[Scan]
initial_time=2016-01-18T23:40:10
final_time=2016-01-18T23:40:31
ip_count=19
run=1024
dataset=11
scan=872
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09526E0
qbias_imon=-1.08749E-4
ql1_vset=
ql1_vmon=-7.56478E-1
ql1_imon=1.40932E-8
ql2_vset=
ql2_vmon=-7.35021E-1
ql2_imon=2.02839E-9
ql3_vset=
ql3_vmon=-9.19483E0
ql3_imon=9.45926E-11
ql4_vset=
ql4_vmon=-9.19025E0
ql4_imon=-2.49755E-10
mult1=-1.00053E-8
mult2=-2.74456E-9
rf_tmon=-3.37086E-3
rf_agc=3.49017E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.41074E-3
ql5_imon=1.68692E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6715E0
bslens_imon=2.52076E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19631E1
lens5a_imon=2.002E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12472E2
lens4a_imon=2.05065E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5402E1
cs_ef1b_imon=3.15663E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04631E2
lens23_imon=1.02131E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04791E1
cs_ea1_imon=1.10375E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38878E0
lens1_imon=2.63547E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6473E1
os_ef1alow_imon=2.97626E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03748E1
cs_ea2_imon=1.36029E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84151E1
cs_ef1a_imon=3.04264E-5
olens2_vset=9.7E-1
olens2_vmon=9.69958E-1
olens2_imon=1.17275E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11477E1
os_restr1_imon=4.28504E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15259E1
os_ea1_imon=2.43618E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63554E1
os_ef1bup_imon=3.084E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23066E0
cs_ionrep_imon=9.50445E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91929E2
cs_nozzle_imon=1.9358E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01688E1
cs_anode1_imon=1.96809E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20432E0
olens4_imon=3.1706E-8
tplens_vset=1.4E-1
tplens_vmon=1.68662E0
tplens_imon=-2.49778E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26849E1
iondef3_imon=1.51568E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26657E1
iondef2_imon=1.56226E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02915E2
lens6_imon=2.98203E-4
ql6_vset=1.0E-1
ql6_vmon=9.52005E-2
ql6_imon=4.05804E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30482E0
ionrepsh_imon=8.52069E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3335E1
lens5b_imon=2.18554E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74495E1
cs_ef2b_imon=3.12431E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44734E0
os_ea2_imon=-6.00875E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06073E2
lens4b_imon=2.00689E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7135E1
cs_ef2a_imon=3.1754E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.02502E0
os_ef2alow_imon=-2.36954E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.82751E-1
os_ef2bup_imon=-5.12194E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11147E1
os_restr2_imon=3.38252E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23071E2
cs_ionfoca_imon=6.28955E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01867E1
cs_anode2_imon=2.08903E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73267E1
iondef1_imon=1.10375E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6813E1
iondef4_imon=1.10241E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=4.73765E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81712E-1
olens1_imon=7.09411E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12609E0
cs_ionaccel_imon=-9.20362E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02084E2
cs_ionfocb_imon=1.47511E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56376E1
einzel_imon=7.86855E-6
window_vset=0.0E0
window_vmon=2.49542E-1
window_imon=-7.5355E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82649E2
mask1_imon=2.39171E-4
mask2_vset=0.0E0
mask2_vmon=-1.86332E1
mask2_imon=-6.59718E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92657E3
multa_neg_imon=7.74549E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93732E3
defgrida_imon=6.66787E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50127E3
multb_neg_imon=7.02592E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.54571E0
defgridb_imon=5.97263E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3326E1
os_fil1_imon=9.39848E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07932E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61331E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31837E1
cs_fil1_imon=7.44959E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.33202E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63447E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.38925E-2
