon=4.28806E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14741E1
os_ea1_imon=2.38935E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63623E1
os_ef1bup_imon=3.08325E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.19322E0
cs_ionrep_imon=9.49171E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91965E2
cs_nozzle_imon=1.93918E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01743E1
cs_anode1_imon=1.96674E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20446E0
olens4_imon=3.16618E-8
tplens_vset=1.4E-1
tplens_vmon=1.72975E0
tplens_imon=-3.85865E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26178E1
iondef3_imon=1.46288E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26502E1
iondef2_imon=1.60491E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02991E2
lens6_imon=2.98158E-4
ql6_vset=1.0E-1
ql6_vmon=9.49144E-2
ql6_imon=4.02288E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.21004E0
ionrepsh_imon=8.08217E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33634E1
lens5b_imon=2.19973E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74429E1
cs_ef2b_imon=3.13767E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.51886E0
os_ea2_imon=-6.88681E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06042E2
lens4b_imon=2.00237E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.713E1
cs_ef2a_imon=3.17227E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10381E0
os_ef2alow_imon=-2.41768E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.93219E-1
os_ef2bup_imon=-5.17471E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11099E1
os_restr2_imon=3.38058E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23005E2
cs_ionfoca_imon=6.30757E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01773E1
cs_anode2_imon=2.08459E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7308E1
iondef1_imon=1.12617E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6846E1
iondef4_imon=1.11008E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=4.74827E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81617E-1
olens1_imon=7.11395E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11693E0
cs_ionaccel_imon=-8.31936E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02061E2
cs_ionfocb_imon=1.47439E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56471E1
einzel_imon=7.83921E-6
window_vset=0.0E0
window_vmon=2.54584E-1
window_imon=-8.03104E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82665E2
mask1_imon=2.39228E-4
mask2_vset=0.0E0
mask2_vmon=-1.8635E1
mask2_imon=-5.50827E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92668E3
multa_neg_imon=7.664E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93683E3
defgrida_imon=6.359E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50115E3
multb_neg_imon=7.11244E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.52788E0
defgridb_imon=6.5717E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33241E1
os_fil1_imon=9.41669E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07648E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61335E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31818E1
cs_fil1_imon=7.22091E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.62956E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63464E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.41505E-2
os_fil2_imon=-2.56386E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.04321E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.4215E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29652E-1
cs_fil2_imon=-2.10135E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.1242E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21762E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.9926E-1
chamber_ion_pmon=1.20017E-7
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40039E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.03741E-1
res40_imon=-2.41047E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=174
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09418E0	-7.56764E-1	-7.34758E-1	-9.19466E0	-9.19006E0	5.10216E-3	9.51767E-2	2.72803E1	-3.26189E1	-3.26307E1	2.67868E1	1.20383E-7	2.51225E-3	2.51225E-3	6.3074E-3	3.00041E-1
