[Scan]
initial_time=2016-01-18T23:36:03
final_time=2016-01-18T23:36:24
ip_count=19
run=1024
dataset=11
scan=864
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0958E0
qbias_imon=-1.08822E-4
ql1_vset=
ql1_vmon=-7.56121E-1
ql1_imon=1.41228E-8
ql2_vset=
ql2_vmon=-7.34925E-1
ql2_imon=2.02432E-9
ql3_vset=
ql3_vmon=-9.1948E0
ql3_imon=1.33562E-10
ql4_vset=
ql4_vmon=-9.19013E0
ql4_imon=-2.51448E-10
mult1=-8.93192E-9
mult2=-2.79577E-9
rf_tmon=-4.9814E-3
rf_agc=3.2731E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.48227E-3
ql5_imon=1.65365E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65994E0
bslens_imon=2.61284E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19762E1
lens5a_imon=2.01513E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12469E2
lens4a_imon=2.05049E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53832E1
cs_ef1b_imon=3.16614E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04602E2
lens23_imon=1.02143E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04578E1
cs_ea1_imon=1.09027E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41051E0
lens1_imon=2.71569E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64963E1
os_ef1alow_imon=2.97189E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03592E1
cs_ea2_imon=1.34187E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84412E1
cs_ef1a_imon=3.04865E-5
olens2_vset=9.7E-1
olens2_vmon=9.70387E-1
olens2_imon=1.16975E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1128E1
os_restr1_imon=4.30391E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14755E1
os_ea1_imon=2.45478E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63485E1
os_ef1bup_imon=3.07965E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23618E0
cs_ionrep_imon=9.60251E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91932E2
cs_nozzle_imon=1.93453E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01863E1
cs_anode1_imon=1.96062E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20403E0
olens4_imon=3.16756E-8
tplens_vset=1.4E-1
tplens_vmon=1.68612E0
tplens_imon=-2.77784E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26166E1
iondef3_imon=1.49614E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26649E1
iondef2_imon=1.58613E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02925E2
lens6_imon=2.98147E-4
ql6_vset=1.0E-1
ql6_vmon=9.47714E-2
ql6_imon=4.02912E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28393E0
ionrepsh_imon=8.55938E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.34019E1
lens5b_imon=2.17527E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74483E1
cs_ef2b_imon=3.13154E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4737E0
os_ea2_imon=-8.17711E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06074E2
lens4b_imon=2.00674E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71192E1
cs_ef2a_imon=3.16866E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06897E0
os_ef2alow_imon=-2.41768E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.97424E-1
os_ef2bup_imon=-5.13868E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1125E1
os_restr2_imon=3.38707E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23012E2
cs_ionfoca_imon=6.28863E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01911E1
cs_anode2_imon=2.08892E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73399E1
iondef1_imon=1.10313E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68406E1
iondef4_imon=1.10936E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=4.69031E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81569E-1
olens1_imon=7.10204E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12113E0
cs_ionaccel_imon=-9.65283E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02037E2
cs_ionfocb_imon=1.47414E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56333E1
einzel_imon=7.91849E-6
window_vset=0.0E0
window_vmon=2.58188E-1
window_imon=-7.41837E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82655E2
mask1_imon=2.39235E-4
mask2_vset=0.0E0
mask2_vmon=-1.8644E1
mask2_imon=-5.47223E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92628E3
multa_neg_imon=7.29588E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93714E3
defgrida_imon=6.44008E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50117E3
multb_neg_imon=7.35832E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.75595E0
defgridb_imon=6.1793E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33278E1
os_fil1_imon=9.41105E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07666E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6145E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31833E1
cs_fil1_imon=7.41913E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.98395E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63601E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.46153E-2
