[Scan]
initial_time=2016-01-18T23:34:21
final_time=2016-01-18T23:34:47
ip_count=19
run=1024
dataset=11
scan=861
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09348E0
qbias_imon=-1.08768E-4
ql1_vset=
ql1_vmon=-7.56407E-1
ql1_imon=1.41294E-8
ql2_vset=
ql2_vmon=-7.34711E-1
ql2_imon=2.02645E-9
ql3_vset=
ql3_vmon=-9.19507E0
ql3_imon=1.16789E-10
ql4_vset=
ql4_vmon=-9.19008E0
ql4_imon=-2.60329E-10
mult1=-9.12252E-9
mult2=-2.71504E-9
rf_tmon=-7.52636E-3
rf_agc=3.11112E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.64916E-3
ql5_imon=1.69371E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65292E0
bslens_imon=2.10155E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19628E1
lens5a_imon=2.0184E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12512E2
lens4a_imon=2.05064E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53899E1
cs_ef1b_imon=3.15965E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04608E2
lens23_imon=1.01836E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04375E1
cs_ea1_imon=1.08255E-5
lens1_vset=-5.0E0
lens1_vmon=-5.4032E0
lens1_imon=2.99919E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64747E1
os_ef1alow_imon=2.97549E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03967E1
cs_ea2_imon=1.35761E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8443E1
cs_ef1a_imon=3.04397E-5
olens2_vset=9.7E-1
olens2_vmon=9.70316E-1
olens2_imon=1.17208E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11376E1
os_restr1_imon=4.2949E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14621E1
os_ea1_imon=2.41386E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63798E1
os_ef1bup_imon=3.07893E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24309E0
cs_ionrep_imon=9.66114E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91957E2
cs_nozzle_imon=1.93611E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01809E1
cs_anode1_imon=1.96494E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20408E0
olens4_imon=3.1673E-8
tplens_vset=1.4E-1
tplens_vmon=1.64804E0
tplens_imon=-5.62508E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26072E1
iondef3_imon=1.52164E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26419E1
iondef2_imon=1.57139E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02937E2
lens6_imon=2.97967E-4
ql6_vset=1.0E-1
ql6_vmon=9.54151E-2
ql6_imon=4.01732E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2533E0
ionrepsh_imon=8.52558E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.34084E1
lens5b_imon=2.19685E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74742E1
cs_ef2b_imon=3.13335E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.45818E0
os_ea2_imon=-7.6078E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06044E2
lens4b_imon=2.00547E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7124E1
cs_ef2a_imon=3.182E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0882E0
os_ef2alow_imon=-2.46814E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.75199E-1
os_ef2bup_imon=-5.14949E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11165E1
os_restr2_imon=3.38634E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23019E2
cs_ionfoca_imon=6.30757E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01797E1
cs_anode2_imon=2.08748E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72863E1
iondef1_imon=1.08832E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68552E1
iondef4_imon=1.10215E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=4.77091E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81808E-1
olens1_imon=7.10873E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12894E0
cs_ionaccel_imon=-8.42748E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02028E2
cs_ionfocb_imon=1.47417E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56675E1
einzel_imon=7.81758E-6
window_vset=0.0E0
window_vmon=2.66597E-1
window_imon=-7.38233E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82627E2
mask1_imon=2.39365E-4
mask2_vset=0.0E0
mask2_vmon=-1.8656E1
mask2_imon=-6.15698E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92636E3
multa_neg_imon=7.32153E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93729E3
defgrida_imon=6.76276E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50102E3
multb_neg_imon=7.07639E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.64217E0
defgridb_imon=6.27969E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33242E1
os_fil1_imon=9.43093E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07942E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61275E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31851E1
cs_fil1_imon=7.26296E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=8.60243E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63333E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.44084E-2
