[Scan]
initial_time=2016-01-18T23:36:32
final_time=2016-01-18T23:36:54
ip_count=19
run=1024
dataset=11
scan=865
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09495E0
qbias_imon=-1.08828E-4
ql1_vset=
ql1_vmon=-7.56383E-1
ql1_imon=1.4122E-8
ql2_vset=
ql2_vmon=-7.34854E-1
ql2_imon=2.05127E-9
ql3_vset=
ql3_vmon=-9.19504E0
ql3_imon=1.63555E-10
ql4_vset=
ql4_vmon=-9.18992E0
ql4_imon=-2.47097E-10
mult1=-9.43937E-9
mult2=-2.65873E-9
rf_tmon=-5.38362E-3
rf_agc=3.28469E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.69685E-3
ql5_imon=1.7074E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67515E0
bslens_imon=2.18086E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19256E1
lens5a_imon=1.98271E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12487E2
lens4a_imon=2.04905E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54007E1
cs_ef1b_imon=3.16506E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04644E2
lens23_imon=1.02265E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04129E1
cs_ea1_imon=1.07823E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39119E0
lens1_imon=2.72881E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64825E1
os_ef1alow_imon=2.98522E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03907E1
cs_ea2_imon=1.35725E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84526E1
cs_ef1a_imon=3.0519E-5
olens2_vset=9.7E-1
olens2_vmon=9.70101E-1
olens2_imon=1.17028E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11472E1
os_restr1_imon=4.28229E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15504E1
os_ea1_imon=2.44018E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63521E1
os_ef1bup_imon=3.07821E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20583E0
cs_ionrep_imon=9.37995E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9194E2
cs_nozzle_imon=1.93719E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01881E1
cs_anode1_imon=1.95845E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20413E0
olens4_imon=3.158E-8
tplens_vset=1.4E-1
tplens_vmon=1.66186E0
tplens_imon=-3.35395E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26224E1
iondef3_imon=1.49136E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2632E1
iondef2_imon=1.5685E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02978E2
lens6_imon=2.98252E-4
ql6_vset=1.0E-1
ql6_vmon=9.51767E-2
ql6_imon=3.9953E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26291E0
ionrepsh_imon=8.3922E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33862E1
lens5b_imon=2.18783E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74711E1
cs_ef2b_imon=3.13443E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.45518E0
os_ea2_imon=-6.49026E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06096E2
lens4b_imon=2.00399E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71336E1
cs_ef2a_imon=3.17551E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10321E0
os_ef2alow_imon=-2.26992E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.81807E-1
os_ef2bup_imon=-5.11705E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11232E1
os_restr2_imon=3.38346E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23032E2
cs_ionfoca_imon=6.2964E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01743E1
cs_anode2_imon=2.08892E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73105E1
iondef1_imon=1.08652E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6852E1
iondef4_imon=1.09819E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=4.77759E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81307E-1
olens1_imon=7.09473E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14095E0
cs_ionaccel_imon=-9.29243E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02068E2
cs_ionfocb_imon=1.47352E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56525E1
einzel_imon=7.76713E-6
window_vset=0.0E0
window_vmon=2.61191E-1
window_imon=-8.13916E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82636E2
mask1_imon=2.39207E-4
mask2_vset=0.0E0
mask2_vmon=-1.86572E1
mask2_imon=-5.86866E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92638E3
multa_neg_imon=7.20256E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93706E3
defgrida_imon=6.6474E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50172E3
multb_neg_imon=7.54143E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.573E0
defgridb_imon=6.58251E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33252E1
os_fil1_imon=9.42192E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08284E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61333E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31835E1
cs_fil1_imon=7.11279E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.68362E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6341E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.51823E-2
os_fil2_imon=-2.46775E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.16335E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.37638E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30558E-1
