[Scan]
initial_time=2016-01-18T23:35:31
final_time=2016-01-18T23:35:55
ip_count=19
run=1024
dataset=11
scan=863
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09487E0
qbias_imon=-1.08795E-4
ql1_vset=
ql1_vmon=-7.56288E-1
ql1_imon=1.41396E-8
ql2_vset=
ql2_vmon=-7.34901E-1
ql2_imon=2.0016E-9
ql3_vset=
ql3_vmon=-9.19464E0
ql3_imon=1.56724E-10
ql4_vset=
ql4_vmon=-9.19003E0
ql4_imon=-2.3247E-10
mult1=-9.86583E-9
mult2=-2.69974E-9
rf_tmon=-5.5713E-3
rf_agc=3.30672E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.673E-3
ql5_imon=1.73408E-9
bslens_vset=-6.2E0
bslens_vmon=-6.62728E0
bslens_imon=2.33089E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19889E1
lens5a_imon=2.03288E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12486E2
lens4a_imon=2.04951E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54142E1
cs_ef1b_imon=3.16184E-5
lens23_vset=-2.05E2
lens23_vmon=-2.046E2
lens23_imon=1.02001E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04587E1
cs_ea1_imon=1.11086E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38967E0
lens1_imon=2.78394E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64782E1
os_ef1alow_imon=2.97765E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03625E1
cs_ea2_imon=1.34588E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84325E1
cs_ef1a_imon=3.04403E-5
olens2_vset=9.7E-1
olens2_vmon=9.70125E-1
olens2_imon=1.17033E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11326E1
os_restr1_imon=4.28852E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15536E1
os_ea1_imon=2.43248E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6349E1
os_ef1bup_imon=3.084E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21611E0
cs_ionrep_imon=9.54775E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91964E2
cs_nozzle_imon=1.93696E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0185E1
cs_anode1_imon=1.96149E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20442E0
olens4_imon=3.16966E-8
tplens_vset=1.4E-1
tplens_vmon=1.61784E0
tplens_imon=-5.11252E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26638E1
iondef3_imon=1.50551E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26472E1
iondef2_imon=1.58691E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02909E2
lens6_imon=2.98034E-4
ql6_vset=1.0E-1
ql6_vmon=9.53197E-2
ql6_imon=4.03585E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25505E0
ionrepsh_imon=8.70891E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.34354E1
lens5b_imon=2.18684E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74461E1
cs_ef2b_imon=3.13265E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.41373E0
os_ea2_imon=-1.0634E-6
lens4b_vset=-4.05E2
lens4b_vmon=-4.06066E2
lens4b_imon=2.00729E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.712E1
cs_ef2a_imon=3.18061E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04413E0
os_ef2alow_imon=-2.40429E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.8333E-1
os_ef2bup_imon=-5.17755E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11089E1
os_restr2_imon=3.38356E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23044E2
cs_ionfoca_imon=6.30247E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01717E1
cs_anode2_imon=2.09286E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73051E1
iondef1_imon=1.09175E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68208E1
iondef4_imon=1.09163E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=4.76116E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82261E-1
olens1_imon=7.12793E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14115E0
cs_ionaccel_imon=-7.91778E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02084E2
cs_ionfocb_imon=1.47327E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56469E1
einzel_imon=7.78515E-6
window_vset=0.0E0
window_vmon=2.46067E-1
window_imon=-7.98728E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82652E2
mask1_imon=2.39254E-4
mask2_vset=0.0E0
mask2_vmon=-1.86356E1
mask2_imon=-6.52767E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92616E3
multa_neg_imon=7.55506E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93707E3
defgrida_imon=6.61004E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50126E3
multb_neg_imon=7.10202E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.68608E0
defgridb_imon=6.26672E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33243E1
os_fil1_imon=9.40827E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07932E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61408E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31847E1
cs_fil1_imon=6.58657E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.31465E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63556E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.43357E-2
os_fil2_imon=-2.45488E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.04557E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.40723E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31649E-1