os_fil2_imon=-2.46067E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.09191E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.47798E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31525E-1
cs_fil2_imon=-2.23478E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.4432E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21769E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31563E-3
inlet_lpb_pmon=3.0174E-1
chamber_ion_pmon=1.19939E-7
chamber_cvt_pmon=2.51389E-3
foreline_cvt_pmon=2.51389E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.74845E-1
res40_imon=-2.40429E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=178
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09371E0	-7.55906E-1	-7.34901E-1	-9.19483E0	-9.18992E0	4.57764E-3	9.49383E-2	2.73163E1	-3.26655E1	-3.26284E1	2.6843E1	1.19841E-7	2.52342E-3	2.52342E-3	6.33919E-3	3.00097E-1
2.0E0	4.7E1	0.0E0	3.16E2	1.6E2	-2.09394E0	-7.56383E-1	-7.35021E-1	-9.19483E0	-9.18989E0	4.3869E-3	9.48668E-2	2.73198E1	-3.26707E1	-3.26309E1	2.68381E1	1.2026E-7	2.52169E-3	2.52169E-3	6.31278E-3	3.0071E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09356E0	-7.56145E-1	-7.35211E-1	-9.19495E0	-9.18987E0	4.45843E-3	9.49144E-2	2.73016E1	-3.2652E1	-3.26408E1	2.67978E1	1.19819E-7	2.51804E-3	2.51804E-3	6.29624E-3	3.00676E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09433E0	-7.56264E-1	-7.34973E-1	-9.19504E0	-9.18999E0	4.69685E-3	9.48191E-2	2.7344E1	-3.26791E1	-3.26254E1	2.68466E1	1.2026E-7	2.51847E-3	2.51847E-3	6.32356E-3	3.00966E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0951E0	-7.56359E-1	-7.35164E-1	-9.19487E0	-9.19006E0	4.52995E-3	9.48191E-2	2.73466E1	-3.26747E1	-3.26308E1	2.68364E1	1.20042E-7	2.52448E-3	2.52448E-3	6.3074E-3	3.04146E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09572E0	-7.56288E-1	-7.35044E-1	-9.19516E0	-9.19011E0	4.48227E-3	9.49144E-2	2.73434E1	-3.26384E1	-3.26296E1	2.68209E1	1.20244E-7	2.51359E-3	2.51359E-3	6.32978E-3	3.00942E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09619E0	-7.56383E-1	-7.35116E-1	-9.19478E0	-9.18989E0	4.57764E-3	9.48668E-2	2.73565E1	-3.26566E1	-3.2637E1	2.68625E1	1.20004E-7	2.51739E-3	2.51739E-3	6.33977E-3	2.9841E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09526E0	-7.56836E-1	-7.35331E-1	-9.19466E0	-9.18992E0	4.31538E-3	9.47475E-2	2.72991E1	-3.26609E1	-3.26128E1	2.68296E1	1.20137E-7	2.52139E-3	2.52139E-3	6.32978E-3	2.98819E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09588E0	-7.56836E-1	-7.35116E-1	-9.1948E0	-9.18975E0	4.74453E-3	9.48429E-2	2.73189E1	-3.265E1	-3.25695E1	2.68695E1	1.20055E-7	2.51417E-3	2.51417E-3	6.30202E-3	2.9841E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09572E0	-7.56669E-1	-7.34687E-1	-9.19473E0	-9.18992E0	4.72069E-3	9.48906E-2	2.73422E1	-3.271E1	-3.26121E1	2.68136E1	1.19809E-7	2.52318E-3	2.52318E-3	6.32936E-3	2.98481E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09541E0	-7.57027E-1	-7.34687E-1	-9.19487E0	-9.18982E0	4.60148E-3	9.47237E-2	2.73291E1	-3.26699E1	-3.26134E1	2.68442E1	1.20106E-7	2.51632E-3	2.51632E-3	6.33436E-3	3.01223E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09541E0	-7.56812E-1	-7.34496E-1	-9.19495E0	-9.18972E0	4.45843E-3	9.47952E-2	2.73159E1	-3.26266E1	-3.26242E1	2.67885E1	1.20017E-7	2.51007E-3	2.51007E-3	6.31837E-3	3.01609E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09533E0	-7.56645E-1	-7.34782E-1	-9.19473E0	-9.18994E0	4.31538E-3	9.46522E-2	2.73231E1	-3.26506E1	-3.26374E1	2.68007E1	1.20106E-7	2.52061E-3	2.52061E-3	6.32896E-3	3.01223E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09456E0	-7.56264E-1	-7.34568E-1	-9.19485E0	-9.18982E0	4.41074E-3	9.49621E-2	2.73187E1	-3.26703E1	-3.26579E1	2.6865E1	1.19887E-7	2.51552E-3	2.51552E-3	6.32112E-3	3.01216E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09533E0	-7.56383E-1	-7.3483E-1	-9.19507E0	-9.18989E0	4.45843E-3	9.51052E-2	2.73424E1	-3.26693E1	-3.26122E1	2.68545E1					
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09495E0	-7.5655E-1	-7.34758E-1	-9.19487E0	-9.19011E0	4.64916E-3	9.50575E-2	2.72937E1	-3.26669E1	-3.26224E1	2.68196E1	1.19757E-7	2.51552E-3	2.51552E-3	6.34588E-3	3.00563E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.0958E0	-7.56431E-1	-7.34544E-1	-9.1949E0	-9.19008E0	4.88758E-3	9.48191E-2	2.73424E1	-3.26663E1	-3.26032E1	2.68262E1	1.20226E-7	2.51225E-3	2.51225E-3	6.33486E-3	2.9952E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09533E0	-7.56526E-1	-7.34687E-1	-9.19473E0	-9.18975E0	4.43459E-3	9.50336E-2	2.73039E1	-3.26687E1	-3.26092E1	2.6837E1	1.20122E-7	2.52099E-3	2.52099E-3	6.29098E-3	3.00563E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09541E0	-7.56264E-1	-7.34735E-1	-9.1949E0	-9.19015E0	4.69685E-3	9.4986E-2	2.73039E1	-3.26313E1	-3.2659E1	2.68256E1	1.19902E-7	2.50775E-3	2.50775E-3	6.33436E-3	3.02769E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09526E0	-7.56478E-1	-7.35021E-1	-9.19483E0	-9.19025E0	4.41074E-3	9.52005E-2	2.73267E1	-3.26657E1	-3.26849E1	2.6813E1	1.19939E-7	2.51389E-3	2.51389E-3	6.31563E-3	3.0174E-1