os_fil2_imon=-2.46775E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.01919E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.3983E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29652E-1
cs_fil2_imon=-2.34762E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.31641E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21771E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33977E-3
inlet_lpb_pmon=2.9943E-1
chamber_ion_pmon=1.19902E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40056E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.51483E-1
res40_imon=-2.51138E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=157
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09518E0	-7.56693E-1	-7.34925E-1	-9.1949E0	-9.18999E0	4.31538E-3	9.47952E-2	2.72825E1	-3.26359E1	-3.26816E1	2.68302E1	1.19965E-7	2.51225E-3	2.51225E-3	6.32386E-3	2.9978E-1
2.0E0	3.9E1	0.0E0	3.16E2	1.6E2	-2.09464E0	-7.56502E-1	-7.35044E-1	-9.19535E0	-9.19018E0	4.50611E-3	9.47714E-2	2.73479E1	-3.26695E1	-3.26352E1	2.68431E1	1.19991E-7	2.51287E-3	2.51287E-3	6.29684E-3	3.006E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09533E0	-7.56216E-1	-7.34806E-1	-9.19528E0	-9.19008E0	4.41074E-3	9.4986E-2	2.72761E1	-3.26428E1	-3.25994E1	2.67781E1	1.19872E-7	2.52027E-3	2.52027E-3	6.32978E-3	3.01209E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.0948E0	-7.56526E-1	-7.35116E-1	-9.19516E0	-9.19003E0	4.48227E-3	9.49144E-2	2.73225E1	-3.26639E1	-3.26092E1	2.68731E1	1.20293E-7	2.51498E-3	2.51498E-3	6.32328E-3	3.03891E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0948E0	-7.56454E-1	-7.35116E-1	-9.19504E0	-9.18994E0	4.64916E-3	9.47952E-2	2.73123E1	-3.26825E1	-3.26044E1	2.68581E1	1.19965E-7	2.51552E-3	2.51552E-3	6.32936E-3	3.01085E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09533E0	-7.5655E-1	-7.3514E-1	-9.19518E0	-9.19011E0	4.69685E-3	9.50813E-2	2.73399E1	-3.26732E1	-3.25995E1	2.68238E1	1.20017E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.00824E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09518E0	-7.56454E-1	-7.34949E-1	-9.19504E0	-9.19008E0	4.81606E-3	9.50098E-2	2.73027E1	-3.26803E1	-3.26331E1	2.67986E1	1.19913E-7	2.5188E-3	2.5188E-3	6.32386E-3	2.98481E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09518E0	-7.56598E-1	-7.35021E-1	-9.19533E0	-9.18987E0	4.57764E-3	9.49383E-2	2.73057E1	-3.26284E1	-3.26248E1	2.67812E1	1.20004E-7	2.51847E-3	2.51847E-3	6.30202E-3	2.98665E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09402E0	-7.56311E-1	-7.34973E-1	-9.19509E0	-9.18982E0	4.62532E-3	9.51052E-2	2.73234E1	-3.2659E1	-3.25971E1	2.68448E1	1.20122E-7	2.51552E-3	2.51552E-3	6.30192E-3	3.00824E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09472E0	-7.56359E-1	-7.3483E-1	-9.19514E0	-9.19006E0	4.93526E-3	9.49144E-2	2.73277E1	-3.26578E1	-3.26021E1	2.6829E1	1.19953E-7	2.51739E-3	2.51739E-3	6.3074E-3	3.0071E-1
1.4E1	3.0E0	0.0E0	5.66E2	3.82E2	-2.09371E0	-7.56383E-1	-7.34472E-1	-9.19523E0	-9.19013E0	5.00679E-3	9.47952E-2	2.73201E1	-3.265E1	-3.26248E1	2.68629E1	1.20031E-7	2.51804E-3	2.51804E-3	6.3074E-3	3.00942E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09433E0	-7.56502E-1	-7.34591E-1	-9.19523E0	-9.1897E0	4.55379E-3	9.5129E-2	2.73279E1	-3.2647E1	-3.2644E1	2.67974E1	1.19749E-7	2.51417E-3	2.51417E-3	6.32356E-3	3.00197E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09449E0	-7.56478E-1	-7.35021E-1	-9.19521E0	-9.18987E0	4.64916E-3	9.51529E-2	2.73352E1	-3.26461E1	-3.26101E1	2.68516E1	1.19965E-7	2.51334E-3	2.51334E-3	6.33486E-3	3.00563E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09418E0	-7.56359E-1	-7.35044E-1	-9.19523E0	-9.19001E0	4.57764E-3	9.49621E-2	2.73429E1	-3.26669E1	-3.26452E1	2.68532E1	1.19913E-7	2.52209E-3	2.52209E-3	6.31837E-3	2.9978E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09464E0	-7.56335E-1	-7.34949E-1	-9.19554E0	-9.1902E0	4.76837E-3	9.49383E-2	2.72922E1	-3.26517E1	-3.26254E1	2.68022E1	1.19965E-7	2.51771E-3	2.51771E-3	6.30192E-3	2.9978E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09464E0	-7.56335E-1	-7.34806E-1	-9.1953E0	-9.18989E0	4.76837E-3	9.51529E-2	2.73096E1	-3.2687E1	-3.26489E1	2.68482E1	1.20069E-7	2.51662E-3	2.51662E-3	6.33486E-3	3.00563E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09487E0	-7.56407E-1	-7.35092E-1	-9.19497E0	-9.19003E0	4.55379E-3	9.51052E-2	2.73089E1	-3.26419E1	-3.26146E1	2.67988E1	1.1993E-7	2.51783E-3	2.51783E-3	6.30221E-3	2.99506E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09371E0	-7.56621E-1	-7.34687E-1	-9.19504E0	-9.18999E0	4.57764E-3	9.52005E-2	2.73231E1	-3.26561E1	-3.26158E1	2.6855E1	1.19951E-7	2.51971E-3	2.51971E-3	6.32418E-3	2.97894E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0934E0	-7.56645E-1	-7.34568E-1	-9.19518E0	-9.19025E0	4.31538E-3	9.49383E-2	2.73694E1	-3.2688E1	-3.26579E1	2.68172E1					
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09348E0	-7.56407E-1	-7.34711E-1	-9.19507E0	-9.19008E0	4.64916E-3	9.54151E-2	2.72863E1	-3.26419E1	-3.26072E1	2.68552E1	1.19902E-7	2.51525E-3	2.51525E-3	6.33977E-3	2.9943E-1
