[Scan]
initial_time=2016-01-18T23:38:31
final_time=2016-01-18T23:38:52
ip_count=19
run=1024
dataset=11
scan=869
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09449E0
qbias_imon=-1.08759E-4
ql1_vset=
ql1_vmon=-7.56335E-1
ql1_imon=1.41442E-8
ql2_vset=
ql2_vmon=-7.34878E-1
ql2_imon=2.03992E-9
ql3_vset=
ql3_vmon=-9.19507E0
ql3_imon=1.35493E-10
ql4_vset=
ql4_vmon=-9.18968E0
ql4_imon=-2.94197E-10
mult1=-1.001E-8
mult2=-2.74506E-9
rf_tmon=-4.76735E-3
rf_agc=3.30364E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.07832E-3
ql5_imon=1.67878E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65914E0
bslens_imon=2.33443E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19712E1
lens5a_imon=1.99961E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1247E2
lens4a_imon=2.05068E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53835E1
cs_ef1b_imon=3.16497E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0464E2
lens23_imon=1.02188E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04611E1
cs_ea1_imon=1.08892E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36607E0
lens1_imon=2.89012E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64823E1
os_ef1alow_imon=2.98982E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03891E1
cs_ea2_imon=1.37667E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84417E1
cs_ef1a_imon=3.03673E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=1.16999E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.115E1
os_restr1_imon=4.29929E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15235E1
os_ea1_imon=2.44416E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63693E1
os_ef1bup_imon=3.08295E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23499E0
cs_ionrep_imon=9.51943E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91905E2
cs_nozzle_imon=1.93551E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01908E1
cs_anode1_imon=1.96427E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20427E0
olens4_imon=3.15695E-8
tplens_vset=1.4E-1
tplens_vmon=1.68037E0
tplens_imon=-4.65239E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25988E1
iondef3_imon=1.49453E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26886E1
iondef2_imon=1.56391E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0296E2
lens6_imon=2.98197E-4
ql6_vset=1.0E-1
ql6_vmon=9.4986E-2
ql6_imon=4.0924E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27864E0
ionrepsh_imon=8.50716E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33888E1
lens5b_imon=2.17976E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74808E1
cs_ef2b_imon=3.13752E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44264E0
os_ea2_imon=-7.6255E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0609E2
lens4b_imon=2.00545E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71153E1
cs_ef2a_imon=3.15941E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04124E0
os_ef2alow_imon=-2.39734E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.07077E-1
os_ef2bup_imon=-5.09414E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11158E1
os_restr2_imon=3.39851E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23025E2
cs_ionfoca_imon=6.27274E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01682E1
cs_anode2_imon=2.0859E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73231E1
iondef1_imon=1.12077E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68319E1
iondef4_imon=1.10102E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=4.75391E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81903E-1
olens1_imon=7.09444E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15736E0
cs_ionaccel_imon=-7.605E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02081E2
cs_ionfocb_imon=1.47403E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56382E1
einzel_imon=7.7782E-6
window_vset=0.0E0
window_vmon=2.40854E-1
window_imon=-7.77877E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82627E2
mask1_imon=2.39095E-4
mask2_vset=0.0E0
mask2_vmon=-1.8635E1
mask2_imon=-5.90213E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92641E3
multa_neg_imon=7.59399E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93699E3
defgrida_imon=6.65605E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50137E3
multb_neg_imon=7.16927E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42918E0
defgridb_imon=6.26672E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33248E1
os_fil1_imon=9.418E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07486E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61306E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31858E1
cs_fil1_imon=7.38588E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.70851E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63623E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.49689E-2