os_fil2_imon=-2.34161E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.07325E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.44419E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30429E-1
cs_fil2_imon=-2.29956E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.16625E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21784E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=2.99175E-1
chamber_ion_pmon=1.20466E-7
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=2.65589E-1
res40_imon=-2.37804E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=209
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.0951E0	-7.56264E-1	-7.34949E-1	-9.19521E0	-9.19006E0	4.55379E-3	9.52244E-2	2.73195E1	-3.26801E1	-3.2617E1	2.68268E1	1.19978E-7	2.51804E-3	2.51804E-3	6.31858E-3	3.03349E-1
2.0E0	2.5E1	0.0E0	3.16E2	1.6E2	-2.09611E0	-7.56121E-1	-7.34735E-1	-9.19511E0	-9.18987E0	4.43459E-3	9.4986E-2	2.73087E1	-3.26699E1	-3.2605E1	2.6819E1	1.19965E-7	2.52647E-3	2.52647E-3	6.33486E-3	3.01347E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09627E0	-7.56192E-1	-7.34663E-1	-9.19516E0	-9.18982E0	4.36306E-3	9.51767E-2	2.73216E1	-3.2685E1	-3.26331E1	2.68184E1	1.20269E-7	2.51809E-3	2.51809E-3	6.3074E-3	3.01674E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.09611E0	-7.5624E-1	-7.34854E-1	-9.19507E0	-9.18994E0	4.26769E-3	9.52482E-2	2.73322E1	-3.26614E1	-3.26142E1	2.68314E1					
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09634E0	-7.55978E-1	-7.3483E-1	-9.19485E0	-9.19003E0	4.41074E-3	9.50813E-2	2.73622E1	-3.2653E1	-3.2641E1	2.68575E1	1.19851E-7	2.51954E-3	2.51954E-3	6.30202E-3	2.99941E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09557E0	-7.56192E-1	-7.34854E-1	-9.19502E0	-9.19023E0	4.64916E-3	9.5129E-2	2.73128E1	-3.26649E1	-3.26042E1	2.684E1	1.20122E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.01609E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09549E0	-7.55954E-1	-7.34854E-1	-9.19504E0	-9.18982E0	4.69685E-3	9.51529E-2	2.73099E1	-3.26422E1	-3.25852E1	2.68214E1	1.19595E-7	2.51739E-3	2.51739E-3	6.30202E-3	3.00966E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0948E0	-7.56025E-1	-7.34854E-1	-9.19518E0	-9.19003E0	4.22001E-3	9.48668E-2	2.73532E1	-3.26338E1	-3.26014E1	2.68599E1	1.19965E-7	2.51771E-3	2.51771E-3	6.29645E-3	3.00041E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0951E0	-7.56383E-1	-7.34735E-1	-9.19478E0	-9.19008E0	4.62532E-3	9.46045E-2	2.72962E1	-3.26455E1	-3.25906E1	2.68209E1	1.20278E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.00824E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09426E0	-7.56073E-1	-7.34711E-1	-9.19504E0	-9.18994E0	4.69685E-3	9.4676E-2	2.72937E1	-3.26344E1	-3.25912E1	2.68593E1	1.19697E-7	2.51096E-3	2.51096E-3	6.33436E-3	3.0071E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09379E0	-7.56383E-1	-7.34806E-1	-9.19516E0	-9.19008E0	4.88758E-3	9.48906E-2	2.7355E1	-3.26795E1	-3.26404E1	2.68142E1	1.19978E-7	2.51581E-3	2.51581E-3	6.30182E-3	3.01209E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09418E0	-7.56192E-1	-7.34687E-1	-9.19502E0	-9.18987E0	4.76837E-3	9.51767E-2	2.72998E1	-3.2649E1	-3.26301E1	2.684E1	1.20209E-7	2.52169E-3	2.52169E-3	6.29665E-3	3.04842E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0934E0	-7.56192E-1	-7.34711E-1	-9.19502E0	-9.19013E0	4.74453E-3	9.49383E-2	2.73171E1	-3.26512E1	-3.26362E1	2.68232E1	1.20069E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.00041E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09426E0	-7.55954E-1	-7.34639E-1	-9.19487E0	-9.18987E0	4.64916E-3	9.51052E-2	2.73417E1	-3.26488E1	-3.26338E1	2.6825E1	1.20209E-7	2.51632E-3	2.51632E-3	6.31278E-3	2.99686E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09426E0	-7.5593E-1	-7.34591E-1	-9.19511E0	-9.1898E0	4.62532E-3	9.47714E-2	2.73255E1	-3.26434E1	-3.26416E1	2.68605E1	1.20191E-7	2.5147E-3	2.5147E-3	6.30182E-3	3.01209E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09495E0	-7.55978E-1	-7.34496E-1	-9.19499E0	-9.19001E0	4.57764E-3	9.48906E-2	2.72763E1	-3.26765E1	-3.25743E1	2.68016E1	1.20055E-7	2.52276E-3	2.52276E-3	6.31278E-3	3.01223E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.0941E0	-7.56168E-1	-7.34806E-1	-9.19509E0	-9.18992E0	4.48227E-3	9.47952E-2	2.73297E1	-3.26284E1	-3.26416E1	2.68424E1	1.19757E-7	2.51552E-3	2.51552E-3	6.28552E-3	3.00041E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09441E0	-7.5624E-1	-7.34878E-1	-9.19514E0	-9.19011E0	4.43459E-3	9.49621E-2	2.73257E1	-3.26555E1	-3.26219E1	2.67995E1	1.20069E-7	2.51443E-3	2.51443E-3	6.30192E-3	3.02659E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09541E0	-7.56264E-1	-7.34901E-1	-9.19518E0	-9.19006E0	4.60148E-3	9.50098E-2	2.73532E1	-3.26512E1	-3.26446E1	2.68226E1	1.20017E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.02922E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0958E0	-7.56121E-1	-7.34925E-1	-9.1948E0	-9.19013E0	4.48227E-3	9.47714E-2	2.73399E1	-3.26649E1	-3.26166E1	2.68406E1	1.20466E-7	2.51954E-3	2.51954E-3	6.32356E-3	2.99175E-1