cs_fil2_imon=-2.31587E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.46057E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2182E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=3.00041E-1
chamber_ion_pmon=1.19913E-7
chamber_cvt_pmon=2.51225E-3
foreline_cvt_pmon=2.51225E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.02647E-1
res40_imon=-2.53983E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=205
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09294E0	-7.56478E-1	-7.34878E-1	-9.19483E0	-9.19003E0	4.52995E-3	9.49383E-2	2.73015E1	-3.26398E1	-3.25731E1	2.68118E1	1.20069E-7	2.51662E-3	2.51662E-3	6.31288E-3	2.97187E-1
2.0E0	3.1E1	0.0E0	3.16E2	1.6E2	-2.09325E0	-7.56526E-1	-7.34925E-1	-9.19485E0	-9.19001E0	3.95775E-3	9.4676E-2	2.73045E1	-3.26753E1	-3.25725E1	2.68496E1	1.19851E-7	2.52169E-3	2.52169E-3	6.34518E-3	2.96634E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09495E0	-7.56717E-1	-7.35068E-1	-9.19473E0	-9.18999E0	3.93391E-3	9.51052E-2	2.73016E1	-3.26708E1	-3.25995E1	2.68412E1	1.20084E-7	2.52139E-3	2.52139E-3	6.32418E-3	2.9829E-1
4.0E0	7.0E0	0.0E0	6.55E2	3.98E2	-2.09472E0	-7.56335E-1	-7.34639E-1	-9.1948E0	-9.19034E0	4.31538E-3	9.50336E-2	2.7344E1	-3.26478E1	-3.26172E1	2.67873E1	1.20344E-7	2.52025E-3	2.52025E-3	6.31798E-3	2.99093E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09379E0	-7.5655E-1	-7.34901E-1	-9.19468E0	-9.19065E0	4.52995E-3	9.52721E-2	2.73291E1	-3.26506E1	-3.2626E1	2.68587E1	1.19965E-7	2.5199E-3	2.5199E-3	6.29645E-3	3.00563E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09464E0	-7.56145E-1	-7.34949E-1	-9.19464E0	-9.19042E0	4.33922E-3	9.52005E-2	2.73123E1	-3.26488E1	-3.26074E1	2.67998E1	1.19809E-7	2.52318E-3	2.52318E-3	6.30192E-3	3.03449E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09387E0	-7.5624E-1	-7.35116E-1	-9.19476E0	-9.19006E0	4.69685E-3	9.53674E-2	2.73466E1	-3.26801E1	-3.2647E1	2.684E1	1.20209E-7	2.51417E-3	2.51417E-3	6.28592E-3	3.00966E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0948E0	-7.56049E-1	-7.35068E-1	-9.19466E0	-9.19042E0	4.45843E-3	9.50813E-2	2.73198E1	-3.26514E1	-3.26431E1	2.68274E1	1.20017E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.00824E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09549E0	-7.56359E-1	-7.35545E-1	-9.19485E0	-9.19023E0	4.36306E-3	9.49144E-2	2.73466E1	-3.26458E1	-3.26194E1	2.6828E1	1.20106E-7	2.51954E-3	2.51954E-3	6.32356E-3	2.98665E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09503E0	-7.56025E-1	-7.35378E-1	-9.19466E0	-9.19015E0	4.24385E-3	9.50336E-2	2.73568E1	-3.26543E1	-3.26326E1	2.6816E1	1.20084E-7	2.52362E-3	2.52362E-3	6.3074E-3	2.99613E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09549E0	-7.56311E-1	-7.35092E-1	-9.19461E0	-9.19011E0	4.33922E-3	9.50336E-2	2.73399E1	-3.26642E1	-3.26417E1	2.68441E1	1.19902E-7	2.51632E-3	2.51632E-3	6.3074E-3	2.99686E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0951E0	-7.5593E-1	-7.35235E-1	-9.1943E0	-9.19011E0	4.24385E-3	9.50098E-2	2.73167E1	-3.26829E1	-3.2637E1	2.68058E1	1.20055E-7	2.51632E-3	2.51632E-3	6.3074E-3	3.0071E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09464E0	-7.56001E-1	-7.34591E-1	-9.19456E0	-9.18994E0	4.52995E-3	9.49383E-2	2.73273E1	-3.26705E1	-3.2623E1	2.67914E1	1.20174E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.01085E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09426E0	-7.56264E-1	-7.3514E-1	-9.1948E0	-9.18996E0	4.17233E-3	9.5129E-2	2.7334E1	-3.26767E1	-3.26354E1	2.68611E1	1.20017E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.02659E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09364E0	-7.56121E-1	-7.35021E-1	-9.19499E0	-9.1898E0	4.17233E-3	9.46045E-2	2.73464E1	-3.26343E1	-3.2613E1	2.68065E1	1.19705E-7	2.51334E-3	2.51334E-3	6.31288E-3	3.00563E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09441E0	-7.55882E-1	-7.34901E-1	-9.19495E0	-9.18994E0	4.3869E-3	9.46283E-2	2.73375E1	-3.26615E1	-3.26272E1	2.68194E1	1.20055E-7	2.51739E-3	2.51739E-3	6.32356E-3	2.99175E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09394E0	-7.56001E-1	-7.34949E-1	-9.19468E0	-9.18975E0	4.52995E-3	9.50336E-2	2.73297E1	-3.26681E1	-3.2605E1	2.68082E1	1.20278E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.00563E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09456E0	-7.56073E-1	-7.34949E-1	-9.19492E0	-9.18992E0	4.29153E-3	9.50336E-2	2.73151E1	-3.26472E1	-3.26219E1	2.68094E1	1.19809E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.01609E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09449E0	-7.5624E-1	-7.34949E-1	-9.19466E0	-9.18996E0	4.8399E-3	9.48668E-2	2.73039E1	-3.26909E1	-3.26188E1	2.68623E1	1.20004E-7	2.52599E-3	2.52599E-3	6.32356E-3	2.99941E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09487E0	-7.56288E-1	-7.34901E-1	-9.19464E0	-9.19003E0	4.673E-3	9.53197E-2	2.73051E1	-3.26472E1	-3.26638E1	2.68208E1	1.19913E-7	2.51225E-3	2.51225E-3	6.31837E-3	3.00041E-1