os_fil2_imon=-2.45488E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.10929E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.40976E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31899E-1
cs_fil2_imon=-2.13631E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.59379E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21807E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33436E-3
inlet_lpb_pmon=2.99175E-1
chamber_ion_pmon=1.19953E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.17127E-1
res40_imon=-2.33131E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=157
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09387E0	-7.56192E-1	-7.34568E-1	-9.19492E0	-9.1902E0	4.95911E-3	9.51052E-2	2.73434E1	-3.26708E1	-3.26154E1	2.68863E1	1.20363E-7	2.52492E-3	2.52492E-3	6.30202E-3	3.00966E-1
2.0E0	3.4E1	1.0E0	3.16E2	1.6E2	-2.09487E0	-7.56168E-1	-7.34687E-1	-9.1943E0	-9.19018E0	4.91142E-3	9.4986E-2	2.73207E1	-3.26354E1	-3.25898E1	2.683E1	1.20158E-7	2.51096E-3	2.51096E-3	6.32356E-3	3.0071E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09518E0	-7.56216E-1	-7.34806E-1	-9.19478E0	-9.19032E0	4.52995E-3	9.50336E-2	2.73254E1	-3.26689E1	-3.2626E1	2.6843E1	1.20316E-7	2.52179E-3	2.52179E-3	6.3074E-3	3.01337E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09495E0	-7.56574E-1	-7.34782E-1	-9.19473E0	-9.19018E0	4.69685E-3	9.49144E-2	2.73273E1	-3.26855E1	-3.26356E1	2.67986E1	1.20092E-7	2.51814E-3	2.51814E-3	6.32328E-3	2.99594E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09487E0	-7.55715E-1	-7.34377E-1	-9.19461E0	-9.19003E0	4.48227E-3	9.51052E-2	2.73074E1	-3.26442E1	-3.26249E1	2.68479E1	1.20174E-7	2.52099E-3	2.52099E-3	6.32386E-3	2.99E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09418E0	-7.56168E-1	-7.34806E-1	-9.19476E0	-9.19011E0	4.57764E-3	9.48191E-2	2.73178E1	-3.26495E1	-3.26559E1	2.68238E1	1.20375E-7	2.52301E-3	2.52301E-3	6.3282E-3	2.97541E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09418E0	-7.5593E-1	-7.34735E-1	-9.19476E0	-9.18982E0	4.62532E-3	9.48191E-2	2.73315E1	-3.2653E1	-3.26128E1	2.68472E1	1.20116E-7	2.51874E-3	2.51874E-3	6.29002E-3	2.99811E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09549E0	-7.56025E-1	-7.34687E-1	-9.19507E0	-9.18972E0	4.62532E-3	9.52244E-2	2.72931E1	-3.26585E1	-3.26182E1	2.68346E1	1.20278E-7	2.5199E-3	2.5199E-3	6.28552E-3	3.00302E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09456E0	-7.56168E-1	-7.34758E-1	-9.19516E0	-9.18999E0	4.64916E-3	9.48429E-2	2.73092E1	-3.26803E1	-3.26195E1	2.68615E1	1.20069E-7	2.5188E-3	2.5188E-3	6.33486E-3	3.02133E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09402E0	-7.56454E-1	-7.34496E-1	-9.19495E0	-9.18999E0	4.69685E-3	9.48191E-2	2.73444E1	-3.26684E1	-3.26023E1	2.67963E1	1.198E-7	2.51847E-3	2.51847E-3	6.31817E-3	3.02253E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09418E0	-7.56359E-1	-7.34639E-1	-9.19499E0	-9.18984E0	4.62532E-3	9.51052E-2	2.72974E1	-3.26773E1	-3.26284E1	2.68587E1	1.19883E-7	2.51611E-3	2.51611E-3	6.3074E-3	3.01337E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09503E0	-7.56335E-1	-7.34758E-1	-9.19464E0	-9.19034E0	4.48227E-3	9.46999E-2	2.73099E1	-3.26609E1	-3.26236E1	2.68447E1	1.20004E-7	2.51632E-3	2.51632E-3	6.3074E-3	3.01738E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09533E0	-7.56454E-1	-7.34901E-1	-9.19518E0	-9.18963E0	4.74453E-3	9.50813E-2	2.73181E1	-3.2685E1	-3.26555E1	2.68268E1	1.20055E-7	2.51632E-3	2.51632E-3	6.32356E-3	2.99941E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09642E0	-7.56431E-1	-7.34615E-1	-9.19518E0	-9.18953E0	4.72069E-3	9.49144E-2	2.736E1	-3.26313E1	-3.26124E1	2.68196E1	1.19757E-7	2.51662E-3	2.51662E-3	6.33486E-3	3.00302E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09464E0	-7.56407E-1	-7.34806E-1	-9.1949E0	-9.18956E0	4.62532E-3	9.49144E-2	2.73315E1	-3.26591E1	-3.26284E1	2.68286E1	1.20106E-7	2.51954E-3	2.51954E-3	6.31278E-3	3.01223E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09418E0	-7.56454E-1	-7.3452E-1	-9.19502E0	-9.18982E0	4.22001E-3	9.50813E-2	2.73237E1	-3.26927E1	-3.26302E1	2.68382E1	1.20017E-7	2.51334E-3	2.51334E-3	6.3074E-3	3.02133E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09557E0	-7.55978E-1	-7.34878E-1	-9.19509E0	-9.18961E0	4.22001E-3	9.47237E-2	2.73252E1	-3.26655E1	-3.26343E1	2.68377E1	1.20122E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.00302E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09495E0	-7.56121E-1	-7.34901E-1	-9.19514E0	-9.1898E0	4.41074E-3	9.46045E-2	2.73364E1	-3.26467E1	-3.26213E1	2.68292E1	1.20004E-7	2.52061E-3	2.52061E-3	6.32896E-3	2.9892E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09472E0	-7.56216E-1	-7.34687E-1	-9.19526E0	-9.18949E0	4.8399E-3	9.51767E-2	2.73505E1	-3.26408E1	-3.2626E1	2.68308E1	1.20209E-7	2.51847E-3	2.51847E-3	6.32356E-3	2.9841E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09449E0	-7.56335E-1	-7.34878E-1	-9.19507E0	-9.18968E0	5.07832E-3	9.4986E-2	2.73231E1	-3.26886E1	-3.25988E1	2.68319E1	1.19953E-7	2.51739E-3	2.51739E-3	6.33436E-3	2.99175E-1