2.0E0	3.1E1	0.0E0	3.16E2	1.6E2	-2.09441E0	-7.5655E-1	-7.34615E-1	-9.19473E0	-9.18975E0	4.62532E-3	9.4986E-2	2.73291E1	-3.26254E1	-3.25906E1	2.67932E1	1.20142E-7	2.51498E-3	2.51498E-3	6.30212E-3	3.01356E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09456E0	-7.56717E-1	-7.34425E-1	-9.19495E0	-9.18999E0	4.72069E-3	9.4986E-2	2.73325E1	-3.26568E1	-3.26411E1	2.69055E1	1.19766E-7	2.52473E-3	2.52473E-3	6.32978E-3	3.00676E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09472E0	-7.5655E-1	-7.34353E-1	-9.19502E0	-9.19034E0	4.43459E-3	9.48668E-2	2.73287E1	-3.26856E1	-3.2649E1	2.6834E1	1.20064E-7	2.51447E-3	2.51447E-3	6.32784E-3	3.01365E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09456E0	-7.56454E-1	-7.34448E-1	-9.19495E0	-9.19023E0	4.86374E-3	9.50575E-2	2.73159E1	-3.26398E1	-3.26675E1	2.6816E1	1.19902E-7	2.51847E-3	2.51847E-3	6.3074E-3	3.00197E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09433E0	-7.56407E-1	-7.34305E-1	-9.19487E0	-9.18996E0	4.57764E-3	9.49621E-2	2.73369E1	-3.26506E1	-3.2629E1	2.6849E1	1.20106E-7	2.51847E-3	2.51847E-3	6.31817E-3	3.00453E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09371E0	-7.56431E-1	-7.34591E-1	-9.19509E0	-9.18996E0	4.57764E-3	9.48906E-2	2.73099E1	-3.26374E1	-3.26266E1	2.68028E1	1.19965E-7	2.5199E-3	2.5199E-3	6.3074E-3	2.97445E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09364E0	-7.56264E-1	-7.34782E-1	-9.19497E0	-9.18984E0	4.64916E-3	9.4986E-2	2.73051E1	-3.26638E1	-3.26083E1	2.68227E1	1.19913E-7	2.51443E-3	2.51443E-3	6.31288E-3	2.9874E-1
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-2.09441E0	-7.56407E-1	-7.34711E-1	-9.19466E0	-9.1898E0	4.57764E-3	9.48668E-2	2.72769E1	-3.26627E1	-3.2617E1	2.68358E1	1.20122E-7	2.51225E-3	2.51225E-3	6.31837E-3	3.00302E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09309E0	-7.56121E-1	-7.34973E-1	-9.19466E0	-9.18996E0	4.98295E-3	9.49144E-2	2.73237E1	-3.26711E1	-3.26224E1	2.68713E1	1.20122E-7	2.52209E-3	2.52209E-3	6.34037E-3	3.00824E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09387E0	-7.56311E-1	-7.34639E-1	-9.19478E0	-9.18992E0	4.8399E-3	9.48191E-2	2.73057E1	-3.26854E1	-3.26089E1	2.68319E1	1.20122E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.00824E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09333E0	-7.56311E-1	-7.34758E-1	-9.19485E0	-9.1898E0	4.57764E-3	9.47475E-2	2.73145E1	-3.2639E1	-3.2652E1	2.68117E1	1.19757E-7	2.51771E-3	2.51771E-3	6.34037E-3	3.00041E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09371E0	-7.56693E-1	-7.34568E-1	-9.19471E0	-9.18972E0	4.52995E-3	9.4986E-2	2.73181E1	-3.26738E1	-3.26478E1	2.68406E1	1.19851E-7	2.52061E-3	2.52061E-3	6.31817E-3	3.0148E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09418E0	-7.56502E-1	-7.34568E-1	-9.19511E0	-9.19013E0	4.48227E-3	9.47237E-2	2.73137E1	-3.26591E1	-3.26223E1	2.67764E1	1.19757E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.01347E-1
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09364E0	-7.56836E-1	-7.34305E-1	-9.1948E0	-9.19027E0	4.45843E-3	9.47714E-2	2.73216E1	-3.26396E1	-3.26065E1	2.68593E1	1.19965E-7	2.51662E-3	2.51662E-3	6.34037E-3	3.00302E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09441E0	-7.56574E-1	-7.34448E-1	-9.19466E0	-9.19011E0	4.24385E-3	9.45807E-2	2.73484E1	-3.26554E1	-3.26014E1	2.68484E1	1.19861E-7	2.51771E-3	2.51771E-3	6.27461E-3	3.02659E-1
2.0E1	8.0E0	0.0E0	8.08E2	5.58E2	-2.09449E0	-7.56502E-1	-7.34234E-1	-9.19487E0	-9.19001E0	4.31538E-3	9.47714E-2	2.73225E1	-3.2644E1	-3.26092E1	2.68148E1	1.19913E-7	2.51662E-3	2.51662E-3	6.32936E-3	3.01609E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09433E0	-7.56526E-1	-7.34305E-1	-9.19485E0	-9.18975E0	4.43459E-3	9.47237E-2	2.73109E1	-3.26567E1	-3.26301E1	2.6854E1	1.20226E-7	2.52209E-3	2.52209E-3	6.32386E-3	3.01085E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09402E0	-7.56812E-1	-7.34425E-1	-9.19497E0	-9.18977E0	4.48227E-3	9.48429E-2	2.73394E1	-3.26713E1	-3.26572E1	2.68142E1	1.20293E-7	2.51393E-3	2.51393E-3	6.31798E-3	3.00097E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09441E0	-7.56693E-1	-7.34377E-1	-9.19514E0	-9.18992E0	4.52995E-3	9.49144E-2	2.7308E1	-3.26502E1	-3.26178E1	2.6846E1	1.20017E-7	2.51771E-3	2.51771E-3	6.3074E-3	2.9926E-1