cs_fil2_imon=-2.22148E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.28037E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21731E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=3.00966E-1
chamber_ion_pmon=1.19953E-7
chamber_cvt_pmon=2.51203E-3
foreline_cvt_pmon=2.51203E-3
chamber_tmon=1.40056E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.32573E-1
res40_imon=-2.46093E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=152
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09518E0	-7.56264E-1	-7.34854E-1	-9.19487E0	-9.18996E0	4.81606E-3	9.50098E-2	2.73222E1	-3.26626E1	-3.26567E1	2.68256E1	1.19861E-7	2.52428E-3	2.52428E-3	6.29645E-3	3.01347E-1
2.0E0	3.2E1	0.0E0	3.16E2	1.6E2	-2.09464E0	-7.5655E-1	-7.34854E-1	-9.19502E0	-9.19008E0	4.57764E-3	9.53197E-2	2.73339E1	-3.26383E1	-3.26529E1	2.6831E1	1.19809E-7	2.5199E-3	2.5199E-3	6.29098E-3	3.00824E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09557E0	-7.56168E-1	-7.34878E-1	-9.19518E0	-9.19006E0	4.8399E-3	9.55105E-2	2.73399E1	-3.26463E1	-3.26295E1	2.68789E1	1.20122E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.00302E-1
4.0E0	1.0E1	0.0E0	6.55E2	3.98E2	-2.0948E0	-7.56288E-1	-7.34997E-1	-9.19526E0	-9.19025E0	4.673E-3	9.54628E-2	2.73139E1	-3.26319E1	-3.26484E1	2.68322E1	1.20004E-7	2.51525E-3	2.51525E-3	6.32356E-3	3.00453E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09433E0	-7.56454E-1	-7.34854E-1	-9.19492E0	-9.1903E0	4.52995E-3	9.52005E-2	2.73496E1	-3.26579E1	-3.26086E1	2.68076E1	1.19941E-7	2.51814E-3	2.51814E-3	6.31798E-3	3.00348E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09518E0	-7.5655E-1	-7.34687E-1	-9.19449E0	-9.19025E0	4.26769E-3	9.50813E-2	2.73351E1	-3.26524E1	-3.26272E1	2.68815E1	1.20244E-7	2.52473E-3	2.52473E-3	6.32418E-3	2.99613E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09487E0	-7.56598E-1	-7.35092E-1	-9.19461E0	-9.19003E0	4.50611E-3	9.52482E-2	2.73237E1	-3.26777E1	-3.25852E1	2.68472E1	1.19851E-7	2.51417E-3	2.51417E-3	6.31817E-3	3.02511E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09472E0	-7.56621E-1	-7.34854E-1	-9.19473E0	-9.1902E0	4.43459E-3	9.50098E-2	2.72985E1	-3.26699E1	-3.26062E1	2.68232E1	1.19861E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.00041E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09402E0	-7.56359E-1	-7.3483E-1	-9.19492E0	-9.19008E0	4.62532E-3	9.49621E-2	2.73335E1	-3.26654E1	-3.2626E1	2.68534E1	1.20017E-7	2.51662E-3	2.51662E-3	6.28552E-3	2.99E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09402E0	-7.56407E-1	-7.34878E-1	-9.19497E0	-9.18992E0	4.76837E-3	9.50336E-2	2.73481E1	-3.26853E1	-3.2621E1	2.6797E1	1.20209E-7	2.51632E-3	2.51632E-3	6.3074E-3	2.9943E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09464E0	-7.56478E-1	-7.34878E-1	-9.19538E0	-9.1898E0	4.74453E-3	9.49383E-2	2.73488E1	-3.26856E1	-3.26001E1	2.68262E1	1.20031E-7	2.51359E-3	2.51359E-3	6.31299E-3	2.99879E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09426E0	-7.56335E-1	-7.34901E-1	-9.1949E0	-9.19003E0	4.57764E-3	9.47952E-2	2.73399E1	-3.26266E1	-3.26074E1	2.68172E1	1.19851E-7	2.51096E-3	2.51096E-3	6.32356E-3	2.9943E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09356E0	-7.56335E-1	-7.35044E-1	-9.19521E0	-9.18987E0	4.55379E-3	9.46283E-2	2.73293E1	-3.26579E1	-3.2593E1	2.68513E1	1.20017E-7	2.52099E-3	2.52099E-3	6.32936E-3	3.00302E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09487E0	-7.5686E-1	-7.35021E-1	-9.19499E0	-9.18982E0	4.86374E-3	9.48191E-2	2.73135E1	-3.26753E1	-3.26306E1	2.68685E1	1.20161E-7	2.51549E-3	2.51549E-3	6.31251E-3	3.00878E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09472E0	-7.56359E-1	-7.35164E-1	-9.19526E0	-9.18992E0	4.8399E-3	9.4986E-2	2.73808E1	-3.2638E1	-3.2635E1	2.68208E1	1.20226E-7	2.5199E-3	2.5199E-3	6.33648E-3	3.00916E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09456E0	-7.56264E-1	-7.34806E-1	-9.19511E0	-9.18999E0	4.69685E-3	9.4986E-2	2.73387E1	-3.26717E1	-3.26434E1	2.68545E1	1.19861E-7	2.51552E-3	2.51552E-3	6.31288E-3	2.9926E-1
2.0E1	1.0E1	0.0E0	8.08E2	5.58E2	-2.09495E0	-7.56454E-1	-7.34782E-1	-9.19514E0	-9.18965E0	4.81606E-3	9.51529E-2	2.72904E1	-3.26536E1	-3.26083E1	2.68166E1	1.19913E-7	2.51443E-3	2.51443E-3	6.32936E-3	3.02133E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0948E0	-7.56598E-1	-7.34997E-1	-9.19497E0	-9.19025E0	4.72069E-3	9.48668E-2	2.73428E1	-3.2639E1	-3.2639E1	2.68424E1	1.19925E-7	2.51693E-3	2.51693E-3	6.29624E-3	2.99879E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09464E0	-7.56645E-1	-7.35044E-1	-9.1948E0	-9.19003E0	4.64916E-3	9.4986E-2	2.73287E1	-3.2682E1	-3.26183E1	2.68341E1	1.20158E-7	2.52169E-3	2.52169E-3	6.31278E-3	2.99941E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09495E0	-7.56383E-1	-7.34854E-1	-9.19504E0	-9.18992E0	4.69685E-3	9.51767E-2	2.73105E1	-3.2632E1	-3.26224E1	2.6852E1	1.19953E-7	2.51203E-3	2.51203E-3	6.31817E-3	3.00966E-1
